CN110044849B - Semi-closed cavity internal defect detection device - Google Patents

Semi-closed cavity internal defect detection device Download PDF

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CN110044849B
CN110044849B CN201910437383.1A CN201910437383A CN110044849B CN 110044849 B CN110044849 B CN 110044849B CN 201910437383 A CN201910437383 A CN 201910437383A CN 110044849 B CN110044849 B CN 110044849B
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light
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camera
closed structure
light source
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CN110044849A (en
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姜毅
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Yi Si Si Hangzhou Technology Co ltd
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Isvision Hangzhou Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/4738Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N2021/4735Solid samples, e.g. paper, glass

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Abstract

The invention discloses a device for detecting internal defects of a semi-closed structure cavity, wherein an opening of the semi-closed structure cavity is a light hole, and the area of the light hole is smaller than the cross section area of the semi-closed structure cavity; the device for detecting the internal defects of the semi-closed structure cavity comprises a light source, a camera and a processing module; after light emitted by the light source passes through the light holes and enters the semi-closed structure cavity, light reflected by the mirror surface cannot be emitted from the light holes, and part of light reflected by the diffuse reflection can be emitted from the light holes and enters a camera for imaging; the device is characterized in that the processing module is electrically connected with the camera, the camera transmits an imaging result to the processing module, the processing module judges whether the region to be detected has defects or not according to the imaging result and outputs the result, the light source and the camera can be arranged to measure the area inside the semi-closed cavity (the region to be detected) which is far larger than the region of the light through hole, and the condition of local overexposure cannot occur.

Description

Semi-closed cavity internal defect detection device
Technical Field
The invention relates to the field of optical design and visual inspection, in particular to a device for detecting internal defects of a cavity of a semi-closed structure.
Background
The semi-closed structure is a common structure in the field of industrial processing and assembly, because the cavity of the semi-closed structure is in a hidden state, particularly for the semi-closed structure with a small aperture, the light hole of the whole semi-closed structure is very small, the information of the inner cavity of the semi-closed structure is difficult to directly acquire, and detection equipment is allowed to extend into the cavity under certain conditions, if an endoscope is adopted for detection, but the method easily causes local bright spots on the inner wall of the cavity, and all areas can be detected only by moving the position of the endoscope; and for the condition that the detection equipment cannot extend into the cavity, the measurement range of the detection equipment cannot exceed the clear aperture of the cavity.
A schematic view of a laser welding gun, such as that shown in fig. 1, is shown, in which: 14 protective glass, 17 light trap, 18 send welding wire mechanism, 19 welding planes, the inside light path of laser welder is vacuum state, in order to prevent outside dust, inside the splash gets into welder, be provided with protective glass 14 in soldered connection department, be provided with the light trap 17 that the size is littleer at protective glass front end, high temperature when the operation in the laser welder can produce "spark" and splash, the splash can be the adhesion on the protective glass in the laser welder at random, the light path that leads to the laser beam is obstructed, cause the decline of welding quality, and the laser welder structure is the semi-closed structure in a small aperture, protective glass is only the pars flava visible, present detection to protective glass either relies on artifical the detection, or whether the laser welder protective glass has the defect and all regularly changes its protective glass, the problem exists: the efficiency is low, the cost is high, impurities such as dust can enter by periodically replacing the protective lens of the laser welding head, and the conductivity of laser in an internal light path is further influenced.
Patent CN107643296A provides a detection method of coaxial light illumination, as shown in fig. 2, this detection method needs to set up coaxial light to shine into the protection lens, the camera gathers the irradiation area, external coaxial light source has increased detection system's complexity, simultaneously, the measurement visual field is limited by protection lens front end light trap size, the light trap size is small, therefore the area that the incident light of coaxial light source projects the protection lens is less than the actual area of waiting to detect of protection lens, the detection method of adopting coaxial light illumination can not realize the detection of the whole area of waiting to detect of protection lens.
