JP4549136B2 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

Info

Publication number
JP4549136B2
JP4549136B2 JP2004252821A JP2004252821A JP4549136B2 JP 4549136 B2 JP4549136 B2 JP 4549136B2 JP 2004252821 A JP2004252821 A JP 2004252821A JP 2004252821 A JP2004252821 A JP 2004252821A JP 4549136 B2 JP4549136 B2 JP 4549136B2
Authority
JP
Japan
Prior art keywords
valve
fluid
unit
gap
flow meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004252821A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006072510A (ja
JP2006072510A5 (enExample
Inventor
研郎 吉野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Yukizai Corp
Original Assignee
Asahi Organic Chemicals Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Organic Chemicals Industry Co Ltd filed Critical Asahi Organic Chemicals Industry Co Ltd
Priority to JP2004252821A priority Critical patent/JP4549136B2/ja
Publication of JP2006072510A publication Critical patent/JP2006072510A/ja
Publication of JP2006072510A5 publication Critical patent/JP2006072510A5/ja
Application granted granted Critical
Publication of JP4549136B2 publication Critical patent/JP4549136B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Flow Control (AREA)
JP2004252821A 2004-08-31 2004-08-31 流体制御装置 Expired - Fee Related JP4549136B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004252821A JP4549136B2 (ja) 2004-08-31 2004-08-31 流体制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004252821A JP4549136B2 (ja) 2004-08-31 2004-08-31 流体制御装置

Publications (3)

Publication Number Publication Date
JP2006072510A JP2006072510A (ja) 2006-03-16
JP2006072510A5 JP2006072510A5 (enExample) 2007-09-20
JP4549136B2 true JP4549136B2 (ja) 2010-09-22

Family

ID=36153105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004252821A Expired - Fee Related JP4549136B2 (ja) 2004-08-31 2004-08-31 流体制御装置

Country Status (1)

Country Link
JP (1) JP4549136B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4994082B2 (ja) * 2007-03-30 2012-08-08 旭有機材工業株式会社 配管部材
JP6037845B2 (ja) * 2013-01-17 2016-12-07 旭有機材株式会社 流体制御装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0683456A (ja) * 1992-09-03 1994-03-25 M C Electron Kk マスフローコントローラ
JPH07210254A (ja) * 1993-11-30 1995-08-11 Hitachi Metals Ltd ガス質量流量制御装置
JPH09303609A (ja) * 1996-05-21 1997-11-28 Toshiba Corp 流量制御弁及びこれを用いた流量制御システム
JP2002135894A (ja) * 2000-10-26 2002-05-10 Murata Mfg Co Ltd 超音波センサ及びそれを用いた電子装置
JP4557413B2 (ja) * 2000-12-05 2010-10-06 旭有機材工業株式会社 ピンチバルブ
JP2003021252A (ja) * 2001-07-05 2003-01-24 Smc Corp 流量制御弁
JP4763936B2 (ja) * 2001-09-07 2011-08-31 アドバンス電気工業株式会社 バルブにおけるガスパージ方法及び構造
JP4590139B2 (ja) * 2001-09-10 2010-12-01 アドバンス電気工業株式会社 流体コントロール弁
JP3995543B2 (ja) * 2002-07-03 2007-10-24 旭有機材工業株式会社 流体制御弁
JP2004164033A (ja) * 2002-11-08 2004-06-10 Asahi Organic Chem Ind Co Ltd 流量制御装置
JP2004170326A (ja) * 2002-11-22 2004-06-17 Oval Corp 超音波式渦流量計

Also Published As

Publication number Publication date
JP2006072510A (ja) 2006-03-16

Similar Documents

Publication Publication Date Title
JP4461329B2 (ja) 流体制御装置
WO2007023972A1 (ja) 流体制御装置
JP5041847B2 (ja) 流体制御装置
WO2007023970A1 (ja) 流体制御装置
US20110044125A1 (en) Fluid mixing system
KR101124447B1 (ko) 유체제어장치
KR20070090078A (ko) 유체혼합장치
JP2007058343A (ja) 流体制御装置
JP4549136B2 (ja) 流体制御装置
JP4854331B2 (ja) 流体混合装置
JP2006072460A (ja) 流体制御装置
JP2014137724A (ja) 流体制御装置
JP2007058336A (ja) 流体制御装置
JP4854330B2 (ja) 流体混合装置
JP2006134100A (ja) 流体制御装置
JP2007057270A (ja) 流体モニタ装置
JP4854348B2 (ja) 流体混合装置
JP2006072515A (ja) 流体制御装置
JP4854350B2 (ja) 流体混合装置
JP2007058348A (ja) 流体制御装置
JP4854329B2 (ja) 流体混合装置
JP4854349B2 (ja) 流体混合装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070807

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070807

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090819

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090825

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091023

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100119

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100317

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100608

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100706

R150 Certificate of patent or registration of utility model

Ref document number: 4549136

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130716

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees