JP4263397B2 - 金属用研磨液 - Google Patents

金属用研磨液 Download PDF

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Publication number
JP4263397B2
JP4263397B2 JP2001371089A JP2001371089A JP4263397B2 JP 4263397 B2 JP4263397 B2 JP 4263397B2 JP 2001371089 A JP2001371089 A JP 2001371089A JP 2001371089 A JP2001371089 A JP 2001371089A JP 4263397 B2 JP4263397 B2 JP 4263397B2
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JP
Japan
Prior art keywords
acid
metal
protective film
film forming
forming agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2001371089A
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English (en)
Japanese (ja)
Other versions
JP2002222782A5 (enExample
JP2002222782A (ja
Inventor
剛 内田
純 松沢
鉄哉 星野
康雄 上方
裕樹 寺崎
喜夫 本間
誠一 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Hitachi Ltd
Showa Denko Materials Co Ltd
Resonac Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Hitachi Ltd, Showa Denko Materials Co Ltd, Resonac Corp filed Critical Hitachi Chemical Co Ltd
Priority to JP2001371089A priority Critical patent/JP4263397B2/ja
Publication of JP2002222782A publication Critical patent/JP2002222782A/ja
Publication of JP2002222782A5 publication Critical patent/JP2002222782A5/ja
Application granted granted Critical
Publication of JP4263397B2 publication Critical patent/JP4263397B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2001371089A 1998-08-31 2001-12-05 金属用研磨液 Expired - Lifetime JP4263397B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001371089A JP4263397B2 (ja) 1998-08-31 2001-12-05 金属用研磨液

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP24561698 1998-08-31
JP10-245616 1998-12-10
JP35118898 1998-12-10
JP10-351188 1998-12-10
JP2001371089A JP4263397B2 (ja) 1998-08-31 2001-12-05 金属用研磨液

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2000568110A Division JP3337464B2 (ja) 1998-08-31 1999-08-31 金属用研磨液及び研磨方法

Related Child Applications (7)

Application Number Title Priority Date Filing Date
JP2004356962A Division JP2005150757A (ja) 1998-08-31 2004-12-09 金属用研磨液及び研磨方法
JP2004356961A Division JP4448435B2 (ja) 1998-08-31 2004-12-09 金属用研磨液及び研磨方法
JP2007038635A Division JP4448522B2 (ja) 1998-08-31 2007-02-19 金属用研磨液及び研磨方法
JP2007038631A Division JP4448521B2 (ja) 1998-08-31 2007-02-19 金属用研磨液及び研磨方法
JP2007038634A Division JP2007142466A (ja) 1998-08-31 2007-02-19 金属用研磨液及び研磨方法
JP2007038630A Division JP4448520B2 (ja) 1998-08-31 2007-02-19 金属用研磨液及び研磨方法
JP2007038626A Division JP4448519B2 (ja) 1998-08-31 2007-02-19 金属用研磨液及び研磨方法

Publications (3)

Publication Number Publication Date
JP2002222782A JP2002222782A (ja) 2002-08-09
JP2002222782A5 JP2002222782A5 (enExample) 2005-05-26
JP4263397B2 true JP4263397B2 (ja) 2009-05-13

Family

ID=27333376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001371089A Expired - Lifetime JP4263397B2 (ja) 1998-08-31 2001-12-05 金属用研磨液

Country Status (1)

Country Link
JP (1) JP4263397B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7186653B2 (en) * 2003-07-30 2007-03-06 Climax Engineered Materials, Llc Polishing slurries and methods for chemical mechanical polishing
JP2018092960A (ja) * 2015-04-03 2018-06-14 Jsr株式会社 洗浄用組成物および洗浄方法
JP7133414B2 (ja) * 2018-09-20 2022-09-08 株式会社フジミインコーポレーテッド 研磨用組成物

Also Published As

Publication number Publication date
JP2002222782A (ja) 2002-08-09

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