JP4662951B2 - 隔離されたガスセンサの配置 - Google Patents
隔離されたガスセンサの配置 Download PDFInfo
- Publication number
- JP4662951B2 JP4662951B2 JP2006551468A JP2006551468A JP4662951B2 JP 4662951 B2 JP4662951 B2 JP 4662951B2 JP 2006551468 A JP2006551468 A JP 2006551468A JP 2006551468 A JP2006551468 A JP 2006551468A JP 4662951 B2 JP4662951 B2 JP 4662951B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- sensor
- permeable membrane
- sensor assembly
- gas permeable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007789 gas Substances 0.000 claims description 152
- 239000012528 membrane Substances 0.000 claims description 52
- 238000000034 method Methods 0.000 claims description 17
- 238000009434 installation Methods 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- 239000001257 hydrogen Substances 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 239000012777 electrically insulating material Substances 0.000 claims description 5
- DHKHKXVYLBGOIT-UHFFFAOYSA-N 1,1-Diethoxyethane Chemical compound CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 claims description 3
- 239000011354 acetal resin Substances 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 229920006324 polyoxymethylene Polymers 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 238000002955 isolation Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 2
- 238000011143 downstream manufacturing Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229920004943 Delrin® Polymers 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008384 membrane barrier Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US54001804P | 2004-01-27 | 2004-01-27 | |
PCT/US2005/002574 WO2005073716A1 (en) | 2004-01-27 | 2005-01-27 | Isolated gas sensor configuration |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007519930A JP2007519930A (ja) | 2007-07-19 |
JP4662951B2 true JP4662951B2 (ja) | 2011-03-30 |
Family
ID=34826168
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006551468A Active JP4662951B2 (ja) | 2004-01-27 | 2005-01-27 | 隔離されたガスセンサの配置 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7249490B2 (de) |
JP (1) | JP4662951B2 (de) |
CN (1) | CN1938588B (de) |
DE (1) | DE112005000251B4 (de) |
WO (1) | WO2005073716A1 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10144873A1 (de) * | 2001-09-12 | 2003-03-27 | Bosch Gmbh Robert | Mikromechanischer Wärmeleitfähigkeitssensor mit poröser Abdeckung |
US7228725B2 (en) * | 2004-01-27 | 2007-06-12 | H2Scan Llc | Thin film gas sensor configuration |
DE112005000251B4 (de) * | 2004-01-27 | 2016-03-10 | H2Scan Corp. | Isolierte Gassensoranordnung |
DE102005050914B4 (de) * | 2005-10-21 | 2009-04-16 | Dräger Safety AG & Co. KGaA | Tragbares Gasmessgerät |
TW200725821A (en) * | 2005-12-27 | 2007-07-01 | Unimems Mfg Co Ltd | Package structure for gas sensor and package method thereof |
US8633825B2 (en) * | 2006-08-08 | 2014-01-21 | Wessels Company | Expansion tank with a predictive sensor |
US8706424B2 (en) * | 2009-06-30 | 2014-04-22 | H2Scan Corporation | System for estimating a gas concentration in a mixed atmosphere |
