CN100565142C - Lightbeam measuring device - Google Patents
Lightbeam measuring device Download PDFInfo
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- CN100565142C CN100565142C CNB2006100886997A CN200610088699A CN100565142C CN 100565142 C CN100565142 C CN 100565142C CN B2006100886997 A CNB2006100886997 A CN B2006100886997A CN 200610088699 A CN200610088699 A CN 200610088699A CN 100565142 C CN100565142 C CN 100565142C
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29349—Michelson or Michelson/Gires-Tournois configuration, i.e. based on splitting and interferometrically combining relatively delayed signals at a single beamsplitter
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Optical Head (AREA)
Abstract
The invention provides a kind of lightbeam measuring device, this lightbeam measuring device (1A) possesses wavefront measurement portion (10A) and hot spot feature measurement portion (10B), this wavefront measurement portion (10A) become have reflection-type wavefront shaping unit (20), Michelson's type optical system configurations of beam separation/synthetic face (15), reflecting plate (17) and optical length adjusting mechanism.By make from beam separation/synthetic face via reflecting surface (17a) turn back to the 1st optical length of beam separation/synthetic face, with approximately consistent with each other via the 2nd optical length that reflection-type wavefront shaping unit (20) turns back to beam separation/synthetic face from beam separation/synthetic face, but can carry out these 2 kinds of measurements of hot spot feature measurement of the wavefront measurement and the light beam of the low light beam of interference capability.Thereby, but obtain also to be adapted to the wavefront measurement of the low light beam of interference capability and can carry out the adjustment of optical system easily and the lightbeam measuring device of the setting of phase shift mechanism.
Description
Technical field
The present invention relates to lightbeam measuring device that the light beam that becomes measuring object is carried out wavefront measurement or carry out various measurements in the optically focused spot (spot) of this light beam, but particularly a kind of lightbeam measuring device that the low light beam of interference capability is measured of being suitable for.
Background technology
In the past, be well known that always, make the light beam measured on the shooting face of CCD etc., form a picture, the shape of this some picture and size or intensity distributions (point is as intensity distributions) and barycentric coordinates etc. are measured the device (being also referred to as " beam profile instrument (beam profiler) ") (patent documentation 1 that reference is following) of (these being generically and collectively referred to as " hot spot (spot) feature measurement ") with the point-like imaging.
In addition, as the device that the wavefront of light beam is measured, so far generally be well known that, the device that possesses the optical system configurations of Mach-Zender interferometer (Mach-Zehnder interferometer), but in recent years, the present patent application people has proposed to possess the scheme of device of the optical system configurations of striking assistant type interferometer (Fizeauinterferometer), and has carried out open (with reference to following patent documentation 2) by Patent Office.
Relatively in the Mach-Zender Wavefront measuring apparatus, by making the reference beam that separates from tested light beam make a part of using light beam, see through pin hole (pinhole) and carry out the wavefront shaping, in striking assistant type Wavefront measuring apparatus, utilized to make reference beam make the optical element (hereinafter referred to as " reflection diffraction portion ") that carries out the wavefront shaping against the incident direction reflection with the part of light beam.Be well known that always, this type of reflection diffraction portion is also referred to as reflection-type pin hole etc., on glass substrate, form small reflector space, form small reflector space (with reference to following patent documentation 3) with front end, or dispose reflecting surface (with reference to patent documentation 4) etc. in rear side near common pin hole at needle-like member.
[patent documentation 1] spy opens the 2004-45327 communique
[patent documentation 2] special Willing 2004-168965 instructions
[patent documentation 3] spy opens the 2000-97612 communique
[patent documentation 4] spy opens clear 58-60590 communique
Described beam profile instrument or Wavefront measuring apparatus for example, are applied in light and pick up in the measurement of output light of (pickup) device.Among this optical take-up apparatus, but the semiconductor laser that the interference capability that higher hamonic wave is overlapping is low utilizes as illumination beam,, need make the light path (optical path) of tested light beam long roughly consistent mutually with the optical length of reference beam for but the low light beam of such interference capability is carried out wavefront measurement.
Because the patent documentation 2 disclosed striking assistant type Wavefront measuring apparatus of putting down in writing previously, set in the mutual different mode of each optical length of tested light beam and reference beam, therefore, but at the light beam of measuring is under the situation of the low light beam of interference capability, exists the problem that is difficult to carry out wavefront measurement.
