JP4509972B2 - 配線基板、埋め込み用セラミックチップ - Google Patents

配線基板、埋め込み用セラミックチップ Download PDF

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Publication number
JP4509972B2
JP4509972B2 JP2006161700A JP2006161700A JP4509972B2 JP 4509972 B2 JP4509972 B2 JP 4509972B2 JP 2006161700 A JP2006161700 A JP 2006161700A JP 2006161700 A JP2006161700 A JP 2006161700A JP 4509972 B2 JP4509972 B2 JP 4509972B2
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JP
Japan
Prior art keywords
chip
main surface
layer
ceramic
terminal electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006161700A
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English (en)
Japanese (ja)
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JP2007096262A (ja
JP2007096262A5 (https=
Inventor
洋 山本
寿毅 関
伸治 由利
正樹 村松
元彦 佐藤
晃文 土佐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP2006161700A priority Critical patent/JP4509972B2/ja
Priority to US11/508,968 priority patent/US7557440B2/en
Publication of JP2007096262A publication Critical patent/JP2007096262A/ja
Priority to US12/475,648 priority patent/US7956454B2/en
Publication of JP2007096262A5 publication Critical patent/JP2007096262A5/ja
Application granted granted Critical
Publication of JP4509972B2 publication Critical patent/JP4509972B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/228Terminals
    • H01G4/236Terminals leading through the housing, i.e. lead-through
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/30Stacked capacitors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0216Reduction of cross-talk, noise or electromagnetic interference
    • H05K1/023Reduction of cross-talk, noise or electromagnetic interference using auxiliary mounted passive components or auxiliary substances
    • H05K1/0231Capacitors or dielectric substances
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/182Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC]
    • H05K1/185Printed circuits structurally associated with non-printed electric components associated with components mounted in printed circuit boards [PCB], e.g. insert-mounted components [IMC] associated with components encapsulated in the insulating substrate of the PCBs; associated with components incorporated in internal layers of multilayer circuit boards
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • H10W70/685Shapes or dispositions thereof comprising multiple insulating layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
    • H10W74/019Manufacture or treatment using temporary auxiliary substrates
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/111Pads for surface mounting, e.g. lay-out
    • H05K1/112Pads for surface mounting, e.g. lay-out directly combined with via connections
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/095Conductive through-holes or vias
    • H05K2201/096Vertically aligned vias, holes or stacked vias
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10674Flip chip
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10712Via grid array, e.g. via grid array capacitor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4602Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H10P72/7424Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used as a support during the manufacture of self-supporting substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/941Dispositions of bond pads
    • H10W72/9415Dispositions of bond pads relative to the surface, e.g. recessed, protruding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP2006161700A 2005-09-01 2006-06-09 配線基板、埋め込み用セラミックチップ Expired - Fee Related JP4509972B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006161700A JP4509972B2 (ja) 2005-09-01 2006-06-09 配線基板、埋め込み用セラミックチップ
US11/508,968 US7557440B2 (en) 2005-09-01 2006-08-24 Wiring board and ceramic chip to be embedded
US12/475,648 US7956454B2 (en) 2005-09-01 2009-06-01 Wiring board and ceramic chip to be embedded

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005254031 2005-09-01
JP2006161700A JP4509972B2 (ja) 2005-09-01 2006-06-09 配線基板、埋め込み用セラミックチップ

Publications (3)

Publication Number Publication Date
JP2007096262A JP2007096262A (ja) 2007-04-12
JP2007096262A5 JP2007096262A5 (https=) 2009-09-10
JP4509972B2 true JP4509972B2 (ja) 2010-07-21

Family

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Family Applications (1)

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JP2006161700A Expired - Fee Related JP4509972B2 (ja) 2005-09-01 2006-06-09 配線基板、埋め込み用セラミックチップ

Country Status (2)

Country Link
US (2) US7557440B2 (https=)
JP (1) JP4509972B2 (https=)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7825522B2 (en) * 2006-07-18 2010-11-02 Lsi Corporation Hybrid bump capacitor
KR100849791B1 (ko) * 2007-03-12 2008-07-31 삼성전기주식회사 캐패시터 내장형 인쇄회로기판
JP5394625B2 (ja) * 2007-10-05 2014-01-22 新光電気工業株式会社 配線基板及びその製造方法
JP2009099589A (ja) * 2007-10-12 2009-05-07 Elpida Memory Inc ウエハまたは回路基板およびその接続構造体
EP2259669A4 (en) * 2008-03-24 2011-12-28 Ngk Spark Plug Co COMPONENT WITH PCB
JP5005599B2 (ja) * 2008-03-31 2012-08-22 Tdk株式会社 電子部品及び電子部品モジュール
JP5217584B2 (ja) * 2008-04-07 2013-06-19 株式会社村田製作所 積層セラミック電子部品
JP5185683B2 (ja) * 2008-04-24 2013-04-17 パナソニック株式会社 Ledモジュールの製造方法および照明器具の製造方法
US7745920B2 (en) * 2008-06-10 2010-06-29 Micron Technology, Inc. Packaged microelectronic devices and methods for manufacturing packaged microelectronic devices
JP5314370B2 (ja) * 2008-09-16 2013-10-16 日本特殊陶業株式会社 セラミック部品の製造方法
JP2010087499A (ja) * 2008-09-30 2010-04-15 Ibiden Co Ltd コンデンサ装置の製造方法
TWI366906B (en) * 2009-03-31 2012-06-21 Ind Tech Res Inst Die stacking structure and fabricating method thereof
JP5535765B2 (ja) * 2009-06-01 2014-07-02 日本特殊陶業株式会社 セラミックコンデンサの製造方法
JP5524715B2 (ja) * 2009-06-01 2014-06-18 日本特殊陶業株式会社 セラミックコンデンサ、配線基板
JPWO2011089936A1 (ja) * 2010-01-22 2013-05-23 日本電気株式会社 機能素子内蔵基板及び配線基板
TW201135980A (en) * 2010-04-02 2011-10-16 Icp Technology Co Ltd Light-emitting diode with substrate having surrounding wall and manufacturing method thereof
JP5548060B2 (ja) * 2010-07-28 2014-07-16 株式会社東芝 半導体装置
TWI446497B (zh) * 2010-08-13 2014-07-21 欣興電子股份有限公司 嵌埋被動元件之封裝基板及其製法
TWI411073B (zh) * 2010-08-13 2013-10-01 欣興電子股份有限公司 嵌埋被動元件之封裝基板及其製法
US20120068218A1 (en) * 2010-09-17 2012-03-22 Taiwan Semiconductor Manufacturing Company, Ltd. Thermally efficient packaging for a photonic device
JP2012104557A (ja) * 2010-11-08 2012-05-31 Ngk Spark Plug Co Ltd 電子部品付き配線基板及びその製造方法
JP2012216611A (ja) * 2011-03-31 2012-11-08 Sony Corp 薄膜キャパシタ、実装基板およびその製造方法
US10622310B2 (en) 2012-09-26 2020-04-14 Ping-Jung Yang Method for fabricating glass substrate package
JP6144058B2 (ja) * 2013-01-31 2017-06-07 新光電気工業株式会社 配線基板及び配線基板の製造方法
JP6013960B2 (ja) * 2013-03-28 2016-10-25 京セラ株式会社 配線基板
US9786434B2 (en) * 2013-10-22 2017-10-10 Samsung Electro-Mechanics Co., Ltd. Multilayer ceramic electronic component and printed circuit board having the same
US9331021B2 (en) * 2014-04-30 2016-05-03 Taiwan Semiconductor Manufacturing Company, Ltd. Chip-on-wafer package and method of forming same
JP2016076658A (ja) * 2014-10-08 2016-05-12 イビデン株式会社 電子部品内蔵配線板及びその製造方法
US9601410B2 (en) 2015-01-07 2017-03-21 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device and method
US9627365B1 (en) * 2015-11-30 2017-04-18 Taiwan Semiconductor Manufacturing Company, Ltd. Tri-layer CoWoS structure
US9852988B2 (en) 2015-12-18 2017-12-26 Invensas Bonding Technologies, Inc. Increased contact alignment tolerance for direct bonding
JP2017123459A (ja) * 2016-01-08 2017-07-13 サムソン エレクトロ−メカニックス カンパニーリミテッド. プリント回路基板
US9831148B2 (en) * 2016-03-11 2017-11-28 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated fan-out package including voltage regulators and methods forming same
US10446487B2 (en) 2016-09-30 2019-10-15 Invensas Bonding Technologies, Inc. Interface structures and methods for forming same
US10580735B2 (en) 2016-10-07 2020-03-03 Xcelsis Corporation Stacked IC structure with system level wiring on multiple sides of the IC die
KR20190092584A (ko) * 2016-12-29 2019-08-07 인벤사스 본딩 테크놀로지스 인코포레이티드 집적된 수동 컴포넌트를 구비한 접합된 구조체
WO2018169968A1 (en) 2017-03-16 2018-09-20 Invensas Corporation Direct-bonded led arrays and applications
US10784191B2 (en) 2017-03-31 2020-09-22 Invensas Bonding Technologies, Inc. Interface structures and methods for forming same
US10510679B2 (en) 2017-06-30 2019-12-17 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device with shield for electromagnetic interference
JP2019067858A (ja) * 2017-09-29 2019-04-25 イビデン株式会社 プリント配線板及びその製造方法
US11011503B2 (en) 2017-12-15 2021-05-18 Invensas Bonding Technologies, Inc. Direct-bonded optoelectronic interconnect for high-density integrated photonics
US11169326B2 (en) 2018-02-26 2021-11-09 Invensas Bonding Technologies, Inc. Integrated optical waveguides, direct-bonded waveguide interface joints, optical routing and interconnects
US11256004B2 (en) 2018-03-20 2022-02-22 Invensas Bonding Technologies, Inc. Direct-bonded lamination for improved image clarity in optical devices
US11515291B2 (en) 2018-08-28 2022-11-29 Adeia Semiconductor Inc. Integrated voltage regulator and passive components
CN109561570B (zh) * 2018-11-21 2020-12-18 奥特斯(中国)有限公司 部件承载件及其制造方法以及使用填料颗粒的方法
US11901281B2 (en) 2019-03-11 2024-02-13 Adeia Semiconductor Bonding Technologies Inc. Bonded structures with integrated passive component
CN111834354B (zh) 2019-04-18 2024-07-16 三星电子株式会社 半导体封装件
JP7379899B2 (ja) * 2019-07-22 2023-11-15 Tdk株式会社 セラミック電子部品
JP7408975B2 (ja) * 2019-09-19 2024-01-09 Tdk株式会社 セラミック電子部品
US11762200B2 (en) 2019-12-17 2023-09-19 Adeia Semiconductor Bonding Technologies Inc. Bonded optical devices
CN113013125B (zh) * 2019-12-20 2024-07-09 奥特斯奥地利科技与系统技术有限公司 嵌入有在侧向上位于堆叠体的导电结构之间的内插件的部件承载件
US11705378B2 (en) * 2020-07-20 2023-07-18 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor packages and methods of forming the same
CN121100389A (zh) * 2023-06-07 2025-12-09 株式会社村田制作所 层叠陶瓷电容器
WO2024252863A1 (ja) * 2023-06-07 2024-12-12 株式会社村田製作所 積層セラミックコンデンサ
US12347628B1 (en) * 2024-08-27 2025-07-01 Saras Micro Devices, Inc. Stackable and embeddable vertical capacitors in semiconductor devices and method of fabrication

