JP4521621B2 - 半導体単結晶製造方法 - Google Patents

半導体単結晶製造方法 Download PDF

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Publication number
JP4521621B2
JP4521621B2 JP14388999A JP14388999A JP4521621B2 JP 4521621 B2 JP4521621 B2 JP 4521621B2 JP 14388999 A JP14388999 A JP 14388999A JP 14388999 A JP14388999 A JP 14388999A JP 4521621 B2 JP4521621 B2 JP 4521621B2
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Prior art keywords
single crystal
rod
crystal rod
pipe
temperature
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Japanese (ja)
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JP2000327476A5 (enExample
JP2000327476A (ja
Inventor
慎二 十河
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Sumco Techxiv Corp
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Sumco Techxiv Corp
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  • Crystals, And After-Treatments Of Crystals (AREA)
JP14388999A 1999-05-24 1999-05-24 半導体単結晶製造方法 Expired - Lifetime JP4521621B2 (ja)

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JP14388999A JP4521621B2 (ja) 1999-05-24 1999-05-24 半導体単結晶製造方法

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Application Number Priority Date Filing Date Title
JP14388999A JP4521621B2 (ja) 1999-05-24 1999-05-24 半導体単結晶製造方法

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JP2000327476A JP2000327476A (ja) 2000-11-28
JP2000327476A5 JP2000327476A5 (enExample) 2006-06-01
JP4521621B2 true JP4521621B2 (ja) 2010-08-11

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JP14388999A Expired - Lifetime JP4521621B2 (ja) 1999-05-24 1999-05-24 半導体単結晶製造方法

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104264220A (zh) * 2014-07-02 2015-01-07 洛阳金诺机械工程有限公司 一种用产品料直接拉制硅芯的方法
JP6863240B2 (ja) * 2017-11-13 2021-04-21 株式会社Sumco シリコン単結晶の製造装置および製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1644002A1 (de) * 1967-04-15 1970-04-09 Siemens Ag Verfahren zum tiegelfreien Zonenschmelzen eines kristallinen Stabes,insbesondere Halbleiterstabes
DE2227750C3 (de) * 1972-06-07 1980-08-28 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum tiegelfreien Zonenschmelzen eines stabförmigen Körpers aus kristallinem Material, insbesondere aus Halbleitermaterial
DE2438852C3 (de) * 1974-08-13 1980-02-07 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen von homogen-dotierten Halbleitereinkristallstäben
JP2845086B2 (ja) * 1993-04-07 1999-01-13 信越半導体株式会社 半導体単結晶成長装置
JPH0940492A (ja) * 1995-07-27 1997-02-10 Hitachi Cable Ltd 単結晶の製造方法及び製造装置

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