KR20040089641A - 제조 공정을 위한 구성 문서와 공정 콘텍스트의 조합 - Google Patents

제조 공정을 위한 구성 문서와 공정 콘텍스트의 조합 Download PDF

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Publication number
KR20040089641A
KR20040089641A KR10-2004-7012850A KR20047012850A KR20040089641A KR 20040089641 A KR20040089641 A KR 20040089641A KR 20047012850 A KR20047012850 A KR 20047012850A KR 20040089641 A KR20040089641 A KR 20040089641A
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KR
South Korea
Prior art keywords
context
configuration
document
manufacturing process
combination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR10-2004-7012850A
Other languages
English (en)
Korean (ko)
Inventor
호보스바리알.
시유롱
브라운러셀씨.
Original Assignee
어드밴스드 마이크로 디바이시즈, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 어드밴스드 마이크로 디바이시즈, 인코포레이티드 filed Critical 어드밴스드 마이크로 디바이시즈, 인코포레이티드
Publication of KR20040089641A publication Critical patent/KR20040089641A/ko
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41835—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by programme execution
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32043—Program, information flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S707/00—Data processing: database and file management or data structures
    • Y10S707/99941—Database schema or data structure
    • Y10S707/99944—Object-oriented database structure
    • Y10S707/99945—Object-oriented database structure processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S707/00—Data processing: database and file management or data structures
    • Y10S707/99941—Database schema or data structure
    • Y10S707/99948—Application of database or data structure, e.g. distributed, multimedia, or image

Landscapes

  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Strategic Management (AREA)
  • Economics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Resources & Organizations (AREA)
  • Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Entrepreneurship & Innovation (AREA)
  • General Business, Economics & Management (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Marketing (AREA)
  • Tourism & Hospitality (AREA)
  • Operations Research (AREA)
  • Development Economics (AREA)
  • Educational Administration (AREA)
  • Game Theory and Decision Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
KR10-2004-7012850A 2002-02-28 2002-12-18 제조 공정을 위한 구성 문서와 공정 콘텍스트의 조합 Ceased KR20040089641A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/085,956 2002-02-28
US10/085,956 US6826437B2 (en) 2002-02-28 2002-02-28 Association of process context with configuration document for manufacturing process
PCT/US2002/040683 WO2003075202A2 (en) 2002-02-28 2002-12-18 Association of process context with configuration document for manufacturing process

Publications (1)

Publication Number Publication Date
KR20040089641A true KR20040089641A (ko) 2004-10-21

Family

ID=27753758

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2004-7012850A Ceased KR20040089641A (ko) 2002-02-28 2002-12-18 제조 공정을 위한 구성 문서와 공정 콘텍스트의 조합

Country Status (8)

Country Link
US (1) US6826437B2 (enExample)
EP (1) EP1479018A1 (enExample)
JP (1) JP4647215B2 (enExample)
KR (1) KR20040089641A (enExample)
CN (1) CN1623156A (enExample)
AU (1) AU2002361791A1 (enExample)
TW (1) TWI326432B (enExample)
WO (1) WO2003075202A2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030204528A1 (en) * 2002-04-30 2003-10-30 Yeaun-Jyh Su Semiconductor wafer manufacturing execution system with special engineer requirement database
EP1656626A2 (en) * 2003-08-13 2006-05-17 Koninklijke Philips Electronics N.V. Context-of-use independent content systems
US20050268219A1 (en) * 2004-05-28 2005-12-01 Microsoft Corporation Method and system for embedding context information in a document
US9070172B2 (en) * 2007-08-27 2015-06-30 Schlumberger Technology Corporation Method and system for data context service
US8156131B2 (en) * 2007-08-27 2012-04-10 Schlumberger Technology Corporation Quality measure for a data context service
TWI380390B (en) * 2008-04-08 2012-12-21 Inotera Memories Inc Method and system for detecting tool errors to stop a process recipe for a single chamber
US20140324769A1 (en) * 2013-04-25 2014-10-30 Globalfoundries Inc. Document driven methods of managing the content of databases that contain information relating to semiconductor manufacturing operations
CN109972122B (zh) * 2019-03-28 2022-04-19 惠科股份有限公司 一种用于显示面板的物料派送控制方法及系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6000830A (en) * 1997-04-18 1999-12-14 Tokyo Electron Limited System for applying recipe of semiconductor manufacturing apparatus
US6035293A (en) * 1997-10-20 2000-03-07 Advanced Micro Devices, Inc. Validating process data in manufacturing process management
US6334122B1 (en) 1998-12-23 2001-12-25 Advanced Micro Devices, Inc. Method and apparatus for translating variable names to column names for accessing a database
US6397225B1 (en) 1998-12-23 2002-05-28 Advanced Micro Devices, Inc. Messaging system with protocol independent message format
JP3998372B2 (ja) * 1999-06-30 2007-10-24 株式会社東芝 半導体処理工程制御システム、半導体処理工程制御方法、及び、そのための処理を記録した記録媒体
US6415193B1 (en) * 1999-07-08 2002-07-02 Fabcentric, Inc. Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment

Also Published As

Publication number Publication date
WO2003075202A2 (en) 2003-09-12
TW200305090A (en) 2003-10-16
CN1623156A (zh) 2005-06-01
JP4647215B2 (ja) 2011-03-09
US6826437B2 (en) 2004-11-30
EP1479018A1 (en) 2004-11-24
TWI326432B (en) 2010-06-21
JP2005519461A (ja) 2005-06-30
AU2002361791A1 (en) 2003-09-16
US20030163213A1 (en) 2003-08-28

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