JP4661167B2 - ポリゴンミラーモータの測定装置 - Google Patents
ポリゴンミラーモータの測定装置 Download PDFInfo
- Publication number
- JP4661167B2 JP4661167B2 JP2004318983A JP2004318983A JP4661167B2 JP 4661167 B2 JP4661167 B2 JP 4661167B2 JP 2004318983 A JP2004318983 A JP 2004318983A JP 2004318983 A JP2004318983 A JP 2004318983A JP 4661167 B2 JP4661167 B2 JP 4661167B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- mirror
- reflected
- polygon mirror
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 claims description 24
- 238000005259 measurement Methods 0.000 claims description 20
- 230000003287 optical effect Effects 0.000 claims description 16
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000000691 measurement method Methods 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
- B41J2/47—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light
- B41J2/471—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light using dot sequential main scanning by means of a light deflector, e.g. a rotating polygonal mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/121—Mechanical drive devices for polygonal mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/127—Adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00007—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for relating to particular apparatus or devices
- H04N1/00018—Scanning arrangements
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/00034—Measuring, i.e. determining a quantity by comparison with a standard
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/0005—Methods therefor in service, i.e. during normal operation
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/00063—Methods therefor using at least a part of the apparatus itself, e.g. self-testing
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/00068—Calculating or estimating
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
- H04N2201/04—Scanning arrangements
- H04N2201/047—Detection, control or error compensation of scanning velocity or position
- H04N2201/04701—Detection of scanning velocity or position
- H04N2201/0471—Detection of scanning velocity or position using dedicated detectors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
- H04N2201/04—Scanning arrangements
- H04N2201/047—Detection, control or error compensation of scanning velocity or position
- H04N2201/04701—Detection of scanning velocity or position
- H04N2201/04739—Detection of scanning velocity or position by detecting the scanning head or scanning carriage
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- General Health & Medical Sciences (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Description
る。
ここでtanθn<<1としてスリット6を配置すればtanθn≒θとみなせるので、(式2)は(式3)のように簡略化できる。さらに、(式3)は(式4)のように展開することができる。ただし、ωは回転角速度、t1はθ1だけ回転するのに要した時間、t2はθ2だけ回転するのに要した時間である。ミラー反射面からスリット6までの距離L、回転角速度ωが既知であるとすれば、t2、t1を計測することでe’の算出が可能となる。ここでθ1はミラー姿勢16のときの反射光17が入射するスリット6のエッジ位置から、反射光13が光検出素子7に入射するであろう位置までの角度であるので、回転角速度ωが一定とすればt1は反射光17を光検出素子7が検出した時点から、ミラー姿勢12の時に光検出素子11が光を検出した時点までの時間によって計測することができる。t2についても同様に、θ2がミラー姿勢18のときの反射光19が入射するスリット6のエッジ位置から、反射光15が光検出素子7に入射するであろう位置までの角度であるので、t2も反射光19を光検出素子7が検出した時点から、ミラー姿勢14の時に光検出素子11が光を検出した時点までの時間によって計測することができる。
4 第1光源
5 光学レンズ(第1光学系)
6、10 スリット
7 第1光検出素子
8 第2光源
9 光学レンズ(第2光学系)
11 第2光検出素子
12、14 ミラー正対時のミラー姿勢
13、15、17、19 反射光
16、18 ミラー姿勢
Claims (2)
- 第1光源と、前記第1光源から射出された第1測定光を被測定ポリゴンミラーで反射させ、反射させた第1反射光を第1スリットを介して検出する第1光検出素子と、
前記第1光源から射出された第1測定光を前記第1光検出素子にスポットを形成させる第1光学系と、
第2光源と、前記第2光源から射出された第2測定光を前記ポリゴンミラーで反射させ、反射させた第2反射光を第2光学系と第2スリットとを介して検出する第2光検出素子と、を備え、
前記第1測定光と前記第2測定光とは、所定の角度θpで交差するように構成され、但し、0°<θp<90°とし、
前記第2光検出素子の出力信号は、前記第2測定光と前記第2反射光とが同一直線状になった時であるミラー正対タイミングにおいて出力されるように構成され、
前記第1反射光が前記ミラー正対タイミングにおける前記第1反射光となす角度をθnとし、前記第1スリットは、tanθn<<1となる位置に配置され、
前記第1光検出素子の出力信号と前記第2光検出素子の出力信号との時間差に基づいて、前記ポリゴンミラーの偏心と面出入りを前記所定の角度θpの関数として算出することにより、前記ポリゴンミラーの偏心と面出入りとの少なくとも一方を測定するポリゴンミラーモータの測定装置。 - 前記第1光学系は光学レンズであり、前記第2光学系はビームスプリッタである請求項1記載のポリゴンミラーモータの測定装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004318983A JP4661167B2 (ja) | 2004-11-02 | 2004-11-02 | ポリゴンミラーモータの測定装置 |
CNB2005101129379A CN100462669C (zh) | 2004-11-02 | 2005-10-14 | 多角镜马达的测量装置 |
US11/262,772 US7460249B2 (en) | 2004-11-02 | 2005-11-01 | Measuring instrument of polygon-mirror motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004318983A JP4661167B2 (ja) | 2004-11-02 | 2004-11-02 | ポリゴンミラーモータの測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006132955A JP2006132955A (ja) | 2006-05-25 |
JP4661167B2 true JP4661167B2 (ja) | 2011-03-30 |
Family
ID=36261409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004318983A Active JP4661167B2 (ja) | 2004-11-02 | 2004-11-02 | ポリゴンミラーモータの測定装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7460249B2 (ja) |