Disclosure of Invention
In order to solve the technical problem, the invention provides a device for detecting the internal defects of a cavity of a semi-closed structure; according to the invention, the camera can acquire all the areas to be detected in the semi-closed structure cavity through the light path design of the light source.
The technical scheme is as follows:
the device for detecting the internal defects of the semi-closed structure cavity comprises a semi-closed structure cavity, wherein an opening of the semi-closed structure cavity is a light hole, and the area of the light hole is smaller than the cross section area of the semi-closed structure cavity;
the device for detecting the internal defects of the semi-closed structure cavity comprises a light source, a camera and a processing module;
after light emitted by the light source passes through the light holes and enters the semi-closed structure cavity, light reflected by the mirror surface cannot be emitted from the light holes, and part of light reflected by the diffuse reflection can be emitted from the light holes and enters a camera for imaging;
the processing module is electrically connected with the camera, the camera transmits an imaging result to the processing module, and the processing module judges whether the area to be detected has defects according to the imaging result and outputs the result.
And the diaphragm is arranged at the edge of the opening of the semi-closed structure cavity and used for preventing the light reflected by the mirror surface from entering the camera.
Further, a lens is arranged between the light source and the light hole and used for controlling the divergence angle of emergent light of the light source, so that the light can not irradiate on the side wall of the semi-closed structure cavity.
Further, the light source comprises a point light source, a collimating lens, a converging lens and a light shielding plate which are arranged in sequence; emergent light of the point light source firstly passes through the collimating lens and then becomes parallel light, and then passes through the converging lens and becomes conical light; the shading plate is arranged on one side of the converging lens and used for partially shading light rays to form annular conical incident light; the incident light passes through the light-transmitting hole without forming reflected light on the side wall around the light-transmitting hole.
Further, the device also comprises a semi-transparent and semi-reflective mirror; the light source and the camera are respectively arranged on two sides of the semi-transparent and semi-reflective mirror, light emitted by the light source enters the semi-closed structure cavity after passing through the semi-transparent and semi-reflective mirror, and light diffused and reflected by the area to be measured is emitted from the light hole and then reflected by the semi-transparent and semi-reflective mirror to enter the camera for imaging.
Further, the light source is an annular light source; the size of the annular light source, the relative position of the annular light source and the camera, the relative position of the camera and the light hole and the focal length of the camera lens simultaneously satisfy the following definitions:
Figure GDA0003003152990000031
wherein: d is the inner diameter of the annular light source; the light holes or the light holes with the added diaphragms are circular holes, and d is the diameter of the light holes; h is the vertical distance between the light source and the light hole; h is the distance from the area to be measured in the semi-closed structure cavity to the light hole; d1 is the diameter of the region to be measured or the diameter of the circumscribed circle of the region to be measured; d2 is the camera target surface height; h1 is the distance from the camera to the light hole; f is the focal length of the lens;
or the light source is a square light source, and the light hole or the light hole with the added diaphragm is square; the size of the light source, the relative position of the light source and the camera, the relative position of the camera and the light hole and the focal length of the camera lens simultaneously satisfy the following definitions:
Figure GDA0003003152990000032
wherein: d is the side length of the light source; d is the side length of the light hole; h is the vertical distance between the light source and the light hole; h is the vertical distance from the area to be measured in the semi-closed structure cavity to the light hole; d1 is the side length of the square region to be measured or the side length of the square region to be measured externally; d2 is the camera target surface height; h1 is the distance from the camera to the light hole; f is the focal length of the lens;
when a square or annular light source is used, preferably H-H1, the light source is fitted over a camera, the camera and light source being located directly below the light-transmissive aperture.
