JP4152806B2 - レーザ光照射装置 - Google Patents

レーザ光照射装置 Download PDF

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Publication number
JP4152806B2
JP4152806B2 JP2003150989A JP2003150989A JP4152806B2 JP 4152806 B2 JP4152806 B2 JP 4152806B2 JP 2003150989 A JP2003150989 A JP 2003150989A JP 2003150989 A JP2003150989 A JP 2003150989A JP 4152806 B2 JP4152806 B2 JP 4152806B2
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JP
Japan
Prior art keywords
lens
laser beam
fastener
base
beam irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003150989A
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English (en)
Japanese (ja)
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JP2004354604A (ja
JP2004354604A5 (enExample
Inventor
洋正 大石
智昭 森若
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2003150989A priority Critical patent/JP4152806B2/ja
Priority to US10/852,140 priority patent/US7187507B2/en
Publication of JP2004354604A publication Critical patent/JP2004354604A/ja
Publication of JP2004354604A5 publication Critical patent/JP2004354604A5/ja
Application granted granted Critical
Publication of JP4152806B2 publication Critical patent/JP4152806B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/026—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/025—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using glue

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Recrystallisation Techniques (AREA)
  • Lasers (AREA)
  • Lens Barrels (AREA)
JP2003150989A 2003-05-28 2003-05-28 レーザ光照射装置 Expired - Fee Related JP4152806B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003150989A JP4152806B2 (ja) 2003-05-28 2003-05-28 レーザ光照射装置
US10/852,140 US7187507B2 (en) 2003-05-28 2004-05-25 Optical component and laser irradiation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003150989A JP4152806B2 (ja) 2003-05-28 2003-05-28 レーザ光照射装置

Publications (3)

Publication Number Publication Date
JP2004354604A JP2004354604A (ja) 2004-12-16
JP2004354604A5 JP2004354604A5 (enExample) 2006-06-15
JP4152806B2 true JP4152806B2 (ja) 2008-09-17

Family

ID=33447748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003150989A Expired - Fee Related JP4152806B2 (ja) 2003-05-28 2003-05-28 レーザ光照射装置

Country Status (2)

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US (1) US7187507B2 (enExample)
JP (1) JP4152806B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7812283B2 (en) * 2004-03-26 2010-10-12 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation method, laser irradiation apparatus, and method for fabricating semiconductor device
JP2007059431A (ja) * 2005-08-22 2007-03-08 Mitsubishi Electric Corp 半導体装置の製造方法及びレーザ加工装置

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2238919A (en) * 1939-01-05 1941-04-22 American Optical Corp Ophthalmic mounting
US5886837A (en) * 1993-06-24 1999-03-23 The United States Of America As Represented By The Secretary Of The Air Force Segmented fresnel lens frame
US5712191A (en) 1994-09-16 1998-01-27 Semiconductor Energy Laboratory Co., Ltd. Method for producing semiconductor device
JP3917231B2 (ja) 1996-02-06 2007-05-23 株式会社半導体エネルギー研究所 レーザー照射装置およびレーザー照射方法
JP4056577B2 (ja) 1997-02-28 2008-03-05 株式会社半導体エネルギー研究所 レーザー照射方法
JP4059952B2 (ja) 1997-03-27 2008-03-12 株式会社半導体エネルギー研究所 レーザー光照射方法
JP4086932B2 (ja) 1997-04-17 2008-05-14 株式会社半導体エネルギー研究所 レーザー照射装置及びレーザー処理方法
JP3770999B2 (ja) 1997-04-21 2006-04-26 株式会社半導体エネルギー研究所 レーザー照射装置及びレーザー照射方法
US6678023B1 (en) 1997-12-17 2004-01-13 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal projector
JP3779052B2 (ja) 1997-12-17 2006-05-24 株式会社半導体エネルギー研究所 液晶プロジェクタ
JP4663047B2 (ja) 1998-07-13 2011-03-30 株式会社半導体エネルギー研究所 レーザー照射装置及び半導体装置の作製方法
US6567219B1 (en) 1999-08-13 2003-05-20 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation apparatus
US7160765B2 (en) 1999-08-13 2007-01-09 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a semiconductor device
AU2001280121A1 (en) * 2000-08-25 2002-03-04 Nikon Corporation Optical element holding device
SG113399A1 (en) 2000-12-27 2005-08-29 Semiconductor Energy Lab Laser annealing method and semiconductor device fabricating method
US6674584B2 (en) * 2001-07-03 2004-01-06 Pts Corporation Optical surface-mount lens cell
TW552645B (en) 2001-08-03 2003-09-11 Semiconductor Energy Lab Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device
JP5078205B2 (ja) 2001-08-10 2012-11-21 株式会社半導体エネルギー研究所 レーザ照射装置
KR100885904B1 (ko) 2001-08-10 2009-02-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 레이저 어닐링장치 및 반도체장치의 제작방법
JP4397571B2 (ja) 2001-09-25 2010-01-13 株式会社半導体エネルギー研究所 レーザ照射方法およびレーザ照射装置、並びに半導体装置の作製方法
JP3973882B2 (ja) 2001-11-26 2007-09-12 株式会社半導体エネルギー研究所 レーザ照射装置およびレーザ照射方法
US6849825B2 (en) 2001-11-30 2005-02-01 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation apparatus
EP1326273B1 (en) 2001-12-28 2012-01-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US6933527B2 (en) 2001-12-28 2005-08-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and semiconductor device production system
US6841797B2 (en) 2002-01-17 2005-01-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device formed over a surface with a drepession portion and a projection portion
JP2003215422A (ja) * 2002-01-22 2003-07-30 Fuji Photo Optical Co Ltd レンズの固定構造
US7259082B2 (en) 2002-10-03 2007-08-21 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing semiconductor device

Also Published As

Publication number Publication date
JP2004354604A (ja) 2004-12-16
US7187507B2 (en) 2007-03-06
US20040240086A1 (en) 2004-12-02

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