JP4157916B2 - 磁気位置センサを有する装置 - Google Patents
磁気位置センサを有する装置 Download PDFInfo
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- JP4157916B2 JP4157916B2 JP2002048410A JP2002048410A JP4157916B2 JP 4157916 B2 JP4157916 B2 JP 4157916B2 JP 2002048410 A JP2002048410 A JP 2002048410A JP 2002048410 A JP2002048410 A JP 2002048410A JP 4157916 B2 JP4157916 B2 JP 4157916B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
- F15B15/20—Other details, e.g. assembly with regulating devices
- F15B15/28—Means for indicating the position, e.g. end of stroke
- F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
- F15B15/2861—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using magnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/0401—Valve members; Fluid interconnections therefor
- F15B2013/0409—Position sensing or feedback of the valve member
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8225—Position or extent of motion indicator
- Y10T137/8242—Electrical
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- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Magnetic Variables (AREA)
Description
【発明の属する技術分野】
本発明は、磁界センサと、ロッド状構成要素、特に磁界を発生する要素およびこの磁界の磁界強度角度を測定する位置センサを有するアクチュエータの軸の線形変位のための解析電子装置を備えている磁気位置センサを有する装置に関し、このセンサによって決定された電界角度信号が変位経路決定のために使用される。
【0002】
【従来の技術】
米国特許第5,570,015号明細書は、ロッド状構成要素、例えば、バルブシャフトの線形変位を測定できる磁気位置測定装置を開示している。測定目的だけのために使用されるシャフトおよび位置センサからなる特定の測定装置は、その変位が測定されるべきであるロッド状構成要素上に配置される。測定装置のシャフトの中に入れるのは、このシャフトの縦方向に磁界を発生するロッド状磁石である。位置センサは、磁界の領域に固定して配置されている。シャフトの位置に対するシャフトの相対変位で、位置センサは、解析電子装置を使用して変位経路にほぼ比例して磁界強度角度を決定する磁界センサによって測定する。しかしながら、経路比例は所定の範囲内だけに存在する。
【0003】
【発明が解決しようとする課題】
必要とされる大きな空間とは別に、この装置の欠点は、シャフトが回転してはいけないことである。遮蔽が使用される場合、この装置は、もはや十分直線的に作動しないので、もはや十分精密でない。
【0004】
本発明の目的は、構造がより簡単で、より小さいが、特にアクチュエータのロッド状構成要素上で無接触に、直接にその測定を実行する磁気位置センサを有する装置を提供することにある。
【0005】
【課題を解決するための手段】
本発明によれば、この目的は、磁界を発生する要素が、アクチュエータそのもののロッド状構成要素を囲む軸方向に磁化された磁石ケーシングであり、それに固定して接続され、その変位軸の周りにそれとともに回転できることにより、達成される。
【0006】