On the other hand, because the Wavefront measuring apparatus of Mach-Zender can make each optical length of tested light beam and reference beam roughly consistent mutually, so, but also can be adapted to the wavefront measurement of the low light beam of interference capability, but because the number of components of optical system is more, and the adjustment part also relates to many-side, so the adjustment that exists optical system is the problem of difficulty very.And, also exist the influence that is subject to vibrate or the problem of phase shift (phase shift) mechanism than difficulty etc. is set.
In addition, in described optical take-up apparatus, in its fabrication phase, carried out wavefront measurement and these the 2 kinds of measurements of hot spot feature measurement of irradiating laser light, still, these 2 kinds of measurements in the past are to utilize other measurement mechanism to carry out independently respectively.Therefore, in order to carry out 2 kinds of measurements, exist the problem that needs the more time.
Summary of the invention
The present invention uses for reference this example, and its 1st purpose is, but a kind of wavefront measurement that can be adapted to the low light beam of interference capability is provided, and, can carry out the lightbeam measuring device that the wavefront measurement of the setting of the adjustment of optical system and phase shift mechanism is used simply.
In addition, the 2nd purpose of the present invention is, but a kind of wavefront measurement that can be adapted to the low light beam of interference capability is provided, and, also can carry out the lightbeam measuring device of the hot spot feature measurement of light beam.
For reaching described the 1st purpose, lightbeam measuring device of the present invention is constructed as follows.That is, lightbeam measuring device involved in the present invention has: tested/the reference beam separating mechanism, its beam separation that will become measuring object is that tested light beam and reference beam make and use light beam; The wavefront reshaping device, it makes with light beam described reference beam and carries out the wavefront shaping, is converted into reference beam; Combination mechanism, it reciprocally synthesizes described tested light beam and described reference beam and obtains interference light; With interference fringe imaging/image mechanism, it makes the interference fringe imaging of the wavefront information that carries the described light beam that becomes measuring object by the described interference light that obtains and makes a video recording, it is characterized in that,
Described wavefront reshaping device is made of reflection-type wavefront shaping unit, this reflection-type wavefront shaping unit has: the plus lens that described reference beam is made converge with light beam and in convergent point disposed the small reflection diffraction portion of this plus lens, its described reference beam with incident makes with the part of light beam and carries out the wavefront shaping, be converted to described reference beam, and with this reference beam towards described tested/the reference beam separating mechanism penetrates;
Described tested/reference beam separating mechanism and described combination mechanism be made of beam separation/synthetic face, this beam separation/synthetic face not only makes to make with the described tested light beam after the beam separation with described reference beam and incides reflecting surface, and makes the described tested light beam that returns from this reflecting surface synthetic with the described reference beam from described wavefront reshaping device;
Also possesses the optical length adjusting mechanism, but it is under the situation of the low light beam of interference capability at the described light beam that becomes measuring object at least, makes the 1st optical length, approximately consistent with each other with the 2nd optical length that turns back to described beam separation/synthetic face from described beam separation/synthetic face via described reflection-type wavefront shaping unit that turns back to described beam separation/synthetic face from described beam separation/synthetic face via described reflecting surface.
In addition, in order to reach described the 2nd purpose, preferred lightbeam measuring device of the present invention possesses: hot spot makes uses the light beam separating mechanism, and it will incide the light beam that becomes measuring object before beam separation/synthetic face, the tested light beam by beam separation/synthetic face after separating or carry out reference beam before the wavefront shaping and make and use up intrafascicular any one a part and make with light beam as hot spot and separate; With point as imaging/image mechanism, its by hot spot make make light beam with light beam point as imaging and make a video recording.
In the present invention, can possess the 1st analysis institution of wavefront measurements that interference fringe analysis is obtained to become the light beam of measuring object.In addition, make with light beam separating mechanism and point in the device as imaging/image mechanism possessing hot spot, preferably on the basis of the 1st analysis institution, also possesses hot spot feature measurement result's the 2nd analysis institution that a picture analysis is obtained to become the light beam of measuring object.
