JP4386812B2 - Ｘ線検査装置 - Google Patents

Ｘ線検査装置 Download PDF

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Publication number
JP4386812B2
JP4386812B2 JP2004248706A JP2004248706A JP4386812B2 JP 4386812 B2 JP4386812 B2 JP 4386812B2 JP 2004248706 A JP2004248706 A JP 2004248706A JP 2004248706 A JP2004248706 A JP 2004248706A JP 4386812 B2 JP4386812 B2 JP 4386812B2
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JP
Japan
Prior art keywords
ray
inspection
axis
inspection object
image
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2004248706A
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English (en)
Japanese (ja)
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JP2005121633A5 (cg-RX-API-DMAC7.html
JP2005121633A (ja
Inventor
信治 吉野
勝 市原
博之 井上
俊生 木下
一生 大内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2004248706A priority Critical patent/JP4386812B2/ja
Publication of JP2005121633A publication Critical patent/JP2005121633A/ja
Publication of JP2005121633A5 publication Critical patent/JP2005121633A5/ja
Application granted granted Critical
Publication of JP4386812B2 publication Critical patent/JP4386812B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP2004248706A 2003-08-27 2004-08-27 Ｘ線検査装置 Expired - Fee Related JP4386812B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004248706A JP4386812B2 (ja) 2003-08-27 2004-08-27 Ｘ線検査装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003303188 2003-08-27
JP2003330180 2003-09-22
JP2004248706A JP4386812B2 (ja) 2003-08-27 2004-08-27 Ｘ線検査装置

Publications (3)

Publication Number Publication Date
JP2005121633A JP2005121633A (ja) 2005-05-12
JP2005121633A5 JP2005121633A5 (cg-RX-API-DMAC7.html) 2007-04-26
JP4386812B2 true JP4386812B2 (ja) 2009-12-16

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ID=34623546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004248706A Expired - Fee Related JP4386812B2 (ja) 2003-08-27 2004-08-27 Ｘ線検査装置

Country Status (1)

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JP (1) JP4386812B2 (cg-RX-API-DMAC7.html)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0415053D0 (en) * 2004-07-05 2004-08-04 Dage Prec Ind Ltd X-ray manipulator
JP4926645B2 (ja) * 2006-10-24 2012-05-09 名古屋電機工業株式会社 放射線検査装置、放射線検査方法および放射線検査プログラム
JP2008298480A (ja) * 2007-05-29 2008-12-11 Beamsense Co Ltd ステレオ透視装置およびそれを用いたステレオ観察方法
JP5125423B2 (ja) * 2007-11-01 2013-01-23 オムロン株式会社 Ｘ線断層画像によるはんだ電極の検査方法およびこの方法を用いた基板検査装置
JP4818245B2 (ja) * 2007-11-14 2011-11-16 株式会社 コアーズ 加熱型ｘ線観察装置
JPWO2009078415A1 (ja) * 2007-12-17 2011-04-28 株式会社ユニハイトシステム Ｘ線検査装置および方法
JP5396751B2 (ja) * 2008-06-18 2014-01-22 オムロン株式会社 Ｘ線利用の基板検査装置
CN102265143A (zh) * 2008-12-22 2011-11-30 欧姆龙株式会社 X射线检查方法和x射线检查装置
JP5444718B2 (ja) * 2009-01-08 2014-03-19 オムロン株式会社 検査方法、検査装置および検査用プログラム
JP4574718B1 (ja) 2009-04-22 2010-11-04 株式会社アドバンテスト 電磁波測定装置、測定方法、プログラム、記録媒体
JP5569061B2 (ja) * 2010-03-15 2014-08-13 オムロン株式会社 Ｘ線検査方法、ｘ線検査装置およびｘ線検査プログラム
JP5220060B2 (ja) * 2010-06-02 2013-06-26 株式会社アドバンテスト 電磁波測定装置、測定方法、プログラム、記録媒体
CN103733053B (zh) * 2011-08-05 2016-08-17 株式会社岛津制作所 射线摄影装置
JP2013061257A (ja) * 2011-09-14 2013-04-04 Omron Corp Ｘ線検査装置、ｘ線検査装置の制御方法、ｘ線検査装置を制御するためのプログラム、および、当該プログラムを格納した記録媒体
KR101181845B1 (ko) * 2011-12-22 2012-09-11 주식회사 쎄크 Ｓｍｔ 인라인용 자동 엑스선 검사장치
KR101381927B1 (ko) * 2013-09-13 2014-04-24 김선택 X선을 이용한 회로소자의 사위 촬영장치 및 방법
KR101467478B1 (ko) * 2013-09-13 2014-12-01 (주)시스트 X선을 이용한 회로소자의 촬영장치 및 방법
EP2927943A1 (en) 2014-04-04 2015-10-07 Nordson Corporation X-ray inspection apparatus for inspecting semiconductor wafers
JP6578369B2 (ja) * 2016-02-04 2019-09-18 エクスロン インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツングＹｘｌｏｎ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｇｍｂｈ インテリジェントな経路曲線を用いたｘ線ｃｔシステム内でのｘ線ｃｔ法において試験片を再構成する方法
DK3690429T3 (en) * 2019-02-04 2021-12-13 Microtec Srl Tunnel ct scanner
EP4414753A4 (en) * 2021-10-08 2025-08-06 Nuctech Co Ltd POSTURE ADJUSTMENT STRUCTURE, TRANSMISSION DEVICE AND RADIATION IMAGING SYSTEM

Also Published As

Publication number Publication date
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