JP4273145B2 - 熱処理装置 - Google Patents
熱処理装置 Download PDFInfo
- Publication number
- JP4273145B2 JP4273145B2 JP2006247621A JP2006247621A JP4273145B2 JP 4273145 B2 JP4273145 B2 JP 4273145B2 JP 2006247621 A JP2006247621 A JP 2006247621A JP 2006247621 A JP2006247621 A JP 2006247621A JP 4273145 B2 JP4273145 B2 JP 4273145B2
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- JP
- Japan
- Prior art keywords
- heat treatment
- heat
- workpiece
- ventilation
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000010438 heat treatment Methods 0.000 title claims description 129
- 238000009423 ventilation Methods 0.000 claims description 43
- 238000001514 detection method Methods 0.000 claims description 10
- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- 238000004378 air conditioning Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/04—Circulating atmospheres by mechanical means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Description
21 熱処理部
3 熱処理手段
4 換気手段
41 吸気ダクト
42 排気ダクト
43 ファン
5A,5B 換気量調整手段
51A 吸気用自動ダンパー
51B 排気用自動ダンパー
W ワーク(被処理物)
Claims (3)
- 熱処理部内に被処理物が収容された状態で、前記熱処理部内の空気を循環させながら加熱することにより前記被処理物を熱処理する熱処理手段と、外気を加熱して前記熱処理部内に送り込むとともに前記熱処理部内の空気を排気することにより前記熱処理部内を換気する換気手段とを備えた熱処理装置において、
前記熱処理手段がワーク検知手段によるワーク無の検知に応じて被処理物を熱処理しないときには、前記熱処理手段がワーク検知手段によるワーク有の検知に応じて又は上流装置によるワーク搬入の信号に応じて被処理物を熱処理するときよりも前記換気手段が換気する換気量を低減させる換気量調整手段をさらに備えることを特徴とする熱処理装置。 - 前記換気手段は、外気を吸い込む吸気ダクトと、前記熱処理部内の空気を排気する排気ダクトとを有し、
前記換気量調整手段は、前記吸気ダクトと排気ダクトのそれぞれに設けられる風量調整用の自動ダンパーと、前記熱処理手段が被処理物を熱処理するときには前記吸気ダクトおよび排気ダクトを開く方向に前記自動ダンパーを駆動し、前記熱処理手段が被処理物を熱処理しないときには前記吸気ダクトおよび排気ダクトを閉じる方向に前記自動ダンパーを駆動する制御を行うダンパー制御部とを有することを特徴とする請求項1に記載の熱処理装置。 - 前記換気手段は、前記熱処理部内の空気を排気する排気ダクトと、この排気ダクトの途中に設けられるファンとを有し、
前記換気量調整手段は、前記熱処理手段が被処理物を熱処理するときには前記ファンの回転数を大きくし、前記熱処理手段が被処理物を熱処理しないときには前記ファンの回転数を小さくする制御を行うファン制御部を有することを特徴とする請求項1に記載の熱処理装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006247621A JP4273145B2 (ja) | 2006-09-13 | 2006-09-13 | 熱処理装置 |
TW096130302A TW200815723A (en) | 2006-09-13 | 2007-08-16 | Heat treatment device |
KR1020070086579A KR101380481B1 (ko) | 2006-09-13 | 2007-08-28 | 열처리 장치 |
CN2007101458676A CN101173840B (zh) | 2006-09-13 | 2007-09-04 | 热处理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006247621A JP4273145B2 (ja) | 2006-09-13 | 2006-09-13 | 熱処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008070017A JP2008070017A (ja) | 2008-03-27 |
JP4273145B2 true JP4273145B2 (ja) | 2009-06-03 |
Family
ID=39291752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006247621A Active JP4273145B2 (ja) | 2006-09-13 | 2006-09-13 | 熱処理装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4273145B2 (ja) |
KR (1) | KR101380481B1 (ja) |
CN (1) | CN101173840B (ja) |
TW (1) | TW200815723A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101737949B1 (ko) * | 2010-03-31 | 2017-05-19 | 고요 써모 시스템 가부시끼 가이샤 | 열처리장치 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4896952B2 (ja) * | 2008-12-04 | 2012-03-14 | エスペック株式会社 | 熱処理装置 |
JP4727712B2 (ja) * | 2008-12-04 | 2011-07-20 | エスペック株式会社 | 通気装置 |
KR101104201B1 (ko) * | 2010-07-13 | 2012-01-10 | (주)에스엠텍 | 기판 열처리 장치 |
KR101406508B1 (ko) * | 2013-03-07 | 2014-06-11 | 김한곤 | 박판유리 강화열처리장치 |
KR101467082B1 (ko) * | 2013-03-07 | 2014-12-01 | 김한곤 | 공기 교반 및 배기수단이 구비된 예열로를 갖는 박판유리 강화열처리장치 |
KR101406576B1 (ko) * | 2013-03-07 | 2014-06-11 | 김한곤 | 공기 교반 및 배기수단이 구비된 서냉로를 갖는 박판유리 강화열처리장치 |
JP6177616B2 (ja) * | 2013-08-01 | 2017-08-09 | 光洋サーモシステム株式会社 | 熱処理装置 |
JP5767354B2 (ja) * | 2014-03-14 | 2015-08-19 | 光洋サーモシステム株式会社 | 熱処理装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2201398Y (zh) * | 1993-12-08 | 1995-06-21 | 地方国营梨树县白云灰厂 | 石灰窑二次通风装置 |
GB2300906B (en) * | 1995-05-18 | 1998-11-04 | Stein Atkinson Strody Ltd | Oven for glass article |
JP3739233B2 (ja) | 1999-06-28 | 2006-01-25 | 光洋サーモシステム株式会社 | 排気型バッチ式オーブン |
JP3403181B2 (ja) * | 2001-03-30 | 2003-05-06 | 東京エレクトロン株式会社 | 熱処理装置及び熱処理方法 |
US6830449B1 (en) * | 2004-02-02 | 2004-12-14 | Sis Microelectronics Corporation | Injector robot for replacing a gas injector in a furnace |
JP2006017357A (ja) * | 2004-06-30 | 2006-01-19 | Espec Corp | 熱処理装置 |
-
2006
- 2006-09-13 JP JP2006247621A patent/JP4273145B2/ja active Active
-
2007
- 2007-08-16 TW TW096130302A patent/TW200815723A/zh unknown
- 2007-08-28 KR KR1020070086579A patent/KR101380481B1/ko active IP Right Grant
- 2007-09-04 CN CN2007101458676A patent/CN101173840B/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101737949B1 (ko) * | 2010-03-31 | 2017-05-19 | 고요 써모 시스템 가부시끼 가이샤 | 열처리장치 |
KR101914434B1 (ko) * | 2010-03-31 | 2018-11-05 | 고요 써모 시스템 가부시끼 가이샤 | 열처리장치 |
Also Published As
Publication number | Publication date |
---|---|
TW200815723A (en) | 2008-04-01 |
JP2008070017A (ja) | 2008-03-27 |
CN101173840A (zh) | 2008-05-07 |
KR101380481B1 (ko) | 2014-04-01 |
TWI354762B (ja) | 2011-12-21 |
KR20080024440A (ko) | 2008-03-18 |
CN101173840B (zh) | 2012-06-27 |
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