Described " small reflection diffraction portion " is meant, the diffraction limit decision (preferably little) of the converging beam of its size by converging in this reflection diffraction portion than diffraction limit, and have make this converging beam at least a portion after as the wavefront shaping spherical wave and the parts of function of reflecting.Can utilize various formations as such reflection diffraction portion, but, for example can list: the parts that on substrate, form small reflector space as concrete embodiment; Form the parts of small reflector space at the front end of needle-like member; Or near the parts of the rear side of pin hole configuration reflecting surface etc.
According to lightbeam measuring device involved in the present invention, owing to possess the wavefront reshaping device that constitutes by reflection-type wavefront shaping unit and by tested/reference beam separating mechanism and combination mechanism that beam separation/synthetic face constitutes, can adopt Michelson (Michelson) type optical system configurations, so, compare with existing Mach-Zender device, can easily carry out the adjustment of optical system and the setting of phase shift mechanism.
In addition, owing to possess the optical length adjusting mechanism, can make each optical length of tested light beam and reference beam approximately consistent with each other, so, but can be adapted to the wavefront measurement of the low light beam of interference capability.
In addition, make the embodiment that constitutes as imaging/image mechanism with light beam separating mechanism and point, can carry out these 2 kinds of measurements of the hot spot feature measurement of the wavefront measurement of light beam and light beam according to possessing hot spot.
Description of drawings
Fig. 1 is the summary pie graph of the related lightbeam measuring device of the present invention's the 1st embodiment.
Fig. 2 is the summary pie graph of analytical equipment shown in Figure 1.
Fig. 3 is the summary pie graph of the related lightbeam measuring device of the present invention's the 2nd embodiment.
Among the figure: 1A-lightbeam measuring device (the 1st embodiment), 1B-lightbeam measuring device (the 2nd embodiment), 10A, 10A '-wavefront measurement portion, 10B-hot spot (spot) feature measurement portion, 11, the 52-collimator lens, 12-beam separation face (hot spot makes and uses the light beam separating mechanism), 13, the 18-imaging len, 14-the 2nd video camera, 14a, the 19a-face of making a video recording, 15-beam separation/synthetic face (tested/the reference beam separating mechanism), 16-chopping mechanism, 17-reflecting plate, the 17a-reflecting surface, 20-reflection-type wavefront shaping unit, 21-plus lens, 22-reflection diffraction portion, the 23-substrate, the 31-analytical equipment, 32-display device, 33-input media, the 34-image production part, 35-fringe analysis portion (the 1st analysis institution), the 36-point is as analysis portion (the 2nd analysis institution), and the 37-point is as the intensity distributions operational part, 38-comparative analysis portion, 50-optical picking up assembly (pickup module), 51-semiconductor laser, 53-collector lens.
Embodiment
＜the 1 embodiment 〉
Below, with reference to accompanying drawing, the embodiment of lightbeam measuring device involved in the present invention is at length described.Fig. 1 is the summary pie graph of the related lightbeam measuring device of the present invention's the 1st embodiment; Fig. 2 is the summary pie graph of analytical equipment shown in Figure 1.
Lightbeam measuring device 1A shown in Figure 1 is to carry out the wavefront measurement of the light beam that optical picking up assembly 50 exported and hot spot feature measurement both sides' device, at first, this optical picking up assembly 50 is described.
Optical picking up assembly 50 shown in Figure 1 possesses: semiconductor laser 51, but the overlapping low light beam of interference capability of its output higher hamonic wave; Collimator lens 52, it makes the parallel beam of being exported as diverging light by this semiconductor laser 51; With collector lens 53, it makes by this collimator lens 52 and makes its parallel beam condenser, but it constitutes and makes as the low light beam right-hand ejaculation in figure of the interference capability of measuring object.In addition, this optical picking up assembly 50 is to carry on not shown optical take-up apparatus and the parts that are used, and is not to be the inscape of lightbeam measuring device 1A.
Then, lightbeam measuring device 1A is described.Lightbeam measuring device 1A shown in Figure 1 roughly is divided into: the opticator that is made of the various opticses that disposed on the optical axis shown in the dot-and-dash line in the drawings and be the measuring and analysis system part that the center constitutes with analytical equipment 31; This opticator also can be divided into: will guide to collimator lens 11 in the optical system from the light beam of described optical picking up assembly 50, be used for the light beam that is directed is carried out the 10A of wavefront measurement portion of wavefront measurement and is used for the light beam that is directed is carried out the hot spot feature measurement 10B of portion of hot spot feature measurement.
