JP2002184725A - Lapping machine, its control method, lapping machine work carrying-in/out device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable the processed works to be effectively and adequately replaced with the unprocessed works in a planetary gear lapping machine. SOLUTION: A gateway 7 through which a carrier 4 is carried in or out is provided on the circumferential wall of the internal gear 6 of a lapping machine, and the gateway 7 is freely closed by a dividing piece 6B. When the carrier 4 is carried in or out, a guide plate 22 is introduced into the gateway 7, and the carrier 4 is made to slide on the guide plate 22. Therefore, a large number of works W housed in the opening of the carrier 4 can be collectively carried out or in together with the carrier 4 without making the works fall off from the carrier 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lapping machine mainly used for lapping a semiconductor substrate such as a silicon wafer or other thin plate-like work, and particularly to smoothly supplying a work to be wrapped and taking out a wrapped work. The present invention relates to a planetary gear type lapping machine, a control method thereof, and a work carrying-in / out device for a lapping machine.

[0002]

2. Description of the Related Art Conventionally, various types of lapping machines have been known as apparatuses for lapping silicon wafers and the like. One of them is a plane lapping machine using a planetary gear unit. 19, I is a ring-shaped internal gear, S is a sun gear provided at the center thereof, and a carrier that rotates while revolving (revolving) around the sun gear S therebetween. P (planetary gear) is provided. In particular, an opening h for accommodating the work W is formed in the carrier P, and the work W accommodated in the opening h is sandwiched between a pair of upper and lower platens (not shown). According to this type of lapping machine, the upper and lower surfaces of the work can be brought into sliding contact with a pair of surface plates to be mirror-finished. In addition, as a structure, there are a method of rotating a pair of platens and a method of not rotating, and in a planetary gear device, there is a type of rotating not only a sun gear but also an internal gear at the same time. It is also possible to make only revolution.

[0003]

However, according to the above-mentioned conventional lapping machine, there are many methods which rely on manual work for setting the work before processing and taking out the work after processing, and the work efficiency is extremely poor. there were. Incidentally, there is an automatic machine for loading works one by one into the opening of the carrier arranged between the sun gear and the internal gear, and taking out works one by one from the opening. It is difficult to deal with changes in the type and arrangement of the carriers, and furthermore, in order to properly attach and detach the work, there is a problem that control must be performed to accurately stop the carrier and its opening at a predetermined position.

The present invention has been made in view of the above circumstances, and an object thereof is to supply a work for wrapping and to take out a wrapped work properly and smoothly. It is in.

[0005]

