JP4662951B2 - 隔離されたガスセンサの配置 - Google Patents

隔離されたガスセンサの配置 Download PDF

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JP4662951B2
JP4662951B2 JP2006551468A JP2006551468A JP4662951B2 JP 4662951 B2 JP4662951 B2 JP 4662951B2 JP 2006551468 A JP2006551468 A JP 2006551468A JP 2006551468 A JP2006551468 A JP 2006551468A JP 4662951 B2 JP4662951 B2 JP 4662951B2
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gas
sensor
permeable membrane
sensor assembly
gas permeable
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JP2007519930A (ja
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ソルター,カールトン
ペンダーグラス,ロバート
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エイチツースキャン コーポレイション
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49826Assembling or joining

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
JP2006551468A 2004-01-27 2005-01-27 隔離されたガスセンサの配置 Active JP4662951B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US54001804P 2004-01-27 2004-01-27
PCT/US2005/002574 WO2005073716A1 (en) 2004-01-27 2005-01-27 Isolated gas sensor configuration

Publications (2)

Publication Number Publication Date
JP2007519930A JP2007519930A (ja) 2007-07-19
JP4662951B2 true JP4662951B2 (ja) 2011-03-30

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Family Applications (1)

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JP2006551468A Active JP4662951B2 (ja) 2004-01-27 2005-01-27 隔離されたガスセンサの配置

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US (2) US7249490B2 (de)
JP (1) JP4662951B2 (de)
CN (1) CN1938588B (de)
DE (1) DE112005000251B4 (de)
WO (1) WO2005073716A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10144873A1 (de) * 2001-09-12 2003-03-27 Bosch Gmbh Robert Mikromechanischer Wärmeleitfähigkeitssensor mit poröser Abdeckung
US7228725B2 (en) * 2004-01-27 2007-06-12 H2Scan Llc Thin film gas sensor configuration
DE112005000251B4 (de) * 2004-01-27 2016-03-10 H2Scan Corp. Isolierte Gassensoranordnung
DE102005050914B4 (de) * 2005-10-21 2009-04-16 Dräger Safety AG & Co. KGaA Tragbares Gasmessgerät
TW200725821A (en) * 2005-12-27 2007-07-01 Unimems Mfg Co Ltd Package structure for gas sensor and package method thereof
US8633825B2 (en) * 2006-08-08 2014-01-21 Wessels Company Expansion tank with a predictive sensor
US8706424B2 (en) * 2009-06-30 2014-04-22 H2Scan Corporation System for estimating a gas concentration in a mixed atmosphere
US8196448B2 (en) 2010-01-20 2012-06-12 GM Global Technology Operations LLC Hydrogen sensor assembly
US9239322B2 (en) 2011-01-23 2016-01-19 Serveron Corporation Electrical apparatus oil sampler and conditioner for solid state sensors
US20120241319A1 (en) * 2011-03-25 2012-09-27 Life Safety Distribution Ag Gas Detector Having Bipolar Counter/Reference Electrode
US8511160B2 (en) * 2011-03-31 2013-08-20 Qualitrol Company, Llc Combined hydrogen and pressure sensor assembly
US8839658B2 (en) 2011-03-31 2014-09-23 Qualitrol Company, Llc Combination of hydrogen and pressure sensors
US8707767B2 (en) 2011-03-31 2014-04-29 Qualitrol Company, Llc Combined hydrogen and pressure sensor assembly
US9194857B2 (en) * 2012-06-04 2015-11-24 Serveron Corporation Sealing apparatus for electrical apparatus oil sampler and conditioner for solid state sensors
WO2013187910A1 (en) * 2012-06-15 2013-12-19 Empire Technology Development Llc Self-cleaning lens
US10197519B2 (en) 2013-03-15 2019-02-05 H2Scan Corporation Gas sensing systems and methods
CN104330531B (zh) * 2014-10-29 2015-11-11 东南大学 一种测试气体传感器件快速响应特性的方法和装置
JP7253551B2 (ja) * 2017-08-14 2023-04-06 ハーン-シッカート-ゲゼルシャフト フュア アンゲヴァンテ フォアシュング アインゲトラーゲナー フェライン 呼吸空気の呼気co2濃度を決定するためのガスセンサ
TWI632371B (zh) * 2017-08-31 2018-08-11 研能科技股份有限公司 致動傳感模組
CN108717097A (zh) * 2018-04-10 2018-10-30 杭州电子科技大学 一种降气体流速的mems缓冲器结构
CN111380931A (zh) * 2018-12-28 2020-07-07 广东美的白色家电技术创新中心有限公司 气体传感器
CN109752418B (zh) * 2019-01-21 2021-11-05 中国科学院上海微系统与信息技术研究所 一种微型热导气体传感器
DE102021214054A1 (de) * 2021-12-09 2023-06-15 Robert Bosch Gesellschaft mit beschränkter Haftung Elektrisches Gerät für den Einsatz in einem Wasserstoff-System