Further, the area to be measured is located on the bottom surface in the cavity of the semi-closed structure opposite to the light hole, and the diameter or the side length of the bottom surface is marked as D3; the dimensions of which satisfy the following definitions:
Figure GDA0003003152990000041
the detection device further comprises a reflector, the reflector is positioned below the light holes, the camera and the light source are positioned on the same side of the reflector, and the inclination angle of the reflector is theta, so that emergent light of the light source is reflected to an area to be detected through the light holes and then reflected to the camera; the angle theta is more than 30 degrees and less than 60 degrees, and the position relation among the reflector, the light transmission hole, the camera and the light source is as follows:
h1 ═ H2+ H3, and H2+ H4;
wherein H is the vertical distance between the light source and the light hole; h1 is the distance from the camera to the light hole; h2 is the distance between the reflector and the light hole; h3 is the distance between the camera and the mirror; h4 is the distance between the light source and the mirror.
The semi-transparent and semi-reflective mirror is positioned below the light hole, and the inclination angle beta is more than 30 degrees and less than 60 degrees; emergent light of the light source penetrates through the semi-transparent and semi-reflective mirror to reach an area to be detected, and light rays diffusely reflected by the area to be detected enter the camera after being reflected by the semi-transparent and semi-reflective mirror;
the position relation among the semi-transparent and semi-reflective mirror, the light hole and the camera meets the following requirements:
H1=H2’+H3’;
wherein: h1 is the distance from the camera to the light hole; h2' is the distance between the semi-transparent and semi-reflective mirror and the light hole; h3' is the distance between the camera and the half-mirror.
The invention can be used for detecting the laser welding protective lens, namely, the semi-closed structure is a laser welding gun, and the area to be detected is the protective lens in the laser welding gun.
Due to the light reflection principle, the gray scales of the images presented by the defect area and the normal area are different, and whether the defect exists or not can be obtained according to the characteristic.
The technical scheme provided by the invention has the following advantages:
by limiting the light source and the camera parameters, the camera view field is not limited by the size of the light hole, images of all areas to be detected can be obtained by one-time acquisition, and the detection result is more comprehensive; by the design of the light source, the situation of local overexposure in the image is avoided, and the image quality is guaranteed;
the method has no requirement on the material of the area to be detected, and both metal with certain roughness and glass with smooth surface and high transmittance can be detected by the method; due to the reflection principle of light, the gray value of the smooth area in the image is low, the rough area is subjected to diffuse reflection, different areas in the image have different gray values, and based on the gray values, the measured internal cavity can be effectively observed according to the image of the area to be measured.
Drawings
FIG. 1 is a schematic view of a laser welding gun;
FIG. 2 is a schematic structural view of embodiment 1 of the present invention;
FIG. 3 is a schematic structural diagram of embodiment 2 of the present invention;
FIG. 4 is a schematic structural diagram of embodiment 3 of the present invention;
FIG. 5 is a schematic structural diagram according to embodiment 4 of the present invention;
fig. 6 is a schematic structural diagram of embodiment 5 of the present invention.
Detailed Description
The technical solution of the present invention is described in detail below with reference to the accompanying drawings and examples.
Example 1
As shown in fig. 2, in the device for detecting the internal defect of the semi-closed structure cavity, an opening of a semi-closed structure cavity 1 is a light hole 2, the light hole 2 is circular, and the area of the light hole is smaller than the cross section area of the semi-closed structure cavity;
the device for detecting the internal defects of the semi-closed structure cavity 1 comprises a light source 4, a camera 5 and a processing module;
the light source 4 is an LED annular surface light source, after the emitted light passes through the light hole 2 and enters the cavity 1 of the semi-closed structure, the light reflected by the mirror surface cannot be emitted from the light hole 2, and part of the light energy reflected by diffusion is emitted from the light hole 2 and enters the camera for imaging; the size of the annular light source, the relative position of the annular light source and the camera 5, the relative position of the camera 5 and the light hole 2 and the focal length of the camera lens simultaneously satisfy the following definitions:
Figure GDA0003003152990000061
wherein: d is the inner diameter of the annular light source; d is the diameter of the light hole; h is the vertical distance between the light source 4 and the light hole 2; h is the distance from the area to be measured 3 in the semi-closed structure cavity 1 to the light hole 2; d1 is the diameter of the region to be measured or the diameter of the circumscribed circle of the region to be measured; d2 is the camera target surface height; h1 is the distance from camera 5 to light hole 2; f is the focal length of the lens;
the processing module is electrically connected with the camera, the camera transmits the imaging result to the processing module, and the processing module judges whether the area to be detected has defects according to the imaging result and outputs the result.