磁界を発生する要素がアクチュエータの軸に直接取り付けられる場合、測定装置の別個のシャフトに対する要求が全くない。他の長所は、この軸がこれが測定に影響を及ぼさないでこのシャフト自体の軸の周りに回転できることである。この場合、丸いアクチュエータシャフトが測定のための耐ねじりガイドを必要としないために、このことは非常に重要である。無故障動作の場合、アクチュエータシャフトが非強磁性材料又は弱い強磁性材料だけからなる場合、有利である。位置センサは、近接不可能なシャフト端の場合にも応用できる。
【0007】
磁石ケーシング長さに関して、長い測定範囲がある。これは、非感温測定原理によるコンパクトな構造を可能にする。位置と測定信号との間の相関の高い直線性もある。精度を増加させるためにセンサ曲線を使用する付加解析装置は、この場合省くことができる。
【0008】
本発明の他の実施形態では、磁界センサは、磁気抵抗素子、ホール効果センサ又は界磁コイルを含む。
【0009】
測定精度の場合、動作中ではなく、所定の形状に関してだが、単一磁石ケーシングの形状に関して磁界を変えることは望ましい。本発明の他の実施形態では、磁石ケーシングは、好ましくは軸方向に接合された環状円板の磁性材料からなる。
【0010】
円板のアセンブリはさらなる変形も可能である。本発明の他の実施形態では、円状円板は異なる残留磁気を持つ材料からなる。
【0011】
円板のアセンブリが望まれない場合、本発明の他の実施形態の磁石ケーシングは、均質の磁性材料からなる場合、軸方向に異なって磁化される。磁石ケーシングのこれらの形式では、測定精度はかなり改良される。
【0012】
本発明の他の実施形態では、均質材料からなるか又は環状円板から組み立てられるかのいずれかの磁石ケーシングは、最小磁界強度を形成するように2/3〜3/2の範囲、好ましくは1に近い直径対長さの比を有する。
【0013】
本発明の他の実施形態では、磁界センサは、ケーシング状スクリーンの内側上に配置される。このスクリーンは、丸い又は正方形の断面を有してもよい。
【0014】
本発明の他の実施形態では、全位置センサ、すなわち磁界センサおよび解析電子装置の両方はスクリーン内にある。この組み合わせは極端に簡単であり、柔軟性がある。
【0015】
本発明の他の実施形態では、磁石ケーシングは、ロッド状構成要素の環状凹部の中に入れられ、かつはめ込み磁石ケーシングは、前記磁石ケーシングの長さよりも大きい長さの非強磁性シャフトケーシングによって囲まれる。このシャフトケーシングは、ロッド状構成要素の中にも入れることができる。
【0016】
本発明の他の実施形態では、ロッド状構成要素は、そのケーシング開口において磁石ケーシングとともに摺動できる非強磁性線形ガイドケーシングによって囲まれ、かつこの非強磁性線形ガイドケーシングは、その内部に磁界センサがあるケーシング状スクリーンによって囲まれる。
【0017】
本発明の他の実施形態では、解析電子装置は、スクリーンの外側上に配置され、かつこのスクリーンを通って案内されたキャリアによって線形ガイドケーシング内に磁気センサを搭載する。
【0018】
本発明の他の実施形態では、測定装置の領域のロッド状構成要素は、中央ピン装置によって一緒に接続された2つの部分からなり、かつ磁石ケーシングおよびシャフトケーシングは、ピン装置の領域のロッド状構成要素に押し進められる。
【0019】
したがって、特に自動車セクタで好ましく使用できる非常に簡単で、適しているコンパクトな測定装置が得られる。
【0020】
【発明の実施の形態】
以下、本発明を図面に示す好適な実施形態に基づいて詳細に説明する。図1は、軸変位を実行するロッド状構成要素、例えばバルブ(図示せず)のシャフト3を示している。磁力線4aを通して見えるようにされる磁界4を発生する磁石ケーシングMは、バルブシャフト3にあり、それに固定して結合されている。この磁力線4aは等しいベクトルポテンシャルの力線である。磁界センサの周りに広がっている磁界4aを測定する磁界センサ5は、磁界4に配置されている。シャフト軸zに沿って、シャフトはz線形変位を行い、またシャフト軸zの周りを回転可能である。磁石ケーシングMは長さLを持つ。磁石ケーシングの外径はDとして示される。r0はシャフト軸zからの磁界センサ5の距離である。磁石ケーシングの磁化方向は、zと示された軸方向にある。磁界センサ5および解析電子装置7は一緒に位置センサを形成する。
【0021】
測定される角度はψmesである。これは、z軸に対する磁界強度Hの角度である。磁界センサ5は、今度は理想的には変位経路に相当する磁界角度を決定する解析電子装置(図示せず)に磁界強度信号を出力する。
【0022】
図2(a)は、変位経路の測定磁界角度を実線曲線6で示している。この曲線の下の破線は理想線である。この曲線は、磁石長の約80%に相当する、選択範囲zmesの変位経路の関数として本来直線であることに注目すべきである。図2(b)は、範囲zmesの測定エラーが約−0.4〜+0.4(磁石長の約80%である)で非常に低いことを示す曲線7に対する経路にある測定エラーを示している。この図は、変位経路z/Lのパーセンテージ測定エラー△ψmesを示している。
【0023】
図2(a)および図2(b)は、遮蔽が全く必要なく、この装置が注意深く選択された場合に全く存在しない状況を示している。磁石ケーシングは、軸方向に均質の材料からなる。実際には、特にいくつかの測定装置がすぐ近くで作動される場合、しばしば遮蔽なしに作動できない。ここで、作動結果は悪化する。この悪化は、図3を参照して説明された軸方向に構造化された磁石ケーシングMで補償できる。
【0024】
図3は、一緒に接合された3つの環状本体M1、M2およびM3を含む磁石ケーシングMを示している。この構造は、対称的であり、すなわち、軸長L1、L2およびL3は等しい。ここで、異なる寸法も、もちろん選択されてもよい。環状本体M1、M2、M3を構造化するいろいろな可能性がある。1つの可能性は、これらを異なる残留磁気の全磁化材料で作ることにある。他の可能性は、個別の環状本体M1、M2、M3を同じ材料で作り、これらを異なる強度に磁化することにある。他の好ましい可能性は、均一の材料の磁石ケーシングMを使用し、適当な装置を使用してシャフト軸zに沿って異なる強度にこの環状本体を磁化することにある。他の変形も可能である。3つ未満の環状本体又は4つ以上の環状本体が可能である。
【0025】
測定精度および達成できる最小磁界強度に対して好ましいケーシング長を得るために、軸方向に修正された磁化を有する均質材料からなるか又は環状円板(M1、M2、M3)から組み立てられるかのいずれかの磁石ケーシングは、最小磁界強度を形成するように2/3から3/2の範囲、好ましくは1に近い直径対長さの比を有する。
【0026】
図4は、いかに測定装置が外部磁界から遮蔽できるかを示す。図4は、シャフト軸zに対するシャフト3を示す。軸方向に均質の材料の磁石ケーシングM(破線分離線M4は無視されねばならない変形例)がシャフト3上にある場合、図示されてはいるが、本質適には望ましくない、図5に示された破線測定エラー曲線を用いる。しかしながら、図3に示されるような3つの異なる環状本体M1、M2、M3の軸方向に構造化された磁石ケーシングMがシャフト3上にある場合、測定エラーは、特にこの要求に応じる図5に示された実線エラー曲線を補償することができる。
【0027】
強磁性材料の遮蔽プレート6は、この装置の周りに延びる。シャフト3は、非強磁性材料又は弱い強磁性材料だけからなる。磁界センサ5がある解析電子装置7を有する全位置センサは、遮蔽プレート6の内側6aに配置されている。接続ケーブル8は、位置信号を制御装置(図示せず)に伝達する。この遮蔽は、隣接センサ又は隣接部からの干渉磁界が磁界歪みをセンサ領域に生じることを防止する。
【0028】
図4とは著しく違って、シャフト3は、シャフト3の中に入れられる磁石ケーシングMを有する図6に示された構造も有してもよい。シャフト3は、測定値変化を生じないでこのセンサに対して自由に回転できることはこの構造から明らかである。
【0029】
図5は、パーセンテージ測定エラーのために既に示された図である。図1の遮蔽されていない測定装置では、破線エラー曲線9が得られる。3つの磁気環状本体M1、M2、M3又は軸方向に変えられる磁化分布が使用される図4の遮蔽測定装置では、実線エラー曲線10が得られる。この図では、パーセンテージ測定エラー△ψmesは、使用される経路がzmesと示される変位経路z/L上に示されている。軸方向に材料又は磁化状態を変えた形状では、測定誤りは図2(a)に示される測定誤りと比べて明らかに確かにかなり減少される。
【0030】
図6は、この装置の他の構造を示す縦断面図である。図7は、線VII‐VIIについての図6に示された装置の断面である。磁石ケーシングMは、ロッド状構成要素3、例えば、バルブシャフト3の環状磁石凹部12の中に入れられる。この場合、磁石ケーシングMは、好ましくは軸方向に磁化される均質の材料からもなってよいし又は3つの環状円板数が単なる一例である磁気環状円板M1、M2、M3からなってもよい。他の実施形態の場合と同様に、2つ又はそれ以上の3個の環状円板だけが使用されてもよい。磁気環状円板への可能な分割が図6に示される。磁石ケーシングMは、これが挿入されたより長さの長い非強磁性材料シャフトケーシング13によって囲まれる。このシャフトケーシング13は、磁石ケーシングM上でその磁石凹部12の上にあるカバー凹部14の中に嵌入される。このシャフトケーシング13の外部壁15は、好ましくはバルブシャフト3の外部壁16と同一平面である。
【0031】
線形ガイドケーシング17は、ケーシング開口18で自由に変位可能であり、回転可能である、図6に示されたバルブシャフト3を囲む。線形ガイドケーシング17は、非強磁性材料からなる。線形ガイドケーシング17は、磁界センサ5の解析電子装置7が配置されたケーシング状スクリーン19によって囲まれる。このスクリーン19は、盲穴22として線形ガイドケーシング17の中に延ばされる開口21を有する。解析電子装置7上に配置されたのは、線形ガイドケーシング17の盲穴22に磁界センサ5を保持するキャリア23である。
【0032】
シャフトケーシング13内のバルブシャフト3は、中央ピン24aおよびピン24aが係合する中央凹部24bからなる中央ピン装置24を有する。バルブシャフト3が延ばされる場合、磁石ケーシングMおよびシャフトケーシング13は容易に押し進めることができる。
【0033】
全ての場合、磁界センサ5は公知の方法で構成されてもよい。対にされた磁気抵抗センサ、ホール効果センサ又は界磁コイルを使用できる。
【0034】
図7は、図6の装置の線VII‐VIIについての断面である。非強磁性材料又は弱い強磁性材料の中心のバルブシャフト3は、磁石ケーシングM、シャフトケーシング13および線形ガイドケーシング17によって囲まれる。この線形ガイドケーシング17はスクリーン19によって囲まれる。解析電子装置7は、キャリア21によって磁界センサ5を搭載する。センサ5までの変位軸zの距離はr0として示される。Diは磁石ケーシングMの内径である。Dは磁石ケーシングの外径である。Dsはスクリーン19の内径である。Lは磁石ケーシングの軸長である。L1、L2、L3は、一緒に磁石ケーシングMの全軸長を形成する個別の環状磁石M1、M2、M3の長さである。
【0035】
図6および図7に示された装置の例として、下記の寸法は例として示すことができる。
r0=0.64D
L=D
Ds=2xD
L1=L2=L3
【0036】
環状磁石M1およびM3の磁化はM2の磁化よりも約10%高くあるべきである。
【図面の簡単な説明】
【図1】軸変位が、構成要素を囲み、それに固定して結合される磁石ケーシングおよび磁石ケーシングの磁界の磁界センサ装置によって決定されるロッド状構成要素を有する本発明による磁気位置センサを有する装置概略構成図。
【図2】経路の測定角の曲線を示す図。
【図3】いくつかの環状本体で構成される磁石ケーシングを示す図。
【図4】磁石ケーシングが軸方向の均質の材料からなるか又は図3におけるようにいくつかの環状本体から組み立てられる場合、および磁界センサを有する解析電子装置がスクリーン内に配置される場合、スクリーンを有する測定装置の断面図。
【図5】異なる磁石ケーシングの使用中生じる測定エラーの比較に関する図4の装置の角度/経路曲線を示す図。
【図6】ロッド状構成要素に統合された磁石ケーシングおよび非常にコンパクトに遮蔽された構造を有する測定装置の縦断面図。
【図7】図6に示された装置の線VII‐VIIについての横断面図。
【符号の説明】
3 ロッド状構成要素
4 磁界
5 磁界センサ
7 解析電子装置
M 磁石ケーシング
z 変位軸
Claims (15)
- 磁界センサと、ロッド状構成要素、特にアクチュエータの軸の線形変位に関する解析電子装置であって、磁界を発生する要素およびこの磁界の磁界強度角度を測定する位置センサを有する解析電子装置とを、備えているとともに、
前記位置センサによって決定された磁界強度角度が、変位経路決定のために使用される装置であって、
磁界を発生する要素が磁気ケーシングであり、この磁気ケーシングは、アクチュエータそれ自体のロッド状構成要素を囲み、ロッド状構成要素の軸方向に磁化されており、ロッド状構成要素に結合され、かつ、その変位軸の周りにロッド状構成要素とともに回転可能であり、
前記磁気ケーシングは、互いに結合された複数の環状円板により構成されており、これら複数の環状円板がそれぞれ異なる残留磁気を有する材料により構成されている、ことを特徴とする装置。 - 前記ロッド状構成要素が、非強磁性材料又は弱い強磁性材料だけからなることを特徴とする請求項1に記載の装置。
- 前記位置センサの磁界センサが、磁気抵抗素子を含むことを特徴とする請求項1又は2に記載の装置。
- 前記磁界センサが、ホール効果センサを含むことを特徴とする請求項1又は2に記載の装置。
- 前記磁界センサが、界磁コイルを含むことを特徴とする請求項1又は2に記載の装置。
- 前記環状円板により構成された磁石ケーシングが、2/3〜3/2の範囲の直径対長さの比を有することを特徴とする請求項1乃至5のいずれか1項に記載の装置。
- 前記直径対長さの比が、およそ1である、ことを特徴とする請求項6に記載の装置。
- 前記磁界センサが、ケーシング状スクリーンの内側に配置されていることを特徴とする請求項1乃至7のいずれか1項に記載の装置。
- 前記磁界センサを有する解析電子装置が、前記スクリーン内にあることを特徴とする請求項8に記載の装置。
- 前記磁石ケーシングが、前記ロッド状構成要素の環状凹部の中に入れられ、かつ、はめ込み磁石ケーシングが、前記磁石ケーシングの長さよりも大きい長さの非強磁性シャフトケーシングによって囲まれることを特徴とする請求項1乃至9のいずれか1項に記載の装置。
- 前記シャフトケーシングが、前記ロッド状構成要素の中にも入れられることを特徴とする請求項10に記載の装置。
- 前記ロッド状構成要素が、その前記ケーシング開口において前記磁石ケーシングとともに摺動できる非強磁性線形ガイドケーシングによって囲まれ、かつ前記非強磁性線形ガイドケーシングが、その内部に磁界センサがあるケーシング状スクリーンによって囲まれることを特徴とする請求項1乃至8および10および11のいずれか1項に記載の装置。
- 前記解析電子装置が、前記スクリーンの外側上に配置され、かつ前記スクリーンを通って案内されたキャリアによって前記線形ガイドケーシング内に前記磁気センサを搭載することを特徴とする請求項12に記載の装置。
- 測定装置の領域の前記ロッド状構成要素が、中央ピン装置によって一緒に接続された2つの部分からなり、かつ前記磁石ケーシングおよび前記シャフトケーシングが、前記ピン装置の領域の前記ロッド状構成要素に押し進められることを特徴とする請求項10乃至13のいずれか1項に記載の装置。
- 磁界センサと、ロッド状構成要素、特にアクチュエータの軸の線形変位に関する解析電子装置であって、磁界を発生する要素およびこの磁界の磁界強度角度を測定する位置センサを有する解析電子装置とを、備えているとともに、
前記位置センサによって決定された磁界強度角度が、変位経路決定のために使用される装置であって、
磁界を発生する要素が磁気ケーシングであり、この磁気ケーシングは、アクチュエータそれ自体のロッド状構成要素を囲み、ロッド状構成要素の軸方向に磁化されており、ロッド状構成要素に結合され、かつ、その変位軸の周りにロッド状構成要素とともに回転可能であり、
前記磁石ケーシングは、均質の磁気材料により構成されており、軸方向に異なって磁化される、ことを特徴とする装置。
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-
2001
- 2001-02-23 DE DE2001108732 patent/DE10108732A1/de not_active Withdrawn
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2002
- 2002-02-21 DE DE50204813T patent/DE50204813D1/de not_active Expired - Lifetime
- 2002-02-21 EP EP02100160A patent/EP1241437B1/de not_active Expired - Lifetime
- 2002-02-25 JP JP2002048410A patent/JP4157916B2/ja not_active Expired - Fee Related
- 2002-02-25 US US10/084,719 patent/US6670806B2/en not_active Expired - Fee Related
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EP1241437B1 (de) | 2005-11-09 |
DE50204813D1 (de) | 2005-12-15 |
DE10108732A1 (de) | 2002-09-05 |
US20020125884A1 (en) | 2002-09-12 |
EP1241437A1 (de) | 2002-09-18 |
US6670806B2 (en) | 2003-12-30 |
JP2003148903A (ja) | 2003-05-21 |
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