CN212674054U - Surface detection device and microscope - Google Patents
Surface detection device and microscope Download PDFInfo
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- CN212674054U CN212674054U CN202020530252.6U CN202020530252U CN212674054U CN 212674054 U CN212674054 U CN 212674054U CN 202020530252 U CN202020530252 U CN 202020530252U CN 212674054 U CN212674054 U CN 212674054U
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Abstract
The utility model provides a surface detection device and microscope, surface detection device includes: the light source is used for emitting detection light; the detection light forms a stripe light beam after passing through a mask plate, and the mask plate is provided with stripes; the fringe light beam is reflected by a first reflecting mirror, and the first reflecting light is emitted to the objective lens group; the first reflected light is converged on the surface to be measured by the objective lens group, and the second reflected light on the surface to be measured passes through the objective lens group and the first reflecting mirror and then passes through the imaging lens group. The utility model has the advantages of surface detection.
Description
Technical Field
The utility model relates to an optical detection, in particular to surface detection device and microscope.
Background
Focusing refers to moving the position of a lens to make an image of an object plane received by a receiving surface (CCD or human eyes) clear, and is divided into manual focusing and automatic focusing.
The current focusing technology mainly has the following defects: for uneven surfaces, holes and defects in the surface can affect the focusing effect. The existing method has large structure volume, most of which can not overcome the influence of holes and can not be suitable for a common microscope.
SUMMERY OF THE UTILITY MODEL
For solving the not enough among the above-mentioned prior art scheme, the utility model provides a small, range of application is wide, have supplementary surface detection device who focuses the function.
The utility model aims at realizing through the following technical scheme:
a surface sensing device, the surface sensing device comprising:
a light source for emitting detection light;
the mask plate is provided with stripes, and the detection light forms stripe light beams after passing through the mask plate;
the first reflecting mirror is used for reflecting the stripe light beam, and the first reflected light is emitted to the objective lens group;
the first reflected light is converged on the flatness to be measured by the objective lens group, and the second reflected light on the flatness to be measured passes through the objective lens group and the first reflecting mirror and then passes through the imaging lens group;
an imaging lens group.
The present invention also provides a microscope with focusing and surface detecting functions, which is achieved by the following technical solutions:
a microscope comprising an objective turret; the microscope further includes:
the auxiliary unit adopts the surface detection device, and the surface detection device is fixed on the objective lens rotary table.
Compared with the prior art, the utility model discloses the beneficial effect who has does:
1. the surface detection function is realized;
forming a stripe beam by using a mask plate, converging on a surface to be measured, and detecting reflected light on the surface: the leveling is represented by equal interval distribution of stripes, the cavities are represented by stripes with curved parts, and the inclination is represented by unequal interval distribution of the stripes;
2. the auxiliary focusing function is realized;
the imaging definition of reflected light of detection light emitted by laser on the surface to be measured is evaluated (the imaging definition evaluation is the prior art), so that an auxiliary focusing function in the focusing process is realized;
3. the volume is small;
the light source, the reflector and the objective lens group are arranged in the shell, so that the size is reduced;
4. the application range is wide;
the objective lens group is fixed at the first through hole of the shell and can be widely applied to various microscopes.
Drawings
The disclosure of the present invention will become more readily understood with reference to the accompanying drawings. As is readily understood by those skilled in the art: these drawings are only intended to illustrate the technical solution of the present invention and are not intended to limit the scope of the present invention. In the figure:
FIG. 1 is a simplified structural diagram of a surface sensing device according to an embodiment of the present invention;
fig. 2 is a schematic view of a surface of a mask plate according to an embodiment of the present invention;
FIG. 3 is an image obtained when the surface to be measured is a flat surface;
FIG. 4 is an image obtained when the surface to be measured has holes;
fig. 5 is an image obtained when the surface to be measured is an inclined surface.
Detailed Description
Fig. 1-5 and the following description depict alternative embodiments of the invention to teach those skilled in the art how to make and reproduce the invention. For the purpose of teaching the present invention, some conventional aspects have been simplified or omitted. Those skilled in the art will appreciate variations or substitutions from these embodiments that will be within the scope of the invention. Those skilled in the art will appreciate that the features described below can be combined in various ways to form multiple variations of the invention. Accordingly, the present invention is not limited to the following alternative embodiments, but is only limited by the claims and their equivalents.
Example 1:
fig. 1 schematically shows a schematic structural diagram of a surface detecting device according to embodiment 1 of the present invention, and as shown in fig. 1, the surface detecting device includes:
a light source 1, such as a semiconductor laser, for emitting detection light;
the mask plate 3 is provided with stripes, such as linear stripes with equal intervals, and the detection light forms stripe light beams after passing through the mask plate;
a first reflecting mirror 6, by which the stripe beam is reflected, the first reflected light being directed to the objective lens group;
the objective lens group 5 is used for converging the first reflected light on the flatness to be measured by the objective lens group, and the second reflected light on the flatness to be measured passes through the objective lens group and the first reflecting mirror and then passes through the imaging lens group; objective lens group with convergence function is the prior art in the field, and the specific structure is not described herein;
the imaging lens group 12, including the objective lens and the imaging unit, is well known in the art, and the detailed structure thereof is not described herein.
In order to reduce the volume of the surface detection device, further, the surface detection device further comprises:
the light source 1, the mask plate 36, the first reflector and the objective lens group 5 are arranged in the shell 7, the shell is provided with a first through hole and a second through hole, the convergent light of the objective lens group 5 penetrates through the first through hole, and the second reflected light sequentially penetrates through the first through hole, the first reflector and the second through hole and then is emitted to the imaging lens group.
In order to adapt to various microscopes, the second through hole is further provided with an external thread, and the external thread is matched with the interface thread of the microscope objective turntable.
