JP4303545B2 - 可動エレメント装置 - Google Patents

可動エレメント装置 Download PDF

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Publication number
JP4303545B2
JP4303545B2 JP2003317267A JP2003317267A JP4303545B2 JP 4303545 B2 JP4303545 B2 JP 4303545B2 JP 2003317267 A JP2003317267 A JP 2003317267A JP 2003317267 A JP2003317267 A JP 2003317267A JP 4303545 B2 JP4303545 B2 JP 4303545B2
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JP
Japan
Prior art keywords
capacitance
mirror
signal
output
movable element
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Expired - Fee Related
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JP2003317267A
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English (en)
Japanese (ja)
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JP2005083937A5 (https=
JP2005083937A (ja
Inventor
聡 井出
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Fujitsu Ltd
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Fujitsu Ltd
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Priority to JP2003317267A priority Critical patent/JP4303545B2/ja
Publication of JP2005083937A publication Critical patent/JP2005083937A/ja
Publication of JP2005083937A5 publication Critical patent/JP2005083937A5/ja
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Publication of JP4303545B2 publication Critical patent/JP4303545B2/ja
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  • Micromachines (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2003317267A 2003-09-09 2003-09-09 可動エレメント装置 Expired - Fee Related JP4303545B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003317267A JP4303545B2 (ja) 2003-09-09 2003-09-09 可動エレメント装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003317267A JP4303545B2 (ja) 2003-09-09 2003-09-09 可動エレメント装置

Publications (3)

Publication Number Publication Date
JP2005083937A JP2005083937A (ja) 2005-03-31
JP2005083937A5 JP2005083937A5 (https=) 2006-09-28
JP4303545B2 true JP4303545B2 (ja) 2009-07-29

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Family Applications (1)

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JP2003317267A Expired - Fee Related JP4303545B2 (ja) 2003-09-09 2003-09-09 可動エレメント装置

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JP (1) JP4303545B2 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4499447B2 (ja) * 2004-03-01 2010-07-07 日本電信電話株式会社 電子部品装置
JP4287324B2 (ja) * 2004-04-28 2009-07-01 日本電信電話株式会社 電子部品装置
JP4902552B2 (ja) * 2006-02-07 2012-03-21 パイオニア株式会社 静電容量検出装置
JP2007249174A (ja) * 2006-02-16 2007-09-27 Olympus Corp 可変形状鏡
CN100593767C (zh) * 2006-06-30 2010-03-10 深圳市大族激光科技股份有限公司 电容传感器的控制方法
JP5103876B2 (ja) * 2006-11-16 2012-12-19 株式会社デンソー ２次元光走査装置
JP5362469B2 (ja) * 2009-02-26 2013-12-11 ラピスセミコンダクタ株式会社 液晶パネルの駆動回路
WO2011112676A1 (en) * 2010-03-09 2011-09-15 Si-Ware Systems A technique to determine mirror position in optical interferometers
DE102012218219A1 (de) * 2012-10-05 2014-04-10 Carl Zeiss Smt Gmbh Verfahren zur Regelung der Verkippung eines Spiegelelements
JP7006189B2 (ja) * 2017-11-28 2022-01-24 株式会社アイシン 静電容量検出装置
CN111045206B (zh) * 2020-01-22 2025-12-19 无锡微视传感科技有限公司 静电扫描微镜
CN112817144B (zh) * 2020-12-31 2023-04-14 歌尔股份有限公司 Mems扫描镜及激光投影仪

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173703A (ja) * 1983-03-23 1984-10-01 Yokogawa Hokushin Electric Corp 容量式変換装置
JP2950011B2 (ja) * 1992-04-06 1999-09-20 松下電器産業株式会社 ミラー駆動装置
US5526172A (en) * 1993-07-27 1996-06-11 Texas Instruments Incorporated Microminiature, monolithic, variable electrical signal processor and apparatus including same
JP3389528B2 (ja) * 1999-04-16 2003-03-24 住友金属工業株式会社 インピーダンス／電圧変換装置
JP2001142009A (ja) * 1999-11-16 2001-05-25 Sony Corp マイクロミラー装置及び光ディスク装置
JP2001249151A (ja) * 2000-03-02 2001-09-14 Denso Corp 容量検出回路
JP2001289607A (ja) * 2000-04-05 2001-10-19 Fujitsu Ltd 揺動角度検出方法および装置並びに光ディスク装置
JP4373034B2 (ja) * 2001-07-11 2009-11-25 富士通株式会社 光スイッチ
JP3800161B2 (ja) * 2001-10-11 2006-07-26 株式会社デンソー 微小可動機構システムと微小可動機構部の制御方法

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Publication number Publication date
JP2005083937A (ja) 2005-03-31

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