JP4509972B2 - 配線基板、埋め込み用セラミックチップ - Google Patents
配線基板、埋め込み用セラミックチップ Download PDFInfo
- Publication number
- JP4509972B2 JP4509972B2 JP2006161700A JP2006161700A JP4509972B2 JP 4509972 B2 JP4509972 B2 JP 4509972B2 JP 2006161700 A JP2006161700 A JP 2006161700A JP 2006161700 A JP2006161700 A JP 2006161700A JP 4509972 B2 JP4509972 B2 JP 4509972B2
- Authority
- JP
- Japan
- Prior art keywords
- chip
- main surface
- layer
- ceramic
- terminal electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/236—Terminals leading through the housing, i.e. lead-through
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
- H05K1/023—Reduction of cross-talk, noise or electromagnetic interference using auxiliary mounted passive components or auxiliary substances
- H05K1/0231—Capacitors or dielectric substances
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC]
- H05K1/185—Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC] associated with components encapsulated in the insulating substrate of the PCBs; associated with components incorporated in internal layers of multilayer circuit boards
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
- H10W70/68—Shapes or dispositions thereof
- H10W70/685—Shapes or dispositions thereof comprising multiple insulating layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/01—Manufacture or treatment
- H10W74/019—Manufacture or treatment using temporary auxiliary substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/111—Pads for surface mounting, e.g. lay-out
- H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/096—Vertically aligned vias, holes or stacked vias
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10674—Flip chip
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10712—Via grid array, e.g. via grid array capacitor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/7424—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used as a support during the manufacture of self-supporting substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/941—Dispositions of bond pads
- H10W72/9415—Dispositions of bond pads relative to the surface, e.g. recessed, protruding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006161700A JP4509972B2 (ja) | 2005-09-01 | 2006-06-09 | 配線基板、埋め込み用セラミックチップ |
| US11/508,968 US7557440B2 (en) | 2005-09-01 | 2006-08-24 | Wiring board and ceramic chip to be embedded |
| US12/475,648 US7956454B2 (en) | 2005-09-01 | 2009-06-01 | Wiring board and ceramic chip to be embedded |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005254031 | 2005-09-01 | ||
| JP2006161700A JP4509972B2 (ja) | 2005-09-01 | 2006-06-09 | 配線基板、埋め込み用セラミックチップ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007096262A JP2007096262A (ja) | 2007-04-12 |
| JP2007096262A5 JP2007096262A5 (https=) | 2009-09-10 |
| JP4509972B2 true JP4509972B2 (ja) | 2010-07-21 |
Family
ID=37802920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006161700A Expired - Fee Related JP4509972B2 (ja) | 2005-09-01 | 2006-06-09 | 配線基板、埋め込み用セラミックチップ |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US7557440B2 (https=) |
| JP (1) | JP4509972B2 (https=) |
Families Citing this family (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7825522B2 (en) * | 2006-07-18 | 2010-11-02 | Lsi Corporation | Hybrid bump capacitor |
| KR100849791B1 (ko) * | 2007-03-12 | 2008-07-31 | 삼성전기주식회사 | 캐패시터 내장형 인쇄회로기판 |
| JP5394625B2 (ja) * | 2007-10-05 | 2014-01-22 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
| JP2009099589A (ja) * | 2007-10-12 | 2009-05-07 | Elpida Memory Inc | ウエハまたは回路基板およびその接続構造体 |
