JP4607435B2 - 半導体コンデンサ内の強誘電性材料と貴金属電極との試験方法 - Google Patents
半導体コンデンサ内の強誘電性材料と貴金属電極との試験方法 Download PDFInfo
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- JP4607435B2 JP4607435B2 JP2003270274A JP2003270274A JP4607435B2 JP 4607435 B2 JP4607435 B2 JP 4607435B2 JP 2003270274 A JP2003270274 A JP 2003270274A JP 2003270274 A JP2003270274 A JP 2003270274A JP 4607435 B2 JP4607435 B2 JP 4607435B2
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- ferroelectric
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- semiconductor substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Automation & Control Theory (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Semiconductor Memories (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Physical Vapour Deposition (AREA)
Description
56 接着層
58 下部電極
60 強誘電体層
68 X線蛍光発光
Claims (8)
- 第1材料を含まない、屈折率2.0を有する純相アルミニウム窒化物層を接着層として、半導体基板上に置くステップと、
該接着層上に下部電極を置くステップと、
該下部電極上にチタニウムを含む強誘電体層を置くステップと、
該強誘電体層にX線を照射するステップと、
前記強誘電体層の特性を判定するべく前記強誘電体層からのX線蛍光発光を検出するステップと
を含んでなる、強誘電体層の試験方法。 - 前記接着層が、800MPaを上回る引張応力を有するものである請求項1に記載の方法。
- 前記接着層が3nmを下回るRMS粗度を有するものである請求項1に記載の方法。
- 前記接着層を半導体基板上に置くステップが、パルスDC電源による反応性スパッタリングを使用するものである請求項1に記載の方法。
- 前記接着層を半導体基板上に置くステップが、20sccmのアルゴンと、15sccmのアルゴン−水素と、99sccmの窒素とによる反応性スパッタリングを使用するものである請求項1に記載の方法。
- 前記接着層を半導体基板上に置くステップが、400℃のヒーター温度による反応性スパッタリングを使用するものである請求項1に記載の方法。
- 前記接着層を半導体基板上に置くステップが、電力が3000〜5000ワットであって周波数が75〜200kHzであり、アーク放電を伴わない反応性スパッタリングを使用するものである請求項1に記載の方法。
- 前記接着層を半導体基板上に置くステップが、パルス幅が500〜2700nsの反応性スパッタリングを使用するものである請求項1に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/190,402 US6617178B1 (en) | 2002-07-02 | 2002-07-02 | Test system for ferroelectric materials and noble metal electrodes in semiconductor capacitors |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004045411A JP2004045411A (ja) | 2004-02-12 |
JP4607435B2 true JP4607435B2 (ja) | 2011-01-05 |
Family
ID=27788712
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003270274A Expired - Fee Related JP4607435B2 (ja) | 2002-07-02 | 2003-07-02 | 半導体コンデンサ内の強誘電性材料と貴金属電極との試験方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6617178B1 (ja) |
JP (1) | JP4607435B2 (ja) |
KR (1) | KR20040004112A (ja) |
DE (1) | DE10318825A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4601896B2 (ja) * | 2002-10-30 | 2010-12-22 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
JP2006310637A (ja) * | 2005-04-28 | 2006-11-09 | Toshiba Corp | 半導体装置 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08264735A (ja) * | 1995-03-20 | 1996-10-11 | Samsung Electron Co Ltd | 強誘電性キャパシタ |
JPH08316098A (ja) * | 1995-05-23 | 1996-11-29 | Fujitsu Ltd | 誘電体薄膜の製造方法 |
JPH11271188A (ja) * | 1998-03-24 | 1999-10-05 | Rigaku Industrial Co | ボロン薄膜標準試料 |
JP2000515329A (ja) * | 1996-07-25 | 2000-11-14 | シーメンス アクチエンゲゼルシヤフト | 強誘電体層を有する層構造体、および層構造体の製造方法 |
JP2001279438A (ja) * | 2000-02-11 | 2001-10-10 | Lucent Technol Inc | 回転マグネトロンスパッタシステムを用いて圧電膜を製作する方法 |
