JP2005345747A5 - - Google Patents
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- Publication number
- JP2005345747A5 JP2005345747A5 JP2004165103A JP2004165103A JP2005345747A5 JP 2005345747 A5 JP2005345747 A5 JP 2005345747A5 JP 2004165103 A JP2004165103 A JP 2004165103A JP 2004165103 A JP2004165103 A JP 2004165103A JP 2005345747 A5 JP2005345747 A5 JP 2005345747A5
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- JP
- Japan
- Prior art keywords
- mask
- film
- filter
- substrate
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000758 substrate Substances 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 14
- 238000000151 deposition Methods 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 9
- 238000009826 distribution Methods 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 description 14
- 239000002245 particle Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004165103A JP4493413B2 (ja) | 2004-06-02 | 2004-06-02 | Ｎｄフィルタの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004165103A JP4493413B2 (ja) | 2004-06-02 | 2004-06-02 | Ｎｄフィルタの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005345747A JP2005345747A (ja) | 2005-12-15 |
| JP2005345747A5 true JP2005345747A5 (https=) | 2007-07-19 |
| JP4493413B2 JP4493413B2 (ja) | 2010-06-30 |
Family
ID=35498193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004165103A Expired - Fee Related JP4493413B2 (ja) | 2004-06-02 | 2004-06-02 | Ｎｄフィルタの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4493413B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007171542A (ja) * | 2005-12-22 | 2007-07-05 | Canon Electronics Inc | 光学絞り用ｎｄフィルタと該ｎｄフィルタを備えた光学絞り装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3621941B2 (ja) * | 2002-09-24 | 2005-02-23 | キヤノン電子株式会社 | Ｎｄフィルタの製造方法及びこのｎｄフィルタを有する光量絞り装置及びカメラ |
| JP2004119064A (ja) * | 2002-09-24 | 2004-04-15 | Fujitsu Ltd | 薄膜形成装置および薄膜形成方法 |
-
2004
- 2004-06-02 JP JP2004165103A patent/JP4493413B2/ja not_active Expired - Fee Related
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