JP4647215B2 - 製造プロセスのためのコンフィグレーションドキュメントとプロセスコンテキストとの関連付け - Google Patents

製造プロセスのためのコンフィグレーションドキュメントとプロセスコンテキストとの関連付け Download PDF

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Publication number
JP4647215B2
JP4647215B2 JP2003573586A JP2003573586A JP4647215B2 JP 4647215 B2 JP4647215 B2 JP 4647215B2 JP 2003573586 A JP2003573586 A JP 2003573586A JP 2003573586 A JP2003573586 A JP 2003573586A JP 4647215 B2 JP4647215 B2 JP 4647215B2
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context
configuration
association
manufacturing process
document
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Japanese (ja)
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JP2005519461A5 (enExample
JP2005519461A (ja
Inventor
アール． ホッブズ バリー
シ ユロン
シー． ブラウン ラッセル
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Advanced Micro Devices Inc
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Advanced Micro Devices Inc
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41835—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by programme execution
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32043—Program, information flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S707/00—Data processing: database and file management or data structures
    • Y10S707/99941—Database schema or data structure
    • Y10S707/99944—Object-oriented database structure
    • Y10S707/99945—Object-oriented database structure processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S707/00—Data processing: database and file management or data structures
    • Y10S707/99941—Database schema or data structure
    • Y10S707/99948—Application of database or data structure, e.g. distributed, multimedia, or image

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  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Strategic Management (AREA)
  • Economics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Resources & Organizations (AREA)
  • Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Entrepreneurship & Innovation (AREA)
  • General Business, Economics & Management (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Marketing (AREA)
  • Tourism & Hospitality (AREA)
  • Operations Research (AREA)
  • Development Economics (AREA)
  • Educational Administration (AREA)
  • Game Theory and Decision Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
JP2003573586A 2002-02-28 2002-12-18 製造プロセスのためのコンフィグレーションドキュメントとプロセスコンテキストとの関連付け Expired - Fee Related JP4647215B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/085,956 US6826437B2 (en) 2002-02-28 2002-02-28 Association of process context with configuration document for manufacturing process
PCT/US2002/040683 WO2003075202A2 (en) 2002-02-28 2002-12-18 Association of process context with configuration document for manufacturing process

Publications (3)

Publication Number Publication Date
JP2005519461A JP2005519461A (ja) 2005-06-30
JP2005519461A5 JP2005519461A5 (enExample) 2006-02-16
JP4647215B2 true JP4647215B2 (ja) 2011-03-09

Family

ID=27753758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003573586A Expired - Fee Related JP4647215B2 (ja) 2002-02-28 2002-12-18 製造プロセスのためのコンフィグレーションドキュメントとプロセスコンテキストとの関連付け

Country Status (8)

Country Link
US (1) US6826437B2 (enExample)
EP (1) EP1479018A1 (enExample)
JP (1) JP4647215B2 (enExample)
KR (1) KR20040089641A (enExample)
CN (1) CN1623156A (enExample)
AU (1) AU2002361791A1 (enExample)
TW (1) TWI326432B (enExample)
WO (1) WO2003075202A2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030204528A1 (en) * 2002-04-30 2003-10-30 Yeaun-Jyh Su Semiconductor wafer manufacturing execution system with special engineer requirement database
EP1656626A2 (en) * 2003-08-13 2006-05-17 Koninklijke Philips Electronics N.V. Context-of-use independent content systems
US20050268219A1 (en) * 2004-05-28 2005-12-01 Microsoft Corporation Method and system for embedding context information in a document
US9070172B2 (en) * 2007-08-27 2015-06-30 Schlumberger Technology Corporation Method and system for data context service
US8156131B2 (en) * 2007-08-27 2012-04-10 Schlumberger Technology Corporation Quality measure for a data context service
TWI380390B (en) * 2008-04-08 2012-12-21 Inotera Memories Inc Method and system for detecting tool errors to stop a process recipe for a single chamber
US20140324769A1 (en) * 2013-04-25 2014-10-30 Globalfoundries Inc. Document driven methods of managing the content of databases that contain information relating to semiconductor manufacturing operations
CN109972122B (zh) * 2019-03-28 2022-04-19 惠科股份有限公司 一种用于显示面板的物料派送控制方法及系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6000830A (en) * 1997-04-18 1999-12-14 Tokyo Electron Limited System for applying recipe of semiconductor manufacturing apparatus
US6035293A (en) * 1997-10-20 2000-03-07 Advanced Micro Devices, Inc. Validating process data in manufacturing process management
US6334122B1 (en) 1998-12-23 2001-12-25 Advanced Micro Devices, Inc. Method and apparatus for translating variable names to column names for accessing a database
US6397225B1 (en) 1998-12-23 2002-05-28 Advanced Micro Devices, Inc. Messaging system with protocol independent message format
JP3998372B2 (ja) * 1999-06-30 2007-10-24 株式会社東芝 半導体処理工程制御システム、半導体処理工程制御方法、及び、そのための処理を記録した記録媒体
US6415193B1 (en) * 1999-07-08 2002-07-02 Fabcentric, Inc. Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment

Also Published As

Publication number Publication date
WO2003075202A2 (en) 2003-09-12
TW200305090A (en) 2003-10-16
CN1623156A (zh) 2005-06-01
KR20040089641A (ko) 2004-10-21
US6826437B2 (en) 2004-11-30
EP1479018A1 (en) 2004-11-24
TWI326432B (en) 2010-06-21
JP2005519461A (ja) 2005-06-30
AU2002361791A1 (en) 2003-09-16
US20030163213A1 (en) 2003-08-28

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