JP4582820B1 - Substrate replacement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate replacement device capable of easily and accurately replacing a processed substrate and an unprocessed substrate on a tray.
A substrate holder 213 for holding and transporting a substrate is provided. The substrate holder 213 jets a compressed gas onto the upper surface of the substrate to hold the substrate in a non-contact manner according to the Bernoulli principle. Part 310, contact holding unit 320 that contacts the upper surface of the substrate and sucks the substrate, non-contact holding unit 310 and support body 330 that supports contact holding unit 320, and non-contact holding unit 310 or contact holding unit 320. One of them is provided with holding unit driving means 340 that moves the non-contact holding unit 310 up and down relatively with respect to the contact holding unit 320 so that the substrate can be held.
[Selection] Figure 4

Description

  The present invention relates to a substrate replacement apparatus that replaces a processed substrate with an unprocessed substrate, and more particularly, a substrate suitable for replacing a processed substrate unloaded from the processing apparatus with an unprocessed substrate and then throwing it back into the processing apparatus. The present invention relates to a replacement device.

  In order to perform a film formation process or a heat treatment on a semiconductor substrate such as a solar cell substrate, the substrate is mounted on a tray and placed in a CVD apparatus or a curing furnace, and the tray is unloaded after the process. Replacing has been done conventionally. As an apparatus that replaces a processed substrate with an unprocessed substrate, for example, Patent Document 1 discloses a substrate transfer robot that automatically transfers a substrate and a tray. This substrate transfer robot has a support mechanism for supporting the tray on the upper surface side, and a substrate holding hand having a Bernoulli chuck mechanism for holding the substrate to be processed on the lower surface side. By holding, it can be easily transported even if the substrate after processing is at a high temperature.

JP 2006-261377 A

  However, since the substrate held by the Bernoulli chuck mechanism is unavoidably moved in the horizontal direction during conveyance, it is difficult to mount the substrate at an accurate position on the tray. Therefore, when a large number of unprocessed substrates are mounted on the tray, there is a possibility that the substrates may protrude from the tray or the substrates may overlap with each other, and there is a problem that film formation processing or heat treatment cannot be performed reliably. It was.

  Therefore, an object of the present invention is to provide a substrate replacement device that can easily and accurately replace a processed substrate and an unprocessed substrate on a tray.

  The object of the present invention is a substrate replacement apparatus that transfers a processed substrate on a tray to a carry-out position and also transfers an unprocessed substrate in a carry-in position onto the tray, thereby replacing the substrate. A substrate holding body that holds and conveys the substrate, the substrate holding body ejecting a compressed gas onto the upper surface of the substrate and holding the substrate in a non-contact manner according to Bernoulli's principle; and a substrate A contact holding unit that contacts the upper surface of the substrate and adsorbs the substrate; a support that supports the non-contact holding unit and the contact holding unit; and the substrate can be held by either the non-contact holding unit or the contact holding unit. And a holding part driving means for moving the non-contact holding part relatively up and down with respect to the contact holding part.

  According to the substrate replacement apparatus of the present invention, it is possible to easily and accurately replace a processed substrate and an unprocessed substrate on a tray.

It is a schematic plan view of a raising / lowering conveyance apparatus provided with the board | substrate replacement apparatus which concerns on one Embodiment of this invention. It is AA sectional drawing of the said raising / lowering conveying apparatus. It is a partial enlarged view of the said raising / lowering conveying apparatus. It is a principal part side view of the said board | substrate replacement apparatus. It is a principal part bottom view of the said board | substrate replacement apparatus. It is a schematic plan view for demonstrating the action | operation of the said board | substrate replacement apparatus.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a schematic plan view of an elevating / conveying apparatus including a substrate replacing apparatus according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line AA in FIG.