At first, described opticator is described.The described wavefront measurement 10A of portion has: tested/reference beam separating mechanism 15, it is to be used for the tested light beam of wavefront measurement and reference beam to make and use light beam with the beam separation that is directed; Wavefront reshaping device 20, it makes with light beam described reference beam and carries out the wavefront shaping and be converted to reference beam; Combination mechanism 15, it reciprocally synthesizes described tested light beam and described reference beam and the acquisition interference light; With interference fringe imaging/ image mechanism 18,19, it makes the interference fringe imaging of the wavefront information that carries light beam by the described interference light that obtains and makes a video recording.
More specifically, described wavefront reshaping device is made of reflection-type wavefront shaping unit 20.This reflection-type wavefront shaping unit 20 has: the plus lens 21 that reference beam is made converge with light beam and in the small reflection diffraction portion 22 that convergent point disposed of this plus lens 21, its reference beam with incident makes with the part of light beam and carries out the wavefront shaping, be converted to described reference beam, and with this reference beam towards described tested/the reference beam separating mechanism penetrates.
Described reflection diffraction portion 22 for example is to constitute by the metal film by gold, aluminium, chromium etc. that evaporation etc. is formed on the substrate 23, its size liken to into the diffraction limit of the light beam of converging beam incident little.And it constitutes the reference beam that makes as converging beam incident and makes a part of using light beam, reflects as the ideal ball ground roll after the wavefront shaping.In addition, to the face relative with plus lens 21 of substrate 23, implemented the antireflection spreading (coat) corresponding with the wavelength of light beam and handled, the reference beam that does not carry out the wavefront shaping that makes makes with light beam and does not turn back to plus lens 21.
In addition, described tested/reference beam separating mechanism and described combination mechanism be made of beam separation/synthetic face 15.This beam separation/synthetic face 15 is formed by block prism (cube prism) beam splitter of type or tabular half-reflecting mirror (half mirror) etc., not only make with reference beam and make the reflecting surface 17a (by the high precision smoothing processing so that the wavefront of incident beam be maintained) that incides reflecting plate 17 with the tested light beam of beam separation, and the tested light beam that returns from this reflecting surface 17a and reference beam from described reflection-type wavefront shaping unit 20 are synthesized.
Described reflecting plate 17 is provided with: keep this reflecting plate 17 can be along 1 mobile pedestal of optical axis direction (above-below direction among the figure); The flange scanning breakout box (fringescan adapter) (all omitting its diagram) that forms with having piezoelectric element etc.These parts be make from beam separation/synthetic face 15 turn back to via reflecting surface 17a beam separation/synthetic face 15 the 1st optical length, with the mutually about consistent optical length adjusting mechanism of the 2nd optical length that turns back to beam separation/synthetic face 15 from beam separation/synthetic face 15 via reflection-type wavefront shaping unit 20.In addition, flange scanning breakout box is the parts that constitute phase shift mechanism, and for example, it makes reflecting plate 17 produce fine motion along optical axis direction by the drive pressure electric device when utilizing phase-shift method to carry out subfringe (subfringe) instrumentation etc.
In addition, described interference fringe imaging/image mechanism is made of imaging len 18 and the 1st video camera 19.Imaging len 18 constitutes, and makes by being imaged on the shooting face 19a (for example, the shooting face by CCD or CMOS etc. constitutes) of the 1st video camera 19 from the interference fringe that beam separation/interference light of synthetic face 15 obtains; The 1st video camera 19 constitutes, the interference fringe that is imaged on the shooting face 19a made a video recording, and with its picture signal output.
In addition, on the light path between described beam separation/synthetic face 15 and the described reflection-type wavefront shaping unit 20, dispose chopping mechanism 16.But this chopping mechanism 16 is made of diaphragm of switch etc., it constitutes, when the point of asking for light beam by computing described later is as intensity distributions, the light path between beam separation/synthetic face 15 and the reflection-type wavefront shaping unit 20 is cut off, when wavefront measurement, this light path is opened.
On the other hand, the described hot spot feature measurement 10B of portion has: hot spot makes with light beam separating mechanism 12, and its part that will incide the light beam before described beam separation/synthetic face 15 makes with light beam as hot spot separates; With point as imaging/image mechanism 13,14, its by separated hot spot make make light beam with light beam point as imaging and make a video recording.