| EP2259669A4 (en) * | 2008-03-24 | 2011-12-28 | Ngk Spark Plug Co | COMPONENT WITH PCB |
| JP5005599B2 (ja) * | 2008-03-31 | 2012-08-22 | Tdk株式会社 | 電子部品及び電子部品モジュール |
| JP5217584B2 (ja) * | 2008-04-07 | 2013-06-19 | 株式会社村田製作所 | 積層セラミック電子部品 |
| JP5185683B2 (ja) * | 2008-04-24 | 2013-04-17 | パナソニック株式会社 | Ledモジュールの製造方法および照明器具の製造方法 |
| US7745920B2 (en) * | 2008-06-10 | 2010-06-29 | Micron Technology, Inc. | Packaged microelectronic devices and methods for manufacturing packaged microelectronic devices |
| JP5314370B2 (ja) * | 2008-09-16 | 2013-10-16 | 日本特殊陶業株式会社 | セラミック部品の製造方法 |
| JP2010087499A (ja) * | 2008-09-30 | 2010-04-15 | Ibiden Co Ltd | コンデンサ装置の製造方法 |
| TWI366906B (en) * | 2009-03-31 | 2012-06-21 | Ind Tech Res Inst | Die stacking structure and fabricating method thereof |
| JP5535765B2 (ja) * | 2009-06-01 | 2014-07-02 | 日本特殊陶業株式会社 | セラミックコンデンサの製造方法 |
| JP5524715B2 (ja) * | 2009-06-01 | 2014-06-18 | 日本特殊陶業株式会社 | セラミックコンデンサ、配線基板 |
| JPWO2011089936A1 (ja) * | 2010-01-22 | 2013-05-23 | 日本電気株式会社 | 機能素子内蔵基板及び配線基板 |
| TW201135980A (en) * | 2010-04-02 | 2011-10-16 | Icp Technology Co Ltd | Light-emitting diode with substrate having surrounding wall and manufacturing method thereof |
| JP5548060B2 (ja) * | 2010-07-28 | 2014-07-16 | 株式会社東芝 | 半導体装置 |
| TWI446497B (zh) * | 2010-08-13 | 2014-07-21 | 欣興電子股份有限公司 | 嵌埋被動元件之封裝基板及其製法 |
| TWI411073B (zh) * | 2010-08-13 | 2013-10-01 | 欣興電子股份有限公司 | 嵌埋被動元件之封裝基板及其製法 |
| US20120068218A1 (en) * | 2010-09-17 | 2012-03-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Thermally efficient packaging for a photonic device |
| JP2012104557A (ja) * | 2010-11-08 | 2012-05-31 | Ngk Spark Plug Co Ltd | 電子部品付き配線基板及びその製造方法 |
| JP2012216611A (ja) * | 2011-03-31 | 2012-11-08 | Sony Corp | 薄膜キャパシタ、実装基板およびその製造方法 |
| US10622310B2 (en) | 2012-09-26 | 2020-04-14 | Ping-Jung Yang | Method for fabricating glass substrate package |
| JP6144058B2 (ja) * | 2013-01-31 | 2017-06-07 | 新光電気工業株式会社 | 配線基板及び配線基板の製造方法 |
| JP6013960B2 (ja) * | 2013-03-28 | 2016-10-25 | 京セラ株式会社 | 配線基板 |
| US9786434B2 (en) * | 2013-10-22 | 2017-10-10 | Samsung Electro-Mechanics Co., Ltd. | Multilayer ceramic electronic component and printed circuit board having the same |
| US9331021B2 (en) * | 2014-04-30 | 2016-05-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Chip-on-wafer package and method of forming same |
| JP2016076658A (ja) * | 2014-10-08 | 2016-05-12 | イビデン株式会社 | 電子部品内蔵配線板及びその製造方法 |
| US9601410B2 (en) | 2015-01-07 | 2017-03-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method |
| US9627365B1 (en) * | 2015-11-30 | 2017-04-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Tri-layer CoWoS structure |
| US9852988B2 (en) | 2015-12-18 | 2017-12-26 | Invensas Bonding Technologies, Inc. | Increased contact alignment tolerance for direct bonding |
| JP2017123459A (ja) * | 2016-01-08 | 2017-07-13 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | プリント回路基板 |
| US9831148B2 (en) * | 2016-03-11 | 2017-11-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated fan-out package including voltage regulators and methods forming same |
| US10446487B2 (en) | 2016-09-30 | 2019-10-15 | Invensas Bonding Technologies, Inc. | Interface structures and methods for forming same |
| US10580735B2 (en) | 2016-10-07 | 2020-03-03 | Xcelsis Corporation | Stacked IC structure with system level wiring on multiple sides of the IC die |
| KR20190092584A (ko) * | 2016-12-29 | 2019-08-07 | 인벤사스 본딩 테크놀로지스 인코포레이티드 | 집적된 수동 컴포넌트를 구비한 접합된 구조체 |
| WO2018169968A1 (en) | 2017-03-16 | 2018-09-20 | Invensas Corporation | Direct-bonded led arrays and applications |
