KR200480692Y1

KR200480692Y1 - Machining apparatus of plate

Info

Publication number: KR200480692Y1
Application number: KR2020120003662U
Authority: KR
Inventors: 요시히코 도지마
Original assignee: 나카무라 토메 세이미쓰고교 가부시키가이샤
Priority date: 2011-05-06
Filing date: 2012-05-03
Publication date: 2016-06-24
Also published as: KR20120007849U; CN202572061U; TWM441208U; JP2012232390A; JP5759779B2

Abstract

[PROBLEMS] To provide a loader for carrying in and returning workpieces before and after machining by a single reciprocating operation between a stocker and a machining machine, and has a standby time of a machining device accompanying carry- .
[MEANS FOR SOLVING PROBLEMS] A loader for carrying in / out a plate material between a stocker and a processing machine, and a lifting and holding port located above the work table of the processing machine. The carrying hand of the loader is provided with a work holder which rotates about 90 degrees around the support shaft and which is individually operated on the lower surface and the upper surface when the loader is in the horizontal position. The lifting and lowering tool is located above the table and passes the plate material between the table and the upper side holding tool of the transferring hand.

Description

[0001] MACHINING APPARATUS OF PLATE [0002]

This invention relates to a glass substrate used as a display panel or a touch panel and a device for processing the other plate material. More particularly, the present invention relates to a process for machining a workpiece to be machined and a stocker for stocking the plate material before and after machining And a device for carrying in and out of a work in a machine in a machine.

BACKGROUND ART A display panel such as a liquid crystal display panel or a glass substrate used for a touch panel has a large area of a large area used for a liquid crystal TV and a small area used for a mobile phone or a game machine. The glass substrate is processed while keeping the surface of the substrate horizontally. However, the glass substrate having a small area is referred to as a case (hereinafter, simply referred to as " case " ), And is carried into the processing apparatus in a state in which the surface is vertically stored.

A processing apparatus for processing a glass substrate having a small area usually includes a processing machine, a stocker for mounting the case, and a loader for transferring the substrate between the stocker and the processing machine. The loader pulls the unprocessed substrate held vertically from the case upward by turning it 90 degrees around the horizontal axis, and brings the substrate into the processing machine horizontally, and the processed substrate is moved horizontally from the processing machine The substrate is carried in and out of the processing machine by rotating the substrate around the horizontal axis by 90 degrees and inserting the substrate into the original case from above with the surface being vertical.

When the loader having only one carrying hand is used as the loader for carrying the substrate before the processing into the processing machine and returning the processed substrate to the original storage section in the returning operation, Until the substrate is returned to the stocker and the next substrate is brought into the processing machine from the stocker, the processing machine can not perform the processing operation and the operating rate of the processing machine is lowered.

Therefore, two transfer hands are arranged side by side on the arm tip of the loader, and the substrate is transferred to the processing machine by the one hand before machining, and this substrate is transferred to a work table (hereinafter simply referred to as a table) The two hands are moved to the side, the one hand is opposed to the table, the unprocessed substrate held by the hand is transferred to the processing machine, and the next A loader having a structure for returning the processed substrate to the stocker is used at the time of returning to take the substrate before machining. According to such a carry-in / take-out operation, the machining machine can start machining immediately after the transfer hand is retracted from the machining machine. The loader is capable of moving the machined substrate while the machining machine is machining the substrate, It is possible to carry out the operation of waiting for the completion of the machining operation to be carried out, thereby shortening the waiting time of the machining machine due to the carrying-in and carrying-out of the substrate, thereby increasing the production efficiency (see Patent Document 1, Patent Document 2 ).

When it is necessary to process a large number of workpieces by installing a plurality of processing devices in the factory, it is required to reduce the processing time and reduce the installation area of the apparatus. If the installation area per unit is small, not only the site area of the plant where a plurality of apparatuses are installed can be reduced, but also the transfer route of the substrate to each apparatus is shortened, thereby improving the operation rate of the apparatus It is because.