In order to achieve the above-mentioned object, the present invention provides a lapping machine, a control method thereof, and a work loading / unloading device for a lapping machine as described below. (1) A carrier having an opening for accommodating a work is disposed between a sun gear and an internal gear, and the work accommodated in the opening of the carrier is provided with an upper surface plate provided to face vertically. In a lapping machine which wraps while being sandwiched between a lower surface plate and a peripheral wall portion of the internal gear, a passage opening which can be opened and closed so as to allow the carrier to pass horizontally along the upper surface of the lower surface plate is formed. Lapping machine. (2) A carrier having an opening for accommodating the work is disposed between the sun gear and the internal gear, and the work accommodated in the opening of the carrier is provided with an upper surface plate provided vertically opposed to each other. In a lapping machine that wraps while sandwiching it with a lower platen, the internal gear is constituted by a partially cut-out base body having a peripheral wall as a passage for a carrier and a detachable division piece for opening and closing the passage. A lapping machine characterized in that when the piece is detached from the mother body, the carrier can be put in and out of the internal gear through the passage opening in and out of the internal gear in a state parallel to the upper surface of the lower platen. (3) A carrier having an opening for accommodating the work is disposed between the sun gear and the internal gear, and the work accommodated in the opening of the carrier is provided with an upper surface plate provided to face vertically. On a lapping machine that wraps while sandwiching it with the lower stool, after the lapping of the work is completed, the upper stool is raised and maintained in a range where the distance between the upper stool and the carrier does not exceed the thickness of the work. The sun gear, internal gear,
And a method of controlling a lapping machine, comprising rotating at least one of an upper surface plate and an upper surface plate. (4) A carrier having an opening for accommodating the work and disposed between the sun gear and the internal gear, and a carrier provided vertically opposed to the work held by the carrier. A work carrying-in / out device applied to a lapping machine having a board and a lower surface plate, and having an openable and closable passage for taking carriers in and out of a portion of the peripheral wall of the internal gear. A work loading / unloading device, comprising: a communication unit having a guide plate that moves toward the head; and a conveyance unit that moves along a longitudinal direction of the guide plate with a carrier containing the work. (5) A carrier having an opening for accommodating the work and disposed between the sun gear and the internal gear, and a carrier provided vertically opposed to the work held by the carrier. A work carrying-in / out device applied to a lapping machine having a board and a lower surface plate, and having an openable and closable passage for taking carriers in and out of a portion of the peripheral wall of the internal gear. A communication means having a guide plate which advances toward the head, a magazine for stocking a carrier for supplying the inside of the internal gear from the passage opening through the guide plate, and a work taken into an opening of the carrier taken out from the magazine. A work set portion to be loaded; and a transfer means for transferring a carrier containing the work from the work set portion onto the guide plate, the transfer means comprising one end of the guide plate and an internal gear. An operation system that moves along the longitudinal direction of the guide plate while holding the carrier so as to move the work while being accommodated in the carrier between the inside and the carrier; A work loading / unloading device provided with a work collecting section for separating and collecting the wrapped work from the carrier taken out of the internal gear by means. (6) The work set section includes a fixing plate for mounting the carrier taken out of the magazine, a jig having a receiving port corresponding to the opening of the carrier, and the work for loading the work before wrapping into the receiving port. A work supply machine that supplies
A jig feeder for moving the jig loaded with the work below the fixing plate, and a receiving pin having a protruding pin that advances from the lower part of the jig moved below the fixing plate to the inside of the receiving port. 6. The work loading / unloading device according to claim 5, further comprising a loading machine for transferring a work in the mouth to an opening of the carrier through a through hole formed in the fixing plate.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic perspective view showing a main part of a lapping machine according to the present invention, and FIG. 2 shows a partial cross section thereof. In the figure, 1 is an upper surface plate (upper lap), 2 is a lower surface plate (lower lap), and they are provided vertically opposite each other via a planetary gear device 3. The planetary gear device 3 includes a disk-shaped carrier 4 (planetary gear) for holding a work W in the form of a thin plate such as a silicon wafer, a sun gear 5 meshing with the carrier 4, and an inner gear meshing with the carrier 4. An opening 4A for accommodating the work W is formed in the carrier 4 among them. still,
In this example, the openings 4A are formed at equal intervals in the circumferential direction on the inside and outside of the carrier 4 (see FIG. 3).

The internal gear 6 is partially cut out as a passage opening 7 with a width larger than the diameter of the carrier 4 as a passage opening 7.
It is composed of a base body 6A in the shape of a letter, and a detachable divided piece 6B that opens and closes the opening 7 for opening and closing. It is possible to move between. Reference numeral 8 denotes an operation device for moving the divided pieces 6B to open and close the passage 7, and in this example, the operation device 8 includes a biaxial actuator (a horizontal movement cylinder 8A and a lifting cylinder 8B). In the present embodiment, the base body 6A of the internal gear is fixed horizontally at the portion of the machine frame, but may be integrally formed around the lower surface plate 2.

On the other hand, the upper stool 1 is provided so as to be able to move up and down while maintaining a parallel state with the lower stool 2. Numeral 9 denotes an actuator composed of a hydraulic cylinder or the like mounted on the upper part of the machine frame for raising and lowering the upper stool 1. The upper stool 1 is rotatably mounted at the tip of a rod thereof via a spherical bearing (not shown) or the like. ing. The lower platen 2 is rotatably supported at a predetermined height at a portion of the machine frame via a thrust bearing (not shown), and a sun gear 5 is provided at the center thereof. Sun gear 5
Is fixed to a rotating shaft 10 and protrudes upward through a through hole 11 formed in the lower platen 2. Reference numeral 12 denotes a drive source composed of an electric motor for rotating the sun gear 5 and the like. In this example, the output shaft and the rotation shaft 10 are connected via gears 13 and 14. A sun gear 5 is provided around the lower surface plate 2.
And a plurality of (five in this example) carriers 4 between the internal gear 6 and the sun gear 5.
Are arranged at equal intervals. The thickness of the carrier 4 is set to be thinner than the work W to be machined, and the work W accommodated in the opening 4A projects from both surfaces of the carrier 4.