  As shown in FIG. 1 and FIG. 2, the elevating / conveying apparatus 1 is disposed so as to face the front surface 2 a of the film forming apparatus 2 such as a CVD apparatus, and is at different height positions on the front surface 2 a of the film forming apparatus 2. The upper support body 10 and the lower support body 110 are provided at substantially the same height as the formed charging section 2b and discharging section 2c. A carry-in conveyor 70 and a carry-out conveyor 72 are arranged on the side opposite to the film forming apparatus 2 with the lifting / lowering conveyance apparatus 1 interposed therebetween. The lifting / lowering conveyance apparatus 1 of this embodiment includes a substrate replacement device 200 that replaces a substrate between the tray 4 made of a carbon plate or the like and the carry-in conveyor 70 or the carry-out conveyor 72.

  The upper support 10 includes a pair of support units 11 and 11 that are erected so as to support both sides of the tray 4 in the transport direction. Each support unit 11 includes a plurality of support rollers 12 that support the lower surface of the tray 4, and the support rollers 12 support shafts so that the tray 4 can be horizontally conveyed toward the input unit 2 b of the film forming apparatus 2. 13 is rotatably supported. A concave groove 12a is formed along the circumferential direction on the surface of the support roller 12 (see FIG. 3), and the concave groove 12a is engaged with a guide rib (not shown) protruding from the lower surface of the tray 4. The tray 4 can be transported in the direction (right direction in FIG. 1) in which the tray 4 is loaded into the loading unit 2b of the film forming apparatus 2.

  The lower support 110 is configured similarly to the upper support 10 and includes a pair of support units 111 and 111 so as to support both sides of the tray 4 in the transport direction. Each support unit 111 includes a plurality of support rollers 112 that support the lower surface of the tray 4. The lower support member 110 guides the tray 4 discharged from the discharge unit 2c of the film forming apparatus 2 in the direction opposite to the transport direction of the upper support member 10.

  FIGS. 3A and 3B are enlarged views of main parts of the support units 11 and 111 of the upper support body 10 and the lower support body 110 as viewed from the film forming apparatus 2 side. The support roller 12 is supported by a support shaft 13 that extends in a horizontal orthogonal direction with respect to the conveyance direction of the tray 4 (direction passing through the drawing). The support shaft 13 extends through a side wall 14 and a holding plate 16 attached to the side wall 14 via a bracket 15, and an engaging portion 17 including a pair of sandwiching pieces 17 a and 17 b is provided at the tip. Is provided. Heat-resistant bushings 18 and 19 are interposed between the support shaft 13 and the side wall 14 and the holding plate 16, respectively. The heat-resistant bushings 18 and 19 support the support shaft 13 so that the support shaft 13 can rotate and advance and retract in the axial direction. To do.

  The support shaft 13 is provided with a driven gear 20, and this driven gear 20 is arranged so as to mesh with a drive gear 22 provided on a rotary shaft 21 that is rotatably supported between the side wall 14 and the holding plate 16. ing. The drive gear 22 is formed in a cylindrical shape that is long in the axial direction, and the meshing state is maintained even if the position of the driven gear 20 changes as the support shaft 13 advances and retreats. The rotating shaft 21 is provided with a sprocket 23. The sprocket 23 is provided corresponding to each of the plurality of support rollers 12 and is rotationally driven via a chain 24 by operation of a drive motor (not shown).

  Further, the upper support body 10 includes a plurality of rotating arms 26 that are rotatably disposed along a vertical plane by a rotating shaft 25. Each rotation arm 26 includes a cam follower 27 that is arranged to freely roll at the tip, and the cam follower 27 is interposed between the sandwiching pieces 17 a and 17 b of the corresponding engagement portion 17, thereby rotating the rotation arm. The support shaft 13 advances and retreats by the rotation of 26. The rotating shaft 25 is provided with an operation plate 28 that protrudes in a direction different from that of the rotating arm 26. A long hole 28a is formed in the operation plate 28, and a protruding piece 29b provided at the tip of the rod 29a of an actuator 29 such as an air cylinder or a hydraulic cylinder engages with the long hole 28a. The revolving arm 26 is rotated through the operating plate 28 and the rotating shaft 25 by the advance and retreat. The actuator 29 is configured to be rotatable with respect to the bracket 30. The pivot shaft 25, the pivot arm 26, the cam follower 27, the operation plate 28, and the actuator 29 function as a retracting unit for retracting the support roller 12.

