JP4521565B2 - 透明電極膜 - Google Patents
透明電極膜 Download PDFInfo
- Publication number
- JP4521565B2 JP4521565B2 JP2004245356A JP2004245356A JP4521565B2 JP 4521565 B2 JP4521565 B2 JP 4521565B2 JP 2004245356 A JP2004245356 A JP 2004245356A JP 2004245356 A JP2004245356 A JP 2004245356A JP 4521565 B2 JP4521565 B2 JP 4521565B2
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- Prior art keywords
- film
- thickness
- ito
- transparent
- metal
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Description
2 透明酸化物半導体
3 電導電子
4 基板
5 金属内での電子の平均自由行程
6 透明酸化物半導体内での電子の平均自由行程
7 島状構造の厚み
8 層状構造の厚み
Claims (5)
- イオンビームスパッタ法あるいはデュアルイオンビームスパッタ法で作製される30nm以下の層状構造をもつ金属層を有する透明電極膜であって、その金属のバルク値の平均自由行程に近い厚みの層状構造の導電性透明酸化物半導体を積層させる構造により、金属層の膜表面や粒界の電子散乱による抵抗上昇が抑制され、シート抵抗が50Ω/sq.以下であることを特徴とする透明電極膜
- 前記金属層に金を用いたことを特徴とする請求項1記載の透明電極膜
- 前記導電性透明酸化物半導体として酸化インジウムを含有することを特徴とする請求項1記載の透明電極膜
- 前記導電性透明酸化物半導体の厚みを10〜30nmにすることによって金属膜の光の反射を抑えたことを特徴とする請求項1記載又は請求項2記載又は請求項3記載の透明電極膜
- 前記導電性透明酸化物半導体が、基板とターゲットを対向させ反跳Arを抑制した基板配置のイオンビームスパッタ法を用いて作製したことを特徴とする請求項3記載の透明電極膜
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004245356A JP4521565B2 (ja) | 2004-08-25 | 2004-08-25 | 透明電極膜 |
Applications Claiming Priority (1)
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JP2004245356A JP4521565B2 (ja) | 2004-08-25 | 2004-08-25 | 透明電極膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006063365A JP2006063365A (ja) | 2006-03-09 |
JP4521565B2 true JP4521565B2 (ja) | 2010-08-11 |
Family
ID=36110110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004245356A Expired - Fee Related JP4521565B2 (ja) | 2004-08-25 | 2004-08-25 | 透明電極膜 |
Country Status (1)
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JP (1) | JP4521565B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112151625B (zh) * | 2020-09-04 | 2022-10-14 | 泰州隆基乐叶光伏科技有限公司 | 太阳电池及生产方法、电池组件 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0255246A (ja) * | 1988-08-22 | 1990-02-23 | Nippon Sheet Glass Co Ltd | 高耐久性熱線遮へいガラスおよびその製造方法 |
JPH10309778A (ja) * | 1997-05-13 | 1998-11-24 | Toppan Printing Co Ltd | 積層体 |
JP2004034312A (ja) * | 2002-06-28 | 2004-02-05 | Mitsui Chemicals Inc | 透明導電性フィルムの製造方法 |
-
2004
- 2004-08-25 JP JP2004245356A patent/JP4521565B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0255246A (ja) * | 1988-08-22 | 1990-02-23 | Nippon Sheet Glass Co Ltd | 高耐久性熱線遮へいガラスおよびその製造方法 |
JPH10309778A (ja) * | 1997-05-13 | 1998-11-24 | Toppan Printing Co Ltd | 積層体 |
JP2004034312A (ja) * | 2002-06-28 | 2004-02-05 | Mitsui Chemicals Inc | 透明導電性フィルムの製造方法 |
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Publication number | Publication date |
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JP2006063365A (ja) | 2006-03-09 |
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