H1, namely, the light source is sleeved on the camera, and the camera and the light source are positioned right below the light hole.
When the area to be measured 3 is positioned on the bottom surface in the cavity 1 of the semi-closed structure opposite to the light hole 2, the diameter or the side length of the bottom surface is marked as D3; the dimensions of which satisfy the following definitions:
Figure GDA0003003152990000062
if the laser welding protective lens is detected, namely the semi-closed structure is a laser welding gun, the area to be detected 3 is the protective lens inside the laser welding gun.
The processor processes the image, when the surface of the lens is smooth, the reflected light conforms to the law of reflection, is blocked by the inner wall of the cavity and is limited in the cavity, and if the surface of the lens is defective (dirty), the light is scattered, and all directions have light, wherein part of the light enters the camera through the light-transmitting opening of the cavity; therefore, the gray scales of the images presented by the defect area and the normal area are different, and whether the image is abnormal or not and whether the protective lens needs to be replaced or not is judged according to the gray scales.
Example 2
As shown in fig. 3, this embodiment adds a diaphragm and a lens to the structure of embodiment 1;
in this embodiment, the diaphragm 9 is disposed at the edge of the opening of the semi-enclosed structure cavity 1, and is used to prevent the light reflected by the mirror surface from entering the camera; when the light hole is not circular, the diaphragm 9 is an inscribed circle of the light hole; further, a lens 6 is arranged between the light source 4 and the light hole and used for controlling the divergence angle of emergent light of the light source, so that the light can not irradiate on the side wall of the semi-closed structure cavity 1.
Example 3
As shown in fig. 4, in the device for detecting the internal defect of the semi-closed structure cavity, an opening of the semi-closed structure cavity 1 is a light hole, and the area of the light hole is smaller than the cross-sectional area of the semi-closed structure cavity;
the device for detecting the internal defects of the semi-closed structure cavity 1 comprises a light source 4, a camera 5 and a processing module;
in the embodiment, the light source 4 is a square light source, after the emitted light passes through the light hole and enters the cavity 1 of the semi-closed structure, the light reflected by the mirror surface cannot be emitted from the light hole, and part of the light reflected by the diffuse reflection can be emitted from the light hole and enter the camera for imaging;
a square diaphragm 9 is arranged at the edge of the opening of the semi-closed structure cavity 1 and is used for preventing light reflected by the mirror surface from entering the camera; the light holes with the square diaphragms added are square light holes; the processing module is electrically connected with the camera, the camera transmits the imaging result to the processing module, and the processing module judges whether the area to be detected has defects according to the imaging result and outputs the result.
The size of the square light source, the relative position of the light source and the camera, the relative position of the camera 5 and the light hole and the focal length of the camera lens simultaneously satisfy the following definitions:
Figure GDA0003003152990000081
wherein: d is the side length of the light source; d is the side length of the square light hole; h is the vertical distance between the light source 4 and the light hole; h is the distance from the area to be measured 3 in the semi-closed structure cavity 1 to the light hole; d1 is the side length of the square region to be measured; d2 is the camera target surface height; h1 is the distance from camera 5 to light hole 2; f is the focal length of the lens;
sleeving a light source on a camera, positioning a reflector 7 below a light hole, positioning the camera 5 and the light source 4 on the same side of the reflector, and reflecting emergent light of the light source 4 to a square area to be measured through the light hole 2 at an inclination angle theta of the reflector 7, and then reflecting light reflected by the square area to be measured to the camera 5; θ is 60 °, and the positional relationship among the reflector 7, the light transmission hole 2, the camera 5, and the light source 4 is as follows:
h1 ═ H2+ H3, and H2+ H4;
wherein, H is the vertical distance between the light source 4 and the light hole 2; h1 is the distance from camera 5 to light hole 2; h2 is the distance between the reflector 7 and the light transmission hole 2; h3 is the distance between camera 5 and mirror 7; h4 is the distance between the light source 4 and the reflector 7, and H3 is H4.
