JP4506135B2 - 圧電振動子 - Google Patents

圧電振動子 Download PDF

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Publication number
JP4506135B2
JP4506135B2 JP2003325560A JP2003325560A JP4506135B2 JP 4506135 B2 JP4506135 B2 JP 4506135B2 JP 2003325560 A JP2003325560 A JP 2003325560A JP 2003325560 A JP2003325560 A JP 2003325560A JP 4506135 B2 JP4506135 B2 JP 4506135B2
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Japan
Prior art keywords
piezoelectric
electrode
piezoelectric vibrator
piezoelectric substrate
excitation electrode
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Expired - Lifetime
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JP2003325560A
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English (en)
Japanese (ja)
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JP2005094410A5 (zh
JP2005094410A (ja
Inventor
健二 佐藤
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Miyazaki Epson Corp
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Miyazaki Epson Corp
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Publication of JP2005094410A5 publication Critical patent/JP2005094410A5/ja
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2003325560A 2003-09-18 2003-09-18 圧電振動子 Expired - Lifetime JP4506135B2 (ja)

Priority Applications (1)

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JP2003325560A JP4506135B2 (ja) 2003-09-18 2003-09-18 圧電振動子

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Application Number Priority Date Filing Date Title
JP2003325560A JP4506135B2 (ja) 2003-09-18 2003-09-18 圧電振動子

Publications (3)

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JP2005094410A JP2005094410A (ja) 2005-04-07
JP2005094410A5 JP2005094410A5 (zh) 2006-09-21
JP4506135B2 true JP4506135B2 (ja) 2010-07-21

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JP2003325560A Expired - Lifetime JP4506135B2 (ja) 2003-09-18 2003-09-18 圧電振動子

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JP (1) JP4506135B2 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8614607B2 (en) 2011-03-18 2013-12-24 Seiko Epson Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device
US9431995B2 (en) 2014-07-31 2016-08-30 Seiko Epson Corporation Resonator element, resonator, resonator device, oscillator, electronic device, and mobile object
US9837982B2 (en) 2011-03-09 2017-12-05 Seiko Epson Corporation Vibrating element, vibrator, oscillator, and electronic device with stepped excitation section

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4558433B2 (ja) * 2004-10-01 2010-10-06 日本電波工業株式会社 水晶振動子
JP4572807B2 (ja) 2005-10-31 2010-11-04 エプソントヨコム株式会社 メサ型圧電振動片
JP4771069B2 (ja) * 2006-01-12 2011-09-14 エプソントヨコム株式会社 圧電振動片及び圧電デバイス
JP4771070B2 (ja) * 2006-01-12 2011-09-14 エプソントヨコム株式会社 圧電振動片及び圧電デバイス
JP4305542B2 (ja) 2006-08-09 2009-07-29 エプソントヨコム株式会社 Ａｔカット水晶振動片及びその製造方法
JP2008263387A (ja) * 2007-04-11 2008-10-30 Epson Toyocom Corp メサ型圧電振動片
JP4936221B2 (ja) * 2007-06-08 2012-05-23 セイコーエプソン株式会社 メサ型圧電振動片、メサ型圧電振動デバイス、発振器、及び電子機器
JP5151823B2 (ja) * 2008-09-02 2013-02-27 セイコーエプソン株式会社 圧電振動片、圧電振動子及び発振器
JP5625432B2 (ja) * 2010-03-26 2014-11-19 セイコーエプソン株式会社 圧電振動素子、及び圧電振動子
JP5505647B2 (ja) * 2010-11-19 2014-05-28 セイコーエプソン株式会社 圧電振動片および圧電振動子
JP2012199861A (ja) * 2011-03-23 2012-10-18 Nippon Dempa Kogyo Co Ltd 水晶デバイス及び水晶デバイスの検査方法
JP5756712B2 (ja) * 2011-08-17 2015-07-29 日本電波工業株式会社 水晶デバイス
JP5930526B2 (ja) 2012-02-20 2016-06-08 日本電波工業株式会社 圧電振動素子及び圧電デバイス
JP6128868B2 (ja) * 2012-02-23 2017-05-17 キヤノン株式会社 振動型駆動装置及び撮像装置
JP5293852B2 (ja) * 2012-02-27 2013-09-18 セイコーエプソン株式会社 メサ型圧電振動片、メサ型圧電振動デバイス、発振器、及び電子機器
JP5943186B2 (ja) * 2012-03-19 2016-06-29 セイコーエプソン株式会社 振動片、振動子、電子デバイス、および電子機器
JP6035808B2 (ja) * 2012-03-27 2016-11-30 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、及び電子機器
JP5459352B2 (ja) * 2012-06-01 2014-04-02 セイコーエプソン株式会社 振動片
JP6175743B2 (ja) * 2012-06-06 2017-08-09 セイコーエプソン株式会社 振動素子の製造方法
JP6083144B2 (ja) * 2012-07-27 2017-02-22 セイコーエプソン株式会社 振動片、振動素子、振動子、電子デバイス、電子機器、移動体及び振動片の製造方法
JP5918067B2 (ja) * 2012-07-31 2016-05-18 京セラクリスタルデバイス株式会社 水晶振動素子
JP6000724B2 (ja) * 2012-07-31 2016-10-05 京セラクリスタルデバイス株式会社 水晶振動素子
JP6108708B2 (ja) * 2012-07-31 2017-04-05 京セラクリスタルデバイス株式会社 水晶振動素子
JP5949445B2 (ja) * 2012-10-26 2016-07-06 株式会社大真空 圧電フィルタ
JP5541377B2 (ja) * 2013-01-31 2014-07-09 日本電波工業株式会社 水晶振動子用素子、水晶振動子及び電子部品
JP2014075848A (ja) * 2014-01-14 2014-04-24 Seiko Epson Corp 振動片および振動子
JP5741876B2 (ja) * 2014-03-19 2015-07-01 セイコーエプソン株式会社 圧電振動片および圧電振動子
JP5871144B2 (ja) * 2014-03-19 2016-03-01 セイコーエプソン株式会社 圧電振動子
JP5949882B2 (ja) * 2014-11-20 2016-07-13 セイコーエプソン株式会社 振動片の製造方法
JP2016174301A (ja) * 2015-03-17 2016-09-29 セイコーエプソン株式会社 振動片、振動子、振動デバイス、発振器、電子機器、および移動体
JP2016187153A (ja) 2015-03-27 2016-10-27 セイコーエプソン株式会社 発振器、電子機器及び移動体
JP6577791B2 (ja) * 2015-08-24 2019-09-18 京セラ株式会社 水晶素板、水晶振動素子及び水晶デバイス
JP2017085386A (ja) * 2015-10-29 2017-05-18 京セラクリスタルデバイス株式会社 水晶デバイス
JP6315115B2 (ja) * 2017-01-20 2018-04-25 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、電子機器、および移動体