An apparatus for processing a peripheral edge of a small glass substrate, which is capable of reducing the installation area of the apparatus and having high productivity, is provided with a grindstone disposed on the opposite side of the stocker with a table of the machine being interposed therebetween, By controlling a contouring method in which only the one-dimensional directional movement of the main shaft of the grindstone and the direction (the longitudinal direction of the apparatus) spaced close to the table of the grindstone are controlled in association with each other, A circumferential edge machining apparatus for machining a circumferential edge of a plate member has been proposed by the present applicant (Patent Document 1, Patent Document 2).

According to the contouring peripheral edge machining apparatus, the peripheral edge of the substrate can be processed into an arbitrary shape only by rotation of the main axis and movement of the grindstone in the one-dimensional direction, and the moving region of the substrate or the grindstone can be reduced, The installation area of the apparatus can be greatly reduced as compared with a machine in which the grindstone or the grindstone moves in a two-dimensional planar shape.

Japanese Patent Application Laid-Open No. 2005-271105 Japanese Laid-Open Patent Publication No. 2006-26874

2. Description of the Related Art In recent years, portable terminals equipped with a liquid crystal panel having an intermediate area such as A4 size or B5 size have been rapidly spreading. The liquid crystal panel having a medium area for a portable terminal is required to have a variety of peripheral edge shapes due to a demand for design due to its large production amount and to form an opening (through hole) for a built-in microphone or a speaker .

In order to comply with the demand for mass production, it is necessary to shorten the waiting time of the processing machine and to reduce the installation area of the machine as described above. On the other hand, machining of a glass substrate having an intermediate area requires a longer processing time per piece than processing of a glass substrate having a small area such as a cellular phone. Therefore, the number of substrates on a stocker required for realizing a desired continuous automatic operation Is at least as good as a glass substrate having a small area.

Therefore, in the case of a conventional small-area glass substrate, a plurality of workpieces are stored and processed on a stocker for one processing machine. In the case of a glass substrate having an intermediate area, it is possible to store the workpieces as one row And a case in which about 30 pieces of glass substrates are housed at narrow intervals with the surface being vertical is loaded on the stocker one by one for each processing machine so that continuous automatic operation for a desired time period can be performed.

Therefore, in the machining apparatus for machining the peripheral edge by the above-described contouring method, the machining apparatus and the stalker are not set too large as compared with the apparatus for machining a glass substrate having a small area (since the moving stroke of the grinding wheel becomes large , The dimension in the longitudinal direction of the device becomes large, but the dimension in the width direction does not increase), and the peripheral edge processing of the glass substrate having an intermediate area such as A4 or B5 size can be performed.

As a loader for carrying in / out work between a stocker and a work machine, when a loader having two hands as in the prior art arranged side by side in the width direction of the apparatus is used, the hand facing the table is moved from one side to the other The hand and the substrate gripped by the hand are extended to the side of the processing machine so as to avoid interference with the adjacent processing machine or the loader, the dimension in the width direction of the processing machine or the stocker There arises a problem that the width dimension of the device becomes large and the installation area becomes large.

Further, as is used in some machine tools, a structure for converting a hand opposed to a table by rotation of 90 or 180 degrees around the horizontal axis of two hands is a structure in which air pressure or inertia force It is not possible to perform a high-speed operation and it is difficult to secure a space for pivoting. Therefore, it is difficult to employ it for a glass substrate processing apparatus having an intermediate area.

The glass substrate for a display panel or a touch panel is based on a rectangular shape, and has a short side and a long side. The housing of the work in the case is usually housed with the long side in the width direction of the apparatus and the short side in the top and bottom directions so that the up and down movement of the loader hand can be shortened when the work is taken out from the case . However, in the structure in which two hands are arranged side by side in the width direction of the apparatus, the work processed in one case is stored in the case, and the width of the hand The larger the amount of movement.

