JP4636829B2 - 相変化メモリのプログラミング方法および書込みドライバ回路 - Google Patents
相変化メモリのプログラミング方法および書込みドライバ回路 Download PDFInfo
- Publication number
- JP4636829B2 JP4636829B2 JP2004236037A JP2004236037A JP4636829B2 JP 4636829 B2 JP4636829 B2 JP 4636829B2 JP 2004236037 A JP2004236037 A JP 2004236037A JP 2004236037 A JP2004236037 A JP 2004236037A JP 4636829 B2 JP4636829 B2 JP 4636829B2
- Authority
- JP
- Japan
- Prior art keywords
- current
- memory cell
- temperature
- control signal
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0069—Writing or programming circuits or methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0004—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
- G11C7/04—Arrangements for writing information into, or reading information out from, a digital store with means for avoiding disturbances due to temperature effects
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0069—Writing or programming circuits or methods
- G11C2013/0092—Write characterized by the shape, e.g. form, length, amplitude of the write pulse
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2003-0056011A KR100505701B1 (ko) | 2003-08-13 | 2003-08-13 | 상 변화 메모리의 셋(set) 시간을 최소화하는프로그래밍 방법 및 프로그래밍 방법을 구현하는 기입드라이버 회로 |
| US10/845,065 US7082051B2 (en) | 2003-08-13 | 2004-05-14 | Method and driver for programming phase change memory cell |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005063647A JP2005063647A (ja) | 2005-03-10 |
| JP2005063647A5 JP2005063647A5 (https=) | 2007-09-20 |
| JP4636829B2 true JP4636829B2 (ja) | 2011-02-23 |
Family
ID=36815432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004236037A Expired - Fee Related JP4636829B2 (ja) | 2003-08-13 | 2004-08-13 | 相変化メモリのプログラミング方法および書込みドライバ回路 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US7126847B2 (https=) |
| JP (1) | JP4636829B2 (https=) |
| DE (1) | DE102004039977B4 (https=) |
Families Citing this family (54)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6147395A (en) * | 1996-10-02 | 2000-11-14 | Micron Technology, Inc. | Method for fabricating a small area of contact between electrodes |
| US7460389B2 (en) * | 2005-07-29 | 2008-12-02 | International Business Machines Corporation | Write operations for phase-change-material memory |
| US7372725B2 (en) * | 2005-08-15 | 2008-05-13 | Infineon Technologies Ag | Integrated circuit having resistive memory |
| CN101180683B (zh) * | 2005-09-21 | 2010-05-26 | 株式会社瑞萨科技 | 半导体器件 |
| CN101292299B (zh) * | 2005-10-17 | 2013-02-06 | 瑞萨电子株式会社 | 半导体器件 |
| US7635855B2 (en) | 2005-11-15 | 2009-12-22 | Macronix International Co., Ltd. | I-shaped phase change memory cell |
| US7449710B2 (en) | 2005-11-21 | 2008-11-11 | Macronix International Co., Ltd. | Vacuum jacket for phase change memory element |
| KR100871880B1 (ko) * | 2006-05-30 | 2008-12-03 | 삼성전자주식회사 | 상 변화 메모리 장치의 메모리 셀 내의 상 변화 물질의일부를 리셋하기 위한 리셋 전류를 감소시키는 방법 및 상변화 메모리 장치 |
| US7505330B2 (en) * | 2006-08-31 | 2009-03-17 | Micron Technology, Inc. | Phase-change random access memory employing read before write for resistance stabilization |
| TWI323469B (en) * | 2006-12-25 | 2010-04-11 | Nanya Technology Corp | Programming method of phase change memory |
| US7718989B2 (en) | 2006-12-28 | 2010-05-18 | Macronix International Co., Ltd. | Resistor random access memory cell device |
| TWI330846B (en) * | 2007-03-08 | 2010-09-21 | Ind Tech Res Inst | A writing method and system for a phase change memory |
