WO2012056893A1 - Workpiece supplying device and workpiece processing device - Google Patents
Workpiece supplying device and workpiece processing device Download PDFInfo
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- WO2012056893A1 WO2012056893A1 PCT/JP2011/073512 JP2011073512W WO2012056893A1 WO 2012056893 A1 WO2012056893 A1 WO 2012056893A1 JP 2011073512 W JP2011073512 W JP 2011073512W WO 2012056893 A1 WO2012056893 A1 WO 2012056893A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Definitions
- the present invention relates to a workpiece supply device that supplies sheet-like workpieces such as solar cell wafers one by one from a cassette to a carry-in position of a transfer device, and a workpiece processing apparatus including the workpiece supply device.
- a plurality of processes at the time of manufacturing a solar cell wafer include an inspection process of a sheet-like workpiece.
- the workpiece inspection process for example, a predetermined portion of the workpiece is imaged by an imaging device.
- the workpiece is transported to the inspection position where the imaging device is provided by the transport device.
- a transport device for transporting a workpiece there is one using an endless belt (for example, see Patent Document 1).
- a workpiece supply device for supplying workpieces to a transfer device
- a device using a cassette in which a plurality of storage units for storing workpieces one by one are stacked in multiple stages in the vertical direction. After reciprocating the cassette in a horizontal plane in a direction perpendicular to the conveying direction of the conveying device, placing the workpiece in the cassette on the endless belt at the loading position of the conveying device, and lowering or raising the cassette by one stage Move the cassette back and forth.
- An object of the present invention is to supply workpieces one by one to a transport device even when a plurality of workpieces are stored in a single storage section in a cassette, and appropriately perform processing on the workpiece being transferred.
- An object of the present invention is to provide a workpiece supply device and a workpiece processing device.
- a workpiece supply device includes a cassette, a lifting mechanism, a first carry-out member, and a second carry-out member, and supplies the workpiece to a workpiece loading position in a conveyance device that conveys a sheet-shaped workpiece along the main conveyance direction.
- a conveyance device that conveys a sheet-shaped workpiece along the main conveyance direction.
- the elevating mechanism lowers or raises the cassette so that the positions of the plurality of storage units in the vertical direction sequentially coincide with the positions of the transport surface.
- a 1st carrying-out mechanism carries out the workpiece
- the second unloading mechanism unloads the workpiece unloaded by the first unloading member from the upper surface side to the loading position along a second direction different from the first direction.
- the workpieces can be supplied one by one to the loading position of the transfer device, and processing on the workpiece being transferred can be performed. It can be done properly.
- a workpiece supply apparatus 10 constitutes a part of a workpiece processing apparatus 100.
- the workpiece processing apparatus 100 performs, for example, an inspection process based on image data captured by the imaging apparatus 121 on a transport apparatus 110 that transports, for example, a solar cell wafer as a sheet-shaped work, and a work transported by the transport apparatus 110.
- Part 120 is provided.
- the conveyance device 110 is configured by an endless belt stretched around a plurality of rollers as an example.
- the conveying apparatus 110 can also be configured by a plurality of rollers or chains. Further, the processing performed by the processing unit 120 is not limited to the inspection processing using the imaging device 121.
- the workpiece supply device 10 is disposed in the vicinity of the carry-in unit 111 of the transfer device 110, and supplies the workpieces one by one to the carry-in unit 111.
- the workpiece supply apparatus 10 includes a cassette 1, an elevating mechanism 2, a first carry-out mechanism 3, a second carry-out mechanism 4, and a collection tray 5.
- the cassette 1 includes a plurality of storage portions 11 stacked in multiple stages in the vertical direction. Each of the plurality of storage units 11 stores one sheet-like workpiece in principle.
- the lifting device 2 raises and lowers the cassette 1 so that the respective positions of the plurality of storage portions 11 in the vertical direction sequentially coincide with the positions of the transport surfaces in the carry-in portion 111 of the transport device 110.
- the first carry-out mechanism 3 is composed of an endless belt 31 stretched around a plurality of rollers as an example.
- the first carry-out mechanism 3 moves the work housed in the housing part 11 whose vertical position coincides with the position of the transport surface among the plurality of housing parts 11 along the first direction X from the bottom surface side. Carry out toward the collection tray 5.
- the first unloading mechanism 3 unloads the work placed on the upper surface of the endless belt 31.
