CN1770604A - 多角镜马达的测量装置 - Google Patents
多角镜马达的测量装置 Download PDFInfo
- Publication number
- CN1770604A CN1770604A CNA2005101129379A CN200510112937A CN1770604A CN 1770604 A CN1770604 A CN 1770604A CN A2005101129379 A CNA2005101129379 A CN A2005101129379A CN 200510112937 A CN200510112937 A CN 200510112937A CN 1770604 A CN1770604 A CN 1770604A
- Authority
- CN
- China
- Prior art keywords
- polygon
- mirror
- photodetector
- polygon mirror
- measurement mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004364 calculation method Methods 0.000 claims abstract description 4
- 238000005259 measurement Methods 0.000 claims description 27
- 238000001514 detection method Methods 0.000 claims description 8
- 230000036544 posture Effects 0.000 description 21
- 238000006073 displacement reaction Methods 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
- B41J2/47—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light
- B41J2/471—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light using dot sequential main scanning by means of a light deflector, e.g. a rotating polygonal mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/121—Mechanical drive devices for polygonal mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/127—Adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00007—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for relating to particular apparatus or devices
- H04N1/00018—Scanning arrangements
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/00034—Measuring, i.e. determining a quantity by comparison with a standard
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/0005—Methods therefor in service, i.e. during normal operation
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/00063—Methods therefor using at least a part of the apparatus itself, e.g. self-testing
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/00002—Diagnosis, testing or measuring; Detecting, analysing or monitoring not otherwise provided for
- H04N1/00026—Methods therefor
- H04N1/00068—Calculating or estimating
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
- H04N2201/04—Scanning arrangements
- H04N2201/047—Detection, control or error compensation of scanning velocity or position
- H04N2201/04701—Detection of scanning velocity or position
- H04N2201/0471—Detection of scanning velocity or position using dedicated detectors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
- H04N2201/04—Scanning arrangements
- H04N2201/047—Detection, control or error compensation of scanning velocity or position
- H04N2201/04701—Detection of scanning velocity or position
- H04N2201/04739—Detection of scanning velocity or position by detecting the scanning head or scanning carriage
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- General Health & Medical Sciences (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
Description
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004318983A JP4661167B2 (ja) | 2004-11-02 | 2004-11-02 | ポリゴンミラーモータの測定装置 |
JP2004318983 | 2004-11-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1770604A true CN1770604A (zh) | 2006-05-10 |
CN100462669C CN100462669C (zh) | 2009-02-18 |
Family
ID=36261409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101129379A Active CN100462669C (zh) | 2004-11-02 | 2005-10-14 | 多角镜马达的测量装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7460249B2 (zh) |
JP (1) | JP4661167B2 (zh) |
CN (1) | CN100462669C (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104197847A (zh) * | 2014-09-19 | 2014-12-10 | 孙维 | 一种传感器 |