The object of the present invention is to provide a loader that performs a one-time reciprocating operation between a storage case on a stocker and a machining machine to bring the unmachined workpiece into the machining device and return the machined workpiece to the original case. Wherein the waiting time of the machine for bringing the sheet into and out of the sheet processing machine is short in the apparatus for processing the sheet material having a certain area such as the glass substrate having the intermediate area, And to obtain such a small device.

The plate material processing apparatus of this invention includes a processing machine 1, a stocker 3 adjacent to the processing machine 1, a loader for loading and unloading the plate material between the stocker and the processing machine, And a lifting and holding member 37 is provided. The processing machine 1 is provided with the table 15 for holding a plate material during processing and a rotary grindstone 27 for processing the peripheral edge of the plate material held on the table. The working machine having the preferable structure includes a table which is rotatably driven around the main shaft while holding the plate material horizontally, a rotary grindstone 27 which is located on the opposite side of the table from the stocker and moves in a direction close to the table, And a controller (5) for controlling the position of the grinding wheel in the direction of close proximity to the grinding wheel so as to control the entire peripheral edge of the grinding wheel only by the one-way movement of the grinding wheel.

The stocker (3) comprises a storage case (C) in which a plurality of plate materials (W) are stacked in a row in a direction perpendicular to the plane with the surface vertically aligned, and a surface of the plate housed in the case And a line passing through the centers of the plural sheets of the plate members is mounted in correspondence with the center of the table 15 of the machine.

The loader 4 moves in the vertical direction and in the carrying direction of the workpiece (in the direction of approaching and separating from the table of the machine tool on the upper side of the plate material mounted on the stocker) and in the vertical direction and in the widthwise direction orthogonal to the carrying direction And a transfer hand 46 which rotates (rocks) around the support shaft 45 by 90 degrees. The carrying hand 46 is provided with work holding openings 47 and 48 which are individually operated respectively on the downward facing face and the upward facing face when the horizontal position is attained. Hereinafter, when the carrying hand is in the horizontal posture, the lower side work holding tool is referred to as a lower side holding tool and the upper side holding tool is referred to as an upper side holding tool. When the delivery hand 46 is in the vertical posture, the upper side retaining mouth 47 faces the machine.

The lifting and retaining tool 37 is located above the table 15 during the loading and unloading of the work so that the plate W can be passed between the lifting and holding tool 37 and the table 15, And a lifting stroke which is located above the plate held by the upper side holding tool 47 of the conveying hand 46 inserted on the table and is capable of passing the plate material between the upper side holding tool 47 and the upper side holding tool 47. [

The processing apparatus of the above structure carries out the loading / unloading of the plate material W into the processing machine 1 by the following operation. The transfer hand 46 is moved downward into the case C to hold the workpiece before the workpiece is lifted from one side of the workpiece holding openings 47 and 48 and then the transfer hand 46 is moved to the side of the machine tool 1 As shown in Fig.

In the case where the work is processed in order from the side close to the processing machine, the workpiece before machining is held by the lower holding tool 48. At this time, after the lifting and lowering tool 37 lifts the processed workpiece on the table 15, the carrying hand 46 moves to the upper side of the table 15 to transfer the workpiece to the table 15, And receives the worked work from the lifting and retaining tool 37 by the upper side retention tool 47. Then, the transfer hand 46 is returned to the stocker 3, and the processing machine starts processing the loaded workpiece immediately when the transfer hand 46 is withdrawn from the table 15.

The transporting hand 46 returned to the stocker 3 is rotated downward to descend so that the processed work held by the upper holding tool 47 is returned to the case and the lower holding tool 48 Holds the workpiece before machining, rises to a horizontal posture, moves to the vicinity of the machining tool, and waits for the end of machining of the machining tool 1. [

In the case where the work is processed in order from the side far from the machine, the workpiece before machining is held by the upper side holder 47. [ The transfer hand 46 moves upward of the table 15 after the horizontal position has been attained and receives the workpiece machined at the lower side holding tool 48 from the table 15, To the lifting and retaining mechanism (37). After the transfer hand 46 is evacuated from the table 15, the lifting and lowering port 37 is lowered to transfer the workpiece to the table 15 to evacuate, and the workpiece is started to be machined. The transporting hand 46 returns to the stocker 3 and rotates downward to descend so that the machined work held by the lower holding opening 48 is returned to the case and the upper holding opening 47 is closed, And moves up to the vicinity of the processing machine to wait for the completion of the machining of the processing machine 1. Then,

In any case, by repeating the above-described operations, the workpiece in the case C is successively returned to the processing machine, and the processed workpiece is successively returned to the original case. In this case, . When the work in the case is completely processed, the entirely processed work is housed in the original case.

In the grinding processing of the glass substrate, pure water is usually used as the processing liquid. Therefore, water and cutting particles are adhered to the processed work. Generally, it is necessary to remove water or cutting water adhering to the workpiece before returning the processed workpiece to the case. In order to clean the processed workpiece, a cleaning table 32 is provided in the middle of the conveyance path of the conveyance hand 46 between the case C on the stocker and the processing machine 1. A preferred cleaning table is a structure in which a workpiece inserted with its surface vertically from above is subjected to airflow flowing from above to below.

When it is desired to avoid taking a long time for the workpiece to be conveyed by the transfer hand 46 staying in the cleaning table 32 while the workpiece is being cleaned, the workpiece is moved to the cleaning table 32 during one reciprocation of the transfer hand 46, . In this case, when the next processed workpiece is exchanged with the cleaned workpiece, the holding position of the processed workpiece of the transfer hand is changed up and down, and the processed workpiece can not be returned to the side where the processed workpiece of the original case is stored . In this case, a provisional mounting table 33 for temporarily storing one piece of workpiece beforehand is provided in the middle of the transfer to the machine, and the pre-machining workpiece previously held in the temporary mounting table 33 and the next pre- It may be carried into the machine while exchanging the work.

In the above-described carrying-in / out operation of the work, between the storage area of the untreated work stored on the far side or the near side from the processing machine in the case and the storage area of the processed work stored sequentially on the opposite side, There is no room for inserting the conveyance hand, but it is unreasonable to store the one work piece in such a case with such a space against the demand to reduce the installation area of the apparatus. One way to solve this problem is to remove the necessary number of pre-machined workpieces from the case to place the transfer hand in a space where it can be inserted and temporarily place it in another place.

As another place, there may be mentioned a table and a cleaning table during processing. That is, since the workpiece being processed on the table and the workpiece being cleaned are pulled out from the case C, it is necessary to install an additional storage section if the transfer hand 46 can be inserted into the space from which the two pieces of workpiece are taken out There is no. In addition, when the provisional mounting table 33 is provided, space for three workpieces can be obtained. However, there is a demand to arrange the work as compactly as possible on the stocker, so there are cases where three or more pieces of work must be taken out. In such a case, a reservoir (35) for temporary storage of one or a plurality of workpieces is provided, and the necessary number of workpieces are stored in the reservoir so as to be transported between the pre- It is good to have space to insert a hand. The retention of the work in the storage stand can be achieved by first moving the desired number of workpieces from the case to the reservoir, machining the remaining workpieces, and then machining the workpieces retracted in the retention direction.

According to this design, a plate material such as a glass substrate having a size of A4 size or B5 size or more is mounted on a stocker in a state in which it is housed in a case tightly and densely in a direction perpendicular to the plane in a vertical posture, It is possible to provide a machining apparatus for a plate material having a high productivity and a small installation area, which performs an operation of continuous automatic machining and returning to the original case.

Since the apparatus can be made compact, it is easy to increase the mechanical rigidity and high-precision machining can be realized. In addition, since a glass substrate or the like having a comparatively large area can be accommodated in the case, it can be transported between processes, and the productivity as a whole including transport can be improved.

Figure 1 is a schematic side view of an embodiment device
Fig. 2 is a cross-
3 is a perspective view of the delivery hand.
Fig. 4 is a view showing the first drawing
FIG. 5 is a cross-
Fig. 6 is a cross-
Fig. 7 is a cross-
Fig. 8 is a view
FIG. 9 is a cross-
Fig. 10 is a cross-
Fig. 11 is a view
FIG. 12 is a view
Fig. 13 is a view
14 is a first drawing showing a second machining operation
Fig. 15 is a cross-

Hereinafter, an embodiment of this invention will be described with reference to the drawings. In the apparatus shown in the figure, a glass substrate W housed in a storage case C having an opened upper portion is carried into the processing machine 1 by a loader 4, and the processing machine 1 carries out the peripheral edge processing And the loaded substrate is returned to the original storage case by the loader 4. The two storage cases are mounted on the stocker 3 and one side of the stocker 3 And two processing machines 1a and 1b, which are arranged rearwardly from each other, are machined in the storage cases on the respective sides.

1, the stocker 3 is a plane rectangle, and a back plate 11 for supporting the constituent members of the two processing machines 1 (1a, 1b) is provided at the center of one side of the stocker 3, (Not shown). On the upper surface of the stocker 3, a locking device (not shown) for fixing the two storage cases C (Ca, Cb) is provided. The housing case C is a container for collectively handling a plurality of substrates and the substrates W are arranged in a vertical direction in the storage case C so as to be narrow And are stored in a state in which they are arranged in an interval. The substrate is generally rectangular in shape, and is housed with its longer side in the width direction of the device and the shorter side in the vertical direction.

The processing machine 1 has a main shaft 12 in the vertical direction which supports and rotates the substrate and two grinding shafts 13 and 14 parallel to the main shaft. At the upper end of the main shaft 12, a table 15 for holding and holding the loaded substrate in a horizontal posture is fixed. The main shaft 12 is rotationally driven by the servo motor 16 and the substrate held on the table 15 is rotated around the center along with the rotation of the main shaft 12. [ A camera 17 for detecting the edge of the substrate placed on the table is provided above the inclination of the table 15.

A straight guide 21 and a feed screw 22 in the horizontal direction (X-axis direction) are provided on the vertical surface of the back plate 11 and are screwed to the feed screw 22, And a conveyance belt 23 that moves along the linear guide 21 along with the rotation. The feed screw 22 is rotationally driven in the forward and reverse directions by the servo motor 24. [

Two conveying platforms 25 and 26 are provided on the conveying table 23, and rotary shafts 13 and 14 are supported by shafts on the respective platforms. The outer grindstone 27 is attached to the grindstone shaft 13 farther from the main shaft 12 and the outer grindstone 27 is attached to the grindstone shaft 14 near the main shaft 12. The grindstone shafts 13, And an inner grindstone 28 is mounted. The circumferential edge of the substrate on the table 15 is controlled in relation to the rotational angle of the main shaft 12 and the moving position of the transfer table 23 in a relational manner registered in the controller 5, To a desired shape. Reference numerals 51 and 52 denote servo amplifiers.

The central axes of the main shaft 12 and the two grinding shafts 13 and 14 are located on a vertical plane parallel to the linear guide 21 and the central view of the substrate W mounted on the stocker 3 is on the vertical plane Is located. The loader, which will be described later, transports the substrate between the storage case C and the processing machine 1 so that the center of the substrate passes through the vertical surface.

As described above, two processing machines 1a and 1b are provided symmetrically with the back plate 11 interposed therebetween. Each of the processing machines includes a substrate (not shown) housed in a storage case C mounted on each side of the stocker W are independently operated without being affected by the operation of the other processing machine or the loader.

A guide arm 41 in the X-axis direction is provided on the stocker 3 at a position above the storage case to be mounted. A feed screw that is rotationally driven by an electric motor 42 is provided in the guide arm 41 and a running carriage 43 that travels along the guide arm 41 is screwed to the feed screw. A conveying hand 46 which rotates (rocks) about the support shaft 90 degrees through an elevator 44 mounted inside the cylinder and a support shaft 45 in the horizontal direction orthogonal to the X- Respectively. The transfer hand 46 swings between a vertical posture extending downward from the support shaft 45 and a horizontal posture extending from the support shaft 45 to the processing machine 1 side.

The conveying hand 46 has a plurality of suction pads 47, 48 which serve as holding holes for the substrate on both sides of the conveying hand 46, that is, on both sides of the upper side and the lower side in the horizontal posture. The adsorption pad holding the substrate by the action of the vacuum pressure is connected to the vacuum source through a different switching valve on one side of the adsorption pad 47 and the other side of the adsorption pad 48, Is conveyed in a state of being adsorbed by a plurality of adsorption pads.

Above the table 15 of each processing machine 1, a lift frame 36 which is lifted and lowered by a cylinder (not shown) is provided, and a suction pad 37 directed downward is attached to the lift frame. The lift frame 36 and the suction pad 37 mounted on the lift frame 36 are disposed on both sides of the moving region of the grinding wheels 27 and 28 in order to avoid interference with the grinding wheels 27 and 28 moving in the X axis direction , Or retracted from the upper side of the table (15) to the stocker (3) side during a work process.

Between the storage case C on the stocker 3 and the processing machine 1 is provided a cleaning table 32 having a holding tool 31 for holding the substrate inserted in the vertical direction with the surface vertically from above, A mounting table 33 is provided. The temporary mounting table 33 temporarily stores the substrate conveyed from the storage case C to the processing machine 1. [ On the other hand, the cleaning table 32 is provided with an air nozzle 34 for spraying air from above on both sides of the substrate supported by the holding tool 31 to blow clean water or cutting water attached to the processed substrate Flush and clean.

Next, the operation of the peripheral edge processing apparatus of the glass substrate having the above structure will be described with reference to Figs. 4 to 13. Fig. In order to eliminate the sliding friction between the adsorption pad and the glass substrate when adsorbing and releasing the glass substrate W by the adsorption pads 47 and 48, when the substrate is adsorbed, The operation of attracting and releasing the substrate in the following description is performed by moving the hand 46 slightly from the substrate immediately after the releasing operation, Is used as a meaning including. The upper side and the lower side of the hand mean the upper side and the lower side when the conveyance hand is in the horizontal posture.

When the storage case C storing the substrate before processing is loaded on the stocker 3 and operation is started, the hand 46 moves downward to the case side in the downward posture and descends to the lower side (lower adsorption pad; The first substrate W1 is picked up and transported to the temporary mounting table 33 for release. The hand 46 moves up to the case side and descends to move the second substrate W2 to the temporary mounting table 33 side so as to move the first substrate W1 to the upper side (47) and then releases the second substrate (W2) to the temporary mounting table (33). Next, the hand 46 moves up to a horizontal posture and moves to the processing machine 1 side, so that the first substrate W1 is opposed to the elevating frame 36. [ In this state, the first substrate W1 is transferred from the upper side of the hand to the elevating frame 36. After the hand 46 is retracted from the table 15, the elevating frame 36 is lowered, W1 to the table 15, and the lift frame 36 is retracted.

The hand 46 moves downward toward the case C while being lowered to position the third substrate W3 on the table 15 while the peripheral edge of the first substrate W1 mounted on the table 15 is being processed, And moves to the temporary mounting table 33 so as to attract the second substrate W2 to the upper side and release the third substrate W3 to the temporary mounting table 33 so as to ascend to be in a horizontal posture, And waits for completion of machining of the workpiece W1.

When the processing is finished, the hand 46 is moved onto the table 15 to suck the processed first substrate W1 onto the lower side 48 of the hand, and the second substrate W2 on the upper side 47 And is transferred to the elevating frame 36 to be retracted from the table 15. After this retraction, the lifting frame 36 is lowered, and the second substrate W2 is transferred to the table 15 to retreat, and the processing machine starts the processing of the second substrate W2.

