JP4407845B2 - 圧電振動子及びその製造方法並びに圧電振動子用の蓋 - Google Patents
圧電振動子及びその製造方法並びに圧電振動子用の蓋 Download PDFInfo
- Publication number
- JP4407845B2 JP4407845B2 JP2008083416A JP2008083416A JP4407845B2 JP 4407845 B2 JP4407845 B2 JP 4407845B2 JP 2008083416 A JP2008083416 A JP 2008083416A JP 2008083416 A JP2008083416 A JP 2008083416A JP 4407845 B2 JP4407845 B2 JP 4407845B2
- Authority
- JP
- Japan
- Prior art keywords
- lid
- piezoelectric vibrator
- wall
- curved
- transmissive member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008083416A JP4407845B2 (ja) | 2007-06-19 | 2008-03-27 | 圧電振動子及びその製造方法並びに圧電振動子用の蓋 |
US12/141,187 US7859172B2 (en) | 2007-06-19 | 2008-06-18 | Piezoelectric resonator, manufacturing method thereof and lid for piezoelectric resonator |
CN2008101286180A CN101330282B (zh) | 2007-06-19 | 2008-06-19 | 压电振子及其制造方法以及压电振子用盖 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007161282 | 2007-06-19 | ||
JP2008083416A JP4407845B2 (ja) | 2007-06-19 | 2008-03-27 | 圧電振動子及びその製造方法並びに圧電振動子用の蓋 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009027687A JP2009027687A (ja) | 2009-02-05 |
JP4407845B2 true JP4407845B2 (ja) | 2010-02-03 |
Family
ID=40205916
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008083416A Expired - Fee Related JP4407845B2 (ja) | 2007-06-19 | 2008-03-27 | 圧電振動子及びその製造方法並びに圧電振動子用の蓋 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4407845B2 (zh) |
CN (1) | CN101330282B (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5476964B2 (ja) * | 2009-12-09 | 2014-04-23 | セイコーエプソン株式会社 | 振動子、発振器、ジャイロ及び電子機器 |
JP5782707B2 (ja) * | 2010-12-01 | 2015-09-24 | セイコーエプソン株式会社 | 電子機器 |
JP5129284B2 (ja) * | 2010-03-09 | 2013-01-30 | 日本電波工業株式会社 | 圧電振動子及び圧電振動子の製造方法 |
US9038463B2 (en) * | 2011-09-22 | 2015-05-26 | Seiko Epson Corporation | Electronic device, manufacturing method thereof, and electronic apparatus |
JP2015023422A (ja) * | 2013-07-18 | 2015-02-02 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器および移動体 |
JP6209886B2 (ja) * | 2013-07-18 | 2017-10-11 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器および移動体 |
JP2015128268A (ja) * | 2013-12-27 | 2015-07-09 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器、物理量センサー、移動体および振動素子の周波数調整方法 |
CN111650400B (zh) * | 2020-06-03 | 2021-05-14 | 西安交通大学 | 一种小型化侧面贴装差动型集成式谐振加速度计 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6321444B1 (en) * | 2000-04-11 | 2001-11-27 | Japan Radio Co., Ltd. | Method of making surface acoustic wave device |
CN2490377Y (zh) * | 2001-06-21 | 2002-05-08 | 江伟林 | 一种电磁阀主阀阀膜 |
JP2005191314A (ja) * | 2003-12-25 | 2005-07-14 | Kyocera Corp | 蓋体およびこれを用いた光半導体装置 |
-
2008
- 2008-03-27 JP JP2008083416A patent/JP4407845B2/ja not_active Expired - Fee Related
- 2008-06-19 CN CN2008101286180A patent/CN101330282B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2009027687A (ja) | 2009-02-05 |
CN101330282A (zh) | 2008-12-24 |
CN101330282B (zh) | 2011-07-13 |
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