More specifically, described hot spot makes with the light beam separating mechanism and is made of the beam splitter of block prism type or tabular formed beam separation faces 12 such as half-reflecting mirror; Describedly constitute by imaging len 13 and the 2nd video camera 14 as imaging/image mechanism.That is, beam separation face 12 constitutes, and the part of the light beam that will penetrate from collimator lens 11 makes with light beam as hot spot separates, and guides to imaging len 13; Imaging len 13 constitutes, and will make the point that generates with light beam by hot spot and look like to be imaged on the shooting face 14a (the shooting face by CCD or CMOS etc. constitutes) of the 2nd video camera 14.In addition, the 2nd video camera 14 constitutes, the point that is imaged on the shooting face 14a is looked like to make a video recording, and with its picture signal output.
Then, described measuring and analysis system is partly described.This measuring and analysis system partly possesses: analytical equipment 31, and it is based on carrying out various analyses from the picture signal of the 1st and the 2nd video camera 19,14; Display device 32, it shows the analysis result and the image of this analytical equipment 31; With input media 33, it is made of keyboard and mouse etc.
Described analytical equipment 31 is made of computing machine etc., as shown in Figure 2, possesses: image production part 34, and it generates the view data of interference fringe and the view data of some picture based on the picture signal from the 1st and the 2nd video camera 19,14; As the fringe analysis portion 35 of the 1st analysis institution, its view data analysis to interference fringe obtains the wavefront measurements of light beam; With as the point of the 2nd analysis institution as analysis portion 36, its view data to a picture is analyzed, and obtains the shape of beam spot (beam spot) and size or the some hot spot feature measurement result as intensity distributions and barycentric coordinates etc.
And this analytical equipment 31 possesses: point is as intensity distributions operational part 37, and its point of trying to achieve light beam by computing is as intensity distributions; With comparative analysis portion 38, it is to carrying out mutual comparative analysis as intensity distributions operational part 37 and described 2 points of trying to achieve respectively as analysis portion 36 as the intensity distributions result by this.In addition, particularly, these each ones 34～38th are made of computing circuit that is stored in the handling procedure in storer etc. and carries out this handling procedure etc.
Describedly constitute as intensity distributions operational part 37, when chopping mechanism shown in Figure 1 16 cuts off the light path between beam separation/synthetic face 15 and the reflection-type wavefront shaping unit 20, by to view data based on intensity distributions before the parallel wave that generate in described image production part 34 from the picture signal of the 1st video camera 19, the expression light beam, carry out Fourier transformation computation, the point of trying to achieve light beam is as intensity distributions.Like this, ask for this method, be well known that the method that for example is recorded in following document (1), (2) always as intensity distributions as the intensity distributions before the parallel wave of light beam.
(1)Warren?J.Smith：Optical?Engineering.SPIE?Press，McGraw-Hill?3rdEdition
(2)Max?Born&Emil?Wolf：Principle?of?Optics，Pergamon?Press?6thEdition
Like this, in lightbeam measuring device 1A, the point of light beam can be tried to achieve by 2 kinds of methods as intensity distributions, promptly, these 2 kinds of methods are respectively: based on the some picture of the light beam that obtains by hot spot feature measurement 10B of portion and image production part 34, ask in as analysis portion 36 a little as the method for intensity distributions and intensity distributions before based on the parallel wave of the light beam that obtains by 10A of wavefront measurement portion and image production part 34 at point, in putting, ask for a little method as intensity distributions as intensity distributions operational part 37.Because these 2 kinds of points as intensity distributions, obtain by 1 lightbeam measuring device 1A, so, mutual correlativity (utilize measurement mechanism separately to obtain 2 kinds of points as intensity distributions, the correlativity that obtain them is extremely difficult) can more easily be obtained.Therefore, might be with the comparative analysis result who obtains by described comparative analysis portion 38, in wavefront measurements that obtains by lightbeam measuring device 1A and hot spot feature measurement result's precision is judged, utilize, or utilize asking on the systematic errors such as aberration that lightbeam measuring device 1A had.
Below, the effect when measuring describes to described lightbeam measuring device 1A.