According to the above lapping machine,
As shown in FIG. 2, the work W accommodated in the opening 4A of the carrier 4 is sandwiched between the upper surface plate 1 and the lower surface plate 2, and in this state, the carrier 4 is rotated around its center by the rotation of the sun gear 5 (rotation). By rotating (revolving) around the sun gear 5 while rotating the upper surface plate 1 and the lower surface plate 2 in a direction opposite to the revolving direction of the carrier 4, the upper and lower surfaces of the work W are finely powdered such as metal. By slidably contacting the upper surface plate 1 and the lower surface plate 2 with a lapping agent made of a liquid such as oil or light oil or a mixture thereof, good lapping (polishing) can be performed.

In FIG. 2, reference numeral 15 denotes a motor for driving the upper platen 1 to rotate, and 16 denotes a motor for driving the lower platen 2 to rotate. Of these, a rotary shaft connected to the output shaft of the motor 15 is provided. Reference numeral 17 penetrates through the rotation shaft 10 for the sun gear, and a drive gear 18 that meshes with the center of the upper stool 1 is fixed to the end of the drive gear 18. However, the lapping machine according to the present invention is not limited to the above-described configuration, and the upper stool 1 and the lower stool 2 are not rotated and only the sun gear 5 is rotated. Can be rotated.

FIG. 3 is a plan view showing the work loading / unloading device of the present invention applied to the lapping machine as described above.
Shows a schematic front view of the same. In these figures, reference numeral 20 denotes a connecting machine as a communication means for exchanging the carrier 4 with the lapping machine. The connecting machine 20 is moved along the radial direction of the internal gear 6 by a linear actuator 21 such as an air cylinder. A reciprocating guide plate 22 is provided, and the guide plate 22 advances toward the passage 7 formed in the internal gear 6 when the carrier 4 is taken in and out.

Reference numeral 23 denotes a magazine for storing empty carriers 4 to be supplied to the lapping machine. Reference numeral 24 denotes a carrier that takes out the carriers 4 one by one from the magazine 23 and opens the opening 4.
A work set portion for loading the work W into A, an unloader 25 for taking out the carrier 4 from the magazine 23, a fixing plate 26 for placing the carrier 4 taken out of the magazine 23 by the unloader 25, Receiving port 27A corresponding to opening 4A of carrier 4
And a work supply machine 2 for supplying a work W before wrapping into a receiving port 27A thereof.
And a jig feeder 29 for moving the jig 27 loaded with the work W below the fixing plate 26. According to the work setting section 24, the work W loaded in the receiving port 27A of the jig can be transferred to the opening of the carrier 4 placed on the fixing plate 26 as described later. The work feeder 28 is of a vibration feeding type (parts feeder) having a spiral guide groove, and the tip of the guide groove is bifurcated, and each end has a finger-like openable / closable chuck 30A, 30B. Is provided.

Reference numeral 31 denotes a monorail type traveling transfer machine (orthogonal coordinate robot) serving as transfer means for transferring the carrier 4 containing the work from the work setting section 24 to the guide plate 22. (X axis guide 3
2) and a Y-axis guide 33).
The X-axis guide 32 is suspended horizontally so as to be movable in the longitudinal direction while maintaining the orthogonal state with the Y-axis guide 33 along a direction perpendicular to the moving direction of the guide plate 22. Have been. The X-axis guide 32 is provided with a suction unit to be described later so as to be able to travel along the longitudinal direction thereof.
An operation of supplying the carrier on the guide plate 22 to the inside of the internal gear 6 while accommodating the work while moving along the shaft guide 32, and taking out the wrapped work together with the carrier from the inside of the internal gear 6. Construct the system.

On the other hand, reference numeral 34 denotes a work collecting section for separating and collecting the wrapped work from the carrier taken out from the inside of the internal gear 6, which is provided near one end of the guide plate 22, Y-axis guide 3 in
3 along with the magazine 23, the fixing plate 26, and the coupling machine 20
Are arranged in series.

Next, the structure of the coupling machine will be described in more detail with reference to FIGS. As is clear from these figures, one end of the guide plate 22 constituting the main part of the coupling machine 20 is connected to the telescopic rod of the linear actuator 21, and the linear actuator 21 mounts the jack 36 on the top of the gantry 35. It is fixed on a pedestal 37 supported so as to be able to move up and down.
A slide piece 38 is fixed to both lower sides of the guide plate 22, and the slide piece 38 is slidably supported along guide shafts 39 provided on both sides of the pedestal 37.
As a result, the guide plate 22 performs a linear motion along the guide shaft 39 by the expansion and contraction operation of the linear motion actuator 21, and its operation position matches the height of the lower stool 2. The guide plate 22 advances toward the opening 7 which is opened when the divided piece 6B constituting the internal gear 6 is detached from the base 6A. It comes into contact with the end face. In this state, the carrier 4 placed on the guide plate 22 is
While being held by the suction unit 40 traveling along the inside, the air is supplied to the inside of the internal gear 6 from the passage opening 7 or taken out from the inside of the internal gear 6 to one end on the guide plate 22. Is slid while maintaining a contact state with the upper surface of the guide plate 22, so that the work accommodated in the opening 4A does not fall off during transportation, and the guide plate 22 and the lower platen 2 are flush. Therefore, the transfer between each other is performed smoothly. During the transport of the carrier 4, a roller made of rubber or the like is provided on the upper surface of the guide plate 22 so that the lower surface of the work accommodated in the opening 4A is not damaged by friction with the guide plate 22, or Teflon (registered trademark) is used. It is good to apply a coating.

Here, the structure of the suction unit 40 is shown in FIG. In the figure, reference numeral 41 denotes a top plate attached to the X-axis guide, and an air cylinder 42 is attached to a lower surface thereof. A disk-shaped support plate 43 is fixed to the telescopic rod, and a suction type suction unit 44 and a ring-shaped receiving seat 45 are attached to the support plate 43. In particular, a spring 46 is interposed between the support plate 43 and the receiving seat 45, and a sponge-like pad 47 is provided on the lower surface of the receiving seat 45. According to the suction unit 40, the support plate 43 is lowered at a predetermined position by the operation of the air cylinder 42. At this time, while the center of the carrier 4 is suctioned by the suction device 44, the periphery of the carrier 4 is pad 47 Can be held.

Next, the structure of the magazine will be described with reference to FIGS. In these figures, reference numeral 50 denotes a column provided to face left and right, and a lift truck 51 is provided between the columns.
Is provided. The elevating carriage 51 is supported on both sides thereof by a guide shaft 52 extending along the column 50 so as to be able to move up and down, and a screw shaft 53 for driving is passed through a central portion thereof. Reference numeral 54 denotes a motor for driving the screw shaft 53 to rotate, and its power is transmitted to the screw shaft 53 via gears 55 and 56. Further, a table 57 for supporting the carrier 4 is connected to the lifting carriage 51 via an arm 58, and the carrier 4 is stacked on the table 57 in a multilayer shape. In particular, the column 50 is provided with a pair of guide pins 59 extending vertically with the table 57 interposed therebetween, so that the carrier 4 can be moved upward while holding the carrier 4 by the guide pins 59. For this reason, the carrier 4 has an opening for accommodating the work, and a pin hole 4B for passing the guide pin 59 around the periphery thereof. According to the above-described magazine 23, the carriers 4 stacked on the table 57 are raised, and the top surfaces thereof are maintained at a predetermined height, and the respective carriers 4 are sequentially made to stand by at the unloading position by the unloader 25. it can. In addition, a sensor S1 for detecting an upper limit and a sensor S2 for detecting a lower limit are mounted on the support column 50 to stop the motor 54 by detecting the lift truck 51 so that the lift truck 51 does not move up and down. Here, the unloader 25 is configured such that a rodless cylinder bridged above the magazine 23 and the fixed plate 26 is used as a track 25A, and a suction unit 25B similar to the suction unit 40 is provided on the track 25A so as to run. (See FIG. 4).

