JP4403000B2 - マイクロチップ及びマイクロポンプ - Google Patents

マイクロチップ及びマイクロポンプ Download PDF

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Publication number
JP4403000B2
JP4403000B2 JP2004097638A JP2004097638A JP4403000B2 JP 4403000 B2 JP4403000 B2 JP 4403000B2 JP 2004097638 A JP2004097638 A JP 2004097638A JP 2004097638 A JP2004097638 A JP 2004097638A JP 4403000 B2 JP4403000 B2 JP 4403000B2
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JP
Japan
Prior art keywords
valve
substrate
pdms
fine
microchip
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Expired - Fee Related
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JP2004097638A
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English (en)
Japanese (ja)
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JP2005283331A (ja
JP2005283331A5 (enExample
Inventor
挙秀 間口
憲一 田山
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Hoya Corp
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Hoya Corp
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Priority to JP2004097638A priority Critical patent/JP4403000B2/ja
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Publication of JP2005283331A5 publication Critical patent/JP2005283331A5/ja
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  • Sampling And Sample Adjustment (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Micromachines (AREA)
  • Fluid-Driven Valves (AREA)
  • Check Valves (AREA)
  • Reciprocating Pumps (AREA)
JP2004097638A 2004-03-30 2004-03-30 マイクロチップ及びマイクロポンプ Expired - Fee Related JP4403000B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004097638A JP4403000B2 (ja) 2004-03-30 2004-03-30 マイクロチップ及びマイクロポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004097638A JP4403000B2 (ja) 2004-03-30 2004-03-30 マイクロチップ及びマイクロポンプ

Publications (3)

Publication Number Publication Date
JP2005283331A JP2005283331A (ja) 2005-10-13
JP2005283331A5 JP2005283331A5 (enExample) 2007-03-29
JP4403000B2 true JP4403000B2 (ja) 2010-01-20

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JP2004097638A Expired - Fee Related JP4403000B2 (ja) 2004-03-30 2004-03-30 マイクロチップ及びマイクロポンプ

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JP (1) JP4403000B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019063981A (ja) * 2017-09-29 2019-04-25 研能科技股▲ふん▼有限公司 流体システム

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005052752A1 (de) * 2005-11-04 2007-05-10 Clondiag Chip Technologies Gmbh Vorrichtung und Verfahren zum Nachweis von molekularen Wechselwirkungen
KR100691732B1 (ko) 2006-02-22 2007-03-12 재단법인서울대학교산학협력재단 3차원 ｐｄｍｓ 구조물 형성 방법
DE112007000722B4 (de) 2006-03-29 2013-07-04 Murata Manufacturing Co., Ltd. Mikropumpe
TW200833950A (en) * 2007-02-09 2008-08-16 Cooler Master Co Ltd A thin film pump
JPWO2008108481A1 (ja) * 2007-03-05 2010-06-17 日本電気株式会社 マイクロチップの流体制御機構
JP5532218B2 (ja) * 2007-09-10 2014-06-25 日本電気株式会社 試料充填装置
US9579653B2 (en) 2008-06-26 2017-02-28 Fujikura Kasei Co., Ltd. Liquid channel device and production method therefor
JP5228797B2 (ja) * 2008-10-28 2013-07-03 藤倉化成株式会社 液体流路装置
CN102150048B (zh) * 2008-10-28 2013-07-10 藤仓化成株式会社 液体流道装置及其制作方法
JP5402262B2 (ja) * 2009-06-05 2014-01-29 株式会社リコー マイクロバルブ及びその製造方法
JP5428624B2 (ja) * 2009-08-03 2014-02-26 株式会社リコー マイクロバルブ及びその製造方法
JP2011232223A (ja) * 2010-04-28 2011-11-17 Power Supply Kk マイクロ流路プレート
DE102011003856B4 (de) 2011-02-09 2020-06-18 Robert Bosch Gmbh Mikrosystem für fluidische Anwendungen sowie Herstellungsverfahren und Benutzungsverfahren für ein Mikrosystem für fluidische Anwendungen
JP6172711B2 (ja) 2012-07-05 2017-08-02 国立研究開発法人理化学研究所 マイクロチップ用の流体制御デバイスおよびその利用
WO2014091334A2 (en) * 2012-12-13 2014-06-19 Koninklijke Philips N.V. Fluidic system with fluidic stop.
US10393101B2 (en) * 2013-08-12 2019-08-27 Koninklijke Philips N.V. Microfluidic device with valve
WO2015163921A1 (en) 2014-04-25 2015-10-29 Hewlett-Packard Development Company, L.P. Diagnostic cassette
JP5866470B1 (ja) * 2015-05-01 2016-02-17 株式会社朝日Ｆｒ研究所 チェックバルブ及びこれを用いたマイクロ化学チップ
KR101768040B1 (ko) * 2016-07-29 2017-08-14 한국과학기술원 랩온어칩용 밸브
KR101824246B1 (ko) * 2017-03-21 2018-01-31 재단법인 대구경북과학기술원 고분자 기판의 선택적 접합방법
KR101888376B1 (ko) * 2017-05-12 2018-08-14 티엔에스(주) 감염성 질병 진단용 유전자칩
KR101910818B1 (ko) 2017-06-02 2018-10-30 대한민국 유전자 판독용 랩온어칩
JP2019002926A (ja) * 2017-06-19 2019-01-10 積水化学工業株式会社 マイクロ流体デバイス及び流体の送液方法
CN108204355A (zh) * 2018-01-12 2018-06-26 长春工业大学 一种三点固支薄膜阀压电泵
JP7214500B2 (ja) * 2019-02-20 2023-01-30 東芝テック株式会社 圧電ポンプ、及び、液体吐出装置
JP7587824B2 (ja) * 2021-02-03 2024-11-21 国立大学法人東京科学大学 マイクロバルブ及びそれを用いたマイクロポンプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019063981A (ja) * 2017-09-29 2019-04-25 研能科技股▲ふん▼有限公司 流体システム
JP7030655B2 (ja) 2017-09-29 2022-03-07 研能科技股▲ふん▼有限公司 流体システム

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Publication number Publication date
JP2005283331A (ja) 2005-10-13

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