JP4304927B2 - 固体撮像素子及びその製造方法 - Google Patents

固体撮像素子及びその製造方法 Download PDF

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Publication number
JP4304927B2
JP4304927B2 JP2002206899A JP2002206899A JP4304927B2 JP 4304927 B2 JP4304927 B2 JP 4304927B2 JP 2002206899 A JP2002206899 A JP 2002206899A JP 2002206899 A JP2002206899 A JP 2002206899A JP 4304927 B2 JP4304927 B2 JP 4304927B2
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Japan
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silicon substrate
photoelectric conversion
conductivity type
soi
solid
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JP2002206899A
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Japanese (ja)
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JP2004055590A5 (https=
JP2004055590A (ja
Inventor
信浩 唐澤
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Sony Corp
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Sony Corp
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  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2002206899A 2002-07-16 2002-07-16 固体撮像素子及びその製造方法 Expired - Fee Related JP4304927B2 (ja)

Priority Applications (1)

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JP2002206899A JP4304927B2 (ja) 2002-07-16 2002-07-16 固体撮像素子及びその製造方法

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JP2002206899A JP4304927B2 (ja) 2002-07-16 2002-07-16 固体撮像素子及びその製造方法

Publications (3)

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JP2004055590A JP2004055590A (ja) 2004-02-19
JP2004055590A5 JP2004055590A5 (https=) 2005-10-20
JP4304927B2 true JP4304927B2 (ja) 2009-07-29

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Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7157300B2 (en) * 2004-11-19 2007-01-02 Sharp Laboratories Of America, Inc. Fabrication of thin film germanium infrared sensor by bonding to silicon wafer
JP4725095B2 (ja) 2004-12-15 2011-07-13 ソニー株式会社 裏面入射型固体撮像装置及びその製造方法
FR2910707B1 (fr) * 2006-12-20 2009-06-12 E2V Semiconductors Soc Par Act Capteur d'image a haute densite d'integration
JP2009065161A (ja) * 2007-09-07 2009-03-26 Dongbu Hitek Co Ltd イメージセンサ及びその製造方法
KR101063651B1 (ko) 2007-12-27 2011-09-14 주식회사 동부하이텍 이미지센서 및 그 제조방법
DE102008051929A1 (de) * 2007-12-27 2009-07-16 Dongbu Hitek Co., Ltd. Bildsensor und Verfahren zu dessen Herstellung
KR100882468B1 (ko) * 2007-12-28 2009-02-09 주식회사 동부하이텍 이미지센서 및 그 제조방법
KR100856942B1 (ko) * 2008-01-07 2008-09-04 주식회사 동부하이텍 이미지센서 및 그 제조방법
KR100997316B1 (ko) 2008-07-29 2010-11-30 주식회사 동부하이텍 이미지센서 및 그 제조방법
KR101016512B1 (ko) * 2008-09-11 2011-02-24 주식회사 동부하이텍 이미지 센서 및 이미지 센서의 제조 방법
KR101116574B1 (ko) * 2008-11-11 2012-02-28 주식회사 동부하이텍 이미지 센서의 제조 방법
TWI498786B (zh) 2009-08-24 2015-09-01 Semiconductor Energy Lab 觸控感應器及其驅動方法與顯示裝置
KR101648200B1 (ko) * 2009-10-22 2016-08-12 삼성전자주식회사 이미지 센서 및 그 제조 방법
WO2011055625A1 (en) * 2009-11-06 2011-05-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and operating method thereof
JP5509962B2 (ja) * 2010-03-19 2014-06-04 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器
JP5585232B2 (ja) 2010-06-18 2014-09-10 ソニー株式会社 固体撮像装置、電子機器
WO2012164829A1 (ja) * 2011-05-31 2012-12-06 パナソニック株式会社 撮像装置
JP6012262B2 (ja) 2012-05-31 2016-10-25 キヤノン株式会社 半導体装置の製造方法
JP6128494B2 (ja) * 2012-06-27 2017-05-17 パナソニックＩｐマネジメント株式会社 固体撮像装置
JP6247918B2 (ja) * 2013-12-09 2017-12-13 浜松ホトニクス株式会社 放射線イメージセンサ
TWI656631B (zh) * 2014-03-28 2019-04-11 日商半導體能源研究所股份有限公司 攝像裝置
CN105742303B (zh) * 2014-12-26 2020-08-25 松下知识产权经营株式会社 摄像装置

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