JP2023133091A5 - - Google Patents

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Publication number
JP2023133091A5
JP2023133091A5 JP2022165676A JP2022165676A JP2023133091A5 JP 2023133091 A5 JP2023133091 A5 JP 2023133091A5 JP 2022165676 A JP2022165676 A JP 2022165676A JP 2022165676 A JP2022165676 A JP 2022165676A JP 2023133091 A5 JP2023133091 A5 JP 2023133091A5
Authority
JP
Japan
Prior art keywords
temperature
substrate
mask
adjusting
target temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022165676A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023133091A (ja
Filing date
Publication date
Priority claimed from KR1020220030913A external-priority patent/KR20230134061A/ko
Application filed filed Critical
Publication of JP2023133091A publication Critical patent/JP2023133091A/ja
Publication of JP2023133091A5 publication Critical patent/JP2023133091A5/ja
Pending legal-status Critical Current

Links

JP2022165676A 2022-03-11 2022-10-14 表示装置製造用蒸着装置及びこれを用いた蒸着方法 Pending JP2023133091A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020220030913A KR20230134061A (ko) 2022-03-11 2022-03-11 표시 장치 제조용 증착 장치 및 이를 이용한 증착 방법
KR10-2022-0030913 2022-03-11

Publications (2)

Publication Number Publication Date
JP2023133091A JP2023133091A (ja) 2023-09-22
JP2023133091A5 true JP2023133091A5 (https=) 2025-09-29

Family

ID=85275007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022165676A Pending JP2023133091A (ja) 2022-03-11 2022-10-14 表示装置製造用蒸着装置及びこれを用いた蒸着方法

Country Status (3)

Country Link
JP (1) JP2023133091A (https=)
KR (1) KR20230134061A (https=)
CN (2) CN116770259A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118781092B (zh) * 2024-08-05 2025-03-21 苏州阿童木新材料科技有限公司 基于cvd设备的成膜沉积质量分析方法及系统

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