TWI326432B - Method,apparatus and computer-readable medium for controlling manufacturing process - Google Patents

Method,apparatus and computer-readable medium for controlling manufacturing process Download PDF

Info

Publication number
TWI326432B
TWI326432B TW092104153A TW92104153A TWI326432B TW I326432 B TWI326432 B TW I326432B TW 092104153 A TW092104153 A TW 092104153A TW 92104153 A TW92104153 A TW 92104153A TW I326432 B TWI326432 B TW I326432B
Authority
TW
Taiwan
Prior art keywords
configuration
execution
conditions
condition
execution condition
Prior art date
Application number
TW092104153A
Other languages
English (en)
Chinese (zh)
Other versions
TW200305090A (en
Inventor
R Hobbs Barry
Shi Yurong
C Brown Russel
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of TW200305090A publication Critical patent/TW200305090A/zh
Application granted granted Critical
Publication of TWI326432B publication Critical patent/TWI326432B/zh

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41835—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by programme execution
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32043—Program, information flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S707/00—Data processing: database and file management or data structures
    • Y10S707/99941—Database schema or data structure
    • Y10S707/99944—Object-oriented database structure
    • Y10S707/99945—Object-oriented database structure processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S707/00—Data processing: database and file management or data structures
    • Y10S707/99941—Database schema or data structure
    • Y10S707/99948—Application of database or data structure, e.g. distributed, multimedia, or image

Landscapes

  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Strategic Management (AREA)
  • Economics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Resources & Organizations (AREA)
  • Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Entrepreneurship & Innovation (AREA)
  • General Business, Economics & Management (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Marketing (AREA)
  • Tourism & Hospitality (AREA)
  • Operations Research (AREA)
  • Development Economics (AREA)
  • Educational Administration (AREA)
  • Game Theory and Decision Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
TW092104153A 2002-02-28 2003-02-27 Method,apparatus and computer-readable medium for controlling manufacturing process TWI326432B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/085,956 US6826437B2 (en) 2002-02-28 2002-02-28 Association of process context with configuration document for manufacturing process

Publications (2)

Publication Number Publication Date
TW200305090A TW200305090A (en) 2003-10-16
TWI326432B true TWI326432B (en) 2010-06-21

Family

ID=27753758

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092104153A TWI326432B (en) 2002-02-28 2003-02-27 Method,apparatus and computer-readable medium for controlling manufacturing process

Country Status (8)

Country Link
US (1) US6826437B2 (enExample)
EP (1) EP1479018A1 (enExample)
JP (1) JP4647215B2 (enExample)
KR (1) KR20040089641A (enExample)
CN (1) CN1623156A (enExample)
AU (1) AU2002361791A1 (enExample)
TW (1) TWI326432B (enExample)
WO (1) WO2003075202A2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030204528A1 (en) * 2002-04-30 2003-10-30 Yeaun-Jyh Su Semiconductor wafer manufacturing execution system with special engineer requirement database
EP1656626A2 (en) * 2003-08-13 2006-05-17 Koninklijke Philips Electronics N.V. Context-of-use independent content systems
US20050268219A1 (en) * 2004-05-28 2005-12-01 Microsoft Corporation Method and system for embedding context information in a document
US9070172B2 (en) * 2007-08-27 2015-06-30 Schlumberger Technology Corporation Method and system for data context service
US8156131B2 (en) * 2007-08-27 2012-04-10 Schlumberger Technology Corporation Quality measure for a data context service
TWI380390B (en) * 2008-04-08 2012-12-21 Inotera Memories Inc Method and system for detecting tool errors to stop a process recipe for a single chamber
US20140324769A1 (en) * 2013-04-25 2014-10-30 Globalfoundries Inc. Document driven methods of managing the content of databases that contain information relating to semiconductor manufacturing operations
CN109972122B (zh) * 2019-03-28 2022-04-19 惠科股份有限公司 一种用于显示面板的物料派送控制方法及系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6000830A (en) * 1997-04-18 1999-12-14 Tokyo Electron Limited System for applying recipe of semiconductor manufacturing apparatus
US6035293A (en) * 1997-10-20 2000-03-07 Advanced Micro Devices, Inc. Validating process data in manufacturing process management
US6334122B1 (en) 1998-12-23 2001-12-25 Advanced Micro Devices, Inc. Method and apparatus for translating variable names to column names for accessing a database
US6397225B1 (en) 1998-12-23 2002-05-28 Advanced Micro Devices, Inc. Messaging system with protocol independent message format
JP3998372B2 (ja) * 1999-06-30 2007-10-24 株式会社東芝 半導体処理工程制御システム、半導体処理工程制御方法、及び、そのための処理を記録した記録媒体
US6415193B1 (en) * 1999-07-08 2002-07-02 Fabcentric, Inc. Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment

Also Published As

Publication number Publication date
WO2003075202A2 (en) 2003-09-12
TW200305090A (en) 2003-10-16
CN1623156A (zh) 2005-06-01
KR20040089641A (ko) 2004-10-21
JP4647215B2 (ja) 2011-03-09
US6826437B2 (en) 2004-11-30
EP1479018A1 (en) 2004-11-24
JP2005519461A (ja) 2005-06-30
AU2002361791A1 (en) 2003-09-16
US20030163213A1 (en) 2003-08-28

Similar Documents

Publication Publication Date Title
TWI311161B (en) Formula-based run-to-run control
TWI326432B (en) Method,apparatus and computer-readable medium for controlling manufacturing process
TWI249119B (en) Semiconductor wafer manufacturing execution system with recipe distribution management database
CN101351751B (zh) 半导体器件实验流程和生产流程的综合配置、流程及执行系统
JP2017027116A (ja) プロセス制御装置及びプロセス制御プログラム
CN104008461B (zh) 一种工作流处理方法及系统
CN115048751A (zh) 一种数据驱动的三维装配工艺变型设计方法和系统
CN113269439A (zh) 一种制造产品的工程变更方法、装置及存储介质
JP2001521237A (ja) マシニングプラントの実現可能なコンフィグレーションを求めるための方法
CN111475159A (zh) 一种自动生成程序的方法、装置及存储介质
TW200419411A (en) Method for synchronously handling wafer-in-process and order
CN101620415A (zh) 半导体工艺中光刻机台的控制方法及装置
CN102044015A (zh) Mes环境中生产需求的反向工程
CN113157979B (zh) 一种基于哑模块节点的内核模块关系图构建方法、系统及介质
JP2002236788A (ja) コンピュータ支援設計用プロジェクト進捗管理装置
Pradhan et al. Token transportation in petri net models of workflow patterns
JPH11224278A (ja) マスクパターンチェック方法
JP2000242304A (ja) プロセス制御装置およびプロセス制御方法
Font et al. Addressing metamodel revisions in model-based software product lines
JP3458158B2 (ja) 鋳造計画作成方法および鋳造計画作成装置
US7127698B2 (en) Method for reducing reticle set cost
TWI228229B (en) Method of duplicating future action of wafer batch in a semiconductor process
TW201721533A (zh) 物料管理方法
CN1319003C (zh) 多批晶圆修改属性编号的方法
JP2006285473A (ja) 製造工程管理システム

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees