JP4417747B2 - 弾性表面波装置およびその製造方法 - Google Patents
弾性表面波装置およびその製造方法 Download PDFInfo
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- JP4417747B2 JP4417747B2 JP2004052528A JP2004052528A JP4417747B2 JP 4417747 B2 JP4417747 B2 JP 4417747B2 JP 2004052528 A JP2004052528 A JP 2004052528A JP 2004052528 A JP2004052528 A JP 2004052528A JP 4417747 B2 JP4417747 B2 JP 4417747B2
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- piezoelectric substrate
- acoustic wave
- surface acoustic
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- 238000000034 method Methods 0.000 claims description 32
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- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 16
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Images
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- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
2,5:酸素含有量が多い領域
3:IDT電極
4:遷移金属元素を添加した圧電基板
6:本発明の弾性表面波装置の周波数特性
7:比較例の弾性表面波装置の周波数特性
8:弾性表面波共振子
Claims (4)
- タンタル酸リチウム単結晶またはニオブ酸リチウム単結晶からなり、かつ酸素含有量が化学量論比組成より少ない非焦電性の圧電基板と、前記圧電基板上に、互いに間隔をあけた状態で配設される複数の電極指を有するIDT電極と、を備え、
前記圧電基板の表面の前記電極指の直下領域および隣接する前記電極指間の直下領域は、酸素含有量が周囲より多い酸化層となっていることを特徴とする弾性表面波装置。 - 前記圧電基板の表面の前記電極指の直下領域および隣接する前記電極指間の直下領域を除く領域は、前記酸化層が除去されていることを特徴とする請求項1に記載の弾性表面波装置。
- タンタル酸リチウム単結晶またはニオブ酸リチウム単結晶からなり、かつ酸素含有量が化学量論比組成より少ない非焦電性の圧電基板の表面の一領域を酸化する工程と、前記圧電基板の表面の前記一領域上にIDT電極を形成する工程と、を含むことを特徴とする弾性表面波装置の製造方法。
- タンタル酸リチウム単結晶またはニオブ酸リチウム単結晶からなり、かつ酸素含有量が化学量論比組成より少ない非焦電性の圧電基板の表面を酸化する工程と、前記圧電基板の酸化表面にIDT電極を形成する工程と、前記圧電基板の前記IDT電極が形成されている表面の一領域を除く酸化表面を除去する工程と、を含むことを特徴とする弾性表面波装置の製造方法。
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JP2004052528A JP4417747B2 (ja) | 2004-02-26 | 2004-02-26 | 弾性表面波装置およびその製造方法 |
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JP2004052528A JP4417747B2 (ja) | 2004-02-26 | 2004-02-26 | 弾性表面波装置およびその製造方法 |
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JP2005244670A JP2005244670A (ja) | 2005-09-08 |
JP4417747B2 true JP4417747B2 (ja) | 2010-02-17 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4031764B2 (ja) | 2004-03-09 | 2008-01-09 | Tdk株式会社 | 弾性表面波素子、弾性表面波装置、デュプレクサ及び弾性表面波素子の製造方法 |
DE112006002957B4 (de) * | 2005-11-14 | 2010-12-16 | Murata Manufacturing Co. Ltd., Nagaokakyo-shi | Verfahren zum Herstellen eines Oberflächenwellenbauelements und Oberflächenwellenbauelement |
JP2008252351A (ja) * | 2007-03-29 | 2008-10-16 | Murata Mfg Co Ltd | 弾性表面波素子及びその製造方法 |
WO2015098694A1 (ja) * | 2013-12-26 | 2015-07-02 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
JP6699223B2 (ja) * | 2016-02-23 | 2020-05-27 | 株式会社リコー | 圧電体評価装置 |
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