JP4490320B2 - 塗布装置 - Google Patents
塗布装置 Download PDFInfo
- Publication number
- JP4490320B2 JP4490320B2 JP2005104393A JP2005104393A JP4490320B2 JP 4490320 B2 JP4490320 B2 JP 4490320B2 JP 2005104393 A JP2005104393 A JP 2005104393A JP 2005104393 A JP2005104393 A JP 2005104393A JP 4490320 B2 JP4490320 B2 JP 4490320B2
- Authority
- JP
- Japan
- Prior art keywords
- plunger
- coating
- cylinder
- liquid
- sealing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000000576 coating method Methods 0.000 title claims description 69
- 239000011248 coating agent Substances 0.000 title claims description 66
- 239000007788 liquid Substances 0.000 claims description 82
- 238000007789 sealing Methods 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 28
- 238000003860 storage Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 11
- 230000001133 acceleration Effects 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 description 14
- 230000008859 change Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004575 stone Substances 0.000 description 3
- 230000037303 wrinkles Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 230000001603 reducing effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B11/00—Single-unit hand-held apparatus in which flow of contents is produced by the muscular force of the operator at the moment of use
- B05B11/01—Single-unit hand-held apparatus in which flow of contents is produced by the muscular force of the operator at the moment of use characterised by the means producing the flow
- B05B11/02—Membranes or pistons acting on the contents inside the container, e.g. follower pistons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Details Of Reciprocating Pumps (AREA)
Description
4 貯留タンク
5 ステージ
6 口金
7 口金駆動装置(駆動手段)
8 液移送ポンプ
10 加圧ポンプ(正圧付与手段)
11 第1開閉バルブ
12 第2開閉バルブ
621 開口部
C12 吸込口
C13 吐出口
C シリンダ
D 液検出センサ(塗布液検出センサ)
F 膜状封止部材
F1 U字形折返し部
F2 開口端部
F3 胴部
G 間隙
J1 軸線
K ガラス基板(基板)
P プランジャ
PD プランジャ駆動装置(プランジャ駆動手段)
R2 真空室(非接液室)
X 方向
Claims (7)
- 塗布液を貯留する貯留タンクと、塗布対象となる基板を保持するステージと、スリット状の開口部を備えステージの上方に架設された口金と、吸込動作と吐出動作とを交互に行うことにより貯留タンク内の塗布液を口金に導く液移送ポンプと、液移送ポンプの吸込口と貯留タンクとの間に配設され上記吸込動作時に開状態となり上記吐出動作時に閉状態となる第1開閉バルブと、液移送ポンプの吐出口と口金との間に配設され上記吐出動作時に開状態となり上記吸込動作時に閉状態となる第2開閉バルブと、スリット状の開口部と基板とを近接させた状態で口金と基板とを相対移動させる駆動手段とを備える塗布装置において、
上記液移送ポンプは、吸込口及び吐出口を備えるシリンダと、シリンダの内部をその軸線に沿う方向に往復移動可能に設けたプランジャと、シリンダとプランジャとの間隙を封止する膜状封止部材と、プランジャを駆動するためのプランジャ駆動手段とを備えており、前記シリンダにおける非接液室に真空ポンプが接続されていることを特徴とする塗布装置。 - 前記膜状封止部材は、可撓性材からなるキャップ状体から構成され、該キャップ状体の開口端部をシリンダの内周面上に固着させた状態で該キャップ状体の胴部によりプランジャを被覆すると共に、シリンダとプランジャとの間隙で下側に折り返して形成されるU字形折返し部により該間隙を封止してなる請求項1に記載の塗布装置。
- 所定の正圧を上記貯留タンク内に付与する正圧付与手段を備える請求項1又は2に記載の塗布装置。
- 前記プランジャ駆動手段は、吸込動作時におけるプランジャの移動速度が、吐出動作時おけるプランジャの移動速度よりも低速度となるようにプランジャを駆動する請求項1から請求項3のいずれかに記載の塗布装置。
- 前記プランジャ駆動手段は、吸込動作時におけるプランジャの加速開始段階での時間−速度の関係が略S字曲線形状となるようにプランジャを駆動する請求項1から請求項4のいずれかに記載の塗布装置。