As shown in Figure 1, but the low light beam of interference capability of right-hand ejaculation from described optical picking up assembly 50 towards figure, after being converted into parallel beam by collimator lens 11, beam separation face 12 places be separated into right-hand wavefront measurement is used in the figure light beam and in the figure below beam spot make and use light beam.
Beam spot after the separation makes with light beam and converges in shooting face 14a in the 2nd video camera 14 via imaging len 13, forms the some picture of light beam on this shooting face 14a.Formed some picture is made a video recording by the 2nd video camera 14, and its picture signal is outputed to analytical equipment 31.Based on the picture signal of being exported, in the image production part 34 of analytical equipment 31, generate the view data of some picture, and in putting as analysis portion 36, the view data of this some picture is analyzed, the point that obtains beam spot is as intensity distributions and half width, cross sectional shape and brightness chromatic dispersion various hot spot feature measurement results such as (dispersion).
On the other hand, the wavefront measurement right-hand from beam separation face 12 towards figure incides beam separation/synthetic face 15 with light beam, be separated at this beam separation/synthetic face 15 places: the tested light beam of top reflection and see through this beam separation/reference beam of synthetic face 15 orientating reflex type wavefront shaping units 20 and make and use light beam in the figure, reference beam makes with the chopping mechanism 16 of light beam by being in open mode, incides plus lens 21.
The reference beam that incides this plus lens 21 makes uses light beam, is converged by this plus lens 21, incides the reflection diffraction portion 22 that is disposed on this convergent point.The reference beam that incides this reflection diffraction portion 22 makes a part of using light beam, in this reflection diffraction portion 22, is converted into through the spherical wave after the wavefront shaping, and towards plus lens 21 reflections.This spherical wave is converted into plane wave in plus lens 21, penetrate towards beam separation/synthetic face 15 as reference beam.And, the reflection below beam separation/synthetic face 15 places are in the figure of the part of this reference beam.
On the other hand, the tested light beam of top reflection reflects in the opposite direction at the reflecting surface 17a place of reflecting plate 17 from beam separation/synthetic face 15 towards figure, turns back to beam separation/synthetic face 15, its a part of transmitted beam separates/synthetic face 15, and the below is penetrated in the figure.
By being synthesized, reference beam that this tested light beam and beam separation/synthetic face 15 is reflected obtains interference light.This interference light incides shooting face 19a in the 1st video camera 19 via imaging len 18, and formation carries the interference fringe picture of the wavefront information of light beam on this shooting face 19a.Formed interference fringe picture outputs to analytical equipment 31 by 19 shootings of the 1st video camera with its picture signal.Based on the picture signal of being exported, in the image production part 34 of analytical equipment 31, generate the view data of interference fringe picture, and in fringe analysis portion 35, the view data of this interference fringe picture is analyzed, obtain the wavefront measurements of light beam.
According to described lightbeam measuring device 1A, because it not only possesses 10A of wavefront measurement portion and the hot spot feature measurement 10B of portion, and the 10A of wavefront measurement portion employing has reflection-type wavefront shaping unit 20, beam separation/synthetic face 15, reflecting plate 17, optical system configurations with Michelson's type of optical length adjusting mechanism, so, but in these 2 kinds of measurements of hot spot feature measurement of wavefront measurement that can carry out the low light beam of interference capability and light beam, compare with the Wavefront measuring apparatus of existing Mach-Zender, the adjustment of optical system and the setting of phase shift mechanism are more easily carried out.
＜the 2 embodiment 〉
Then, the 2nd embodiment to lightbeam measuring device involved in the present invention describes.Fig. 3 is the summary pie graph of the related lightbeam measuring device 1B of the present invention's the 2nd embodiment.In addition, in lightbeam measuring device 1B shown in Figure 3, the inscape identical with lightbeam measuring device 1A shown in Figure 1 adopted common sign, and omit its detailed explanation for fear of repetition, below, only difference is at length described.
Lightbeam measuring device 1B shown in Figure 3 is the device that the light beam from optical picking up assembly 50 outputs is carried out wavefront measurement, and the differences different with lightbeam measuring device 1A shown in Figure 1 are that it does not possess hot spot feature measurement portion.In addition, do not possess hot spot feature measurement portion, also just omitted chopping mechanism shown in Figure 1 16, point shown in Figure 2 as analysis portion 36, point as intensity distributions operational part 37 and comparative analysis portion 38 etc.