- the first direction X is parallel to the transport direction of the transport device 110.
- the second carry-out mechanism 4 includes a vacuum chuck 41 and a slide mechanism 42 as an example.
- the second carry-out mechanism 4 moves the work carried out by the first carry-out mechanism 3 along the second direction Y orthogonal to the first direction X from the upper surface side between the first carry-out mechanism 3 and the collection tray 5.
- the slide mechanism 42 reciprocates the vacuum chuck 41 along the second direction Y between the upper part of the second carry-out mechanism 4 and the carry-in part 111 of the carrying device 110.
- the work stored in the storage unit 11 is moved by the first carry-out mechanism 3. It is unloaded along the first direction X from the bottom side.
- the work carried out in the first direction X is carried out by the second carrying-out mechanism 4 from the upper surface side along the second direction Y to the carrying-in part 111 of the carrying device 110.
- the collection tray 5 is a collection unit of the present invention and accommodates unprocessed workpieces.
- the collection tray 5 can be omitted when a work other than the work located at the top of the plurality of works stored in the single storage unit 11 is unnecessary.
- the cassette 1, the lifting mechanism 2, the first carry-out mechanism 3, and the collection tray 5 are arranged on both sides with the carry-in part 111 interposed therebetween. It only has to be arranged on one side. However, by disposing these on both sides of the carry-in part 111, after supplying all the workpieces stored in one cassette 1, the supply of workpieces from the other cassette 1 is continued. One cassette 1 can be replaced with a new cassette 1.
- the installation space for the workpiece supply apparatus 10 can be minimized. It is not limited.
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
Abstract
The present invention is capable of supplying workpieces to a conveying device one sheet at a time, even when there are multiple sheets of workpieces contained in a single containment unit within a cassette, and of performing appropriate processing of workpieces undergoing conveyance. The workpiece supplying device (10) is provided with a cassette (1), a lifting/lowering mechanism (2), a first transferring member (3), and a second transferring member (4). The cassette (1) comprises a plurality of containment units (11) in which sheets of workpieces are contained, and the containment units are arranged in multiple tiers stacked in upward and downward directions. The lifting/lowering mechanism (2) lowers or lifts the cassette (1) so that each of the positions of the plurality of containment units (11) moving in the upward and downward directions sequentially coincides with the position of the conveyance surface. The first transferring mechanism (3) transfers workpieces in a single containment unit (11) along a first direction (X) from the undersurface-side. The second transferring mechanism (4) transfers workpieces that have been transferred by the first transferring mechanism (3) along a second direction (Y) from the uppersurface-side.
Description
この発明は、太陽電池用ウェハ等のシート状のワークをカセットから１枚ずつ搬送装置の搬入位置に供給するワーク供給装置、及びこのワーク供給装置を備えたワーク処理装置に関する。
The present invention relates to a workpiece supply device that supplies sheet-like workpieces such as solar cell wafers one by one from a cassette to a carry-in position of a transfer device, and a workpiece processing apparatus including the workpiece supply device.
太陽電池用ウェハの製造時の複数の工程には、シート状のワークの検査工程が含まれる。ワークの検査工程では、例えば撮像装置によってワークの所定箇所を撮像する。ワークは、搬送装置によって撮像装置が設けられている検査位置に搬送される。ワークを搬送する搬送装置として、無端ベルトを用いたものがある（例えば、特許文献１参照。）。
A plurality of processes at the time of manufacturing a solar cell wafer include an inspection process of a sheet-like workpiece. In the workpiece inspection process, for example, a predetermined portion of the workpiece is imaged by an imaging device. The workpiece is transported to the inspection position where the imaging device is provided by the transport device. As a transport device for transporting a workpiece, there is one using an endless belt (for example, see Patent Document 1).
検査工程のタクトタイムを向上するためには、搬送装置にワークを１枚ずつ所定のタイミングで円滑に供給する必要がある。
In order to improve the tact time of the inspection process, it is necessary to smoothly supply workpieces one by one to the transfer device at a predetermined timing.
このため、搬送装置にワークを供給するワーク供給装置として、ワークを１枚ずつ収納する複数の収納部を上下方向に多段に積層して配置したカセットを用いたものがある。カセットを水平面内で搬送装置の搬送方向に直交する方向に往復移動させ、カセット内のワークを搬送装置の搬入位置で無端ベルト上に載置し、カセットを１段分だけ下降又は上昇させた後にカセットを往復移動させる。
For this reason, as a workpiece supply device for supplying workpieces to a transfer device, there is a device using a cassette in which a plurality of storage units for storing workpieces one by one are stacked in multiple stages in the vertical direction. After reciprocating the cassette in a horizontal plane in a direction perpendicular to the conveying direction of the conveying device, placing the workpiece in the cassette on the endless belt at the loading position of the conveying device, and lowering or raising the cassette by one stage Move the cassette back and forth.
カセットの各収納部にはワークを１枚ずつ収納させておく必要があるが、太陽電池用ウェハのように薄肉のワークでは誤って２枚以上のワークが単一の収納部に収納される可能性が高い。従来のワーク供給装置では、カセットの各収納部について１回の供給動作を行っており、単一の収納部に複数枚のワークが収納されている場合には、複数枚のワークが一度に搬送装置に供給され、検査工程を適正に行うことができなくなる。このような問題は、検査工程時だけでなく、搬送放置が搬送するワークに対する検査工程以外の工程に対するワークの搬送時にも同様に生じる。
Although it is necessary to store one work piece in each storage part of the cassette, two or more work pieces can be mistakenly stored in a single storage part for thin-walled work pieces such as wafers for solar cells. High nature. In the conventional work supply device, one supply operation is performed for each storage part of the cassette, and when a plurality of works are stored in a single storage part, a plurality of works are conveyed at a time. It is supplied to the apparatus and the inspection process cannot be performed properly. Such a problem occurs not only at the time of the inspection process, but also when the workpiece is transported to a process other than the inspection process for the workpiece to be transported.
この発明の目的は、カセット内の単一の収納部に複数枚のワークが収納された場合でも、搬送装置に１枚ずつワークを供給することができ、搬送中のワークに対する処理を適正に行うことができるワーク供給装置、及びワーク処理装置を提供することにある。
An object of the present invention is to supply workpieces one by one to a transport device even when a plurality of workpieces are stored in a single storage section in a cassette, and appropriately perform processing on the workpiece being transferred. An object of the present invention is to provide a workpiece supply device and a workpiece processing device.
この発明に係るワーク供給装置は、カセット、昇降機構、第１搬出部材、第２搬出部材を備え、シート状のワークを主搬送方向に沿って搬送する搬送装置におけるワークの搬入位置へワークを供給する。カセットは、シート状のワークを収納する複数の収納部を上下方向に多段に積層して配置している。昇降機構は、上下方向について複数の収納部のそれぞれの位置が搬送面の位置に順次一致するようにカセットを下降又は上昇させる。第１搬出機構は、複数の収納部のうちで上下方向の位置が搬送面の位置に一致する収納部に収納されているワークを底面側から第１の方向に沿って搬出する。第２搬出機構は、第１搬出部材が搬出したワークを上面側から第１の方向と異なる第２の方向に沿って搬入位置へ搬出する。
A workpiece supply device according to the present invention includes a cassette, a lifting mechanism, a first carry-out member, and a second carry-out member, and supplies the workpiece to a workpiece loading position in a conveyance device that conveys a sheet-shaped workpiece along the main conveyance direction. To do. In the cassette, a plurality of storage portions for storing sheet-like workpieces are stacked in multiple stages in the vertical direction. The elevating mechanism lowers or raises the cassette so that the positions of the plurality of storage units in the vertical direction sequentially coincide with the positions of the transport surface. A 1st carrying-out mechanism carries out the workpiece | work accommodated in the storage part in which the position of an up-down direction corresponds to the position of a conveyance surface among several storage parts along a 1st direction from the bottom face side. The second unloading mechanism unloads the workpiece unloaded by the first unloading member from the upper surface side to the loading position along a second direction different from the first direction.
この発明によれば、カセット内の単一の収納部に複数枚のワークが収納された場合でも、搬送装置の搬入位置に１枚ずつワークを供給することができ、搬送中のワークに対する処理を適正に行うことができる。
According to the present invention, even when a plurality of workpieces are stored in a single storage section in the cassette, the workpieces can be supplied one by one to the loading position of the transfer device, and processing on the workpiece being transferred can be performed. It can be done properly.
以下に、この発明の実施形態に係るワーク供給装置及びワーク処理装置について、図面を参照して説明する。図１に示すように、この発明の実施形態に係るワーク供給装置１０は、ワーク処理装置１００の一部を構成している。ワーク処理装置１００は、シート状のワークとして例えば太陽電池用ウェハを搬送する搬送装置１１０と、搬送装置１１０が搬送するワークに対し、例えば撮像装置１２１が撮像した画像データに基づく検査処理を行う処理部１２０を備えている。搬送装置１１０は、一例として複数のローラに張架された無端ベルトで構成されている。
Hereinafter, a workpiece supply device and a workpiece processing device according to an embodiment of the present invention will be described with reference to the drawings. As shown in FIG. 1, a workpiece supply apparatus 10 according to an embodiment of the present invention constitutes a part of a workpiece processing apparatus 100. The workpiece processing apparatus 100 performs, for example, an inspection process based on image data captured by the imaging apparatus 121 on a transport apparatus 110 that transports, for example, a solar cell wafer as a sheet-shaped work, and a work transported by the transport apparatus 110. Part 120 is provided. The conveyance device 110 is configured by an endless belt stretched around a plurality of rollers as an example.
なお、搬送装置１１０は、複数のローラ又はチェーン等で構成することもできる。また、処理部１２０が行う処理は、撮像装置１２１を用いた検査処理に限るものではない。
In addition, the conveying apparatus 110 can also be configured by a plurality of rollers or chains. Further, the processing performed by the processing unit 120 is not limited to the inspection processing using the imaging device 121.
図１及び図２に示すように、ワーク供給装置１０は、搬送装置１１０の搬入部１１１に近接して配置されており、ワークを１枚ずつ搬入部１１１に供給する。このため、ワーク供給装置１０は、カセット１、昇降機構２、第１搬出機構３、第２搬出機構４、回収トレイ５を備えている。
As shown in FIGS. 1 and 2, the workpiece supply device 10 is disposed in the vicinity of the carry-in unit 111 of the transfer device 110, and supplies the workpieces one by one to the carry-in unit 111. For this reason, the workpiece supply apparatus 10 includes a cassette 1, an elevating mechanism 2, a first carry-out mechanism 3, a second carry-out mechanism 4, and a collection tray 5.
カセット１は、複数の収納部１１を上下方向に多段に積層して備えている。複数の収納部１１のそれぞれは、シート状のワークを原則として１枚ずつ収納する。昇降装置２は、上下方向における複数の収納部１１のそれぞれの位置が搬送装置１１０の搬入部１１１における搬送面の位置に順次一致するように、カセット１を昇降させる。
The cassette 1 includes a plurality of storage portions 11 stacked in multiple stages in the vertical direction. Each of the plurality of storage units 11 stores one sheet-like workpiece in principle. The lifting device 2 raises and lowers the cassette 1 so that the respective positions of the plurality of storage portions 11 in the vertical direction sequentially coincide with the positions of the transport surfaces in the carry-in portion 111 of the transport device 110.
第１搬出機構３は、一例として複数のローラに張架された無端ベルト３１で構成されている。第１搬出機構３は、複数の収納部１１のうちで上下方向の位置が搬送面の位置に一致している収納部１１に収納されているワークを底面側から第１の方向Ｘに沿って回収トレイ５に向けて搬出する。即ち、第１搬出機構３は、無端ベルト３１の上面にワークを載置して搬出する。第１の方向Ｘは、搬送装置１１０の搬送方向に平行にされている。
The first carry-out mechanism 3 is composed of an endless belt 31 stretched around a plurality of rollers as an example. The first carry-out mechanism 3 moves the work housed in the housing part 11 whose vertical position coincides with the position of the transport surface among the plurality of housing parts 11 along the first direction X from the bottom surface side. Carry out toward the collection tray 5. In other words, the first unloading mechanism 3 unloads the work placed on the upper surface of the endless belt 31. The first direction X is parallel to the transport direction of the transport device 110.