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57151023U (zh) * 1981-03-16 1982-09-22
JPH02231808A (ja) * 1989-03-03 1990-09-13 Toyo Commun Equip Co Ltd 圧電振動子の電極構造
JPH0316310A (ja) * 1988-12-12 1991-01-24 Nippon Dempa Kogyo Co Ltd 水晶振動子
JPH04127709A (ja) * 1990-09-19 1992-04-28 Seiko Epson Corp Ａｔカット水晶振動子
JPH04175004A (ja) * 1990-03-28 1992-06-23 Nippon Dempa Kogyo Co Ltd オーバトーン圧電発振子
JPH0652230U (ja) * 1992-12-11 1994-07-15 シチズン時計株式会社 圧電振動子
JP2001223557A (ja) * 2000-02-10 2001-08-17 Nippon Dempa Kogyo Co Ltd 水晶振動子の電極形成方法及び水晶振動子
JP2001230655A (ja) * 2000-02-18 2001-08-24 Toyo Commun Equip Co Ltd 圧電振動子
JP2001326554A (ja) * 2000-05-16 2001-11-22 Toyo Commun Equip Co Ltd 圧電振動子

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57151023U (zh) * 1981-03-16 1982-09-22
JPH0316310A (ja) * 1988-12-12 1991-01-24 Nippon Dempa Kogyo Co Ltd 水晶振動子
JPH02231808A (ja) * 1989-03-03 1990-09-13 Toyo Commun Equip Co Ltd 圧電振動子の電極構造
JPH04175004A (ja) * 1990-03-28 1992-06-23 Nippon Dempa Kogyo Co Ltd オーバトーン圧電発振子
JPH04127709A (ja) * 1990-09-19 1992-04-28 Seiko Epson Corp Ａｔカット水晶振動子
JPH0652230U (ja) * 1992-12-11 1994-07-15 シチズン時計株式会社 圧電振動子
JP2001223557A (ja) * 2000-02-10 2001-08-17 Nippon Dempa Kogyo Co Ltd 水晶振動子の電極形成方法及び水晶振動子
JP2001230655A (ja) * 2000-02-18 2001-08-24 Toyo Commun Equip Co Ltd 圧電振動子
JP2001326554A (ja) * 2000-05-16 2001-11-22 Toyo Commun Equip Co Ltd 圧電振動子

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9837982B2 (en) 2011-03-09 2017-12-05 Seiko Epson Corporation Vibrating element, vibrator, oscillator, and electronic device with stepped excitation section
US8614607B2 (en) 2011-03-18 2013-12-24 Seiko Epson Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device
US9093634B2 (en) 2011-03-18 2015-07-28 Seiko Epson Corporation Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device
US9948275B2 (en) 2011-03-18 2018-04-17 Seiko Epson Corporation Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device
US9431995B2 (en) 2014-07-31 2016-08-30 Seiko Epson Corporation Resonator element, resonator, resonator device, oscillator, electronic device, and mobile object
US9716484B2 (en) 2014-07-31 2017-07-25 Seiko Epson Corporation Resonator element, resonator, resonator device, oscillator, electronic device, and mobile object

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