CN1770604A - 多角镜马达的测量装置 - Google Patents
多角镜马达的测量装置 Download PDFInfo
- Publication number
- CN1770604A CN1770604A CNA2005101129379A CN200510112937A CN1770604A CN 1770604 A CN1770604 A CN 1770604A CN A2005101129379 A CNA2005101129379 A CN A2005101129379A CN 200510112937 A CN200510112937 A CN 200510112937A CN 1770604 A CN1770604 A CN 1770604A
- Authority
- CN
- China
- Prior art keywords
- polygon
- mirror
- photodetector
- polygon mirror
- measurement mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004364 calculation method Methods 0.000 claims abstract description 4
- 238000005259 measurement Methods 0.000 claims description 27
- 238000001514 detection method Methods 0.000 claims description 8
- 230000036544 posture Effects 0.000 description 21
- 238000006073 displacement reaction Methods 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
- B41J2/47—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light
- B41J2/471—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light using dot sequential main scanning by means of a light deflector, e.g. a rotating polygonal mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/121—Mechanical drive devices for polygonal mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/127—Adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00007—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for relating to particular apparatus or devices
- H04N1/00018—Scanning arrangements
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/00034—Measuring, i.e. determining a quantity by comparison with a standard
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/0005—Methods therefor in service, i.e. during normal operation
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/00063—Methods therefor using at least a part of the apparatus itself, e.g. self-testing
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/00068—Calculating or estimating
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
- H04N2201/04—Scanning arrangements
- H04N2201/047—Detection, control or error compensation of scanning velocity or position
- H04N2201/04701—Detection of scanning velocity or position
- H04N2201/0471—Detection of scanning velocity or position using dedicated detectors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
- H04N2201/04—Scanning arrangements
- H04N2201/047—Detection, control or error compensation of scanning velocity or position
- H04N2201/04701—Detection of scanning velocity or position
- H04N2201/04739—Detection of scanning velocity or position by detecting the scanning head or scanning carriage
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- General Health & Medical Sciences (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
Description
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004318983 | 2004-11-02 | ||
JP2004318983A JP4661167B2 (ja) | 2004-11-02 | 2004-11-02 | ポリゴンミラーモータの測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1770604A true CN1770604A (zh) | 2006-05-10 |
CN100462669C CN100462669C (zh) | 2009-02-18 |
Family
ID=36261409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101129379A Active CN100462669C (zh) | 2004-11-02 | 2005-10-14 | 多角镜马达的测量装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7460249B2 (zh) |
JP (1) | JP4661167B2 (zh) |
CN (1) | CN100462669C (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104197847A (zh) * | 2014-09-19 | 2014-12-10 | 孙维 | 一种传感器 |
CN108871732A (zh) * | 2017-05-12 | 2018-11-23 | 翊鼎光电股份有限公司 | 光学检测设备 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006084331A (ja) * | 2004-09-16 | 2006-03-30 | Matsushita Electric Ind Co Ltd | ポリゴンミラーモータの偏心測定装置 |
KR101018207B1 (ko) * | 2009-02-06 | 2011-02-28 | 삼성전기주식회사 | 빔 스캐너 및 표면 측정 장치 |
US9052513B2 (en) | 2011-05-06 | 2015-06-09 | Lexmark International, Inc. | Laser scan unit for an imaging device |
KR102197470B1 (ko) * | 2018-11-28 | 2020-12-31 | 세메스 주식회사 | 기판 처리 장치 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60102606U (ja) * | 1983-12-20 | 1985-07-12 | 富士通株式会社 | 光点位置測定装置 |
JPH01232226A (ja) * | 1988-03-11 | 1989-09-18 | Copal Electron Co Ltd | スキャナの動的面出入り測定装置 |
JPH0690111B2 (ja) * | 1989-02-03 | 1994-11-14 | コパル電子株式会社 | 動的面出入り測定装置 |
US5105296A (en) * | 1989-11-20 | 1992-04-14 | Dainippon Screen Mfg. Co., Ltd. | Method and apparatus for detecting beam spot shape |
JPH0735988B2 (ja) * | 1990-09-21 | 1995-04-19 | コパル電子株式会社 | 動的面出入り測定装置 |
JPH05227710A (ja) * | 1991-03-29 | 1993-09-03 | Nippon Densan Corp | モータの偏心測定装置 |
JP4322155B2 (ja) * | 2004-03-24 | 2009-08-26 | 株式会社リコー | 可動物体又は静止物体の形状測定装置及び測定方法 |
JP2006084331A (ja) * | 2004-09-16 | 2006-03-30 | Matsushita Electric Ind Co Ltd | ポリゴンミラーモータの偏心測定装置 |
-
2004
- 2004-11-02 JP JP2004318983A patent/JP4661167B2/ja not_active Expired - Lifetime
-
2005
- 2005-10-14 CN CNB2005101129379A patent/CN100462669C/zh active Active
- 2005-11-01 US US11/262,772 patent/US7460249B2/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104197847A (zh) * | 2014-09-19 | 2014-12-10 | 孙维 | 一种传感器 |
CN108871732A (zh) * | 2017-05-12 | 2018-11-23 | 翊鼎光电股份有限公司 | 光学检测设备 |
Also Published As
Publication number | Publication date |
---|---|
JP4661167B2 (ja) | 2011-03-30 |
US20060092405A1 (en) | 2006-05-04 |
JP2006132955A (ja) | 2006-05-25 |
US7460249B2 (en) | 2008-12-02 |
CN100462669C (zh) | 2009-02-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: NMB-MAT MOYOR Free format text: FORMER OWNER: PANASONIC ELECTRIC EQUIPMENT INDUSTRIAL CO.,LTD. Effective date: 20100702 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: OSAKA PREFECTURE GOVERNMENT, JAPAN TO: TOKYO, JAPAN |
|
TR01 | Transfer of patent right |
Effective date of registration: 20100702 Address after: Tokyo, Japan Patentee after: Meiwa Motor Co., Ltd. Address before: Osaka Japan Patentee before: Matsushita Electric Industrial Co., Ltd. |