KR20060127803A - 광빔 측정장치 - Google Patents
광빔 측정장치 Download PDFInfo
- Publication number
- KR20060127803A KR20060127803A KR1020060050712A KR20060050712A KR20060127803A KR 20060127803 A KR20060127803 A KR 20060127803A KR 1020060050712 A KR1020060050712 A KR 1020060050712A KR 20060050712 A KR20060050712 A KR 20060050712A KR 20060127803 A KR20060127803 A KR 20060127803A
- Authority
- KR
- South Korea
- Prior art keywords
- light beam
- wavefront
- light
- spot
- separation
- Prior art date
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- 238000005259 measurement Methods 0.000 claims abstract description 53
- 230000004907 flux Effects 0.000 claims abstract description 44
- 238000007689 inspection Methods 0.000 claims abstract description 8
- 230000003287 optical effect Effects 0.000 claims description 62
- 238000003384 imaging method Methods 0.000 claims description 51
- 238000000926 separation method Methods 0.000 claims description 50
- 238000007493 shaping process Methods 0.000 claims description 37
- 238000000034 method Methods 0.000 abstract description 6
- 230000001427 coherent effect Effects 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 3
- 230000002194 synthesizing effect Effects 0.000 abstract 3
- 238000009826 distribution Methods 0.000 description 24
- 238000004458 analytical method Methods 0.000 description 23
- 230000010363 phase shift Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000003306 harvesting Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010191 image analysis Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000010835 comparative analysis Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29349—Michelson or Michelson/Gires-Tournois configuration, i.e. based on splitting and interferometrically combining relatively delayed signals at a single beamsplitter
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Optical Head (AREA)
Abstract
Description
Claims (4)
- 측정대상으로 되는 광빔을 피검광속과 기준광속 작성용 광속으로 분리하는 피검/기준광속 분리수단과, 상기 기준광속 작성용 광속을 파면정형해서 기준광속으로 변환하는 파면정형 수단과, 상기 피검광속과 상기 기준광속을 서로 합파해서 간섭광을 얻는 합파수단과, 얻어진 상기 간섭광에 의해 상기 광빔의 파면정보를 담지한 간섭 스트라이프를 결상시켜서 촬상하는 간섭 스트라이프 결상/촬상수단을 가지고 이루어지는 광빔 측정장치로서,상기 파면정형 수단은 상기 기준광속 작성용 광속을 수속시키는 수속렌즈와, 상기 수속렌즈의 수속점에 배치된 미소한 반사 회절부를 가지고 이루어지고, 입사된 상기 기준광속 작성용 광속의 일부를 파면정형해서 상기 기준광속으로 변환하고, 상기 기준광속을 상기 피검/기준광속 분리수단을 향해서 출사시키는 반사형 파면정형 유닛에 의해 구성되고,상기 피검/기준광속 분리수단 및 상기 합파수단은 상기 기준광속 작성용 광속과 분리된 상기 피검광속을 반사면에 입사시키는 동시에, 상기 반사면으로부터 되돌아오는 상기 피검광속을 상기 파면정형 수단으로부터의 상기 기준광속과 합파시키는 광속분리/합파면에 의해 구성되어 있고,적어도 상기 광빔이 저 가간섭성의 광속인 경우에, 상기 광속분리/합파면으로부터 상기 반사면을 거쳐서 상기 광속분리/합파면으로 되돌아오는 제 1 광로길이와, 상기 광속분리/합파면으로부터 상기 반사형 파면정형 유닛을 거쳐서 상기 광속 분리/합파면으로 되돌아오는 제 2 광로길이를 서로 대략 일치시키는 광로길이 조정수단을 구비하고 있는 것을 특징으로 하는 광빔 측정장치.
- 제 1항에 있어서, 상기 광속분리/합파면에 입사되기 전의 상기 광빔, 상기 광속분리/합파면에 의해 분리된 후의 상기 피검광속, 또는 파면정형되기 전의 상기 기준광속 작성용 광속 중 어느 하나의 일부를 스폿 작성용 광속으로서 분리하는 스폿 작성용 광속 분리수단과, 상기 스폿 작성용 광속에 의해 상기 광빔의 스폿상을 결상시켜서 촬상하는 스폿상 결상/촬상수단을 구비해서 이루어지는 것을 특징으로 하는 광빔 측정장치.
- 제 1항에 있어서, 상기 간섭 스트라이프를 해석해서 상기 광빔의 파면 측정결과를 얻는 제 1 해석수단을 구비하고 있는 것을 특징으로 하는 광빔 측정장치.
- 제 2항에 있어서, 상기 간섭 스트라이프를 해석해서 상기 광빔의 파면 측정결과를 얻는 제 1 해석수단과, 상기 스폿상을 해석해서 상기 광빔의 스폿특성 측정결과를 얻는 제 2 해석수단을 구비하고 있는 것을 특징으로 하는 광빔 측정장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2005-00166624 | 2005-06-07 | ||
JP2005166624A JP4667965B2 (ja) | 2005-06-07 | 2005-06-07 | 光ビーム測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060127803A true KR20060127803A (ko) | 2006-12-13 |
KR100769214B1 KR100769214B1 (ko) | 2007-10-22 |
Family
ID=37509768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020060050712A KR100769214B1 (ko) | 2005-06-07 | 2006-06-07 | 광빔 측정장치 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4667965B2 (ko) |
KR (1) | KR100769214B1 (ko) |
CN (1) | CN100565142C (ko) |
TW (1) | TWI287619B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100903264B1 (ko) * | 2007-04-30 | 2009-06-17 | 광주과학기술원 | 파면 수차 측정 장치 및 방법 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009069041A (ja) | 2007-09-14 | 2009-04-02 | Fujinon Corp | 光ピックアップ用波面測定装置 |
JP5139832B2 (ja) * | 2008-02-14 | 2013-02-06 | 浜松ホトニクス株式会社 | 観察装置 |
TWI393919B (zh) * | 2008-11-27 | 2013-04-21 | Ind Tech Res Inst | 光束整形器 |
CN110044849B (zh) * | 2019-05-24 | 2021-08-17 | 易思维(杭州)科技有限公司 | 半封闭腔体内部缺陷检测装置 |
TWI729403B (zh) * | 2019-05-31 | 2021-06-01 | 致茂電子股份有限公司 | 光電元件特性測量裝置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2693791B2 (ja) * | 1988-10-25 | 1997-12-24 | 三菱電機株式会社 | 欠陥検査装置 |
IL100655A (en) * | 1991-02-08 | 1994-11-28 | Hughes Aircraft Co | Profile gauge for interferometric laser |
JP3150764B2 (ja) * | 1992-06-10 | 2001-03-26 | オリンパス光学工業株式会社 | 簡易干渉計 |
CA2169141A1 (en) * | 1995-04-07 | 1996-10-08 | Ivan Prikryl | Interferometer having a micromirror |
JP2000097616A (ja) * | 1998-09-22 | 2000-04-07 | Nikon Corp | 干渉計 |
JP2001215105A (ja) * | 2000-02-02 | 2001-08-10 | Nikon Corp | 干渉計、形状測定装置及び露光装置、並びに形状測定方法及び露光方法 |
JP2004045326A (ja) * | 2002-07-15 | 2004-02-12 | Konica Minolta Holdings Inc | 干渉計装置 |
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2005
- 2005-06-07 JP JP2005166624A patent/JP4667965B2/ja not_active Expired - Fee Related
-
2006
- 2006-06-01 CN CNB2006100886997A patent/CN100565142C/zh not_active Expired - Fee Related
- 2006-06-02 TW TW095119510A patent/TWI287619B/zh not_active IP Right Cessation
- 2006-06-07 KR KR1020060050712A patent/KR100769214B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100903264B1 (ko) * | 2007-04-30 | 2009-06-17 | 광주과학기술원 | 파면 수차 측정 장치 및 방법 |
Also Published As
Publication number | Publication date |
---|---|
JP4667965B2 (ja) | 2011-04-13 |
TWI287619B (en) | 2007-10-01 |
CN1877270A (zh) | 2006-12-13 |
KR100769214B1 (ko) | 2007-10-22 |
JP2006343121A (ja) | 2006-12-21 |
CN100565142C (zh) | 2009-12-02 |
TW200706830A (en) | 2007-02-16 |
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