Example 4
As shown in fig. 5, in the device for detecting the internal defect of the semi-closed structure cavity, an opening of the semi-closed structure cavity 1 is a light hole, and the area of the light hole is smaller than the cross-sectional area of the semi-closed structure cavity;
the device for detecting the internal defects of the semi-closed structure cavity comprises a light source 4, a camera 5 and a processing module;
in the embodiment, the light source 4 is an annular light source, after the emitted light passes through the light holes and enters the cavity 1 of the semi-closed structure, the light reflected by the mirror surface cannot be emitted from the light holes, and part of the light reflected by the diffuse light can be emitted from the light holes and enters the camera for imaging;
a diaphragm 9 is arranged at the edge of the opening of the semi-closed structure cavity 1 and is used for preventing light reflected by the mirror surface from entering the camera;
the diaphragm 9 is an inscribed circle of the light hole; the light hole with the diaphragm is a circular hole;
the processing module is electrically connected with the camera, the camera transmits the imaging result to the processing module, and the processing module judges whether the area to be detected has defects according to the imaging result and outputs the result.
Further, the size of the annular light source, the relative position of the annular light source and the camera 5, the relative position of the camera 5 and the light hole, and the focal length of the camera lens simultaneously satisfy the following definitions:
Figure GDA0003003152990000091
wherein: d is the inner diameter of the annular light source; d is the diameter of the light hole; h is the vertical distance between the light source 4 and the light hole; h is the distance from the area to be measured 3 in the semi-closed structure cavity 1 to the light hole; d1 is the diameter of the region to be measured or the diameter of the circumscribed circle of the region to be measured; d2 is the camera target surface height; h1 is the distance from camera 5 to light hole 2; f is the focal length of the lens;
the light source further comprises a semi-transparent and semi-reflective mirror 8, wherein the semi-transparent and semi-reflective mirror 8 is positioned below the light hole and is inclined at an angle beta of 45 degrees; emergent light of the light source 4 penetrates through the semi-permeable and semi-reflective mirror 8 to reach the area to be measured 3, and light rays diffusely reflected by the area to be measured 3 enter the camera 5 after being reflected by the semi-permeable and semi-reflective mirror 8;
the position relation among the semi-transparent and semi-reflective mirror 8, the light hole and the camera 5 satisfies:
H1=H2’+H3’;
wherein: h1 is the distance from the camera (5) to the light transmission hole; h2' is the distance between the half-transparent and half-reflective mirror 8 and the light hole; h3' is the distance between the camera and the half mirror 8.
Example 5
As shown in fig. 6, this embodiment replaces the annular light source of embodiment 4 with a point light source 411, a collimating lens 412, a converging lens 413, and a light shielding plate 414, which are arranged in this order; the emergent light of the point light source 411 passes through the collimating lens 412 and then becomes parallel light, and then passes through the converging lens 413 and becomes cone light; the light shielding plate 414 is disposed on one side of the converging lens 413, and is used for partially shielding light to form a ring-shaped cone-shaped incident light; the incident light passes through the light-transmitting hole without forming reflected light on the side wall around the light-transmitting hole.
For convenience in explanation and accurate definition in the appended claims, the terms "upper", "lower", "inner" and "outer" are used to describe features of the exemplary embodiments with reference to the positions of such features as displayed in the figures.
The foregoing descriptions of specific exemplary embodiments of the present invention have been presented for purposes of illustration and description. The foregoing description is not intended to be exhaustive or to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain certain principles of the invention and its practical application to enable others skilled in the art to make and use various exemplary embodiments of the invention and various alternatives and modifications thereof. It is intended that the scope of the invention be defined by the following claims and their equivalents.

