JP4629896B2 - 圧電体素子及びこれを用いた電気機器 - Google Patents

圧電体素子及びこれを用いた電気機器 Download PDF

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Publication number
JP4629896B2
JP4629896B2 JP2001101286A JP2001101286A JP4629896B2 JP 4629896 B2 JP4629896 B2 JP 4629896B2 JP 2001101286 A JP2001101286 A JP 2001101286A JP 2001101286 A JP2001101286 A JP 2001101286A JP 4629896 B2 JP4629896 B2 JP 4629896B2
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Japan
Prior art keywords
piezoelectric
piezoelectric element
film
plane
lower electrode
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Expired - Fee Related
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JP2001101286A
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English (en)
Japanese (ja)
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JP2002299714A (ja
JP2002299714A5 (enExample
Inventor
浩二 角
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2001101286A priority Critical patent/JP4629896B2/ja
Publication of JP2002299714A publication Critical patent/JP2002299714A/ja
Publication of JP2002299714A5 publication Critical patent/JP2002299714A5/ja
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Publication of JP4629896B2 publication Critical patent/JP4629896B2/ja
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JP2001101286A 2001-03-30 2001-03-30 圧電体素子及びこれを用いた電気機器 Expired - Fee Related JP4629896B2 (ja)

Priority Applications (1)

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JP2001101286A JP4629896B2 (ja) 2001-03-30 2001-03-30 圧電体素子及びこれを用いた電気機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001101286A JP4629896B2 (ja) 2001-03-30 2001-03-30 圧電体素子及びこれを用いた電気機器

Publications (3)

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JP2002299714A JP2002299714A (ja) 2002-10-11
JP2002299714A5 JP2002299714A5 (enExample) 2005-04-28
JP4629896B2 true JP4629896B2 (ja) 2011-02-09

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JP2001101286A Expired - Fee Related JP4629896B2 (ja) 2001-03-30 2001-03-30 圧電体素子及びこれを用いた電気機器

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JP (1) JP4629896B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103339380A (zh) * 2011-10-11 2013-10-02 株式会社村田制作所 流体控制装置、流体控制装置的调节方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4513252B2 (ja) * 2002-10-25 2010-07-28 パナソニック株式会社 圧電体薄膜素子およびそれを用いたアクチュエータ、インクジェットヘッドならびにインクジェット記録装置
JP2005340428A (ja) * 2004-05-26 2005-12-08 Seiko Epson Corp 圧電体素子及びその製造方法
JP5201304B2 (ja) * 2006-03-28 2013-06-05 セイコーエプソン株式会社 アクチュエータ装置の製造方法及び液体噴射ヘッドの製造方法
KR101033077B1 (ko) * 2006-12-09 2011-05-06 가부시키가이샤 무라타 세이사쿠쇼 압전 펌프
WO2008129829A1 (ja) * 2007-03-30 2008-10-30 Daikin Industries, Ltd. 送風ファン
WO2008126377A1 (ja) * 2007-03-30 2008-10-23 Daikin Industries, Ltd. 空気熱交換ユニット及び熱交換モジュール
JP2010241021A (ja) 2009-04-07 2010-10-28 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター
CN105201796A (zh) * 2015-10-29 2015-12-30 宁波大学 一种压电蠕动微泵
JP6904101B2 (ja) 2017-06-26 2021-07-14 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置および圧電デバイス

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3398962B2 (ja) * 1991-05-09 2003-04-21 東陶機器株式会社 強誘電体磁器組成物
JPH08268756A (ja) * 1995-03-30 1996-10-15 Toyota Central Res & Dev Lab Inc 強誘電性セラミックスの製造方法
JPH09321361A (ja) * 1996-05-27 1997-12-12 Tdk Corp 圧電振動部品及びその製造方法
JP3755283B2 (ja) * 1998-02-13 2006-03-15 オムロン株式会社 圧電素子及びその製造方法、圧電素子を用いた振動センサ、圧電アクチュエータ、光スキャナ、歪みセンサ、圧電式振動ジャイロ
JP2000158648A (ja) * 1998-11-27 2000-06-13 Matsushita Electric Ind Co Ltd インクジェット式記録ヘッド

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103339380A (zh) * 2011-10-11 2013-10-02 株式会社村田制作所 流体控制装置、流体控制装置的调节方法
CN103339380B (zh) * 2011-10-11 2015-11-25 株式会社村田制作所 流体控制装置、流体控制装置的调节方法

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JP2002299714A (ja) 2002-10-11

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