JP4427876B2 - 半導体角速度センサ - Google Patents

半導体角速度センサ Download PDF

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Publication number
JP4427876B2
JP4427876B2 JP2000220922A JP2000220922A JP4427876B2 JP 4427876 B2 JP4427876 B2 JP 4427876B2 JP 2000220922 A JP2000220922 A JP 2000220922A JP 2000220922 A JP2000220922 A JP 2000220922A JP 4427876 B2 JP4427876 B2 JP 4427876B2
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JP
Japan
Prior art keywords
angular velocity
portions
beams
vibrator
velocity sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000220922A
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English (en)
Japanese (ja)
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JP2001091265A (ja
JP2001091265A5 (https=
Inventor
岳志 伊藤
宗男 頼永
祐史 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Soken Inc
Original Assignee
Denso Corp
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Denso Corp, Nippon Soken Inc filed Critical Denso Corp
Priority to JP2000220922A priority Critical patent/JP4427876B2/ja
Publication of JP2001091265A publication Critical patent/JP2001091265A/ja
Publication of JP2001091265A5 publication Critical patent/JP2001091265A5/ja
Application granted granted Critical
Publication of JP4427876B2 publication Critical patent/JP4427876B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

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  • Gyroscopes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
JP2000220922A 1999-07-22 2000-07-21 半導体角速度センサ Expired - Fee Related JP4427876B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000220922A JP4427876B2 (ja) 1999-07-22 2000-07-21 半導体角速度センサ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-207715 1999-07-22
JP20771599 1999-07-22
JP2000220922A JP4427876B2 (ja) 1999-07-22 2000-07-21 半導体角速度センサ

Publications (3)

Publication Number Publication Date
JP2001091265A JP2001091265A (ja) 2001-04-06
JP2001091265A5 JP2001091265A5 (https=) 2008-09-04
JP4427876B2 true JP4427876B2 (ja) 2010-03-10

Family

ID=26516424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000220922A Expired - Fee Related JP4427876B2 (ja) 1999-07-22 2000-07-21 半導体角速度センサ

Country Status (1)

Country Link
JP (1) JP4427876B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7302847B2 (en) * 2004-08-17 2007-12-04 Nippon Soken, Inc. Physical quantity sensor having movable portion
JP4528720B2 (ja) * 2005-12-28 2010-08-18 株式会社東芝 赤外線検出素子およびその製造方法と赤外線カメラ
JP2007218608A (ja) * 2006-02-14 2007-08-30 Denso Corp 半導体力学量センサ
JP5206709B2 (ja) 2009-03-18 2013-06-12 株式会社豊田中央研究所 可動体を備えている装置
JP4905574B2 (ja) 2010-03-25 2012-03-28 株式会社豊田中央研究所 可動部分を備えている積層構造体
JP7135291B2 (ja) * 2017-10-24 2022-09-13 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、電子機器および移動体

Also Published As

Publication number Publication date
JP2001091265A (ja) 2001-04-06

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