JP4493413B2 - Ｎｄフィルタの製造方法 - Google Patents

Ｎｄフィルタの製造方法 Download PDF

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Publication number
JP4493413B2
JP4493413B2 JP2004165103A JP2004165103A JP4493413B2 JP 4493413 B2 JP4493413 B2 JP 4493413B2 JP 2004165103 A JP2004165103 A JP 2004165103A JP 2004165103 A JP2004165103 A JP 2004165103A JP 4493413 B2 JP4493413 B2 JP 4493413B2
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Japan
Prior art keywords
film
mask
substrate
filter
forming
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Expired - Fee Related
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JP2004165103A
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Japanese (ja)
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JP2005345747A5 (https=
JP2005345747A (ja
Inventor
真志 内山
康典 斎藤
孝幸 若林
道男 柳
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Canon Electronics Inc
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Canon Electronics Inc
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Application filed by Canon Electronics Inc filed Critical Canon Electronics Inc
Priority to JP2004165103A priority Critical patent/JP4493413B2/ja
Publication of JP2005345747A publication Critical patent/JP2005345747A/ja
Publication of JP2005345747A5 publication Critical patent/JP2005345747A5/ja
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Publication of JP4493413B2 publication Critical patent/JP4493413B2/ja
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Expired - Fee Related legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Diaphragms For Cameras (AREA)
JP2004165103A 2004-06-02 2004-06-02 Ｎｄフィルタの製造方法 Expired - Fee Related JP4493413B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004165103A JP4493413B2 (ja) 2004-06-02 2004-06-02 Ｎｄフィルタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004165103A JP4493413B2 (ja) 2004-06-02 2004-06-02 Ｎｄフィルタの製造方法

Publications (3)

Publication Number Publication Date
JP2005345747A JP2005345747A (ja) 2005-12-15
JP2005345747A5 JP2005345747A5 (https=) 2007-07-19
JP4493413B2 true JP4493413B2 (ja) 2010-06-30

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Family Applications (1)

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JP2004165103A Expired - Fee Related JP4493413B2 (ja) 2004-06-02 2004-06-02 Ｎｄフィルタの製造方法

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JP (1) JP4493413B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007171542A (ja) * 2005-12-22 2007-07-05 Canon Electronics Inc 光学絞り用ｎｄフィルタと該ｎｄフィルタを備えた光学絞り装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3621941B2 (ja) * 2002-09-24 2005-02-23 キヤノン電子株式会社 Ｎｄフィルタの製造方法及びこのｎｄフィルタを有する光量絞り装置及びカメラ
JP2004119064A (ja) * 2002-09-24 2004-04-15 Fujitsu Ltd 薄膜形成装置および薄膜形成方法

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Publication number Publication date
JP2005345747A (ja) 2005-12-15

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