Next, the structure of the work set section will be described with reference to FIGS. In FIGS. 11 and 12, reference numeral 60 denotes a pedestal of a work set portion, and a pedestal 62 whose height is adjustable via a jack 61 is provided on the pedestal 60. As shown in FIG.
The fixing plate 26 is horizontally supported on a side wall 63 of the fixing plate 26 via a bracket 64. In addition, a jig feeder 29 for moving the jig 27 below the fixing plate 26 is provided above the side wall 63. The jig feeder 29 includes a pair of rail members 29A and 29B provided in parallel with each other along the upper surface of the side wall 63, one 29A of which is a driving side composed of a rodless cylinder or the like, and the other 29A is a driving side.
B is a driven side composed of a linear guide or the like. FIG.
As shown in FIG. 3, the rail member 29A is provided with a traveling platform 65 driven by air pressure or the like, and the rail member 29B is provided with a slide piece 6 slidable along a track 66.
The slide piece 67 and the traveling platform 65 are connected by a U-shaped seat plate 68 as shown in FIG. According to the jig feeder 29, the seat plate 68 supports the jig 27 and the rail members 29A, 2A.
9B is moved below the fixed plate 26 from one end. As shown in FIG. 14, the seat plate 68 is provided with a fixing pin 69 for fixing the jig 27 during transfer. On the other hand, the jig 27 is provided with a pinhole 27B for passing a fixing pin 69 and a pinhole 27C for passing a coupling pin described later.

In FIG. 11, reference numeral 70 denotes a turntable having a connecting pin 71, which is a rail member 29A, 2A.
9B and rotatably attached to the output shaft of the index motor 72. The index motor 72 is supported by a cylinder 73 provided on the gantry 60 so as to be able to move up and down. When the index motor 72 is pushed up to a predetermined height by the cylinder 73, the coupling pin 71 is introduced into the pin hole 27C of the jig 27. The jig 27 is shown in FIG.
The work supplied from the work supply machine is sequentially loaded into the receiving port 27A while the jig 27 is intermittently rotated at that position. When the work W is loaded into all the receiving ports 27A, the jig 2 is moved while the index motor 72 is lowered.
7 is put on the seat plate 68, and at this time, the fixing pins 69 of the seat plate 68 are introduced into the pin holes 27B of the jig 27 to fix the jig. The receiving port 27A of the jig is shown in FIG.
The work W can be supported so as not to fall by using a stepped hole as shown in FIG.

On the other hand, the work loaded in the receiving port 27A of the jig is fixed to the pedestal 62 below the fixing plate 26.
A loading machine 74 for transferring the carrier to the opening of the carrier placed thereon, and a jig 27 and a carrier 4 for transferring the same.
And a holding tool 75 that integrates them via a fixing plate 26. The loading machine 74 has a table 77 provided on the upper surface with a projection pin 76 corresponding to the opening of the carrier, and the table 77 is supported by a cylinder 78 so as to be able to move up and down. The holder 75 is a piece 80 having a guide pin 79 for insertion into a pinhole 27C or the like formed in the jig 27.
And a cylinder 81 for moving the piece 80 up and down. As shown in FIG. 14, the fixing plate 26 also has pin holes 26B corresponding to the guide pins 79, and the carrier 4
Through holes 26A corresponding to the openings are formed. Here, the pinholes 26B and 27C match the pinholes 4B of the carrier 4 shown in FIG. According to the work set section 24 as described above, when the jig 27 loaded with the work is moved below the fixing plate 26 by the jig feeder 29, the jig 27 is extended by the extension of the cylinder 78. The jig 27, the fixing plate 26, and the carrier 4 placed on the fixing plate 26 are pushed up toward the fixing plate 26, as shown in FIG.