Claims (9)

1. The device for detecting the internal defects of the semi-closed structure cavity comprises a semi-closed structure cavity (1), wherein an opening of the semi-closed structure cavity is a light hole (2), and the area of the light hole (2) is smaller than the cross section area of the semi-closed structure cavity;
the internal defect detection device of the semi-closed structure cavity (1) comprises a light source (4), a camera (5) and a processing module;
the method is characterized in that: after light emitted by the light source (4) passes through the light holes (2) and enters the semi-closed structure cavity (1), all light reflected by the mirror surface cannot be emitted from the light holes (2), and part of light reflected by the diffuse reflection can be emitted from the light holes (2) and enters a camera for imaging;
the processing module is electrically connected with the camera, the camera transmits an imaging result to the processing module, and the processing module judges whether the area to be detected has defects according to the imaging result and outputs the result;
the light source (4) is an annular light source; the size of the annular light source, the relative position of the annular light source and the camera (5), the relative position of the camera (5) and the light hole (2) and the focal length of a camera lens simultaneously satisfy the following definitions:
Figure FDA0003003152980000011
wherein: d is the inner diameter of the annular light source; the light holes or the light holes with the added diaphragms are circular holes, and d is the diameter of the light holes; h is the vertical distance between the light source (4) and the light hole (2); h is the distance from the area (3) to be measured in the semi-closed structure cavity (1) to the light hole (2); d1 is the diameter of the region to be measured or the diameter of the circumscribed circle of the region to be measured; d2 is the camera target surface height; h1 is the distance from the camera (5) to the light hole (2); f is the focal length of the lens;
or the light source (4) is a square light source, and the light holes or the light holes (2) with the added diaphragms are square; the size of the light source, the relative position of the light source and the camera (5), the relative position of the camera (5) and the light hole (2) and the focal length of the camera lens simultaneously satisfy the following definitions:
Figure FDA0003003152980000012
wherein: d is the side length of the light source; d is the side length of the light hole; h is the vertical distance between the light source (4) and the light hole (2); h is the vertical distance from the area (3) to be measured in the semi-closed structure cavity (1) to the light hole (2); d1 is the side length of the square region to be measured or the side length of the square region to be measured externally; d2 is the camera target surface height; h1 is the distance from the camera (5) to the light hole (2); f is the focal length of the lens.
2. The device for detecting the internal defects of the semi-closed structure cavity comprises a semi-closed structure cavity (1), wherein an opening of the semi-closed structure cavity is a light hole (2), and the area of the light hole (2) is smaller than the cross section area of the semi-closed structure cavity;
the internal defect detection device of the semi-closed structure cavity (1) comprises a light source (4), a camera (5) and a processing module;
the method is characterized in that: after light emitted by the light source (4) passes through the light holes (2) and enters the semi-closed structure cavity (1), all light reflected by the mirror surface cannot be emitted from the light holes (2), and part of light reflected by the diffuse reflection can be emitted from the light holes (2) and enters a camera for imaging;
the processing module is electrically connected with the camera, the camera transmits an imaging result to the processing module, and the processing module judges whether the area to be detected has defects according to the imaging result and outputs the result;
the light source (4) comprises a point light source (411), a collimating lens (412), a converging lens (413) and a light shielding plate (414) which are arranged in sequence; emergent light of the point light source (411) firstly passes through the collimating lens (412) and then becomes parallel light, and then passes through the converging lens (413) and becomes conical light; the light shielding plate (414) is arranged on one side of the converging lens (413) and is used for partially shielding light rays to form annular cone-shaped incident light; the incident light does not form reflected light on the peripheral side wall of the light hole when passing through the light hole;
the size of the light shielding plate (414), the relative position of the light shielding plate (414) and the camera (5), the relative position of the camera (5) and the light transmission hole (2), and the focal length of a camera lens simultaneously satisfy the following definitions:
Figure FDA0003003152980000021
wherein: d is the diameter of the shutter plate (414); d is the diameter of the light hole; h is the vertical distance between the shading plate (414) and the light hole (2); h is the distance from the area (3) to be measured in the semi-closed structure cavity (1) to the light hole (2); d1 is the diameter of the region to be measured or the diameter of the circumscribed circle of the region to be measured; d2 is the camera target surface height; h1 is the distance from the camera (5) to the light hole (2); f is the focal length of the lens.