第２搬出機構４は、一例として真空チャック４１及びスライド機構４２を備えている。第２搬出機構４は、第１搬出機構３が搬出したワークを、第１搬出機構３と回収トレイ５との間で、上面側から第１の方向Ｘに直交する第２の方向Ｙに沿って搬入部１１１へ搬出する。このため、スライド機構４２は、真空チャック４１を第２の方向Ｙに沿って第２搬出機構４の上方と搬送装置１１０の搬入部１１１との間に往復移動させる。
The second carry-out mechanism 4 includes a vacuum chuck 41 and a slide mechanism 42 as an example. The second carry-out mechanism 4 moves the work carried out by the first carry-out mechanism 3 along the second direction Y orthogonal to the first direction X from the upper surface side between the first carry-out mechanism 3 and the collection tray 5. To carry-in part 111. For this reason, the slide mechanism 42 reciprocates the vacuum chuck 41 along the second direction Y between the upper part of the second carry-out mechanism 4 and the carry-in part 111 of the carrying device 110.
昇降機構２によってカセット１内に配置された複数の収納部１１の何れかの上下方向の位置が搬送面の位置に一致すると、その収納部１１に収納されているワークが第１搬出機構３によって底面側から第１の方向Ｘに沿って搬出される。第１の方向Ｘに搬出されたワークは、第２搬出機構４により、上面側から第２の方向Ｙに沿って搬送装置１１０の搬入部１１１へ搬出される。
When the vertical position of any of the plurality of storage units 11 arranged in the cassette 1 by the elevating mechanism 2 coincides with the position of the conveying surface, the work stored in the storage unit 11 is moved by the first carry-out mechanism 3. It is unloaded along the first direction X from the bottom side. The work carried out in the first direction X is carried out by the second carrying-out mechanism 4 from the upper surface side along the second direction Y to the carrying-in part 111 of the carrying device 110.
単一の収納部１１に誤って複数枚のワークが収納されている場合、複数枚のワークの全てが第１の方向Ｘに沿って搬出された後、第２搬出機構４の真空チャック４１は最上部に位置する１枚のワークのみを吸着し、他のワークは自重によって第１搬出機構３上に停まる。したがって、最上部に位置する１枚のワークのみが第２の方向Ｙに沿って搬送装置１１０の搬入部１１１に搬出される。単一の収納部１１に誤って複数枚のワークが収納されている場合でも、搬入部１１１には１枚のワークのみが供給され、ワーク処理装置１００におけるワークに対する処理を正確に行わせることができる。
When a plurality of workpieces are mistakenly stored in the single storage unit 11, after all of the plurality of workpieces are unloaded along the first direction X, the vacuum chuck 41 of the second unloading mechanism 4 is Only one workpiece located at the top is adsorbed, and the other workpieces are stopped on the first carry-out mechanism 3 by their own weight. Therefore, only one workpiece located at the uppermost part is carried out along the second direction Y to the carry-in unit 111 of the carrying device 110. Even when a plurality of workpieces are mistakenly stored in the single storage unit 11, only one workpiece is supplied to the carry-in unit 111, so that the workpiece processing apparatus 100 can accurately process the workpiece. it can.
最上部に位置する１枚のワーク以外のワークは、第１搬出機構３によって回収トレイ５に搬送される。回収トレイ５は、この発明の回収部であり、未処理のワークを収容する。単一の収納部１１内に収納された複数枚のワークのうち、最上部に位置するワーク以外のワークが不要である場合には、回収トレイ５を省略できる。
Work other than one work positioned at the top is transported to the collection tray 5 by the first carry-out mechanism 3. The collection tray 5 is a collection unit of the present invention and accommodates unprocessed workpieces. The collection tray 5 can be omitted when a work other than the work located at the top of the plurality of works stored in the single storage unit 11 is unnecessary.
なお、図１に示す例では、カセット１、昇降機構２、第１搬出機構３及び回収トレイ５は、搬入部１１１を挟んで両側のそれぞれに配置されているが、これらは搬入部１１１の少なくとも一方に配置されていればよい。但し、これらを搬入部１１１を挟んで両側のそれぞれに配置することで、一方のカセット１に収納されているワークの全てを供給した後、他方のカセット１からワークの供給を継続し、この間に一方のカセット１を新たなカセット１と交換することができる。
In the example shown in FIG. 1, the cassette 1, the lifting mechanism 2, the first carry-out mechanism 3, and the collection tray 5 are arranged on both sides with the carry-in part 111 interposed therebetween. It only has to be arranged on one side. However, by disposing these on both sides of the carry-in part 111, after supplying all the workpieces stored in one cassette 1, the supply of workpieces from the other cassette 1 is continued. One cassette 1 can be replaced with a new cassette 1.