In particular, they each have their pinholes 4B,
Guide pins 79 are inserted into 26B and 27C to be integrated. At this time, the socket 27A of the jig, the through hole 26A of the fixing plate, and the opening 4A of the carrier are connected to each other on the axis of the protruding pin 76. Has become. In this state, the table 77 is raised by the operation of the cylinder 78 to a position where the upper end surface of the protruding pin 76 coincides with the upper surface of the fixing plate 26, whereby the work W previously loaded into the receiving port 27A of the jig is moved. Projection pin on bottom 76
While being supported in the opening 4A of the carrier. Thus, when the work W is transferred to the opening 4A of the carrier, the guide plate 79 is fixed and the guide pin 79 is lowered while the carrier 4 is held by the suction unit 40 of the traveling transporter while the guide plate 22 is held. After that, the ejection pin 76 is moved to the jig socket 27.
A will be extracted from A. The carrier 4 loaded with the work W is slid from the fixed plate 26 onto the guide plate 22 so that the work W does not fall off. Therefore, the fixed plate 26 and the guide plate 22 have the same height. Is set to

Next, the structure of the work collecting section is shown in FIGS.
8, the work collecting section 34 is generally configured as a small-sized conveyor. Reference numeral 90 denotes a traveling body made of a rubber belt or the like forming an endless track, 91 denotes a motor for driving the traveling body 90, and the carrier 4 denotes a traveling body 9
0 and is transported in the traveling direction. In particular, the carrier 4 is conveyed while being supported by only the two edges of the carrier by the traveling body 90. Therefore, the work W accommodated in the carrier 4 falls below the opening 4A. Reference numeral 92 denotes a cylindrical receiving frame provided between and below the traveling bodies 90, and the work W dropped from the carrier 4 is collected through the receiving frame 92. Incidentally, it is preferable to install a collection container storing water or the like below the receiving frame 92, whereby the impact due to the fall of the work can be reduced and the wrapping surface can be prevented from being damaged. Note that the carrier 4 is transported to the destination by the traveling body 90 while dropping the work W, and a take-out conveyor 93 for taking out the carrier 4 is connected to the leading end thereof (see FIG. 3).

Here, the operation of the lapping machine provided with the work loading / unloading device configured as described above will be described. First, when the work W is wrapped by the lapping machine, the carrier 4 is taken out of the magazine 23 by the unloader 25, moved to the position above the fixed plate 26, and is on standby.
On the other hand, the chucker 30 at the tip of
The workpieces before processing are supplied one by one to A and 30B, and the workpieces are sequentially loaded into the receiving port 27A of the jig 27 which is intermittently rotated. When the work is loaded into all of the receiving ports 27A, the jig 27 is fixed by the jig feeder 29 to the fixing plate 26.
Is moved to a position where the lower surface of the fixing plate 26 is in close contact with the lower surface of the fixing plate 26. Then, the carrier 4 waiting on the fixed plate 26 is lowered onto the fixed plate 26, and immediately after that, the work in the jig 27 is transferred to the carrier opening 4A by the protruding pin 76.

Thereafter, the carrier is moved to the suction unit 40.
The guide plate 22 is slid from the fixed plate 26 onto the guide plate 22 while being held by the guide plate 22. The guide plate 22 is introduced into the passage 7 of the internal gear 6 in advance and waits for the arrival of the carrier 4. Then, when the carrier 4 is moved onto the guide plate 22, the movement of the X-axis guide 32 with respect to the Y-axis guide 33 stops, and the suction unit 40 moves along the X-axis guide 32.
Starts running. As a result, the carrier 4 slides on the guide plate 22 while being held by the suction unit 40, and
From the internal gear 6. When one carrier is supplied to the inside of the internal gear 6, the guide plate 22 is once separated from the passage 7, and instead, the divided piece 6B is inserted into the passage 7, and the passage is closed. Thereafter, the sun gear 5 is rotated by a predetermined amount, whereby the previously supplied carrier 4 is removed from the position of the passage 7. Then
When the divided piece 6B is detached from the base 6A again, the passage 7 is opened, and the guide plate 22 is re-introduced here.
Thus, by repeating the above operation, a fixed number (five in this example) of carriers are arranged inside the internal gear 6.

Thereafter, the upper surface plate 1 is lowered with the passage opening 7 closed, and the work accommodated in each carrier 4 is sandwiched between the upper surface plate 1 and the lower surface plate 2, and in this state, the sun gear 5. Upper platen 1 and lower platen 2 are rotated. This allows
Both surfaces of the work are wrapped with high precision flatness. When the lapping is completed, the upper stool 1 is raised and the work W
At this time, the workpiece may stick to the upper surface plate 1 and may not be separated. Therefore, in this example, after the lapping is completed, the upper surface plate 1 is raised within a range (about 1 mm) in which the distance between the upper surface plate 1 and the carrier 4 does not exceed the thickness of the work W, and the sun gear 5 is rotated in that state. As a result, the work W and the upper surface plate 1 relatively slide against each other due to the rotation / revolution of the carrier 4, and the work is completely separated from the upper surface plate 1. At this time, instead of rotating the sun gear 5, the upper platen 1 or the internal gear 6 may be rotated.

Thereafter, while the upper platen 1 is raised again to a predetermined position, one of the carriers 4 is moved to the position of the passage 7 by the rotation of the sun gear 5, and then the divided piece 6B is separated from the base 6A. The passage 7 is opened, and the guide plate 22 is introduced into the passage 7. Then, the suction unit 40 of the traveling transfer device moves upward inside the internal gear 6 to suck the carrier 4, and moves toward one end of the guide plate 22 in this state. As a result, the carrier 4 is held in the suction unit 40
The carrier 4 taken out of the internal gear 6 is sucked by the X-axis guide 32 starting to move along the Y-axis guide 33 after being slid on the guide plate 22 while being held at the position. While being held by the unit 40, it is slid from the guide plate 22 onto the work collecting portion 34,
Here, the wrapped work W is separated from the carrier 4 and collected. During the discharge of the carrier 4 from the internal gear 6, the next carrier 4 is prepared in the work setting section 24, and the carrier is alternately replaced with the carrier taken out from the internal gear with respect to the internal gear 6. .

[0027]

As is apparent from the above description, according to the present invention, a through hole for a carrier is provided in a portion of the peripheral wall of the internal gear,
Since the carrier can be taken in and out through the opening, a large number of works can be supplied or taken out in units of carriers, and the time required for exchanging works before and after machining can be greatly reduced. In addition, since the carrier can be automatically loaded and unloaded, the efficiency is high and the safety in operation is greatly improved. Furthermore, since the sun gear etc. are rotated with the upper stool slightly raised after the work wrapping is completed, the work is prevented from adhering to the upper stool and all the work is left in the opening of the carrier. Can be taken out reliably.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a main part of a lapping machine according to the present invention.

FIG. 2 is a sectional view of a main part of the lapping machine.

FIG. 3 is a schematic plan view showing a work loading / unloading device applied to the lapping machine.

FIG. 4 is a schematic front view of the work loading / unloading device.

FIG. 5 is a schematic diagram showing a state in which the carrier is carried into the lapping machine by the work carrying-in / out device.

FIG. 6 is a plan view showing a state where the guide plate is introduced into the passage opening;

FIG. 7 is a side view showing a state in which the guide plate is detached from the opening.

FIG. 8 is a side view showing a suction unit for holding a carrier during conveyance.

FIG. 9 is a schematic side view of a magazine.

FIG. 10 is a cross-sectional view of a magazine.

FIG. 11 is a schematic side view of a work set part.

FIG. 12 is a schematic front view of a work set unit.

FIG. 13 is a partial cross-sectional view of a work set part.

FIG. 14 is a partial plan view of a work set part.

FIG. 15 is a cross-sectional view showing a jig partially broken away.

FIG. 16 is a partial cross-sectional view showing a state where a work is transferred from a jig to a carrier.

FIG. 17 is a plan view of a work collection unit.

FIG. 18 is a side view of a work collecting unit.

FIG. 19 is a plan view showing a planetary gear portion in a conventional lapping machine.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Upper surface plate 2 Lower surface plate 3 Planetary gear device 4 Carrier 4A Opening 5 Sun gear 6 Internal gear 6A Base 6B Dividing piece 7 Passage opening 20 Coupler (communication means) 22 Guide plate 23 Magazine 24 Work set part 26 Fixing plate 27 Jig 27A Receiving port 28 Work feeder 29 Jig feeder 31 Traveling conveyance machine (conveying means) 32 X-axis guide 33 Y-axis guide 34 Work collection unit

Claims (6)

[Claims] A carrier having an opening for accommodating a work is disposed between a sun gear and an internal gear, and a work accommodated in the opening of the carrier is provided so as to be vertically opposed to each other. In a lapping machine that wraps while sandwiching between a platen and a lower surface plate, an opening that can be opened and closed to allow the carrier to pass horizontally along the upper surface of the lower surface plate is formed in a portion of a peripheral wall of the internal gear. A lapping machine characterized by the following. 2. A carrier having an opening for accommodating a work is disposed between the sun gear and the internal gear, and the work accommodated in the opening of the carrier is vertically opposed to each other. In a lapping machine that wraps while sandwiching between a board and a lower platen, the internal gear is constituted by a partially cut-out base body with a peripheral wall thereof as a passage for a carrier and a detachable division piece for opening and closing the passage. A lapping machine characterized in that the carrier can be moved in and out of the internal gear through the passage opening in parallel with the upper surface of the lower platen when the divided piece is detached from the mother body. 3. A carrier having an opening for accommodating a work is disposed between the sun gear and the internal gear, and the work accommodated in the opening of the carrier is vertically opposed to each other. In a lapping machine that wraps while sandwiching between a platen and a lower platen, after the work wrapping is completed, raise the upper platen so that the distance between the upper platen and the carrier does not exceed the thickness of the work, and change the state. Sun gear,
A method for controlling a lapping machine, comprising rotating at least one of an internal gear and an upper surface plate. 4. A carrier having an opening for accommodating a work and disposed between the sun gear and the internal gear, and provided vertically opposed to each other with the work held by the carrier interposed therebetween. A work carrying-in / out device applied to a lapping machine having an upper surface plate and a lower surface plate, and having an openable and closable passage for taking a carrier in and out of a peripheral wall portion of the internal gear, A work loading / unloading device, comprising: a communication means provided with a guide plate which advances toward a mouth; and a transfer means which moves along a longitudinal direction of the guide plate with a carrier containing a work. 5. A carrier having an opening for accommodating a work and disposed between the sun gear and the internal gear, and provided vertically opposite to each other with the work held by the carrier interposed therebetween. A work carrying-in / out device applied to a lapping machine having an upper surface plate and a lower surface plate, and having an openable and closable passage for taking a carrier in and out of a peripheral wall portion of the internal gear, A communication means having a guide plate which advances toward the mouth, a magazine for stocking a carrier for supplying the inside of the internal gear from the passage opening through the guide plate, and an opening of the carrier taken out from the magazine. A work setting unit for loading the work, and a transfer unit for transferring a carrier containing the work from the work set unit onto the guide plate, the transfer unit including one end of the guide plate; An operation system that moves along the longitudinal direction of the guide plate while holding the carrier so as to move the work while being accommodated in the carrier between the internal gear and the inside of the internal gear, in the vicinity of one end of the guide plate; Is a work carrying-in / out device provided with a work collecting section for separating and collecting the wrapped work from the carrier taken out of the internal gear by the transfer means. 6. A work set section comprising: a fixing plate for mounting a carrier taken out of a magazine; a jig having a receiving port corresponding to an opening of the carrier; and a work before wrapping is loaded into the receiving port. A work feeder for supplying the work, a jig feeder for moving the jig loaded with the work below the fixing plate, and a lower part of the jig moved below the fixing plate to the inside of the receptacle. 6. A loading / unloading device according to claim 5, further comprising a loading machine having a protruding pin for moving the workpiece in the receiving port through a through hole formed in the fixing plate to the opening of the carrier.