  The support unit 111 of the lower support 110 also has the same configuration as the support unit 11 of the upper support 10. That is, the support roller 112 is supported by a support shaft 113 that extends in a horizontal orthogonal direction with respect to the transport direction of the tray 4 (direction passing through the drawing). The support shaft 113 extends through a side wall 114 and a holding plate 116 attached to the side wall 114 via a bracket 115, and an engaging portion 117 including a pair of sandwiching pieces 117a and 117b is provided at the tip. Is provided. Heat-resistant bushings 118 and 119 are interposed between the support shaft 113, the side wall 114, and the holding plate 116, respectively. The heat-resistant bushings 118 and 119 support the support shaft 113 so that the support shaft 113 can rotate and advance and retreat in the axial direction. To do.

  The support shaft 113 is provided with a driven gear 120, and this driven gear 120 is disposed so as to mesh with a drive gear 122 provided on a rotary shaft 121 that is rotatably supported between the side wall 114 and the holding plate 116. ing. The drive gear 122 is formed in a cylindrical shape that is long in the axial direction, and the meshing state is maintained even if the position of the driven gear 120 changes due to the advancement and retraction of the support shaft 113. In addition, a sprocket 123 is provided on the rotating shaft 121. The sprocket 123 is provided corresponding to each of the plurality of support rollers 112 and is rotationally driven through a chain 124 by the operation of a drive motor (not shown).

  In addition, the lower support 110 includes a plurality of rotating arms 126 that are rotatably disposed along a vertical plane by a rotating shaft 125. Each rotation arm 126 includes a cam follower 127 that is rotatably arranged at the tip, and the cam follower 127 is interposed between the sandwiching pieces 117a and 117b of the corresponding engagement portion 117, whereby the rotation arm is provided. The support shaft 113 moves forward and backward by the rotation of 126. The rotating shaft 125 is provided with an operating plate 128 that protrudes in a direction different from that of the rotating arm 126. A long hole 128a is formed in the operation plate 128, and a protruding piece 129b provided at the tip of the rod 129a of an actuator such as an air cylinder or a hydraulic cylinder engages with the long hole 128a. As a result, the rotating arm 126 rotates via the operating plate 128 and the rotating shaft 125. In FIG. 3, the cylinder and the bracket that supports the cylinder are not shown. The pivot shaft 125, the pivot arm 126, the cam follower 127, the operation plate 128, and the actuator also function as a retracting unit for retracting the support roller 112.

  The lifting / lowering conveyance device 1 includes a lifting / lowering device 50 that moves the tray 4 up and down. As shown in FIG. 2, the lifting device 50 includes a lifting table 52 supported on the upper end of a ball screw 51 protruding from the main body 50 a, and the upper surface of the lifting table 52 is heat resistant to contact the lower surface of the tray 4. A plurality of sex jacks 53 are arranged in a matrix. The elevating table 52 moves up and down along the guide member 54 when the screw shaft of the ball screw 51 is rotated by driving of a drive motor (not shown), and the tray 4 supported by the jack 53 is placed on the upper support. 10 and the lower support 110 can be raised and lowered. The raising / lowering mechanism of the raising / lowering table 52 is not limited to the thing of this embodiment, The other structure which can be stopped in desired height positions, such as a raising / lowering cylinder, may be sufficient.

  In addition, the substrate exchange device 200 included in the lifting / lowering conveyance device 1 includes a conveyance body 210 that conveys a substrate, a guide rail 220 that supports the conveyance body 210 above the upper support 10, and a conveyance body 210 along the guide rail 220. And a horizontal driving device 230 for driving in the horizontal direction.