| KR100882119B1 (ko) * | 2007-07-24 | 2009-02-05 | 주식회사 하이닉스반도체 | 상 변화 메모리 장치의 구동 방법 |
| US7729161B2 (en) | 2007-08-02 | 2010-06-01 | Macronix International Co., Ltd. | Phase change memory with dual word lines and source lines and method of operating same |
| US8158965B2 (en) * | 2008-02-05 | 2012-04-17 | Macronix International Co., Ltd. | Heating center PCRAM structure and methods for making |
| US8077505B2 (en) | 2008-05-07 | 2011-12-13 | Macronix International Co., Ltd. | Bipolar switching of phase change device |
| US8134857B2 (en) | 2008-06-27 | 2012-03-13 | Macronix International Co., Ltd. | Methods for high speed reading operation of phase change memory and device employing same |
| US8116115B2 (en) | 2008-11-06 | 2012-02-14 | Micron Technology, Inc. | Multilevel phase change memory operation |
| US8031516B2 (en) * | 2008-12-12 | 2011-10-04 | Stephen Tang | Writing memory cells exhibiting threshold switch behavior |
| US8107283B2 (en) | 2009-01-12 | 2012-01-31 | Macronix International Co., Ltd. | Method for setting PCRAM devices |
| US8030635B2 (en) | 2009-01-13 | 2011-10-04 | Macronix International Co., Ltd. | Polysilicon plug bipolar transistor for phase change memory |
| US8064247B2 (en) | 2009-01-14 | 2011-11-22 | Macronix International Co., Ltd. | Rewritable memory device based on segregation/re-absorption |
| JP4720912B2 (ja) | 2009-01-22 | 2011-07-13 | ソニー株式会社 | 抵抗変化型メモリデバイス |
| US8933536B2 (en) | 2009-01-22 | 2015-01-13 | Macronix International Co., Ltd. | Polysilicon pillar bipolar transistor with self-aligned memory element |
| US8084760B2 (en) | 2009-04-20 | 2011-12-27 | Macronix International Co., Ltd. | Ring-shaped electrode and manufacturing method for same |
| US8173987B2 (en) | 2009-04-27 | 2012-05-08 | Macronix International Co., Ltd. | Integrated circuit 3D phase change memory array and manufacturing method |
| US8097871B2 (en) | 2009-04-30 | 2012-01-17 | Macronix International Co., Ltd. | Low operational current phase change memory structures |
| US7933139B2 (en) | 2009-05-15 | 2011-04-26 | Macronix International Co., Ltd. | One-transistor, one-resistor, one-capacitor phase change memory |
| US7968876B2 (en) | 2009-05-22 | 2011-06-28 | Macronix International Co., Ltd. | Phase change memory cell having vertical channel access transistor |
| US8350316B2 (en) | 2009-05-22 | 2013-01-08 | Macronix International Co., Ltd. | Phase change memory cells having vertical channel access transistor and memory plane |
| US8809829B2 (en) | 2009-06-15 | 2014-08-19 | Macronix International Co., Ltd. | Phase change memory having stabilized microstructure and manufacturing method |
| US8406033B2 (en) | 2009-06-22 | 2013-03-26 | Macronix International Co., Ltd. | Memory device and method for sensing and fixing margin cells |
| US8363463B2 (en) | 2009-06-25 | 2013-01-29 | Macronix International Co., Ltd. | Phase change memory having one or more non-constant doping profiles |
| US8238149B2 (en) | 2009-06-25 | 2012-08-07 | Macronix International Co., Ltd. | Methods and apparatus for reducing defect bits in phase change memory |
| US8110822B2 (en) | 2009-07-15 | 2012-02-07 | Macronix International Co., Ltd. | Thermal protect PCRAM structure and methods for making |
| US8198619B2 (en) | 2009-07-15 | 2012-06-12 | Macronix International Co., Ltd. | Phase change memory cell structure |
| US7894254B2 (en) | 2009-07-15 | 2011-02-22 | Macronix International Co., Ltd. | Refresh circuitry for phase change memory |