In addition, the 10A ' of wavefront measurement portion shown in Figure 3 is made of the Michelson's type optical system configurations with reflection-type wavefront shaping unit 20, beam separation/synthetic face 15 and reflecting plate 17, and, reflecting plate 17 have the optical length adjusting mechanism that constitutes by 1 pedestal and flange scanning breakout box aspect, identical with the 1st previous embodiment.
Therefore,, but can carry out wavefront measurement to the low light beam of interference capability according to this lightbeam measuring device 1B, and, compare with the Wavefront measuring apparatus of existing Mach-Zender, make the adjustment of optical system and the setting of phase shift mechanism can be easier to carry out.
The change of＜embodiment 〉
More than, embodiments of the present invention at length are illustrated, still, the present invention is defined in these embodiments, and its embodiment can be done various changes.
For example, in described embodiment, for the wavelength that makes the light beam of measuring does not change, reflection-type wavefront shaping unit 20 only is a kind, still, also can be that the light beam of measuring is a plurality of, with the mutual different situation of corresponding these wavelength of energy, and possess each self-corresponding multiple reflection-type wavefront shaping unit at each wavelength, when the light beam wavelength measured changes, can switch mutually and use.
And, in embodiment shown in Figure 1, to incide the part of described beam separation/synthetic face 15 (tested/the reference beam separating mechanism) light beam before, make with light beam as hot spot and to separate by beam separation face 12 (hot spot makes and uses the light beam separating mechanism), but, other beam separation face also can be set between beam separation/synthetic face 15 and reflecting plate 17, will be by the part of the tested light beam after beam separation/synthetic face 15 separates, make with light beam as hot spot and to separate, other beam separation face perhaps is set between beam separation/synthetic face 15 and wavefront shaping unit 20, to carry out wavefront shaping reference beam before and make a part of using light beam, and make with light beam as hot spot and separate.
In addition, in described embodiment, for will be from the light beam of optical picking up assembly 50 output as measuring object, different with common interferometer, do not possess light supply apparatus as inscape, but, also can possess exportable reference light source device with reference beam of high precision wavefront.Under the situation that possesses such reference light source device, make reference beam from the reference light source device, export via the tested lens that become measuring object, and by its wavefront is measured, and index distribution that can the tested lens of instrumentation etc.
In addition, employed reflection diffraction portion 22 in the wavefront shaping unit 20 also can utilize the reflection diffraction portion of above-mentioned patent documentation 2 disclosed various embodiments.
Claims (4)
1, a kind of lightbeam measuring device has: tested/the reference beam separating mechanism, its beam separation that will become measuring object becomes tested light beam and reference beam to make to use light beam; The wavefront reshaping device makes with light beam described reference beam and to carry out the wavefront shaping, is converted into reference beam; Combination mechanism synthesizes described tested light beam and described reference beam mutually and to obtain interference light; With interference fringe imaging/image mechanism, make the interference fringe imaging of the wavefront information that carries the described light beam that becomes measuring object and make a video recording by the described interference light that obtains;
Described wavefront reshaping device is made of reflection-type wavefront shaping unit, this reflection-type wavefront shaping unit has: the plus lens that described reference beam is made converge with light beam and in convergent point disposed the small reflection diffraction portion of this plus lens, its described reference beam to incident makes with the part of light beam and carries out the wavefront shaping, be converted to described reference beam, and with this reference beam towards described tested/the reference beam separating mechanism penetrates;
Described tested/reference beam separating mechanism and described combination mechanism be made of beam separation/synthetic face, this beam separation/synthetic face not only makes to make with the described tested light beam after the beam separation with described reference beam and incides reflecting surface, and makes the described tested light beam that returns from this reflecting surface synthetic with the described reference beam from described wavefront reshaping device;
Possesses the optical length adjusting mechanism, but it is under the situation of the low light beam of interference capability at the described light beam that becomes measuring object at least, makes the 1st optical length, approximately consistent with each other with the 2nd optical length that turns back to described beam separation/synthetic face from described beam separation/synthetic face via described reflection-type wavefront shaping unit that turns back to described beam separation/synthetic face from described beam separation/synthetic face via described reflecting surface.