JP2001313376A (ja) * | 2000-04-24 | 2001-11-09 | Ramtron Corp | プラチナ下部電極および強誘電性キャパシタの製造方法、ならびに強誘電性キャパシタ |
JP2002016229A (ja) * | 2000-06-29 | 2002-01-18 | Rikogaku Shinkokai | 強誘電体素子およびその製造方法 |
JP2002030432A (ja) * | 2000-07-19 | 2002-01-31 | Hitachi Ltd | スパッタリング装置およびスパッタリング方法 |
JP2002164586A (ja) * | 2000-11-24 | 2002-06-07 | Tdk Corp | 電子デバイス用基板及びこれを用いた薄膜圧電体素子、並びに電子デバイス用基板の製造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5483568A (en) * | 1994-11-03 | 1996-01-09 | Kabushiki Kaisha Toshiba | Pad condition and polishing rate monitor using fluorescence |
KR0183868B1 (ko) | 1996-05-25 | 1999-04-15 | 김광호 | 강유전체막 및 그의 형성방법 |
JP3193302B2 (ja) * | 1996-06-26 | 2001-07-30 | ティーディーケイ株式会社 | 膜構造体、電子デバイス、記録媒体および強誘電体薄膜の製造方法 |
US6494566B1 (en) * | 1997-01-31 | 2002-12-17 | Kyocera Corporation | Head member having ultrafine grooves and a method of manufacture thereof |
JP3472087B2 (ja) * | 1997-06-30 | 2003-12-02 | Tdk株式会社 | 膜構造体、電子デバイス、記録媒体および酸化物導電性薄膜の製造方法 |
KR100269306B1 (ko) * | 1997-07-31 | 2000-10-16 | 윤종용 | 저온처리로안정화되는금속산화막으로구성된완충막을구비하는집적회로장치및그제조방법 |
US6328433B1 (en) * | 1998-01-22 | 2001-12-11 | Seiko Epson Corporation | Piezoelectric film element and ink-jet recording head using the same |
US20030021732A1 (en) * | 2001-07-25 | 2003-01-30 | Motorola, Inc. | Apparatus for analyzing target materials and methods for fabricating an apparatus for analyzing target materials |
-
2002
- 2002-07-02 US US10/190,402 patent/US6617178B1/en not_active Expired - Fee Related
-
2003
- 2003-04-24 DE DE10318825A patent/DE10318825A1/de not_active Withdrawn
- 2003-07-01 KR KR1020030044194A patent/KR20040004112A/ko not_active Application Discontinuation
- 2003-07-02 JP JP2003270274A patent/JP4607435B2/ja not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08264735A (ja) * | 1995-03-20 | 1996-10-11 | Samsung Electron Co Ltd | 強誘電性キャパシタ |
JPH08316098A (ja) * | 1995-05-23 | 1996-11-29 | Fujitsu Ltd | 誘電体薄膜の製造方法 |
JP2000515329A (ja) * | 1996-07-25 | 2000-11-14 | シーメンス アクチエンゲゼルシヤフト | 強誘電体層を有する層構造体、および層構造体の製造方法 |
JPH11271188A (ja) * | 1998-03-24 | 1999-10-05 | Rigaku Industrial Co | ボロン薄膜標準試料 |
JP2001279438A (ja) * | 2000-02-11 | 2001-10-10 | Lucent Technol Inc | 回転マグネトロンスパッタシステムを用いて圧電膜を製作する方法 |
JP2001313376A (ja) * | 2000-04-24 | 2001-11-09 | Ramtron Corp | プラチナ下部電極および強誘電性キャパシタの製造方法、ならびに強誘電性キャパシタ |
JP2002016229A (ja) * | 2000-06-29 | 2002-01-18 | Rikogaku Shinkokai | 強誘電体素子およびその製造方法 |
JP2002030432A (ja) * | 2000-07-19 | 2002-01-31 | Hitachi Ltd | スパッタリング装置およびスパッタリング方法 |
JP2002164586A (ja) * | 2000-11-24 | 2002-06-07 | Tdk Corp | 電子デバイス用基板及びこれを用いた薄膜圧電体素子、並びに電子デバイス用基板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US6617178B1 (en) | 2003-09-09 |
DE10318825A1 (de) | 2004-01-29 |
KR20040004112A (ko) | 2004-01-13 |
JP2004045411A (ja) | 2004-02-12 |
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