| US8064248B2 (en) | 2009-09-17 | 2011-11-22 | Macronix International Co., Ltd. | 2T2R-1T1R mix mode phase change memory array |
| US8178387B2 (en) | 2009-10-23 | 2012-05-15 | Macronix International Co., Ltd. | Methods for reducing recrystallization time for a phase change material |
| US8729521B2 (en) | 2010-05-12 | 2014-05-20 | Macronix International Co., Ltd. | Self aligned fin-type programmable memory cell |
| US8310864B2 (en) | 2010-06-15 | 2012-11-13 | Macronix International Co., Ltd. | Self-aligned bit line under word line memory array |
| US8395935B2 (en) | 2010-10-06 | 2013-03-12 | Macronix International Co., Ltd. | Cross-point self-aligned reduced cell size phase change memory |
| US8497705B2 (en) | 2010-11-09 | 2013-07-30 | Macronix International Co., Ltd. | Phase change device for interconnection of programmable logic device |
| US8467238B2 (en) | 2010-11-15 | 2013-06-18 | Macronix International Co., Ltd. | Dynamic pulse operation for phase change memory |
| JP5645778B2 (ja) * | 2011-08-26 | 2014-12-24 | 株式会社日立製作所 | 情報記憶素子 |
| JP5308497B2 (ja) * | 2011-10-05 | 2013-10-09 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US9336876B1 (en) * | 2013-03-15 | 2016-05-10 | Crossbar, Inc. | Soak time programming for two-terminal memory |
| US9559113B2 (en) | 2014-05-01 | 2017-01-31 | Macronix International Co., Ltd. | SSL/GSL gate oxide in 3D vertical channel NAND |
| US9343149B2 (en) * | 2014-07-10 | 2016-05-17 | Micron Technology, Inc. | Enhancing nucleation in phase-change memory cells |
| US9583187B2 (en) * | 2015-03-28 | 2017-02-28 | Intel Corporation | Multistage set procedure for phase change memory |
| US9672906B2 (en) | 2015-06-19 | 2017-06-06 | Macronix International Co., Ltd. | Phase change memory with inter-granular switching |
| US10354729B1 (en) * | 2017-12-28 | 2019-07-16 | Micron Technology, Inc. | Polarity-conditioned memory cell write operations |
| US11276462B2 (en) * | 2020-06-16 | 2022-03-15 | Intel Corporation | Techniques for a multi-step current profile for a phase change memory |
| US11915751B2 (en) | 2021-09-13 | 2024-02-27 | International Business Machines Corporation | Nonvolatile phase change material logic device |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4225946A (en) * | 1979-01-24 | 1980-09-30 | Harris Corporation | Multilevel erase pulse for amorphous memory devices |
| US6075719A (en) | 1999-06-22 | 2000-06-13 | Energy Conversion Devices, Inc. | Method of programming phase-change memory element |
| US6487113B1 (en) * | 2001-06-29 | 2002-11-26 | Ovonyx, Inc. | Programming a phase-change memory with slow quench time |
| US6570784B2 (en) * | 2001-06-29 | 2003-05-27 | Ovonyx, Inc. | Programming a phase-change material memory |
| JP2003100084A (ja) * | 2001-09-27 | 2003-04-04 | Toshiba Corp | 相変化型不揮発性記憶装置 |
| US6625054B2 (en) * | 2001-12-28 | 2003-09-23 | Intel Corporation | Method and apparatus to program a phase change memory |
| JP4218527B2 (ja) * | 2002-02-01 | 2009-02-04 | 株式会社日立製作所 | 記憶装置 |
| JP3999549B2 (ja) * | 2002-04-01 | 2007-10-31 | 株式会社リコー | 相変化材料素子および半導体メモリ |
| DE60227534D1 (de) | 2002-11-18 | 2008-08-21 | St Microelectronics Srl | Schaltung und Anordnung zur Tempeaturüberwachung von chalcogenische Elementen, insbesondere von Phasenänderungsspeicherelementen |
| KR100498493B1 (ko) * | 2003-04-04 | 2005-07-01 | 삼성전자주식회사 | 저전류 고속 상변화 메모리 및 그 구동 방식 |
| KR100564567B1 (ko) * | 2003-06-03 | 2006-03-29 | 삼성전자주식회사 | 상 변화 메모리의 기입 드라이버 회로 |
