JP4492275B2 - 表面検査装置 - Google Patents

表面検査装置 Download PDF

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Publication number
JP4492275B2
JP4492275B2 JP2004277357A JP2004277357A JP4492275B2 JP 4492275 B2 JP4492275 B2 JP 4492275B2 JP 2004277357 A JP2004277357 A JP 2004277357A JP 2004277357 A JP2004277357 A JP 2004277357A JP 4492275 B2 JP4492275 B2 JP 4492275B2
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JP
Japan
Prior art keywords
light
light source
inspected
steel plate
inspection apparatus
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Expired - Fee Related
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JP2004277357A
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English (en)
Japanese (ja)
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JP2005003691A5 (https=
JP2005003691A (ja
Inventor
貴彦 大重
満昭 上杉
敬弘 腰原
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JFE Steel Corp
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JFE Steel Corp
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Priority to JP2004277357A priority Critical patent/JP4492275B2/ja
Publication of JP2005003691A publication Critical patent/JP2005003691A/ja
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JP2004277357A 1999-02-08 2004-09-24 表面検査装置 Expired - Fee Related JP4492275B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004277357A JP4492275B2 (ja) 1999-02-08 2004-09-24 表面検査装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2978499 1999-02-08
JP2978399 1999-02-08
JP2978599 1999-02-08
JP2004277357A JP4492275B2 (ja) 1999-02-08 2004-09-24 表面検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2000028699A Division JP2000298102A (ja) 1999-02-08 2000-02-07 表面検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010001194A Division JP4775492B2 (ja) 1999-02-08 2010-01-06 表面検査装置

Publications (3)

Publication Number Publication Date
JP2005003691A JP2005003691A (ja) 2005-01-06
JP2005003691A5 JP2005003691A5 (https=) 2007-03-01
JP4492275B2 true JP4492275B2 (ja) 2010-06-30

Family

ID=34108968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004277357A Expired - Fee Related JP4492275B2 (ja) 1999-02-08 2004-09-24 表面検査装置

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JP (1) JP4492275B2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007017181A (ja) * 2005-07-05 2007-01-25 Nano System Solutions:Kk 表面検査装置及び表面検査方法
JP2007047022A (ja) * 2005-08-10 2007-02-22 Gen Tec:Kk 表面形状測定装置
JP2009092426A (ja) * 2007-10-04 2009-04-30 Nippon Steel Corp 表面検査方法及び表面検査装置
JP4820971B2 (ja) * 2008-03-08 2011-11-24 関東自動車工業株式会社 表面検査方法
JP5552890B2 (ja) * 2010-05-11 2014-07-16 Ｊｆｅスチール株式会社 欠陥探傷ヘッドの退避方法および欠陥探傷装置
JP5655610B2 (ja) * 2011-02-10 2015-01-21 Ｊｆｅスチール株式会社 表面検査装置
JP5867069B2 (ja) * 2011-12-26 2016-02-24 Ｊｆｅスチール株式会社 欠陥検出装置およびその退避方法
JP6245046B2 (ja) * 2014-04-09 2017-12-13 Ｊｆｅスチール株式会社 表面欠陥検査装置および表面欠陥検査方法
EP3454004B1 (en) * 2016-06-27 2021-01-27 Nippon Steel Corporation Shape measurement device and shape measurement method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6122279Y2 (https=) * 1979-11-01 1986-07-04
JPS60165853U (ja) * 1984-04-11 1985-11-02 日立電子エンジニアリング株式会社 円筒物体表面検査装置における搬送装置
JPS6262205A (ja) * 1985-09-13 1987-03-18 Toray Ind Inc 物体の表面凹凸検査方法
JPS62103546A (ja) * 1985-10-30 1987-05-14 Nissan Motor Co Ltd 表面欠陥検査装置
JPH0769161B2 (ja) * 1990-04-14 1995-07-26 松下電工株式会社 凹凸面の検査方法およびその装置
JPH0518907A (ja) * 1991-07-08 1993-01-26 Kawasaki Steel Corp 鋼帯表面疵検査方法
JPH0694642A (ja) * 1992-09-16 1994-04-08 Kawasaki Steel Corp 表面欠陥検査方法および装置
JPH09113465A (ja) * 1995-10-18 1997-05-02 Nippon Steel Corp 亜鉛メッキ系鋼板用表面欠陥検出装置
JPH09304033A (ja) * 1996-05-14 1997-11-28 Furukawa Electric Co Ltd:The 圧延板の光学式形状検出方法及びその装置

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Publication number Publication date
JP2005003691A (ja) 2005-01-06

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