3. The apparatus for detecting defects inside a semi-closed structure cavity according to claim 1 or 2, wherein: the semi-closed structure cavity comprises a semi-closed structure cavity body (1) and is characterized by further comprising a diaphragm (9) arranged at the edge of the opening of the semi-closed structure cavity body (1) and used for preventing light reflected by a mirror surface from entering the camera.
4. The apparatus for detecting defects inside a semi-closed structure cavity according to claim 1 or 2, wherein: and a lens is arranged between the light source (4) and the light hole (2) and used for controlling the divergence angle of emergent light of the light source so that the light can not irradiate on the side wall of the semi-closed structure cavity (1).
5. The apparatus for detecting defects inside a cavity of a semi-closed structure according to claim 1, wherein: the device also comprises a semi-transparent and semi-reflective mirror (8); the light source (4) and the camera (5) are respectively arranged on two sides of the semi-transparent and semi-reflective mirror (8), light emitted by the light source (4) penetrates through the semi-transparent and semi-reflective mirror (8) and then enters the semi-closed structure cavity (1), and light diffused and reflected by the area to be measured is emitted from the light hole (2) and then reflected by the semi-transparent and semi-reflective mirror (8) to enter the camera for imaging.
6. The apparatus for detecting defects inside a cavity of a semi-closed structure according to claim 1, wherein: the area to be measured (3) is positioned on the bottom surface in the semi-closed structure cavity (1) opposite to the light hole (2), and the diameter or the side length of the bottom surface is marked as D3; the dimensions of which satisfy the following definitions:
Figure FDA0003003152980000031
7. the apparatus for detecting defects inside a cavity of a semi-closed structure according to claim 1, wherein: H-H1.
8. The apparatus for detecting defects inside a cavity of a semi-closed structure according to claim 1, wherein: the detection device further comprises a reflector (7), the reflector (7) is located below the light holes (2), the camera (5) and the light source (4) are located on the same side of the reflector, the inclination angle of the reflector (7) is theta, the reflector is used for reflecting emergent light of the light source (4) to the area to be detected (3) through the light holes (2), and then reflecting light reflected by the area to be detected (3) to the camera (5); the angle theta is more than 30 degrees and less than 60 degrees, and the position relation among the reflector (7), the light transmission hole (2), the camera (5) and the light source (4) is as follows:
h1 ═ H2+ H3, and H2+ H4;
wherein H is the vertical distance between the light source (4) and the light hole (2); h1 is the distance from the camera (5) to the light hole (2); h2 is the distance between the reflector (7) and the light hole (2); h3 is the distance between the camera (5) and the reflector (7); h4 is the distance between the light source (4) and the reflector (7).
9. The apparatus for detecting defects inside a cavity of a semi-closed structure according to claim 1, wherein: the semi-transparent and semi-reflective mirror (8) is positioned below the light hole (2), and the angle of inclination beta is more than 30 degrees and less than 60 degrees; emergent light of the light source (4) penetrates through the semi-transparent and semi-reflective mirror (8) to reach the area to be measured (3), and light rays diffusely reflected by the area to be measured (3) enter the camera (5) after being reflected by the semi-transparent and semi-reflective mirror (8);
the semi-transparent and semi-reflective mirror (8) satisfies the following requirements in relation to the position of the light hole (2) and the position of the camera (5):
H1=H2’+H3’;
wherein: h1 is the distance from the camera (5) to the light hole (2); h2' is the distance between the semi-transparent and semi-reflective mirror (8) and the light hole (2); h3' is the distance between the camera and the half-transparent half-mirror (8).
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