JP4645831B2 - 液体噴射ヘッド及びその製造方法並びに液体噴射装置 - Google Patents

液体噴射ヘッド及びその製造方法並びに液体噴射装置 Download PDF

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Publication number
JP4645831B2
JP4645831B2 JP2005187280A JP2005187280A JP4645831B2 JP 4645831 B2 JP4645831 B2 JP 4645831B2 JP 2005187280 A JP2005187280 A JP 2005187280A JP 2005187280 A JP2005187280 A JP 2005187280A JP 4645831 B2 JP4645831 B2 JP 4645831B2
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JP
Japan
Prior art keywords
piezoelectric
lower electrode
piezoelectric element
region
piezoelectric elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005187280A
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English (en)
Japanese (ja)
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JP2007001270A (ja
JP2007001270A5 (enExample
Inventor
勝人 島田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2005187280A priority Critical patent/JP4645831B2/ja
Priority to US11/475,129 priority patent/US7641324B2/en
Publication of JP2007001270A publication Critical patent/JP2007001270A/ja
Publication of JP2007001270A5 publication Critical patent/JP2007001270A5/ja
Application granted granted Critical
Publication of JP4645831B2 publication Critical patent/JP4645831B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2005187280A 2005-06-27 2005-06-27 液体噴射ヘッド及びその製造方法並びに液体噴射装置 Expired - Fee Related JP4645831B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005187280A JP4645831B2 (ja) 2005-06-27 2005-06-27 液体噴射ヘッド及びその製造方法並びに液体噴射装置
US11/475,129 US7641324B2 (en) 2005-06-27 2006-06-27 Liquid-jet head, method of manufacturing the same, and liquid-jet apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005187280A JP4645831B2 (ja) 2005-06-27 2005-06-27 液体噴射ヘッド及びその製造方法並びに液体噴射装置

Publications (3)

Publication Number Publication Date
JP2007001270A JP2007001270A (ja) 2007-01-11
JP2007001270A5 JP2007001270A5 (enExample) 2008-06-05
JP4645831B2 true JP4645831B2 (ja) 2011-03-09

Family

ID=37566805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005187280A Expired - Fee Related JP4645831B2 (ja) 2005-06-27 2005-06-27 液体噴射ヘッド及びその製造方法並びに液体噴射装置

Country Status (2)

Country Link
US (1) US7641324B2 (enExample)
JP (1) JP4645831B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101153690B1 (ko) * 2006-02-20 2012-06-18 삼성전기주식회사 잉크젯 헤드의 압전 액츄에이터 및 그 형성 방법
JP2008036890A (ja) * 2006-08-02 2008-02-21 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
US8298430B2 (en) * 2007-10-25 2012-10-30 Tdk Corporation Method of etching magnetoresistive film by using a plurality of metal hard masks
FR2950197A1 (fr) * 2009-09-15 2011-03-18 Commissariat Energie Atomique Membrane piezoelectrique a actionnement optimise et procede de fabrication de la membrane
JP2012016900A (ja) * 2010-07-08 2012-01-26 Seiko Epson Corp 液滴吐出ヘッド及び液滴吐出装置
JP5900294B2 (ja) * 2012-11-12 2016-04-06 ブラザー工業株式会社 液体吐出装置及び圧電アクチュエータ
JP6064688B2 (ja) * 2013-03-08 2017-01-25 株式会社リコー 液滴吐出ヘッド及びその製造方法、液体カートリッジ並びに画像形成装置
JP5856105B2 (ja) * 2013-06-28 2016-02-09 東芝テック株式会社 インクジェットヘッド及びインクジェット記録装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998018632A1 (en) * 1996-10-28 1998-05-07 Seiko Epson Corporation Ink jet recording head
JPH11227196A (ja) * 1998-02-18 1999-08-24 Seiko Epson Corp インクジェット記録ヘッド及びその製造方法
JP3485014B2 (ja) * 1999-02-26 2004-01-13 セイコーエプソン株式会社 インクジェット式記録ヘッド及びインクジェット式記録装置
EP1101615B1 (en) * 1999-11-15 2003-09-10 Seiko Epson Corporation Ink-jet recording head and ink-jet recording apparatus
JP4614068B2 (ja) * 2005-01-24 2011-01-19 セイコーエプソン株式会社 液体噴射ヘッド及びその製造方法並びに液体噴射装置

Also Published As

Publication number Publication date
JP2007001270A (ja) 2007-01-11
US20060290748A1 (en) 2006-12-28
US7641324B2 (en) 2010-01-05

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