また、第１の方向Ｘを搬送装置１００の搬送方向に平行にし、第２の方向Ｙを第１の方向Ｘに直交させることで、ワーク供給装置１０の設置スペースを最小にできるが、これに限るものではない。
In addition, by setting the first direction X parallel to the transport direction of the transport apparatus 100 and making the second direction Y orthogonal to the first direction X, the installation space for the workpiece supply apparatus 10 can be minimized. It is not limited.
上述の実施形態の説明は、すべての点で例示であって、制限的なものではないと考えられるべきである。本発明の範囲は、上述の実施形態ではなく、特許請求の範囲によって示される。さらに、本発明の範囲には、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。
The description of the above-described embodiment is an example in all respects, and should be considered as not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.
１－カセット
２－昇降機構
３－第１搬出機構
４－第２搬出機構
５－回収トレイ
１０－ワーク供給装置
１１－収納部
１００－ワーク処理装置
１１０－搬送装置
１１１－搬入部 1-cassette 2-lifting mechanism 3-first unloading mechanism 4-second unloading mechanism 5-recovery tray 10-work feeding device 11-storage unit 100-work processing device 110-conveying device 111-loading unit
２－昇降機構
３－第１搬出機構
４－第２搬出機構
５－回収トレイ
１０－ワーク供給装置
１１－収納部
１００－ワーク処理装置
１１０－搬送装置
１１１－搬入部 1-cassette 2-lifting mechanism 3-first unloading mechanism 4-second unloading mechanism 5-recovery tray 10-work feeding device 11-storage unit 100-work processing device 110-conveying device 111-loading unit
Claims (9)
- シート状のワークを主搬送方向に沿って搬送する搬送装置におけるワークの搬入位置へワークを供給するワーク供給装置であって、
シート状のワークを収納する複数の収納部を上下方向に多段に積層して配置したカセットと、
上下方向について前記複数の収納部のそれぞれの位置が搬送面の位置に順次一致するように前記カセットを下降又は上昇させる昇降機構と、
前記複数の収納部のうちで上下方向の位置が前記搬送面の位置に一致する収納部に収納されているワークを底面側から第１の方向に沿って搬出する第１搬出部材と、
前記第１搬出部材が搬出したワークを上面側から前記第１の方向と異なる第２の方向に沿って前記搬入位置へ搬出する第２搬出部材と、
を備えたワーク供給装置。 A workpiece supply device that supplies a workpiece to a workpiece loading position in a conveyance device that conveys a sheet-shaped workpiece along the main conveyance direction,
A cassette in which a plurality of storage units for storing sheet-like workpieces are stacked in multiple stages in the vertical direction;
An elevating mechanism that lowers or raises the cassette so that each position of the plurality of storage units sequentially matches the position of the transport surface in the vertical direction;
A first unloading member for unloading a workpiece stored in a storage unit whose vertical position matches the position of the transport surface among the plurality of storage units along the first direction from the bottom surface;
A second unloading member for unloading the work unloaded by the first unloading member from the upper surface side to the loading position along a second direction different from the first direction;
Work supply device with - 前記第１搬出部材が排出したワークを回収する回収部を備え、前記第２搬出部材は前記第１搬出部材と前記回収部との間でワークを搬出する請求項１に記載のワーク供給装置。 The workpiece supply apparatus according to claim 1, further comprising a recovery unit that recovers the workpiece discharged by the first unloading member, wherein the second unloading member unloads the workpiece between the first unloading member and the recovery unit.
- 前記第１の方向は前記主搬送方向に平行であり、前記第２の方向は前記第１の方向に直交する請求項１に記載のワーク供給装置。 The work supply apparatus according to claim 1, wherein the first direction is parallel to the main transport direction, and the second direction is orthogonal to the first direction.
- 前記第１の方向は前記主搬送方向に平行であり、前記第２の方向は前記第１の方向に直交する請求項２に記載のワーク供給装置。 The work supply apparatus according to claim 2, wherein the first direction is parallel to the main transport direction, and the second direction is orthogonal to the first direction.
- 前記第１搬出部材はワークの底面に外周面が接触させる無端ベルトで構成され、前記第２搬出部材はワークの上面を吸着するチャックを備えた請求項１に記載のワーク供給装置。 The work supply apparatus according to claim 1, wherein the first carry-out member is configured by an endless belt whose outer peripheral surface is in contact with the bottom surface of the work, and the second carry-out member includes a chuck that sucks the top surface of the work.