- 前記液移送ポンプは、その吐出口がシリンダの頂部に設けられ、シリンダの軸線が鉛直軸に平行となるように立設して使用される請求項1から請求項5のいずれかに記載の塗布装置。
- 前記膜状封止部材から漏れた塗布液を検出するための塗布液検出センサを設け、この塗布液検出センサの検知信号に応じて第1開閉バルブを閉状態とする請求項1から請求項6のいずれかに記載の塗布装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005104393A JP4490320B2 (ja) | 2005-03-31 | 2005-03-31 | 塗布装置 |
TW095108824A TWI355297B (en) | 2005-03-31 | 2006-03-15 | Applicator device |
US11/387,865 US7591899B2 (en) | 2005-03-31 | 2006-03-24 | Applicator device |
KR1020060029613A KR101268805B1 (ko) | 2005-03-31 | 2006-03-31 | 도포 장치 |
CNA2006100670827A CN1840241A (zh) | 2005-03-31 | 2006-03-31 | 涂敷装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005104393A JP4490320B2 (ja) | 2005-03-31 | 2005-03-31 | 塗布装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006281091A JP2006281091A (ja) | 2006-10-19 |
JP4490320B2 true JP4490320B2 (ja) | 2010-06-23 |
Family
ID=37029533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005104393A Active JP4490320B2 (ja) | 2005-03-31 | 2005-03-31 | 塗布装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7591899B2 (ja) |
JP (1) | JP4490320B2 (ja) |
KR (1) | KR101268805B1 (ja) |
CN (1) | CN1840241A (ja) |
TW (1) | TWI355297B (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008173526A (ja) * | 2007-01-16 | 2008-07-31 | Toray Eng Co Ltd | 塗布装置及び塗布方法 |
JP2008289966A (ja) * | 2007-05-22 | 2008-12-04 | Watanabe Shoko:Kk | スリットコータ |
JP5002369B2 (ja) * | 2007-08-17 | 2012-08-15 | 大日本スクリーン製造株式会社 | ノズル保管装置および塗布装置 |
JP2009049228A (ja) * | 2007-08-21 | 2009-03-05 | Dainippon Screen Mfg Co Ltd | ポンプおよび基板処理装置 |
JP5148248B2 (ja) * | 2007-11-08 | 2013-02-20 | 東レエンジニアリング株式会社 | 塗布装置及び塗布方法 |
JP2009130008A (ja) * | 2007-11-21 | 2009-06-11 | Toray Eng Co Ltd | 塗布装置及びその基板保持方法 |
KR100912407B1 (ko) * | 2007-12-18 | 2009-08-14 | 주식회사 나래나노텍 | 개선된 도액 펌핑장치용 구동장치 및 이를 구비한 도액펌핑장치, 노즐 장치 및 코팅 장치 |
JP5276338B2 (ja) * | 2008-02-27 | 2013-08-28 | 東レエンジニアリング株式会社 | 塗布装置 |
JP5292121B2 (ja) * | 2009-02-04 | 2013-09-18 | 東レエンジニアリング株式会社 | ピストンポンプ及びそれを備える塗布装置 |
JP5465936B2 (ja) | 2009-07-01 | 2014-04-09 | 武蔵エンジニアリング株式会社 | 液体材料吐出方法、装置およびプログラム |
JP2011179468A (ja) * | 2010-03-03 | 2011-09-15 | Dow Corning Toray Co Ltd | 高粘性流体用ディスペンサー |
KR101676006B1 (ko) * | 2011-11-16 | 2016-11-16 | 한미반도체 주식회사 | 몰딩장치 |
JP6144514B2 (ja) * | 2013-03-27 | 2017-06-07 | 株式会社Screenホールディングス | スリットノズル、基板処理装置およびスリットノズルの製造方法 |
TWI558471B (zh) * | 2014-12-01 | 2016-11-21 | Wei Kuang Automation Co Ltd | Coating machine for multi-phase glue device |
CN105080789B (zh) * | 2015-08-10 | 2017-11-07 | 深圳市华星光电技术有限公司 | 涂布装置及涂布器 |
CN105170417A (zh) * | 2015-08-26 | 2015-12-23 | 京东方科技集团股份有限公司 | 一种涂布机及涂布方法 |
JP6407833B2 (ja) * | 2015-10-13 | 2018-10-17 | 東京エレクトロン株式会社 | 処理液供給装置 |
CN115318561B (zh) * | 2022-09-05 | 2024-02-02 | 安徽固孚智能装备有限公司 | 全自动真空灌胶机 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63138177A (ja) * | 1986-11-28 | 1988-06-10 | Kurabo Ind Ltd | ベロ−ズポンプ |