CN108871732A (zh) * | 2017-05-12 | 2018-11-23 | 翊鼎光电股份有限公司 | 光学检测设备 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006084331A (ja) * | 2004-09-16 | 2006-03-30 | Matsushita Electric Ind Co Ltd | ポリゴンミラーモータの偏心測定装置 |
KR101018207B1 (ko) * | 2009-02-06 | 2011-02-28 | 삼성전기주식회사 | 빔 스캐너 및 표면 측정 장치 |
US9052513B2 (en) | 2011-05-06 | 2015-06-09 | Lexmark International, Inc. | Laser scan unit for an imaging device |
KR102197470B1 (ko) * | 2018-11-28 | 2020-12-31 | 세메스 주식회사 | 기판 처리 장치 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60102606U (ja) * | 1983-12-20 | 1985-07-12 | 富士通株式会社 | 光点位置測定装置 |
JPH01232226A (ja) * | 1988-03-11 | 1989-09-18 | Copal Electron Co Ltd | スキャナの動的面出入り測定装置 |
JPH0690111B2 (ja) * | 1989-02-03 | 1994-11-14 | コパル電子株式会社 | 動的面出入り測定装置 |
US5105296A (en) * | 1989-11-20 | 1992-04-14 | Dainippon Screen Mfg. Co., Ltd. | Method and apparatus for detecting beam spot shape |
JPH0735988B2 (ja) * | 1990-09-21 | 1995-04-19 | コパル電子株式会社 | 動的面出入り測定装置 |
JPH05227710A (ja) * | 1991-03-29 | 1993-09-03 | Nippon Densan Corp | モータの偏心測定装置 |
JP4322155B2 (ja) * | 2004-03-24 | 2009-08-26 | 株式会社リコー | 可動物体又は静止物体の形状測定装置及び測定方法 |
JP2006084331A (ja) * | 2004-09-16 | 2006-03-30 | Matsushita Electric Ind Co Ltd | ポリゴンミラーモータの偏心測定装置 |
-
2004
- 2004-11-02 JP JP2004318983A patent/JP4661167B2/ja active Active
-
2005
- 2005-10-14 CN CNB2005101129379A patent/CN100462669C/zh active Active
- 2005-11-01 US US11/262,772 patent/US7460249B2/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104197847A (zh) * | 2014-09-19 | 2014-12-10 | 孙维 | 一种传感器 |
CN108871732A (zh) * | 2017-05-12 | 2018-11-23 | 翊鼎光电股份有限公司 | 光学检测设备 |
Also Published As
Publication number | Publication date |
---|---|
JP2006132955A (ja) | 2006-05-25 |
JP4661167B2 (ja) | 2011-03-30 |
CN100462669C (zh) | 2009-02-18 |
US7460249B2 (en) | 2008-12-02 |
US20060092405A1 (en) | 2006-05-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105627921A (zh) | 一种绝对式编码器的细分采集系统及其测量方法 | |
CN104457805B (zh) | 编码器和使用编码器的装置 | |
CN101691998B (zh) | 二维激光自准直仪 | |
CN101169601B (zh) | 一种调焦调平测量系统 | |
CN1770604A (zh) | 多角镜马达的测量装置 | |
CN100460811C (zh) | 一种提高直线度测量灵敏度的方法与装置 | |
CN101067546A (zh) | 减小外差干涉非线性误差一次谐波分量的方法与装置 | |
CN1308656C (zh) | 测量激光光束平行性的装置 | |
CN100424971C (zh) | 多面镜电机的偏心测量装置 | |
CN1285881C (zh) | 测量参考面旁边通过的部件与参考面间距离的方法及系统 | |
TWI414751B (zh) | 旋轉角度量測系統 | |
CN1740742A (zh) | 光栅式光电自准直仪 | |
US5473436A (en) | Surface shape measurement device with slit plate and single photoelectric converter | |
CN102252652B (zh) | 多光束激光外差二次谐波法测量激光入射角度的方法 | |
CN1110397A (zh) | 使用相位变异的光学测距装置及其方法 | |
CN101201548B (zh) | 调焦调平测量系统及方法 | |
CN102221356B (zh) | 多普勒振镜正弦调制多光束激光外差二次谐波测量激光入射角度的装置及方法 | |
CN112432766A (zh) | 一种激光扫描振镜性能检测方法 | |
CN100501319C (zh) | 采用psd的光电倾角测量装置 | |
EP0243961A2 (en) | Film thickness measuring device | |
Okuyama et al. | Investigation of an optical noncontact gear geometry measurement system: measurement of pitch errors and tooth profiles | |
EP0486050B1 (en) | Method and apparatus for measuring displacement | |
CN2600814Y (zh) | 差动离焦并行全场三维检测装置 | |
JP2674129B2 (ja) | 距離測定装置 | |
RU2082087C1 (ru) | Оптико-электронное устройство измерения положения отсчетного круга угломерного инструмента |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: NMB-MAT MOYOR Free format text: FORMER OWNER: PANASONIC ELECTRIC EQUIPMENT INDUSTRIAL CO.,LTD. Effective date: 20100702 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: OSAKA PREFECTURE GOVERNMENT, JAPAN TO: TOKYO, JAPAN |
|
TR01 | Transfer of patent right |
Effective date of registration: 20100702 Address after: Tokyo, Japan Patentee after: Meiwa Motor Co., Ltd. Address before: Osaka Japan Patentee before: Matsushita Electric Industrial Co., Ltd. |