  The transport body 210 includes a block-shaped base body 211 extending in a direction perpendicular to the moving direction, an elevating body 212 suspended and supported by the base body 211, and a plurality of substrate holders 213 attached to the elevating body 212. I have. The elevating body 212 is supported by a vertical drive device 214 formed of an air cylinder attached to the base body 211 so as to be movable up and down. Auxiliary guides 215 and 215 that penetrate the base body 211 are fixed to the upper part of the elevating body 212. ing. The vertical drive device 214 can use a ball screw or an electric motor in addition to the fluid pressure cylinder. When the weight of the lifting body 212 is large, a balance cylinder or the like for reducing the load of the vertical drive device 214 is used. It may be added.

  A plurality (four in this embodiment) of substrate holders 213 are arranged in a line along the longitudinal direction of the base body 211 as shown in FIG. The arrangement of the substrate holders 213 is not particularly limited, and may be a plurality of rows or a single row. As shown in a side view in FIG. 4A, the substrate holder 213 includes a non-contact holding unit 310 that holds the substrate in a non-contact manner, a contact holding unit 320 that contacts the upper surface of the substrate and sucks the substrate, A non-contact holding unit 310 and a support 330 that supports the contact holding unit 320.

  The non-contact holding unit 310 can use a Bernoulli chuck configured to eject compressed air along the upper surface of the substrate and suck the substrate with a negative pressure generated by the Bernoulli principle. Around the non-contact holding part 310, as shown in FIG. 4B, a gap formed between the lower edge part 310a and the substrate 6b is maintained, and a plurality of substrates 6b can be securely held in a non-contact manner. A hitting portion 311 is provided. The contact portion 311 is preferably made of a heat resistant material in order to contact the high-temperature processed substrate 6b. The contact portion 311 is for urging non-contact holding of the substrate 6b by the non-contact holding portion 310. For example, instead of coming into contact with the upper surface of the substrate 6b as in the present embodiment, the contact portion 311 contacts the outer peripheral edge of the substrate 6b. It may be a configuration.

  The contact holding unit 320 includes a plurality of vacuum suction tools 321 arranged around the non-contact holding unit 310, and a suction part 321a including a suction cup is provided at the lower end of each vacuum suction tool 321. As shown in FIG. 4A, the contact holding unit 320 can hold and hold the substrate 6a by vacuum suction in a state where the suction unit 321a is in contact with the upper surface of the substrate 6a.

  The arrangement of the non-contact holding unit 310 and the contact holding unit 320 in the support 330 is not particularly limited, but as shown in a bottom view in FIG. 5, the center position of the non-contact holding unit 310 (in this embodiment, compression) The air injection holes 312 are formed so that the positions of the air injection holes 312 substantially coincide with the center positions of the polygons (rectangles in FIG. 5) connecting the centers of the suction portions 321a of the vacuum suction tools 321; A configuration in which the central part of the substrates 6a and 6b can be held by the contact holding part 320 is preferable. Accordingly, even when the non-contact holding unit 310 or the contact holding unit 320 is selectively used, the substrate holder 213 can be positioned and conveyed easily and accurately. In addition, each adsorption | suction part 321a of the contact holding | maintenance part 320 can also be connected to a single vacuum source.

  As shown in FIGS. 4A and 4B, the non-contact holding unit 310 is supported by a holding unit driving device 340 including an air cylinder fixed to the support 330 so as to be movable up and down. The holding unit driving device 340 includes a movable piece 341 that is guided up and down by a linear guide (not shown) provided in the main body 340 a, and the non-contact holding unit 310 is attached to the movable piece 341. As shown in FIGS. 4A and 4B, the holding unit driving device 340 moves the non-contact holding unit 310 up and down relative to the contact holding unit 320 to hold the holding unit that holds the substrate in a non-contact manner. Either the part 310 or the contact holding part 320 can be selected. The holding unit driving device 340 may be anything that supports the contact holding unit 320 so as to be movable up and down, and may be other driving means such as a ball screw and an electric motor in addition to the fluid pressure cylinder. Further, the holding unit driving device 340 is configured to move the contact holding unit 320 up and down instead of the non-contact holding unit 310, or to move both the non-contact holding unit 310 and the contact holding unit 320 individually up and down. Any configuration that causes a relative vertical movement between the contact holding unit 310 and the contact holding unit 320 is not limited to that of the present embodiment.

  Piping (not shown) for driving the non-contact holding unit 310, the contact holding unit 320, and the holding unit driving device 340 is compressed through a valve or a flow meter provided in a control box 211 a fixed to the base body 211. It is connected to an air source or a vacuum source, and operations of the non-contact holding unit 310, the contact holding unit 320, and the holding unit driving device 340 can be controlled by the control box 211a.

  The guide rail 220 extends in the direction in which the tray 4 is inserted into the film forming apparatus 2 (left and right direction in FIG. 1), and is supported by a frame (not shown). The guide rail 220 is engaged with an engaging portion 211 b provided at a lower portion of the base body 211 constituting the transport body 210.

  The horizontal driving device 230 includes a pair of linear motors 231 and 232. The linear motors 231 and 232 include stators 231a and 232a in which permanent magnets having different polarities are alternately arranged on strips, and movers 231b and 232b each having a coil and a core. The stators 231a and 232a are It is supported by a frame (not shown) so as to extend in parallel with the guide rail 220, and the movers 231b and 232b are supported by the base 211 with a slight gap between the stators 231a and 232a. The horizontal driving device 230 can move the transport body 210 along the guide rail 220 by controlling the energization to the movers 231b and 232b. In addition to the linear motor, the horizontal driving device 230 can also use various driving devices that can position and convey the conveyance body 210 such as a ball screw and a driving belt. A detection device such as a CCD camera for detecting the position of the substrate may be provided in order to position and convey the carrier 210 with high accuracy.

  According to the elevating and conveying apparatus 1 having the above configuration, the support rollers 12 and 112 included in the upper support 10 and the lower support 110 protrude inward from the side wall 14 as shown in FIG. As shown in FIG. 3B, by rotating the rods 29a and 129a of the hydraulic cylinder from the position shown in FIG. 3B, the rotation arms 26 and 126 are rotated in the direction indicated by the arrow B. Move in the C direction. Thereby, when raising / lowering the tray 4 with the raising / lowering apparatus 50, since the support rollers 12 and 112 can be retracted and interference with the tray 4 can be prevented, the raising / lowering conveyance of the tray 4 can be performed rapidly.

  For example, in FIG. 2, when the support roller 12 of the upper support 10 is protruded, the tray 4 is supported by the support roller 12 as shown by the broken line in FIG. The tray 4 can be loaded into the film forming apparatus by driving the support roller 12 even when it is lowered to a position substantially the same as 110 (position indicated by a solid line in FIG. 2), and the tray discharged from the film forming apparatus 4 is acceptable. Accordingly, the tray 4 can be loaded and received simultaneously with the film forming apparatus, and the tray 4 can be transported quickly and efficiently. In particular, when the length of the tray 4 in the transport direction is long, the time required for the entire tray 4 to be put into the film forming apparatus cannot be ignored. The effect compared with the configuration becomes more remarkable.

  The tray 4 received by the lower support 110 is in a state where the lifting table 52 is substantially at the same height as the upper support 10 in a state where the support roller 12 of the upper support 10 is retracted (a state indicated by a solid line in FIG. 2). By raising the position to (a position indicated by a broken line in FIG. 2), the substrate on the tray 4 can be replaced while the tray 4 is supported by the lift table 52. Since the entire lower surface of the tray 4 is supported by the heat-resistant jack 53, it is possible to prevent the tray 4 from being bent during the replacement work, and to reliably take out the substrate after film formation and mount a new substrate. Can do. After the replacement work is completed, the above procedure can be repeated by projecting the support roller 12 of the upper support 10 and lowering the lifting table 52.

