JP4567689B2 - 半導体装置の設計支援装置 - Google Patents
半導体装置の設計支援装置 Download PDFInfo
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Description
図1は、本発明の実施の形態にかかる半導体装置の設計支援装置の主構成を示すブロック図である。図1に示すように、本実施の形態にかかる半導体装置の設計支援装置は、入力制御部2と、インターポーザ配置部4と、ダイボンド部5と、ワイヤボンド部6と、デザインルール測定部7と、記憶部8と、データ分析部9、を備えて構成されている。なお、図1において矢印線はデータの流れを示す。また、インターポーザ配置部4と、ダイボンド部5と、ワイヤボンド部6と、をまとめてアセンブリ部3と称する。
2 入力制御部
3 アセンブリ部
4 インターポーザ配置部
5 ダイボンド部
6 ワイヤボンド部
7 デザインルール測定部
7a 測定結果
8 測定結果データ
9 データ分析部
10 分析結果データ
11a 半導体チップ
11b 半導体チップ
12 インターポーザ
13 ボンドワイヤ
14 ボンディングパッド
15 ボンディングフィンガ
16 要因表
17 直交表
Claims (10)
- 半導体チップとインターポーザとを接続するボンドワイヤの配線設計を支援する半導体装置の設計支援装置であって、
半導体チップのインターポーザへの配置位置のばらつきの発生と、インターポーザのボンドワイヤ接続端子位置のばらつきの発生と、を模擬した模擬設計データを作成する手段と、
前記模擬設計データに基づいて、前記半導体チップのインターポーザへの配置位置のばらつき、および前記インターポーザのボンドワイヤ接続端子位置のばらつきに起因した半導体装置の製造における不具合を分析する分析手段と、
を備えることを特徴とする半導体装置の設計支援装置。 - 半導体チップとインターポーザとを接続するボンドワイヤの配線設計を支援する半導体装置の設計支援装置であって、
半導体チップのインターポーザへの配置位置のばらつきの発生と、インターポーザのボンドワイヤ接続端子位置のばらつきの発生と、を模擬した模擬設計データを作成する手段と、
前記模擬設計データに基づいて、前記半導体チップのインターポーザへの配置位置のばらつきの許容範囲、および前記インターポーザのボンドワイヤ接続端子位置のばらつきの許容範囲を分析する分析手段と、
を備えることを特徴とする請求項1に記載の半導体装置の設計支援装置。 - 半導体パッケージの設計データに基づいて、インターポーザに半導体チップを配置する際の半導体チップの配置位置のばらつきを模擬した位置に半導体チップを配置した半導体チップ模擬配置データを作成する第1のデータ作成手段と、
前記半導体パッケージの設計データおよび半導体チップ模擬配置データに基づいて、前記設計データにおける配置位置からずれて配置された半導体チップのボンドワイヤ接続端子と、前記インターポーザのボンドワイヤ接続端子との間をボンドワイヤで配線したボンドワイヤ模擬データを作成する第2のデータ作成手段と、
前記ボンドワイヤ模擬データから、前記配線されたボンドワイヤのデザインルールを測定する測定手段と、
前記測定手段における測定結果の分析を行う分析手段と、
を備えたことを特徴とする半導体装置の設計支援装置。 - 前記半導体パッケージの設計データとして、前記インターポーザの形状、前記半導体チップの形状、前記半導体チップの前記インターポーザへの配置位置、前記半導体チップと前記インターポーザとを接続するボンドワイヤの形状、および前記半導体チップと前記インターポーザとを接続するボンドワイヤの配置位置を用いることを特徴とする請求項3に記載の半導体装置の設計支援装置。
- 第1のデータ作成手段が、前記半導体パッケージの設計データにおける前記インターポーザへの前記半導体チップの配置位置に対して、前記インターポーザの半導体チップ配置面における面内方向もしくは回転方向での前記半導体チップの配置位置のばらつき、または前記インターポーザの厚み方向での前記半導体チップの傾きのばらつきを模擬した位置に半導体チップを配置した半導体チップ模擬配置データを作成すること
を特徴とする請求項3に記載の半導体装置の設計支援装置。 - 前記測定手段が、前記配線されたボンドワイヤのデザインルールとして、前記ボンドワイヤ間のクリアランス、前記ボンドワイヤと前記半導体チップとのクリアランスを測定すること
を特徴とする請求項3に記載の半導体装置の設計支援装置。 - 前記分析手段が、デザインルールを満足する前記半導体チップの前記インターポーザへの配置位置のばらつきの許容範囲を分析すること
を特徴とする請求項6に記載の半導体装置の設計支援装置。 - 前記分析手段が、デザインルールを満足する前記インターポーザのボンドワイヤ接続端子位置のばらつきの許容範囲を分析すること
を特徴とする請求項6に記載の半導体装置の設計支援装置。 - 前記測定手段における測定結果を記憶する記憶手段を備えることを特徴とする請求項3に記載の半導体装置の設計支援装置。
- 前記分析手段における分析結果を記憶する記憶手段を備えることを特徴とする請求項3に記載の半導体装置の設計支援装置。
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PCT/JP2004/016243 WO2006048921A1 (ja) | 2004-11-01 | 2004-11-01 | 半導体装置の設計支援装置 |
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US (1) | US7725847B2 (ja) |
JP (1) | JP4567689B2 (ja) |
CN (1) | CN100403502C (ja) |
DE (1) | DE112004002981B4 (ja) |
HK (1) | HK1097955A1 (ja) |
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DE112004002981T5 (de) | 2007-11-08 |
CN100403502C (zh) | 2008-07-16 |
HK1097955A1 (en) | 2007-07-06 |
US7725847B2 (en) | 2010-05-25 |
WO2006048921A1 (ja) | 2006-05-11 |
JPWO2006048921A1 (ja) | 2008-05-22 |
US20080250363A1 (en) | 2008-10-09 |
DE112004002981B4 (de) | 2018-07-26 |
CN1894786A (zh) | 2007-01-10 |
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