US8196448B2 (en) | 2010-01-20 | 2012-06-12 | GM Global Technology Operations LLC | Hydrogen sensor assembly |
US9239322B2 (en) | 2011-01-23 | 2016-01-19 | Serveron Corporation | Electrical apparatus oil sampler and conditioner for solid state sensors |
US20120241319A1 (en) * | 2011-03-25 | 2012-09-27 | Life Safety Distribution Ag | Gas Detector Having Bipolar Counter/Reference Electrode |
US8511160B2 (en) * | 2011-03-31 | 2013-08-20 | Qualitrol Company, Llc | Combined hydrogen and pressure sensor assembly |
US8839658B2 (en) | 2011-03-31 | 2014-09-23 | Qualitrol Company, Llc | Combination of hydrogen and pressure sensors |
US8707767B2 (en) | 2011-03-31 | 2014-04-29 | Qualitrol Company, Llc | Combined hydrogen and pressure sensor assembly |
US9194857B2 (en) * | 2012-06-04 | 2015-11-24 | Serveron Corporation | Sealing apparatus for electrical apparatus oil sampler and conditioner for solid state sensors |
WO2013187910A1 (en) * | 2012-06-15 | 2013-12-19 | Empire Technology Development Llc | Self-cleaning lens |
US10197519B2 (en) | 2013-03-15 | 2019-02-05 | H2Scan Corporation | Gas sensing systems and methods |
CN104330531B (zh) * | 2014-10-29 | 2015-11-11 | 东南大学 | 一种测试气体传感器件快速响应特性的方法和装置 |
JP7253551B2 (ja) * | 2017-08-14 | 2023-04-06 | ハーン-シッカート-ゲゼルシャフト フュア アンゲヴァンテ フォアシュング アインゲトラーゲナー フェライン | 呼吸空気の呼気co2濃度を決定するためのガスセンサ |
TWI632371B (zh) * | 2017-08-31 | 2018-08-11 | 研能科技股份有限公司 | 致動傳感模組 |
CN108717097A (zh) * | 2018-04-10 | 2018-10-30 | 杭州电子科技大学 | 一种降气体流速的mems缓冲器结构 |
CN111380931A (zh) * | 2018-12-28 | 2020-07-07 | 广东美的白色家电技术创新中心有限公司 | 气体传感器 |
CN109752418B (zh) * | 2019-01-21 | 2021-11-05 | 中国科学院上海微系统与信息技术研究所 | 一种微型热导气体传感器 |
DE102021214054A1 (de) * | 2021-12-09 | 2023-06-15 | Robert Bosch Gesellschaft mit beschränkter Haftung | Elektrisches Gerät für den Einsatz in einem Wasserstoff-System |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02150753A (ja) * | 1988-11-30 | 1990-06-11 | Toshiba Corp | 感応素子 |
JPH0254898B2 (de) * | 1982-03-30 | 1990-11-22 | Westinghouse Electric Corp | |
JPH04238259A (ja) * | 1991-01-23 | 1992-08-26 | Osaka Gas Co Ltd | ガス検出器 |
JPH07225206A (ja) * | 1994-02-10 | 1995-08-22 | Oki Electric Ind Co Ltd | 匂いセンサおよびその匂いセンサを用いたガスセンサ |
JPH11237355A (ja) * | 1998-02-24 | 1999-08-31 | Yazaki Corp | ガスセンサ |
JP3162957B2 (ja) * | 1995-06-22 | 2001-05-08 | 株式会社ガスター | Coセンサ |
JP2002539441A (ja) * | 1999-03-17 | 2002-11-19 | テー・エー・エム!テクニシェ・エントビクルンゲン・ウント・メニジメント・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | 空気中に含まれるガスおよび煙のセンサ装置と検出方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5175016A (en) * | 1990-03-20 | 1992-12-29 | Minnesota Mining And Manufacturing Company | Method for making gas sensing element |
DE4105025C1 (de) * | 1991-02-19 | 1992-07-02 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
WO1993013408A1 (en) * | 1991-12-31 | 1993-07-08 | Abbott Laboratories | Composite membrane |
US5464966A (en) * | 1992-10-26 | 1995-11-07 | The United States Of America As Represented By The Secretary Of Commerce | Micro-hotplate devices and methods for their fabrication |