- 前記第１搬出部材はワークの底面に外周面が接触させる無端ベルトで構成され、前記第２搬出部材はワークの上面を吸着するチャックを備えた請求項２に記載のワーク供給装置。 The work supply apparatus according to claim 2, wherein the first carry-out member is constituted by an endless belt whose outer peripheral surface is in contact with the bottom surface of the work, and the second carry-out member is provided with a chuck that adsorbs the top surface of the work.
- 前記第１搬出部材はワークの底面に外周面が接触させる無端ベルトで構成され、前記第２搬出部材はワークの上面を吸着するチャックを備えた請求項３に記載のワーク供給装置。 The work supply apparatus according to claim 3, wherein the first carry-out member is constituted by an endless belt whose outer peripheral surface is in contact with the bottom surface of the work, and the second carry-out member includes a chuck that sucks the top surface of the work.
- 前記第１搬出部材はワークの底面に外周面が接触させる無端ベルトで構成され、前記第２搬出部材はワークの上面を吸着するチャックを備えた請求項４に記載のワーク供給装置。 The work supply apparatus according to claim 4, wherein the first carry-out member is constituted by an endless belt whose outer peripheral surface is in contact with the bottom surface of the work, and the second carry-out member includes a chuck that sucks the top surface of the work.
- 請求項１乃至８の何れかに記載のワーク供給装置によって搬入位置に供給されたワークを搬送する搬送装置と、
前記搬送装置によって搬送されるワークに対して所定の処理を施す処理部と、
を備えたワーク処理装置。 A transport device that transports the workpiece supplied to the carry-in position by the workpiece supply device according to claim 1,
A processing unit that performs a predetermined process on the workpiece conveyed by the conveying device;
Work processing device with
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| JP2012540766A JP5606546B2 (en) | 2010-10-28 | 2011-10-13 | Work processing device |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2010241748 | 2010-10-28 | ||
| JP2010-241748 | 2010-10-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2011/073512 WO2012056893A1 (en) | 2010-10-28 | 2011-10-13 | Workpiece supplying device and workpiece processing device |
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| JP (1) | JP5606546B2 (en) |
| TW (1) | TWI443058B (en) |
| WO (1) | WO2012056893A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109625744A (en) * | 2019-01-29 | 2019-04-16 | 佛山市新泓达机械有限公司 | A kind of glass warehousing system and control method |
| WO2021072973A1 (en) * | 2019-10-14 | 2021-04-22 | 苏州赛腾精密电子股份有限公司 | Conveying device and detection system |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6011311B2 (en) * | 2012-12-18 | 2016-10-19 | 日本電気硝子株式会社 | Work conveying apparatus and work conveying method |
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| JPS6331133A (en) * | 1986-07-25 | 1988-02-09 | Nikon Corp | Wafer carrier system |
| JPH01321257A (en) * | 1988-06-21 | 1989-12-27 | Nitto Denko Corp | Method of sticking thin plate to adhesive tape |
| JPH09181149A (en) * | 1997-02-07 | 1997-07-11 | Hitachi Ltd | Vacuum treatment apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000012652A (en) * | 1998-06-24 | 2000-01-14 | Sony Corp | Semiconductor wafer carrying device |
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2011
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- 2011-10-13 JP JP2012540766A patent/JP5606546B2/en not_active Expired - Fee Related
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6331133A (en) * | 1986-07-25 | 1988-02-09 | Nikon Corp | Wafer carrier system |
| JPH01321257A (en) * | 1988-06-21 | 1989-12-27 | Nitto Denko Corp | Method of sticking thin plate to adhesive tape |
| JPH09181149A (en) * | 1997-02-07 | 1997-07-11 | Hitachi Ltd | Vacuum treatment apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109625744A (en) * | 2019-01-29 | 2019-04-16 | 佛山市新泓达机械有限公司 | A kind of glass warehousing system and control method |
| WO2021072973A1 (en) * | 2019-10-14 | 2021-04-22 | 苏州赛腾精密电子股份有限公司 | Conveying device and detection system |
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| JPWO2012056893A1 (en) | 2014-03-20 |
| TWI443058B (en) | 2014-07-01 |
| TW201242867A (en) | 2012-11-01 |
| JP5606546B2 (en) | 2014-10-15 |
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