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3672169B2 (ja) * 1999-03-05 2005-07-13 日本特殊陶業株式会社 コンデンサ、コア基板本体の製造方法、及び、コンデンサ内蔵コア基板の製造方法
JP3489728B2 (ja) * 1999-10-18 2004-01-26 株式会社村田製作所 積層コンデンサ、配線基板および高周波回路
JP2004172412A (ja) * 2002-11-20 2004-06-17 Kyocera Corp コンデンサ素子およびコンデンサ素子内蔵多層配線基板
JP2005039217A (ja) 2003-06-24 2005-02-10 Ngk Spark Plug Co Ltd 中間基板
JP2005039243A (ja) 2003-06-24 2005-02-10 Ngk Spark Plug Co Ltd 中間基板
US7135534B2 (en) * 2003-07-24 2006-11-14 Rajiv Gandhi Centre For Biotechnology Polymer support for solid phase peptide synthesis and process for preparation thereof
CN100367491C (zh) 2004-05-28 2008-02-06 日本特殊陶业株式会社 中间基板
JP4528062B2 (ja) * 2004-08-25 2010-08-18 富士通株式会社 半導体装置およびその製造方法
TWI264094B (en) * 2005-02-22 2006-10-11 Phoenix Prec Technology Corp Package structure with chip embedded in substrate

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Publication number Publication date
US20070045814A1 (en) 2007-03-01
JP2007096262A (ja) 2007-04-12
US20090255719A1 (en) 2009-10-15
US7956454B2 (en) 2011-06-07
US7557440B2 (en) 2009-07-07

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