During the processing of the second substrate W2, the hand 46 is moved downward to raise the first substrate W1 to the cleaning table 32 and move to the case C side to move the fourth substrate W4 Absorbed. The cleaning table 32 blows air from the nozzles 34 to blow the processing liquid (water) and cutting particles adhering to the first substrate W1 into an air stream ejected from the nozzles 34, W1) is dried.

The hand 46 that has adsorbed the fourth substrate W4 moves to the temporary mounting table 33 to attract the third substrate W3 to the upper side 47 and the fourth substrate W4 to the temporary mounting table 33, And is in a horizontal posture to wait for the end of the processing of the second substrate. When the processing of the second substrate is completed, the hand 46 is inserted on the table 15 to suck the processed second substrate W2 to the lower side 48 of the hand, The substrate W4 is transferred to the lifting frame 36. Then, The hand is retracted from the table 15 and the hand 46 is brought into the downward position during the processing of the third substrate W3 mounted on the table 15 by the lifting frame 36 to move the cleaning table 32 The first substrate W1 is moved upward between the first substrate W1 and the temporary mounting table 33 so that the second substrate W2 is lifted by the cleaning table 32 and moved toward the case C, The substrate W1 is returned to the first accommodating portion C1 and the fifth substrate W5 is sucked to the lower side. The hand 46 ascends straight and then moves to the temporary mounting table 33 and descends. After the fourth substrate is attracted to the upper side, the fifth substrate is raised and placed in the horizontal position with the temporary mounting table 33, And waits for the completion of the processing of the substrate W3.

When the processing is completed, the hand 46 is inserted above the table 15, the third substrate W3 processed from the table 15 is sucked downward, and the upper fifth substrate is transferred to the elevating frame 36 I will turn over. The hand 46 is lowered between the cleaning table 32 and the temporary mounting table 33 while the table 15 receives the fifth substrate W5 from the elevating frame and is being processed, The first substrate W1 and the sixth substrate W6 are moved to the side of the case C after the second substrate is moved to the side of the processing machine by the suction of the second substrate, . Then, the second substrate W2 is placed on the second housing portion C2, and the sixth substrate W6 is attracted to the lower side to rise straight and move to the temporary mounting table 33. [ By repeating the above operation, the peripheral edge processing of all the substrates housed in the case C is performed.

In the case C, a space of three substrates is formed between the area where the processed substrate is stored and the area where the processed substrate is stored. Therefore, the hand 46 is inserted into this space, It is possible to carry out transportation.

The above-mentioned machining operation is to process the substrates stored in the storage case C in order from the side close to the processing machine 1, but it is also possible to perform machining from the far side of the machining machine 1 in order. For example, in the case where the substrate W is densely housed in the case C and the hand 46 can not be inserted between the processed substrate and the unprocessed substrate in the space of three substrates, (35) for temporarily storing one or a plurality of substrates on the farther side from the processing machine (1) than the loading position of the storage case (C) of the storage case (3).

14 and 15, when the case C is loaded on the stocker, the hand 46 first moves a predetermined number of the substrates away from the processing machine 1 from the case C one by one To the reservoir (35). The fourth substrate W4 is sucked onto the upper side 47 of the hand 46 and placed on the temporary mounting table 33 to be returned to the next stage, 5 substrate W5 so as to move between the cleaning table 32 and the temporary mounting table 33. The fourth substrate W4 is attracted to the lower side 48 and then slightly moved toward the case side, W5 to the temporary mounting table 33 and moves upwards on the table 15 in a horizontal posture. While the fourth substrate W4 is placed on the table 15 and the processing machine is processing the fourth substrate W4, the hand 46 sucks the sixth substrate W6 to the cleaning table 32 and the temporary mounting table 33 and the fifth substrate W5 is attracted to the lower side and the sixth substrate W6 on the upper side is raised with the provisional mounting table 33 to be in a horizontal posture to move the fourth substrate W4 Wait for the end of machining.

