JP4407845B2 - 圧電振動子及びその製造方法並びに圧電振動子用の蓋 - Google Patents

圧電振動子及びその製造方法並びに圧電振動子用の蓋 Download PDF

Info

Publication number
JP4407845B2
JP4407845B2 JP2008083416A JP2008083416A JP4407845B2 JP 4407845 B2 JP4407845 B2 JP 4407845B2 JP 2008083416 A JP2008083416 A JP 2008083416A JP 2008083416 A JP2008083416 A JP 2008083416A JP 4407845 B2 JP4407845 B2 JP 4407845B2
Authority
JP
Japan
Prior art keywords
lid
piezoelectric vibrator
wall
curved
transmissive member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008083416A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009027687A (ja
Inventor
賀津雄 石川
明稔 原
幸弘 利根川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miyazaki Epson Corp
Original Assignee
Miyazaki Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miyazaki Epson Corp filed Critical Miyazaki Epson Corp
Priority to JP2008083416A priority Critical patent/JP4407845B2/ja
Priority to US12/141,187 priority patent/US7859172B2/en
Priority to CN2008101286180A priority patent/CN101330282B/zh
Publication of JP2009027687A publication Critical patent/JP2009027687A/ja
Application granted granted Critical
Publication of JP4407845B2 publication Critical patent/JP4407845B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2008083416A 2007-06-19 2008-03-27 圧電振動子及びその製造方法並びに圧電振動子用の蓋 Expired - Fee Related JP4407845B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008083416A JP4407845B2 (ja) 2007-06-19 2008-03-27 圧電振動子及びその製造方法並びに圧電振動子用の蓋
US12/141,187 US7859172B2 (en) 2007-06-19 2008-06-18 Piezoelectric resonator, manufacturing method thereof and lid for piezoelectric resonator
CN2008101286180A CN101330282B (zh) 2007-06-19 2008-06-19 压电振子及其制造方法以及压电振子用盖

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007161282 2007-06-19
JP2008083416A JP4407845B2 (ja) 2007-06-19 2008-03-27 圧電振動子及びその製造方法並びに圧電振動子用の蓋

Publications (2)

Publication Number Publication Date
JP2009027687A JP2009027687A (ja) 2009-02-05
JP4407845B2 true JP4407845B2 (ja) 2010-02-03

Family

ID=40205916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008083416A Expired - Fee Related JP4407845B2 (ja) 2007-06-19 2008-03-27 圧電振動子及びその製造方法並びに圧電振動子用の蓋

Country Status (2)

Country Link
JP (1) JP4407845B2 (zh)
CN (1) CN101330282B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5476964B2 (ja) * 2009-12-09 2014-04-23 セイコーエプソン株式会社 振動子、発振器、ジャイロ及び電子機器
JP5782707B2 (ja) * 2010-12-01 2015-09-24 セイコーエプソン株式会社 電子機器
JP5129284B2 (ja) 2010-03-09 2013-01-30 日本電波工業株式会社 圧電振動子及び圧電振動子の製造方法
US9038463B2 (en) * 2011-09-22 2015-05-26 Seiko Epson Corporation Electronic device, manufacturing method thereof, and electronic apparatus
JP6209886B2 (ja) * 2013-07-18 2017-10-11 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP2015023422A (ja) * 2013-07-18 2015-02-02 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP2015128268A (ja) * 2013-12-27 2015-07-09 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器、物理量センサー、移動体および振動素子の周波数調整方法
CN111650400B (zh) * 2020-06-03 2021-05-14 西安交通大学 一种小型化侧面贴装差动型集成式谐振加速度计

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6321444B1 (en) * 2000-04-11 2001-11-27 Japan Radio Co., Ltd. Method of making surface acoustic wave device
CN2490377Y (zh) * 2001-06-21 2002-05-08 江伟林 一种电磁阀主阀阀膜
JP2005191314A (ja) * 2003-12-25 2005-07-14 Kyocera Corp 蓋体およびこれを用いた光半導体装置

Also Published As

Publication number Publication date
CN101330282B (zh) 2011-07-13
CN101330282A (zh) 2008-12-24
JP2009027687A (ja) 2009-02-05

Similar Documents

Publication Publication Date Title
JP4324811B2 (ja) 圧電振動子及びその製造方法
JP4407845B2 (ja) 圧電振動子及びその製造方法並びに圧電振動子用の蓋
JP5062413B2 (ja) 音叉型圧電振動片及び音叉型圧電振動子
JP5276035B2 (ja) 圧電デバイスの製造方法及び圧電デバイス
US7859172B2 (en) Piezoelectric resonator, manufacturing method thereof and lid for piezoelectric resonator
JP4609196B2 (ja) 圧電振動片および圧電デバイスならびに電子機器および携帯電話装置
JP4553157B2 (ja) 音叉型圧電振動片及び音叉型圧電振動子
JP4985960B2 (ja) 振動片及び振動子
JP2006148857A (ja) 圧電振動片および圧電デバイス
JP2006311090A (ja) 圧電振動片および圧電デバイス
JP2011223230A (ja) 振動片、振動子
JP4647677B2 (ja) 圧電デバイス
JP5170405B2 (ja) 圧電振動子の製造方法
JP2007163200A (ja) 振動片、角速度センサ
JP5494994B2 (ja) 振動子の製造方法
JP5131438B2 (ja) 圧電デバイスの製造方法
JP2009017005A (ja) 圧電振動子及びその製造方法
CN105827212B (zh) 压电振动片及压电振动器
JP2009021773A (ja) 圧電振動子の製造方法
JP2008072618A (ja) 圧電デバイスおよび圧電デバイスの製造方法
JP2010166198A (ja) 圧電振動子
JP2008294783A (ja) 圧電振動子及びその製造方法
JP5057122B2 (ja) 圧電振動片および圧電振動子
JP4978220B2 (ja) 圧電振動子及びその製造方法
JP5128381B2 (ja) 圧電デバイスとその製造方法

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090416

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090513

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090708

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20091021

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20091103

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121120

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121120

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121120

Year of fee payment: 3

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121120

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121120

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121120

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131120

Year of fee payment: 4

LAPS Cancellation because of no payment of annual fees