JPS63256164A (ja) * | 1987-04-14 | 1988-10-24 | Seiko Epson Corp | 嫌気性液体の定量吐出方法 |
JPH0345487U (ja) * | 1989-09-09 | 1991-04-26 | ||
JPH07124504A (ja) * | 1993-11-01 | 1995-05-16 | Katoo Seiko Kk | 液体供給装置 |
JPH0927114A (ja) * | 1995-07-07 | 1997-01-28 | Sony Corp | 磁気記録媒体 |
JPH11257236A (ja) * | 1998-03-17 | 1999-09-21 | Tokyo Electron Ltd | 空気駆動式液体供給装置 |
JP2000038218A (ja) * | 1998-07-23 | 2000-02-08 | Shinko Electric Co Ltd | 物品の移動装置および移動方法 |
JP2000334355A (ja) * | 1999-05-27 | 2000-12-05 | Toray Ind Inc | ピストンポンプ、塗布装置および塗布方法並びにプラズマディスプレイおよびディスプレイ用部材の製造装置および製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0213184U (ja) | 1988-06-30 | 1990-01-26 | ||
JP2540411B2 (ja) * | 1992-03-31 | 1996-10-02 | 株式会社荏原製作所 | プランジャポンプ |
US6419462B1 (en) * | 1997-02-24 | 2002-07-16 | Ebara Corporation | Positive displacement type liquid-delivery apparatus |
US6398527B1 (en) * | 2000-08-21 | 2002-06-04 | Westport Research Inc. | Reciprocating motor with uni-directional fluid flow |
US20020048519A1 (en) * | 2000-09-27 | 2002-04-25 | Joseph Spiteri-Gonzi | Disposable pump and filter assembly |
US6848625B2 (en) * | 2002-03-19 | 2005-02-01 | Tokyo Electron Limited | Process liquid supply mechanism and process liquid supply method |
JP4494829B2 (ja) | 2004-03-03 | 2010-06-30 | 東レエンジニアリング株式会社 | 塗布液供給装置および塗布液供給方法 |
-
2005
- 2005-03-31 JP JP2005104393A patent/JP4490320B2/ja active Active
-
2006
- 2006-03-15 TW TW095108824A patent/TWI355297B/zh active
- 2006-03-24 US US11/387,865 patent/US7591899B2/en active Active
- 2006-03-31 KR KR1020060029613A patent/KR101268805B1/ko active IP Right Grant
- 2006-03-31 CN CNA2006100670827A patent/CN1840241A/zh active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63138177A (ja) * | 1986-11-28 | 1988-06-10 | Kurabo Ind Ltd | ベロ−ズポンプ |
JPS63256164A (ja) * | 1987-04-14 | 1988-10-24 | Seiko Epson Corp | 嫌気性液体の定量吐出方法 |
JPH0345487U (ja) * | 1989-09-09 | 1991-04-26 | ||
JPH07124504A (ja) * | 1993-11-01 | 1995-05-16 | Katoo Seiko Kk | 液体供給装置 |
JPH0927114A (ja) * | 1995-07-07 | 1997-01-28 | Sony Corp | 磁気記録媒体 |
JPH11257236A (ja) * | 1998-03-17 | 1999-09-21 | Tokyo Electron Ltd | 空気駆動式液体供給装置 |
JP2000038218A (ja) * | 1998-07-23 | 2000-02-08 | Shinko Electric Co Ltd | 物品の移動装置および移動方法 |
JP2000334355A (ja) * | 1999-05-27 | 2000-12-05 | Toray Ind Inc | ピストンポンプ、塗布装置および塗布方法並びにプラズマディスプレイおよびディスプレイ用部材の製造装置および製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2006281091A (ja) | 2006-10-19 |
US20060219166A1 (en) | 2006-10-05 |
TW200706255A (en) | 2007-02-16 |
KR101268805B1 (ko) | 2013-05-28 |
US7591899B2 (en) | 2009-09-22 |
TWI355297B (en) | 2012-01-01 |
KR20060105658A (ko) | 2006-10-11 |
CN1840241A (zh) | 2006-10-04 |
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