  In the present embodiment, not only the support roller 12 of the upper support 10 but also the support roller 112 of the lower support 110 are configured to be retractable. In order to retract the support roller 112 of the lower support 110, for example, the tray 4 is paid out due to occurrence of a defect or trouble, so that the tray 4 is moved to a payout position below the receiving position from the film forming apparatus 2. This can be done when lowering.

  The substrate replacement device 200 replaces the substrate after film formation mounted on the tray 4 with an unprocessed substrate for each row. This procedure will be described based on a schematic plan view shown in FIG.

  In the elevating and conveying apparatus 1, the tray 4 received from the film forming apparatus 2 is raised by the elevating apparatus 50, so that the substrate 6 b after film formation is placed on the tray 4 as shown in FIG. They are arranged in a matrix so as to form a row in the direction perpendicular to the transport direction to the film forming apparatus 2. On the other hand, the carry-in conveyor 70 and the carry-out conveyor 72 are installed so as to carry the substrate in the same direction as the longitudinal direction of the carrier 210 (the row direction of the substrate holders 213). The substrates 6a are arranged in a row. As shown in FIG. 4B, each substrate holder 213 is maintained in a state where the non-contact holding part 310 is lowered relative to the contact holding part 320 by the operation of the holding part driving device 340. The substrate can be held by the contact holding unit 310. Each substrate holder 213 is transported to a position immediately above the substrate 6b after film formation by the operation of the horizontal driving device 230 and the vertical driving device 214 while ejecting air from the non-contact holding unit 310, whereby the substrate 6b. Is held by the negative pressure generated between the non-contact holding portion 310 and the non-contact holding portion 310.

  Next, each substrate holder 213 is moved to the carry-out position P of the carry-out conveyor 72 shown in FIG. 6B by the operation of the horizontal drive device 230 and the vertical drive device 214. Since the substrate 6b after film formation is held in a non-contact manner by the non-contact holding unit 310, there may be a slight positional shift or rotation in the horizontal direction during transportation. However, the position of the substrate 6b on the carry-out conveyor 72 or Since the tolerance for the deviation of the orientation (posture) is high, the substrate 6 b can be reliably mounted on the carry-out conveyor 72 by stopping the air injection of the non-contact holding unit 310.

  Next, each substrate holder 213 is moved to the carry-in position Q of the carry-in conveyor 70 shown in FIG. 6C by the operation of the horizontal drive device 230 and the vertical drive device 214. At the same time, each substrate holder 213 raises the non-contact holding portion 310 relative to the contact holding portion 320 by the operation of the holding portion driving device 340, as shown in FIG. The substrate can be held by the contact holding unit 320. Each of the substrate holders 213 is transported to a position immediately above the unprocessed substrate 6a by the operation of the horizontal driving device 230 and the vertical driving device 214 while sucking air by the contact holding unit 320, whereby each suction unit 321a. Comes into contact with the upper surface of the substrate 6a, and the substrate 6a is attracted to and held in contact with the contact holding portion 320. Since the substrate 6a with which each adsorption part 321a comes into contact is an untreated room temperature substrate, there is no risk of thermal degradation in each adsorption part 321a, and the adsorption performance can be maintained satisfactorily for a long time.

  Each of the substrate holders 213 is operated by the horizontal driving device 230 and the vertical driving device 214, as shown in FIG. 6D, in the empty space on the tray 4 by the unloading of the substrate 6b after the previous film formation. Move directly above. Since each substrate holder 213 holds the unprocessed substrate 6a in a contact state, there is no possibility of a change in the position or orientation of the substrate being transferred. For this reason, by stopping the air suction of the contact holding unit 320, the unprocessed substrate 6a is not mounted on the tray 4 and does not overlap with the other substrates 6a and 6b, and does not protrude from the tray 4, and is accurately mounted in an empty space. can do.

