JP2005519461A5 - - Google Patents

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Publication number
JP2005519461A5
JP2005519461A5 JP2003573586A JP2003573586A JP2005519461A5 JP 2005519461 A5 JP2005519461 A5 JP 2005519461A5 JP 2003573586 A JP2003573586 A JP 2003573586A JP 2003573586 A JP2003573586 A JP 2003573586A JP 2005519461 A5 JP2005519461 A5 JP 2005519461A5
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JP
Japan
Prior art keywords
context
configuration
association
manufacturing process
document
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003573586A
Other languages
English (en)
Japanese (ja)
Other versions
JP4647215B2 (ja
JP2005519461A (ja
Filing date
Publication date
Priority claimed from US10/085,956 external-priority patent/US6826437B2/en
Application filed filed Critical
Publication of JP2005519461A publication Critical patent/JP2005519461A/ja
Publication of JP2005519461A5 publication Critical patent/JP2005519461A5/ja
Application granted granted Critical
Publication of JP4647215B2 publication Critical patent/JP4647215B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003573586A 2002-02-28 2002-12-18 製造プロセスのためのコンフィグレーションドキュメントとプロセスコンテキストとの関連付け Expired - Fee Related JP4647215B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/085,956 US6826437B2 (en) 2002-02-28 2002-02-28 Association of process context with configuration document for manufacturing process
PCT/US2002/040683 WO2003075202A2 (en) 2002-02-28 2002-12-18 Association of process context with configuration document for manufacturing process

Publications (3)

Publication Number Publication Date
JP2005519461A JP2005519461A (ja) 2005-06-30
JP2005519461A5 true JP2005519461A5 (enExample) 2006-02-16
JP4647215B2 JP4647215B2 (ja) 2011-03-09

Family

ID=27753758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003573586A Expired - Fee Related JP4647215B2 (ja) 2002-02-28 2002-12-18 製造プロセスのためのコンフィグレーションドキュメントとプロセスコンテキストとの関連付け

Country Status (8)

Country Link
US (1) US6826437B2 (enExample)
EP (1) EP1479018A1 (enExample)
JP (1) JP4647215B2 (enExample)
KR (1) KR20040089641A (enExample)
CN (1) CN1623156A (enExample)
AU (1) AU2002361791A1 (enExample)
TW (1) TWI326432B (enExample)
WO (1) WO2003075202A2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030204528A1 (en) * 2002-04-30 2003-10-30 Yeaun-Jyh Su Semiconductor wafer manufacturing execution system with special engineer requirement database
EP1656626A2 (en) * 2003-08-13 2006-05-17 Koninklijke Philips Electronics N.V. Context-of-use independent content systems
US20050268219A1 (en) * 2004-05-28 2005-12-01 Microsoft Corporation Method and system for embedding context information in a document
US9070172B2 (en) * 2007-08-27 2015-06-30 Schlumberger Technology Corporation Method and system for data context service
US8156131B2 (en) * 2007-08-27 2012-04-10 Schlumberger Technology Corporation Quality measure for a data context service
TWI380390B (en) * 2008-04-08 2012-12-21 Inotera Memories Inc Method and system for detecting tool errors to stop a process recipe for a single chamber
US20140324769A1 (en) * 2013-04-25 2014-10-30 Globalfoundries Inc. Document driven methods of managing the content of databases that contain information relating to semiconductor manufacturing operations
CN109972122B (zh) * 2019-03-28 2022-04-19 惠科股份有限公司 一种用于显示面板的物料派送控制方法及系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6000830A (en) * 1997-04-18 1999-12-14 Tokyo Electron Limited System for applying recipe of semiconductor manufacturing apparatus
US6035293A (en) * 1997-10-20 2000-03-07 Advanced Micro Devices, Inc. Validating process data in manufacturing process management
US6334122B1 (en) 1998-12-23 2001-12-25 Advanced Micro Devices, Inc. Method and apparatus for translating variable names to column names for accessing a database
US6397225B1 (en) 1998-12-23 2002-05-28 Advanced Micro Devices, Inc. Messaging system with protocol independent message format
JP3998372B2 (ja) * 1999-06-30 2007-10-24 株式会社東芝 半導体処理工程制御システム、半導体処理工程制御方法、及び、そのための処理を記録した記録媒体
US6415193B1 (en) * 1999-07-08 2002-07-02 Fabcentric, Inc. Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment

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