| EP1489622B1 (en) * | 2003-06-16 | 2007-08-15 | STMicroelectronics S.r.l. | Writing circuit for a phase change memory device |
| KR100532462B1 (ko) * | 2003-08-22 | 2005-12-01 | 삼성전자주식회사 | 상 변화 메모리 장치의 기입 전류 량을 제어하는프로그래밍 방법 및 프로그래밍 방법을 구현하는 기입드라이버 회로 |
| KR100564602B1 (ko) * | 2003-12-30 | 2006-03-29 | 삼성전자주식회사 | 상 변화 메모리 어레이의 셋 프로그래밍 방법 및 기입드라이버 회로 |
| KR100574975B1 (ko) * | 2004-03-05 | 2006-05-02 | 삼성전자주식회사 | 상 변화 메모리 어레이의 셋 프로그래밍 방법 및 기입드라이버 회로 |
| KR100682895B1 (ko) * | 2004-11-06 | 2007-02-15 | 삼성전자주식회사 | 다양한 저항 상태를 지닌 저항체를 이용한 비휘발성메모리 소자 및 그 작동 방법 |
-
2004
- 2004-08-12 DE DE102004039977A patent/DE102004039977B4/de not_active Expired - Fee Related
- 2004-08-13 JP JP2004236037A patent/JP4636829B2/ja not_active Expired - Fee Related
-
2006
- 2006-04-12 US US11/401,866 patent/US7126847B2/en not_active Expired - Fee Related
- 2006-04-12 US US11/401,861 patent/US7126846B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE102004039977A1 (de) | 2005-03-17 |
| DE102004039977B4 (de) | 2008-09-11 |
| US7126847B2 (en) | 2006-10-24 |
| JP2005063647A (ja) | 2005-03-10 |
| US20060181931A1 (en) | 2006-08-17 |
| US20060181933A1 (en) | 2006-08-17 |
| US7126846B2 (en) | 2006-10-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4636829B2 (ja) | 相変化メモリのプログラミング方法および書込みドライバ回路 | |
| JP4847008B2 (ja) | 相変化メモリアレイのセットプログラミング方法及び書き込みドライバ回路 | |
| KR100505701B1 (ko) | 상 변화 메모리의 셋(set) 시간을 최소화하는프로그래밍 방법 및 프로그래밍 방법을 구현하는 기입드라이버 회로 | |
| JP4767559B2 (ja) | 相変化メモリアレイのセットプログラミング方法及び書き込みドライバ回路 | |
| JP4351121B2 (ja) | 相変化メモリ装置のプログラミング方法及びその書込みドライバ回路 | |
| US7511993B2 (en) | Phase change memory device and related programming method | |
| US7283387B2 (en) | Phase change random access memory device having variable drive voltage circuit | |
| US7436711B2 (en) | Semiconductor memory device | |
| US7457151B2 (en) | Phase change random access memory (PRAM) device having variable drive voltages | |
| EP1617437A1 (en) | Phase change memory device and programming and controlling methods | |
| US7864619B2 (en) | Write driver circuit for phase-change memory, memory including the same, and associated methods | |
| JP2007164964A (ja) | 相変化メモリ装置及びそのプログラム方法 | |
| US8077507B2 (en) | Phase-change memory device | |
| JP2005100617A (ja) | リセット状態での相変化物質の抵抗値の範囲を均一に維持する相変化メモリ装置及びその方法 | |
| US7471553B2 (en) | Phase change memory device and program method thereof | |
| JP2005346900A (ja) | 相変化メモリ装置の駆動回路及びプログラミング方法 | |
| JP2008226427A (ja) | 相変化メモリの書き込み方法とシステム | |
| JP2006318635A (ja) | 相変化メモリ装置の駆動方法及び相変化メモリ装置 | |
| CN1975928B (zh) | 相变随机存取存储器及控制其读取操作的方法 | |
| JP2013097857A (ja) | 半導体メモリ装置、半導体メモリ装置のための分割プログラム制御回路及びプログラム方法 | |
| KR20140029734A (ko) | 반도체 장치 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070801 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070801 |
|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20080207 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20080222 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100414 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100427 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100727 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20101026 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20101122 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131203 Year of fee payment: 3 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| LAPS | Cancellation because of no payment of annual fees |