| US10784191B2 (en) | 2017-03-31 | 2020-09-22 | Invensas Bonding Technologies, Inc. | Interface structures and methods for forming same |
| US10510679B2 (en) | 2017-06-30 | 2019-12-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device with shield for electromagnetic interference |
| JP2019067858A (ja) * | 2017-09-29 | 2019-04-25 | イビデン株式会社 | プリント配線板及びその製造方法 |
| US11011503B2 (en) | 2017-12-15 | 2021-05-18 | Invensas Bonding Technologies, Inc. | Direct-bonded optoelectronic interconnect for high-density integrated photonics |
| US11169326B2 (en) | 2018-02-26 | 2021-11-09 | Invensas Bonding Technologies, Inc. | Integrated optical waveguides, direct-bonded waveguide interface joints, optical routing and interconnects |
| US11256004B2 (en) | 2018-03-20 | 2022-02-22 | Invensas Bonding Technologies, Inc. | Direct-bonded lamination for improved image clarity in optical devices |
| US11515291B2 (en) | 2018-08-28 | 2022-11-29 | Adeia Semiconductor Inc. | Integrated voltage regulator and passive components |
| CN109561570B (zh) * | 2018-11-21 | 2020-12-18 | 奥特斯(中国)有限公司 | 部件承载件及其制造方法以及使用填料颗粒的方法 |
| US11901281B2 (en) | 2019-03-11 | 2024-02-13 | Adeia Semiconductor Bonding Technologies Inc. | Bonded structures with integrated passive component |
| CN111834354B (zh) | 2019-04-18 | 2024-07-16 | 三星电子株式会社 | 半导体封装件 |
| JP7379899B2 (ja) * | 2019-07-22 | 2023-11-15 | Tdk株式会社 | セラミック電子部品 |
| JP7408975B2 (ja) * | 2019-09-19 | 2024-01-09 | Tdk株式会社 | セラミック電子部品 |
| US11762200B2 (en) | 2019-12-17 | 2023-09-19 | Adeia Semiconductor Bonding Technologies Inc. | Bonded optical devices |
| CN113013125B (zh) * | 2019-12-20 | 2024-07-09 | 奥特斯奥地利科技与系统技术有限公司 | 嵌入有在侧向上位于堆叠体的导电结构之间的内插件的部件承载件 |
| US11705378B2 (en) * | 2020-07-20 | 2023-07-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor packages and methods of forming the same |
| CN121100389A (zh) * | 2023-06-07 | 2025-12-09 | 株式会社村田制作所 | 层叠陶瓷电容器 |
| WO2024252863A1 (ja) * | 2023-06-07 | 2024-12-12 | 株式会社村田製作所 | 積層セラミックコンデンサ |
| US12347628B1 (en) * | 2024-08-27 | 2025-07-01 | Saras Micro Devices, Inc. | Stackable and embeddable vertical capacitors in semiconductor devices and method of fabrication |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3672169B2 (ja) * | 1999-03-05 | 2005-07-13 | 日本特殊陶業株式会社 | コンデンサ、コア基板本体の製造方法、及び、コンデンサ内蔵コア基板の製造方法 |
| JP3489728B2 (ja) * | 1999-10-18 | 2004-01-26 | 株式会社村田製作所 | 積層コンデンサ、配線基板および高周波回路 |
| JP2004172412A (ja) * | 2002-11-20 | 2004-06-17 | Kyocera Corp | コンデンサ素子およびコンデンサ素子内蔵多層配線基板 |
| JP2005039217A (ja) | 2003-06-24 | 2005-02-10 | Ngk Spark Plug Co Ltd | 中間基板 |
| JP2005039243A (ja) | 2003-06-24 | 2005-02-10 | Ngk Spark Plug Co Ltd | 中間基板 |
| US7135534B2 (en) * | 2003-07-24 | 2006-11-14 | Rajiv Gandhi Centre For Biotechnology | Polymer support for solid phase peptide synthesis and process for preparation thereof |
| CN100367491C (zh) | 2004-05-28 | 2008-02-06 | 日本特殊陶业株式会社 | 中间基板 |
| JP4528062B2 (ja) * | 2004-08-25 | 2010-08-18 | 富士通株式会社 | 半導体装置およびその製造方法 |
| TWI264094B (en) * | 2005-02-22 | 2006-10-11 | Phoenix Prec Technology Corp | Package structure with chip embedded in substrate |
-
2006
- 2006-06-09 JP JP2006161700A patent/JP4509972B2/ja not_active Expired - Fee Related
- 2006-08-24 US US11/508,968 patent/US7557440B2/en active Active
-
2009
- 2009-06-01 US US12/475,648 patent/US7956454B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20070045814A1 (en) | 2007-03-01 |
| JP2007096262A (ja) | 2007-04-12 |
| US20090255719A1 (en) | 2009-10-15 |
| US7956454B2 (en) | 2011-06-07 |
| US7557440B2 (en) | 2009-07-07 |
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