When the processing is finished, the elevating frame 36 picks up the processed substrate W4 and inserts the hand 46 onto the table 15. The fourth substrate W4 is transferred from the lifting frame to the upper side while the lower fifth substrate W5 is placed on the table 15. The hand 46 moves to the cleaning table 32 to clean the fourth substrate W4, (32). The hand 46 goes to take the seventh substrate W7 and sucks the seventh substrate W7 on the upper side to move to the temporary mounting table 33 and adsorbs the sixth substrate W6 on the lower side , The seventh substrate W7 is lifted up on the temporary mounting table 33 to become a horizontal posture and wait for the end of the processing of the fifth substrate W5.

When the processing is finished, the processed substrate W5 is adsorbed by the lifting frame 36, the substrate W5 processed on the upper side of the hand 46 inserted on the table is received, and the sixth substrate W6 And placed on the table 15. The hand 46 moves to the cleaning table 32 to attract the cleaned fourth substrate W4 to the lower side and the upper fifth substrate W5 to the cleaning table 32. The hand C To return the fourth substrate W4 to the first containing portion C1 and adsorb the eighth substrate W8 on the upper side. In this example, a space of six substrates is formed between the processed substrate and the substrate before machining, and the substrate can be transported by inserting the hand 46 into this space.

After the last substrate (the substrate closest to the processing machine) accommodated in the case is carried out as described above, the hand then goes to take the substrates W1 to W3 placed on the holding table 35 and holds them in the same order After the substrates are successively processed, the processed substrates are sequentially returned to the three accommodating portions on the side of the processing machine of the case (C), thereby completing the processing of all the substrates in the case (C).

In the above example, the processed substrate is cleaned and dried in the cleaning table 32 during one processing cycle, and the substrate returned to the case from the processing machine is replaced by the cleaning, The provisional mounting table 33 is provided to replace the substrate. On the other hand, when the cleaning time is shorter than the processing time and the hand stays on the cleaning table during cleaning and drying, and the processed substrate is returned to the case without being held on the cleaning table, the temporary mounting table 33 There is no need to install. In this case, a reservoir 35 for storing the number of sheets (one sheet being processed) required to be removed for inserting the hand may be provided.

1: Machine
3: Stocker
4: Loader
5: Controller
15: Work table
27: rotating grindstone
32: Washing zone
33: temporary installation
35: Reservoir
37: Lifting and holding port
45: Support shaft
46:
47:
48:
C: Storage case
W: plate

Claims

A conveying hand for conveying a sheet material before and after processing between the table and the stocker; and a conveying device for conveying the sheet material between the table and the stocker, And a lifting and lowering port for lifting and transferring the plate material between the table and the table,
The transfer hand is provided with a plate holding member on the upper side and the lower side when the plate member is held in the horizontal posture and directly receives the plate member between the lower holding member and the table and rotates the plate member between the holding member on the upper side and the table , The apparatus for machining a plate material by passing the plate material through the lifting and lowering port,
And a holding table for temporarily holding at least one plate material in a vertical posture between the receiving portion of the plate material on the stocker and the processing machine or between the receiving portion and the processing machine, At least one pre-machining plate is stored in the reservoir stand and provisional mounting stand, and all the plate materials of the storage section after being stored are transferred to the processing machine before the plate material of the storage section is transferred to the processing machine, Into the processing machine.

The method according to claim 1,
A cleaning table for holding and cleaning one sheet of processed sheet material in a vertical posture between the storage portion of the sheet material on the stocker and the processing machine and the temporary mounting table for holding one sheet of pre-
Wherein the transfer hand is a plate for transferring a sheet material to be transferred to the processing machine between the upper and lower holding tools in the temporary mounting table and replacing the plate taken out from the processing machine between the upper and lower holding tools in the cleaning table, .

3. The method according to claim 1 or 2,
A cutting apparatus for working a peripheral edge of a plate material by control of a contouring method in accordance with a rotation angle of a main axis of the table and a position of a tool for machining a peripheral edge of the plate near and away from the table , The center of the plate material stored in the stocker, the tool, and the center of rotation of the table are located on the same vertical plane, and the table is positioned in the middle between the tool and the plate material on the stocker.

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