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02150753A (ja) * 1988-11-30 1990-06-11 Toshiba Corp 感応素子
JPH0254898B2 (de) * 1982-03-30 1990-11-22 Westinghouse Electric Corp
JPH04238259A (ja) * 1991-01-23 1992-08-26 Osaka Gas Co Ltd ガス検出器
JPH07225206A (ja) * 1994-02-10 1995-08-22 Oki Electric Ind Co Ltd 匂いセンサおよびその匂いセンサを用いたガスセンサ
JPH11237355A (ja) * 1998-02-24 1999-08-31 Yazaki Corp ガスセンサ
JP3162957B2 (ja) * 1995-06-22 2001-05-08 株式会社ガスター Coセンサ
JP2002539441A (ja) * 1999-03-17 2002-11-19 テー・エー・エム!テクニシェ・エントビクルンゲン・ウント・メニジメント・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング 空気中に含まれるガスおよび煙のセンサ装置と検出方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5175016A (en) * 1990-03-20 1992-12-29 Minnesota Mining And Manufacturing Company Method for making gas sensing element
DE4105025C1 (de) * 1991-02-19 1992-07-02 Robert Bosch Gmbh, 7000 Stuttgart, De
WO1993013408A1 (en) * 1991-12-31 1993-07-08 Abbott Laboratories Composite membrane
US5464966A (en) * 1992-10-26 1995-11-07 The United States Of America As Represented By The Secretary Of Commerce Micro-hotplate devices and methods for their fabrication
US5279795A (en) * 1993-01-04 1994-01-18 The United States Of America As Represented By The United States Department Of Energy Extended range chemical sensing apparatus
JPH0722506A (ja) 1993-07-05 1995-01-24 Mitsubishi Electric Corp 半導体装置及びその製造方法
EP0722565B1 (de) * 1993-10-08 1999-05-19 Microchip (Proprietary) Limited Katalytischer gassensor
US5798556A (en) * 1996-03-25 1998-08-25 Motorola, Inc. Sensor and method of fabrication
DE69630292D1 (de) * 1996-07-31 2003-11-13 St Microelectronics Srl Verfahren zur Herstellung von integrierten Halbleiteranordnungen mit chemoresistivem Gasmikrosensor
US5659127A (en) * 1996-08-26 1997-08-19 Opto Tech Corporation Substrate structure of monolithic gas sensor
RU2137117C1 (ru) * 1996-10-10 1999-09-10 Самсунг Электроникс Ко., Лтд. Гибридная интегральная схема газового сенсора
GB2339474B (en) * 1998-07-10 2000-07-05 Draeger Sicherheitstech Gmbh A flashback barrier
DE19854396C2 (de) * 1998-11-25 2002-02-07 Freudenberg Carl Kg Sensormodul
DE19911867C2 (de) * 1999-03-17 2002-02-21 T E M Techn Entwicklungen Und Sensorsystem zur Detektion von Gasen und Dämpfen in Luft
KR20010037655A (ko) 1999-10-19 2001-05-15 이진경 마이크로머시닝 기술에 의해 제조되는 저전력형 세라믹 가스센서 및 그 제조방법
EP1350097A4 (de) * 2000-12-05 2010-01-13 Bill Hoagland Wasserstoffgasanzeigersystem
DE10204458A1 (de) * 2002-02-05 2003-08-14 Stefan Raible Gassensor
DE112005000251B4 (de) * 2004-01-27 2016-03-10 H2Scan Corp. Isolierte Gassensoranordnung

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0254898B2 (de) * 1982-03-30 1990-11-22 Westinghouse Electric Corp
JPH02150753A (ja) * 1988-11-30 1990-06-11 Toshiba Corp 感応素子
JPH04238259A (ja) * 1991-01-23 1992-08-26 Osaka Gas Co Ltd ガス検出器
JPH07225206A (ja) * 1994-02-10 1995-08-22 Oki Electric Ind Co Ltd 匂いセンサおよびその匂いセンサを用いたガスセンサ
JP3162957B2 (ja) * 1995-06-22 2001-05-08 株式会社ガスター Coセンサ
JPH11237355A (ja) * 1998-02-24 1999-08-31 Yazaki Corp ガスセンサ
JP2002539441A (ja) * 1999-03-17 2002-11-19 テー・エー・エム!テクニシェ・エントビクルンゲン・ウント・メニジメント・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング 空気中に含まれるガスおよび煙のセンサ装置と検出方法

Also Published As

Publication number Publication date
US20050183968A1 (en) 2005-08-25
US20080145279A1 (en) 2008-06-19
DE112005000251B4 (de) 2016-03-10
WO2005073716A1 (en) 2005-08-11
CN1938588A (zh) 2007-03-28
CN1938588B (zh) 2011-11-09
US7913542B2 (en) 2011-03-29
DE112005000251T5 (de) 2007-03-22
JP2007519930A (ja) 2007-07-19
US7249490B2 (en) 2007-07-31

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