  Thereafter, as shown in FIG. 6E, each substrate holder 213 moves to the second row of the substrate 6 b after film formation on the tray 4 and is non-contact holding portion with respect to the contact holding portion 320. 310 is relatively lowered, the substrate 6b after film formation is held in a non-contact manner by the non-contact holding unit 310, and the above procedure is repeated. In this way, all the deposited substrates 6b on the tray 4 can be replaced with the untreated substrate 6a before the deposition.

  As described above, according to the substrate replacement device 200 of the present embodiment, the non-contact holding unit includes the holding unit driving device 340 that moves the non-contact holding unit 310 up and down relatively with respect to the contact holding unit 320. The substrate can be held by selecting either 310 or the contact holding unit 320. For this reason, the non-contact holding part 310 is used for holding the substrate 6b after the film formation, so that the substrate 6 is reliably transferred to the carry-out position while cooling the substrate 6 with the blown air without causing a problem of heat resistance due to the contact hold. it can. On the other hand, the substrate 6a can be mounted at an accurate position on the tray 4 by using the contact holding unit 320 for holding the substrate 6a before film formation. Therefore, it is possible to easily and accurately replace the substrate 6b on the tray 4 and the unprocessed substrate 6a. In addition, since the maximum amount of substrates 6a that can be mounted on the tray 4 can be mounted, the film forming efficiency of the film forming apparatus 2 can be increased.

  As mentioned above, although one Embodiment of this invention was explained in full detail, the specific aspect of this invention is not limited to the said embodiment. For example, in this embodiment, the elevating and conveying apparatus is used for loading and receiving with the film forming apparatus, but the elevating and conveying apparatus of the present invention is not limited to such an application, for example, The present invention can be applied to various processing apparatuses having different inlet and outlet height positions, such as a curing furnace and a drying furnace. The substrate replacement apparatus of the present embodiment is particularly suitable for replacing a processed high-temperature substrate with an unprocessed substrate, but replacing a processed substrate that is difficult to maintain contact, such as application of a liquid agent, with an unprocessed substrate. The present invention can also be applied to various uses thrown into the processing apparatus.

DESCRIPTION OF SYMBOLS 1 Elevating and conveying apparatus 4 Tray 200 Substrate changing apparatus 210 Conveying body 211 Base body 212 Elevating body 213 Substrate holding body 214 Vertical driving apparatus 220 Guide rail 230 Horizontal driving apparatus 310 Non-contact holding section 320 Contact holding section 330 Support body 340 Holding section driving means

Claims (3)

A substrate replacement device that replaces a substrate by transporting a processed substrate on a tray to an unloading position and an unprocessed substrate at a loading position on the tray,
It has a substrate holder that holds and transports the substrate,
The substrate holder is
A non-contact holding unit that jets compressed gas to the upper surface of the substrate and holds the substrate in a non-contact manner according to the Bernoulli principle;
A contact holding part that contacts the upper surface of the substrate and sucks the substrate;
A support that supports the non-contact holding unit and the contact holding unit;
A substrate replacement apparatus comprising: a holding unit driving unit that moves the non-contact holding unit relatively up and down relative to the contact holding unit so that the substrate can be held by either the non-contact holding unit or the contact holding unit. .   The substrate replacement apparatus according to claim 1, wherein the contact holding unit includes a plurality of suction units arranged around the non-contact holding unit. In the state where the non-contact holding unit is lowered relative to the contact holding unit, the substrate holding body transfers the processed substrate on the tray by the non-contact holding unit, and then transfers the substrate to the contact holding unit. 3. The substrate replacement device according to claim 1, wherein operation control is performed so that an unprocessed substrate is transported by the contact holding unit in a state where the non-contact holding unit is relatively raised.

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