2, lightbeam measuring device according to claim 1 is characterized in that, possesses:
Hot spot makes uses the light beam separating mechanism, and it will incide described before beam separation/synthetic face and become the light beam of measuring object, the tested light beam by beam separation/synthetic face after separating or carry out described reference beam before the wavefront shaping and make and use up intrafascicular any one a part and make with light beam as hot spot and separate; With
Point is as imaging/image mechanism, its by hot spot make make the described light beam that becomes measuring object with light beam point as imaging and make a video recording.
3, lightbeam measuring device according to claim 1 is characterized in that, possesses:
The 1st analysis institution, it obtains the described wavefront measurements that becomes the light beam of measuring object to described interference fringe analysis.
4, lightbeam measuring device according to claim 2 is characterized in that, possesses:
The 1st analysis institution, it obtains the described wavefront measurements that becomes the light beam of measuring object to described interference fringe analysis; With
The 2nd analysis institution, it looks like to analyze to described point and obtains the described hot spot feature measurement result who becomes the light beam of measuring object.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005166624A JP4667965B2 (en) | 2005-06-07 | 2005-06-07 | Light beam measuring device |
| JP2005166624 | 2005-06-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1877270A CN1877270A (en) | 2006-12-13 |
| CN100565142C true CN100565142C (en) | 2009-12-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100886997A Expired - Fee Related CN100565142C (en) | 2005-06-07 | 2006-06-01 | Lightbeam measuring device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4667965B2 (en) |
| KR (1) | KR100769214B1 (en) |
| CN (1) | CN100565142C (en) |
| TW (1) | TWI287619B (en) |
Families Citing this family (6)
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|---|---|---|---|---|
| KR100903264B1 (en) * | 2007-04-30 | 2009-06-17 | 광주과학기술원 | Apparatus and Method for measuring wavefront aberrations |
| JP2009069041A (en) | 2007-09-14 | 2009-04-02 | Fujinon Corp | Wavefront measuring device for optical pickup apparatus |
| JP5139832B2 (en) * | 2008-02-14 | 2013-02-06 | 浜松ホトニクス株式会社 | Observation device |
| TWI393919B (en) * | 2008-11-27 | 2013-04-21 | Ind Tech Res Inst | Beam shaper |
| CN110044849B (en) * | 2019-05-24 | 2021-08-17 | 易思维（杭州）科技有限公司 | Semi-closed cavity internal defect detection device |
| TWI729403B (en) * | 2019-05-31 | 2021-06-01 | 致茂電子股份有限公司 | Device for measuring optolectronic units |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2693791B2 (en) * | 1988-10-25 | 1997-12-24 | 三菱電機株式会社 | Defect inspection equipment |
| IL100655A (en) * | 1991-02-08 | 1994-11-28 | Hughes Aircraft Co | Interferometric laser profilometer |
| JP3150764B2 (en) * | 1992-06-10 | 2001-03-26 | オリンパス光学工業株式会社 | Simple interferometer |
| CA2169141A1 (en) * | 1995-04-07 | 1996-10-08 | Ivan Prikryl | Interferometer having a micromirror |
| JP2000097616A (en) * | 1998-09-22 | 2000-04-07 | Nikon Corp | Interferometer |
| JP2001215105A (en) * | 2000-02-02 | 2001-08-10 | Nikon Corp | Interferrometer, shape measuring apparatus and aligner and shape measuring method and exposing method |
| JP2004045326A (en) * | 2002-07-15 | 2004-02-12 | Konica Minolta Holdings Inc | Interferometer |
-
2005
- 2005-06-07 JP JP2005166624A patent/JP4667965B2/en not_active Expired - Fee Related
-
2006
- 2006-06-01 CN CNB2006100886997A patent/CN100565142C/en not_active Expired - Fee Related
- 2006-06-02 TW TW095119510A patent/TWI287619B/en not_active IP Right Cessation
- 2006-06-07 KR KR1020060050712A patent/KR100769214B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR20060127803A (en) | 2006-12-13 |
| JP4667965B2 (en) | 2011-04-13 |
| KR100769214B1 (en) | 2007-10-22 |
| TW200706830A (en) | 2007-02-16 |
| TWI287619B (en) | 2007-10-01 |
| JP2006343121A (en) | 2006-12-21 |
| CN1877270A (en) | 2006-12-13 |
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