JP4407845B2 - 圧電振動子及びその製造方法並びに圧電振動子用の蓋 - Google Patents

圧電振動子及びその製造方法並びに圧電振動子用の蓋 Download PDF

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Publication number
JP4407845B2
JP4407845B2 JP2008083416A JP2008083416A JP4407845B2 JP 4407845 B2 JP4407845 B2 JP 4407845B2 JP 2008083416 A JP2008083416 A JP 2008083416A JP 2008083416 A JP2008083416 A JP 2008083416A JP 4407845 B2 JP4407845 B2 JP 4407845B2
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Japan
Prior art keywords
lid
piezoelectric vibrator
wall
curved
transmissive member
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Expired - Fee Related
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JP2008083416A
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English (en)
Japanese (ja)
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JP2009027687A (ja
Inventor
賀津雄 石川
明稔 原
幸弘 利根川
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Miyazaki Epson Corp
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Miyazaki Epson Corp
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Priority to JP2008083416A priority Critical patent/JP4407845B2/ja
Priority to US12/141,187 priority patent/US7859172B2/en
Priority to CN2008101286180A priority patent/CN101330282B/zh
Publication of JP2009027687A publication Critical patent/JP2009027687A/ja
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2008083416A 2007-06-19 2008-03-27 圧電振動子及びその製造方法並びに圧電振動子用の蓋 Expired - Fee Related JP4407845B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008083416A JP4407845B2 (ja) 2007-06-19 2008-03-27 圧電振動子及びその製造方法並びに圧電振動子用の蓋
US12/141,187 US7859172B2 (en) 2007-06-19 2008-06-18 Piezoelectric resonator, manufacturing method thereof and lid for piezoelectric resonator
CN2008101286180A CN101330282B (zh) 2007-06-19 2008-06-19 压电振子及其制造方法以及压电振子用盖

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007161282 2007-06-19
JP2008083416A JP4407845B2 (ja) 2007-06-19 2008-03-27 圧電振動子及びその製造方法並びに圧電振動子用の蓋

Publications (2)

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JP2009027687A JP2009027687A (ja) 2009-02-05
JP4407845B2 true JP4407845B2 (ja) 2010-02-03

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JP2008083416A Expired - Fee Related JP4407845B2 (ja) 2007-06-19 2008-03-27 圧電振動子及びその製造方法並びに圧電振動子用の蓋

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JP (1) JP4407845B2 (zh)
CN (1) CN101330282B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5476964B2 (ja) * 2009-12-09 2014-04-23 セイコーエプソン株式会社 振動子、発振器、ジャイロ及び電子機器
JP5782707B2 (ja) * 2010-12-01 2015-09-24 セイコーエプソン株式会社 電子機器
JP5129284B2 (ja) * 2010-03-09 2013-01-30 日本電波工業株式会社 圧電振動子及び圧電振動子の製造方法
US9038463B2 (en) * 2011-09-22 2015-05-26 Seiko Epson Corporation Electronic device, manufacturing method thereof, and electronic apparatus
JP2015023422A (ja) * 2013-07-18 2015-02-02 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP6209886B2 (ja) * 2013-07-18 2017-10-11 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP2015128268A (ja) * 2013-12-27 2015-07-09 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器、物理量センサー、移動体および振動素子の周波数調整方法
CN111650400B (zh) * 2020-06-03 2021-05-14 西安交通大学 一种小型化侧面贴装差动型集成式谐振加速度计

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6321444B1 (en) * 2000-04-11 2001-11-27 Japan Radio Co., Ltd. Method of making surface acoustic wave device
CN2490377Y (zh) * 2001-06-21 2002-05-08 江伟林 一种电磁阀主阀阀膜
JP2005191314A (ja) * 2003-12-25 2005-07-14 Kyocera Corp 蓋体およびこれを用いた光半導体装置

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JP2009027687A (ja) 2009-02-05
CN101330282A (zh) 2008-12-24
CN101330282B (zh) 2011-07-13

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