US5279795A (en) * | 1993-01-04 | 1994-01-18 | The United States Of America As Represented By The United States Department Of Energy | Extended range chemical sensing apparatus |
JPH0722506A (ja) | 1993-07-05 | 1995-01-24 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
EP0722565B1 (de) * | 1993-10-08 | 1999-05-19 | Microchip (Proprietary) Limited | Katalytischer gassensor |
US5798556A (en) * | 1996-03-25 | 1998-08-25 | Motorola, Inc. | Sensor and method of fabrication |
DE69630292D1 (de) * | 1996-07-31 | 2003-11-13 | St Microelectronics Srl | Verfahren zur Herstellung von integrierten Halbleiteranordnungen mit chemoresistivem Gasmikrosensor |
US5659127A (en) * | 1996-08-26 | 1997-08-19 | Opto Tech Corporation | Substrate structure of monolithic gas sensor |
RU2137117C1 (ru) * | 1996-10-10 | 1999-09-10 | Самсунг Электроникс Ко., Лтд. | Гибридная интегральная схема газового сенсора |
GB2339474B (en) * | 1998-07-10 | 2000-07-05 | Draeger Sicherheitstech Gmbh | A flashback barrier |
DE19854396C2 (de) * | 1998-11-25 | 2002-02-07 | Freudenberg Carl Kg | Sensormodul |
DE19911867C2 (de) * | 1999-03-17 | 2002-02-21 | T E M Techn Entwicklungen Und | Sensorsystem zur Detektion von Gasen und Dämpfen in Luft |
KR20010037655A (ko) | 1999-10-19 | 2001-05-15 | 이진경 | 마이크로머시닝 기술에 의해 제조되는 저전력형 세라믹 가스센서 및 그 제조방법 |
EP1350097A4 (de) * | 2000-12-05 | 2010-01-13 | Bill Hoagland | Wasserstoffgasanzeigersystem |
DE10204458A1 (de) * | 2002-02-05 | 2003-08-14 | Stefan Raible | Gassensor |
DE112005000251B4 (de) * | 2004-01-27 | 2016-03-10 | H2Scan Corp. | Isolierte Gassensoranordnung |
-
2005
- 2005-01-27 DE DE112005000251.9T patent/DE112005000251B4/de not_active Expired - Fee Related
- 2005-01-27 WO PCT/US2005/002574 patent/WO2005073716A1/en active Application Filing
- 2005-01-27 CN CN2005800062261A patent/CN1938588B/zh active Active
- 2005-01-27 US US11/046,397 patent/US7249490B2/en not_active Expired - Fee Related
- 2005-01-27 JP JP2006551468A patent/JP4662951B2/ja active Active
-
2007
- 2007-07-31 US US11/831,865 patent/US7913542B2/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0254898B2 (de) * | 1982-03-30 | 1990-11-22 | Westinghouse Electric Corp | |
JPH02150753A (ja) * | 1988-11-30 | 1990-06-11 | Toshiba Corp | 感応素子 |
JPH04238259A (ja) * | 1991-01-23 | 1992-08-26 | Osaka Gas Co Ltd | ガス検出器 |
JPH07225206A (ja) * | 1994-02-10 | 1995-08-22 | Oki Electric Ind Co Ltd | 匂いセンサおよびその匂いセンサを用いたガスセンサ |
JP3162957B2 (ja) * | 1995-06-22 | 2001-05-08 | 株式会社ガスター | Coセンサ |
JPH11237355A (ja) * | 1998-02-24 | 1999-08-31 | Yazaki Corp | ガスセンサ |
JP2002539441A (ja) * | 1999-03-17 | 2002-11-19 | テー・エー・エム!テクニシェ・エントビクルンゲン・ウント・メニジメント・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | 空気中に含まれるガスおよび煙のセンサ装置と検出方法 |
Also Published As
Publication number | Publication date |
---|---|
US20050183968A1 (en) | 2005-08-25 |
US20080145279A1 (en) | 2008-06-19 |
DE112005000251B4 (de) | 2016-03-10 |
WO2005073716A1 (en) | 2005-08-11 |
CN1938588A (zh) | 2007-03-28 |
CN1938588B (zh) | 2011-11-09 |
US7913542B2 (en) | 2011-03-29 |
DE112005000251T5 (de) | 2007-03-22 |
JP2007519930A (ja) | 2007-07-19 |
US7249490B2 (en) | 2007-07-31 |
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