JP (1) | JP4661167B2 (ja) |
CN (1) | CN100462669C (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006084331A (ja) * | 2004-09-16 | 2006-03-30 | Matsushita Electric Ind Co Ltd | ポリゴンミラーモータの偏心測定装置 |
KR101018207B1 (ko) * | 2009-02-06 | 2011-02-28 | 삼성전기주식회사 | 빔 스캐너 및 표면 측정 장치 |
US8817058B2 (en) * | 2011-05-06 | 2014-08-26 | Lexmark International, Inc. | System and method for reducing scan line jitter in a laser scan unit for an imaging device |
CN104197847A (zh) * | 2014-09-19 | 2014-12-10 | 孙维 | 一种传感器 |
TWI634309B (zh) * | 2017-05-12 | 2018-09-01 | 翊鼎光電股份有限公司 | 光學檢測設備 |
KR102197470B1 (ko) * | 2018-11-28 | 2020-12-31 | 세메스 주식회사 | 기판 처리 장치 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60102606U (ja) * | 1983-12-20 | 1985-07-12 | 富士通株式会社 | 光点位置測定装置 |
JPH04130239A (ja) * | 1990-09-21 | 1992-05-01 | Copal Electron Co Ltd | 動的面出入り測定装置 |
JP2006084331A (ja) * | 2004-09-16 | 2006-03-30 | Matsushita Electric Ind Co Ltd | ポリゴンミラーモータの偏心測定装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01232226A (ja) * | 1988-03-11 | 1989-09-18 | Copal Electron Co Ltd | スキャナの動的面出入り測定装置 |
JPH0690111B2 (ja) * | 1989-02-03 | 1994-11-14 | コパル電子株式会社 | 動的面出入り測定装置 |
US5105296A (en) * | 1989-11-20 | 1992-04-14 | Dainippon Screen Mfg. Co., Ltd. | Method and apparatus for detecting beam spot shape |
JPH05227710A (ja) * | 1991-03-29 | 1993-09-03 | Nippon Densan Corp | モータの偏心測定装置 |
JP4322155B2 (ja) * | 2004-03-24 | 2009-08-26 | 株式会社リコー | 可動物体又は静止物体の形状測定装置及び測定方法 |
-
2004
- 2004-11-02 JP JP2004318983A patent/JP4661167B2/ja active Active
-
2005
- 2005-10-14 CN CNB2005101129379A patent/CN100462669C/zh active Active
- 2005-11-01 US US11/262,772 patent/US7460249B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60102606U (ja) * | 1983-12-20 | 1985-07-12 | 富士通株式会社 | 光点位置測定装置 |
JPH04130239A (ja) * | 1990-09-21 | 1992-05-01 | Copal Electron Co Ltd | 動的面出入り測定装置 |
JP2006084331A (ja) * | 2004-09-16 | 2006-03-30 | Matsushita Electric Ind Co Ltd | ポリゴンミラーモータの偏心測定装置 |
Also Published As
Publication number | Publication date |
---|---|
US20060092405A1 (en) | 2006-05-04 |
CN100462669C (zh) | 2009-02-18 |
US7460249B2 (en) | 2008-12-02 |
CN1770604A (zh) | 2006-05-10 |
JP2006132955A (ja) | 2006-05-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110573928B (zh) | 光检测和测距系统中的角校准 | |
US4897536A (en) | Optical axis displacement sensor with cylindrical lens means | |
US20050225742A1 (en) | Apparatus and method for optical determination of intermediate distances | |
US7193730B2 (en) | Eccentricity measuring instrument of polygon-mirror motor | |
US7460249B2 (en) | Measuring instrument of polygon-mirror motor | |
US20130057872A1 (en) | Device for Determining Distance Interferometrically | |
KR20100041024A (ko) | 2차원 회절 격자를 이용한 6 자유도 측정 장치 | |
JP5322099B2 (ja) | 角度センサ | |
JP2008256465A (ja) | 計測装置 | |
JP2017053772A (ja) | 変位測定装置 | |
JP4696249B2 (ja) | 形状測定方法及び装置 | |
US5724130A (en) | Technique for the measurement and calibration of angular position | |
Saito et al. | A micro angle sensor based on laser autocollimation | |
JPH04130239A (ja) | 動的面出入り測定装置 | |
RU81317U1 (ru) | Устройство для измерения угловых скоростей вращения | |
JPH0783619A (ja) | レーザ変位計 | |
JP2003121127A (ja) | 測定装置 | |
JP2008256463A (ja) | 計測装置及びミラー姿勢・回動監視装置 | |
JPH07294537A (ja) | 速度及び距離の検出装置 | |
RU2165070C2 (ru) | Устройство для измерения малых перемещений | |
USH212H (en) | Displacement and force measurement by means of optically-generated moire fringes | |
JP2011247736A (ja) | 被検曲面形状測定装置 | |
JPH04220586A (ja) | レーザドップラ方式による被測定物の速度、長さ等の測定における被測定物の傾き、位置ずれ検出方法 | |
JPS6338107A (ja) | 走査式レ−ザ距離計 | |
JPH0331367B2 (ja) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20071031 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20071113 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20091120 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100113 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100202 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100325 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100727 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100826 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20101207 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20101220 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 4661167 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140114 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140114 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140114 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |