TW200706830A - A light beam measurement device - Google Patents

A light beam measurement device

Info

Publication number
TW200706830A
TW200706830A TW095119510A TW95119510A TW200706830A TW 200706830 A TW200706830 A TW 200706830A TW 095119510 A TW095119510 A TW 095119510A TW 95119510 A TW95119510 A TW 95119510A TW 200706830 A TW200706830 A TW 200706830A
Authority
TW
Taiwan
Prior art keywords
light beam
measurement
beam splitting
wave surface
coupling surface
Prior art date
Application number
TW095119510A
Other languages
Chinese (zh)
Other versions
TWI287619B (en
Inventor
Zong-Tao Ge
Takayuki Saito
Minoru Kurose
Hideo Kanda
Kazuhisa Arakawa
Original Assignee
Fujinon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujinon Corp filed Critical Fujinon Corp
Publication of TW200706830A publication Critical patent/TW200706830A/en
Application granted granted Critical
Publication of TWI287619B publication Critical patent/TWI287619B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29349—Michelson or Michelson/Gires-Tournois configuration, i.e. based on splitting and interferometrically combining relatively delayed signals at a single beamsplitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Optical Head (AREA)

Abstract

This invention provides a light beam measurement device which can conduct wave surface measurement of light beam with low interferentiable feature, and which easily enables the adjustment of the parts of optical system or the provision of phase shift mechanism. The light beam measurement device 1A is a Michelson type optical system arrangement which has a wave surface measurement portion 10A, and a spot feature measurement portion 10B, said wave surface measurement portion 10A having a reflection type wave surface adjustment unit 20, a light beam splitting /coupling surface 15, a reflection plate 17, and a light path length adjustment means. The first light path length passing from said light beam splitting/ coupling surface 15 through a reflection surface 17a and returning to said light beam splitting/ coupling surface 15 is made almost the same as the 2nd light path length passing from said light beam splitting/ coupling surface 15 through a reflection type wave surface adjustment unit 20 and returning to said light beam splitting/ coupling surface 15. Thereby, two measurements including the wave surface measurement of light beam having low interferentiable feature and spot feature measurement can be conducted.
TW095119510A 2005-06-07 2006-06-02 A light beam measurement device TWI287619B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005166624A JP4667965B2 (en) 2005-06-07 2005-06-07 Light beam measuring device

Publications (2)

Publication Number Publication Date
TW200706830A true TW200706830A (en) 2007-02-16
TWI287619B TWI287619B (en) 2007-10-01

Family

ID=37509768

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095119510A TWI287619B (en) 2005-06-07 2006-06-02 A light beam measurement device

Country Status (4)

Country Link
JP (1) JP4667965B2 (en)
KR (1) KR100769214B1 (en)
CN (1) CN100565142C (en)
TW (1) TWI287619B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI393919B (en) * 2008-11-27 2013-04-21 Ind Tech Res Inst Beam shaper

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100903264B1 (en) * 2007-04-30 2009-06-17 광주과학기술원 Apparatus and Method for measuring wavefront aberrations
JP2009069041A (en) 2007-09-14 2009-04-02 Fujinon Corp Wavefront measuring device for optical pickup apparatus
JP5139832B2 (en) * 2008-02-14 2013-02-06 浜松ホトニクス株式会社 Observation device
CN110044849B (en) * 2019-05-24 2021-08-17 易思维（杭州）科技有限公司 Semi-closed cavity internal defect detection device
TWI729403B (en) * 2019-05-31 2021-06-01 致茂電子股份有限公司 Device for measuring optolectronic units

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2693791B2 (en) * 1988-10-25 1997-12-24 三菱電機株式会社 Defect inspection equipment
IL100655A (en) * 1991-02-08 1994-11-28 Hughes Aircraft Co Interferometric laser profilometer
JP3150764B2 (en) * 1992-06-10 2001-03-26 オリンパス光学工業株式会社 Simple interferometer
CA2169141A1 (en) * 1995-04-07 1996-10-08 Ivan Prikryl Interferometer having a micromirror
JP2000097616A (en) * 1998-09-22 2000-04-07 Nikon Corp Interferometer
JP2001215105A (en) * 2000-02-02 2001-08-10 Nikon Corp Interferrometer, shape measuring apparatus and aligner and shape measuring method and exposing method
JP2004045326A (en) * 2002-07-15 2004-02-12 Konica Minolta Holdings Inc Interferometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI393919B (en) * 2008-11-27 2013-04-21 Ind Tech Res Inst Beam shaper

Also Published As

Publication number Publication date
CN1877270A (en) 2006-12-13
JP4667965B2 (en) 2011-04-13
CN100565142C (en) 2009-12-02
KR20060127803A (en) 2006-12-13
TWI287619B (en) 2007-10-01
KR100769214B1 (en) 2007-10-22
JP2006343121A (en) 2006-12-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees