JP4144810B2 - 液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びに画像形成装置、液滴吐出装置 - Google Patents

液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びに画像形成装置、液滴吐出装置 Download PDF

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Publication number
JP4144810B2
JP4144810B2 JP2000185712A JP2000185712A JP4144810B2 JP 4144810 B2 JP4144810 B2 JP 4144810B2 JP 2000185712 A JP2000185712 A JP 2000185712A JP 2000185712 A JP2000185712 A JP 2000185712A JP 4144810 B2 JP4144810 B2 JP 4144810B2
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Japan
Prior art keywords
electrode
diaphragm
gap
nozzle
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000185712A
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English (en)
Japanese (ja)
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JP2002001970A (ja
JP2002001970A5 (enExample
Inventor
田中　　誠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP2000185712A priority Critical patent/JP4144810B2/ja
Priority to US09/875,394 priority patent/US6508539B2/en
Publication of JP2002001970A publication Critical patent/JP2002001970A/ja
Publication of JP2002001970A5 publication Critical patent/JP2002001970A5/ja
Application granted granted Critical
Publication of JP4144810B2 publication Critical patent/JP4144810B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2000185712A 2000-06-21 2000-06-21 液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びに画像形成装置、液滴吐出装置 Expired - Fee Related JP4144810B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000185712A JP4144810B2 (ja) 2000-06-21 2000-06-21 液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びに画像形成装置、液滴吐出装置
US09/875,394 US6508539B2 (en) 2000-06-21 2001-06-06 Liquid-firing head and manufacturing method thereof, ink-jet recording device and micro-actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000185712A JP4144810B2 (ja) 2000-06-21 2000-06-21 液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びに画像形成装置、液滴吐出装置

Publications (3)

Publication Number Publication Date
JP2002001970A JP2002001970A (ja) 2002-01-08
JP2002001970A5 JP2002001970A5 (enExample) 2006-02-23
JP4144810B2 true JP4144810B2 (ja) 2008-09-03

Family

ID=18685989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000185712A Expired - Fee Related JP4144810B2 (ja) 2000-06-21 2000-06-21 液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びに画像形成装置、液滴吐出装置

Country Status (2)

Country Link
US (1) US6508539B2 (enExample)
JP (1) JP4144810B2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100438836B1 (ko) * 2001-12-18 2004-07-05 삼성전자주식회사 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법
US6626520B1 (en) * 2002-05-23 2003-09-30 Eastman Kodak Company Drop-on-demand liquid emission using asymmetrical electrostatic device
US7416281B2 (en) * 2002-08-06 2008-08-26 Ricoh Company, Ltd. Electrostatic actuator formed by a semiconductor manufacturing process
AT500259B1 (de) * 2003-09-09 2007-08-15 Austria Tech & System Tech Dünnschichtanordnung und verfahren zum herstellen einer solchen dünnschichtanordnung
JP2005262686A (ja) * 2004-03-18 2005-09-29 Ricoh Co Ltd アクチュエータ、液滴吐出ヘッド、インクカートリッジ、インクジェット記録装置、マイクロポンプ、光変調デバイス、基板
US7334871B2 (en) * 2004-03-26 2008-02-26 Hewlett-Packard Development Company, L.P. Fluid-ejection device and methods of forming same
CN100436135C (zh) * 2005-02-17 2008-11-26 精工爱普生株式会社 静电激励器及其制造方法、液滴喷头及其制造方法
JP4305439B2 (ja) * 2005-02-17 2009-07-29 セイコーエプソン株式会社 静電アクチュエータ及びその製造方法、液滴吐出ヘッド及びその製造方法、液滴吐出装置並びにデバイス
JP2007077864A (ja) * 2005-09-14 2007-03-29 Ricoh Co Ltd 静電型アクチュエータ、液滴吐出ヘッド、液体カートリッジ、画像形成装置、マイクロポンプ及び光学デバイス
JP4903065B2 (ja) * 2007-02-09 2012-03-21 富士フイルム株式会社 ノズルプレート及びその製造方法、並びに液体吐出ヘッド及び画像形成装置
US10406811B2 (en) 2016-12-19 2019-09-10 Fujifilm Dimatix, Inc. Actuators for fluid delivery systems
CN108574748A (zh) * 2018-03-19 2018-09-25 维沃移动通信有限公司 膜片制备方法、膜片和壳体
US12441108B2 (en) 2022-03-17 2025-10-14 Ricoh Company, Ltd. Liquid discharge head, liquid discharge device, liquid discharge apparatus, method for manufacturing liquid discharge head

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0671882A (ja) 1992-06-05 1994-03-15 Seiko Epson Corp インクジェットヘッド及びその製造方法
JP3395463B2 (ja) 1995-07-27 2003-04-14 セイコーエプソン株式会社 インクジェットヘッドおよびその駆動方法
JP3432346B2 (ja) 1996-01-16 2003-08-04 株式会社リコー 記録ヘッド

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Publication number Publication date
US6508539B2 (en) 2003-01-21
JP2002001970A (ja) 2002-01-08
US20010055046A1 (en) 2001-12-27

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