In order to prevent external dust particles from entering the shell to pollute the optical device, the first through hole and/or the second through hole are/is provided with optical window sheets.
In order to observe the surface to be measured, further, the surface inspection apparatus further includes:
the second reflected light passes through the imaging lens group and then is imaged on the photoelectric detector;
and the output signal of the photoelectric detector is transmitted to the display.
In order to further reduce the volume of the device, further, the surface detection device further comprises:
the collimating lens 2 is used for emitting the detection light to the mask plate 3 after the detection light passes through the collimating lens 2;
and the second reflector 4 reflects the fringe light beam onto the first reflector 6, so that the light path is folded, and the size is reduced.
Example 2:
an application example of the surface inspection device according to embodiment 1 of the present invention to a microscope.
In the present application example, as shown in fig. 1, the microscope has an imaging device 12, and a housing 7 is fixed to a turntable;
the light source 1 adopts a semiconductor laser, and the emitted detection light is visible light; the detection light passes through the collimating lens 2 and then is collimated and expanded, and the area of the light beam is larger than that of the circular mask plate 3 but smaller than that of the second reflecting mirror 4; the collimated light becomes a light beam with stripes after passing through the mask plate 3, and then is reflected by the second reflecting mirror 4; as shown in fig. 2, the mask 3 has a first group of linear stripes and a second group of linear stripes, the first group of linear stripes are distributed at equal intervals, the second group of linear stripes are distributed at equal intervals, and an included angle between the second group of linear stripes and the first group of linear stripes is a right angle; the reflected light on the second reflector 4 is reflected by the first reflector 6, then the first reflected light is emitted to the objective lens group 5, and finally is emitted out of an optical window sheet at a first through hole of the shell 7 and is converged on the surface to be measured 11; the incident angle of the incident light on the first mirror 6 and/or the second mirror 4 is 45 degrees;
the second reflected light on the surface 11 to be measured sequentially passes through the optical window, the objective lens group 5, the first reflector 6 and the optical window (the shell 7 is fixed on the objective lens turntable) at the second through hole, finally enters the imaging device 12, is imaged on the photoelectric detector 13, such as a CCD (charge coupled device), the image of the surface is displayed on a display, the obtained image is shown in figures 3-5, the figure 3 shows that the flat surface and the stripes are distributed at equal intervals, the figure 4 shows that the surface with the holes and the stripes have curved parts, and the figure 5 shows that the inclined surface and the stripes are distributed at unequal intervals; by evaluating the imaging definition, the auxiliary focusing during focusing is realized; imaging sharpness evaluation is state of the art.
The above embodiments only exemplarily show that the mask plate adopts linear stripes, and of course, the mask plate may be stripes with other shapes, such as equally spaced circular stripes distributed in concentric circles.
Claims (10)
1. A surface sensing device, characterized by: the surface detection apparatus includes:
a light source for emitting detection light;
the mask plate is provided with stripes, and the detection light forms stripe light beams after passing through the mask plate;
the first reflecting mirror is used for reflecting the stripe light beam, and the first reflected light is emitted to the objective lens group;
the first reflected light is converged on the surface to be measured by the objective lens group, and the second reflected light on the surface to be measured passes through the objective lens group and the first reflecting mirror and then passes through the imaging lens group;
an imaging lens group.
2. The surface sensing device of claim 1, wherein: the surface sensing device further includes:
the light source, the mask plate, the first reflector and the objective lens group are arranged in the shell, the shell is provided with a first through hole and a second through hole, the convergent light of the objective lens group penetrates through the first through hole, and the second reflected light sequentially penetrates through the first through hole, the first reflector and the second through hole and then irradiates to the imaging lens group.
3. The surface sensing device of claim 2, wherein: the second through hole is provided with an internal thread, and the shell of the imaging lens group is provided with an external thread matched with the internal thread.
4. The surface sensing device of claim 2, wherein: and the first through hole and/or the second through hole are/is provided with optical window sheets.
5. The surface sensing device of claim 1, wherein: the surface sensing device further includes:
the second reflected light passes through the imaging lens group and then is imaged on the photoelectric detector;
and the output signal of the photoelectric detector is transmitted to the display.
6. The surface sensing device of claim 1, wherein: the surface sensing device further includes:
the detection light penetrates through the collimating lens and then is emitted to the mask plate;
a second mirror, the fringe beam being reflected by the second mirror onto the first mirror.
7. The surface sensing device of claim 6, wherein: the incident angle of the incident light on the first mirror and/or the second mirror is 45 degrees.
8. The surface sensing device of claim 1, wherein: the mask plate is provided with a first group of straight line stripes and a second group of straight line stripes, the first group of straight line stripes are distributed at equal intervals, the second group of straight line stripes are distributed at equal intervals, and the included angle between the second group of straight line stripes and the first group of straight line stripes is a right angle or an acute angle.
9. A microscope comprising an objective turret; the method is characterized in that: the microscope further includes:
an auxiliary unit using the surface inspecting device according to any one of claims 1 to 8, the surface inspecting device being fixed to the objective turret.
10. A microscope as claimed in claim 9, characterised in that: the objective lens group is fixed at a through hole of a shell of the surface detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020530252.6U CN212674054U (en) | 2020-04-13 | 2020-04-13 | Surface detection device and microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020530252.6U CN212674054U (en) | 2020-04-13 | 2020-04-13 | Surface detection device and microscope |
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| Publication Number | Publication Date |
|---|---|
| CN212674054U true CN212674054U (en) | 2021-03-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202020530252.6U Active CN212674054U (en) | 2020-04-13 | 2020-04-13 | Surface detection device and microscope |
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| CN (1) | CN212674054U (en) |
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- 2020-04-13 CN CN202020530252.6U patent/CN212674054U/en active Active
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