JP4139655B2 - ネガ型レジスト組成物 - Google Patents
ネガ型レジスト組成物 Download PDFInfo
- Publication number
- JP4139655B2 JP4139655B2 JP2002262775A JP2002262775A JP4139655B2 JP 4139655 B2 JP4139655 B2 JP 4139655B2 JP 2002262775 A JP2002262775 A JP 2002262775A JP 2002262775 A JP2002262775 A JP 2002262775A JP 4139655 B2 JP4139655 B2 JP 4139655B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- alkali
- block unit
- soluble
- block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 0 CC(C=C1)=CCC1(*)O Chemical compound CC(C=C1)=CCC1(*)O 0.000 description 4
- YCYCQJSSLLADJN-UHFFFAOYSA-N CC(C=C1)=CCC1C(O)=O Chemical compound CC(C=C1)=CCC1C(O)=O YCYCQJSSLLADJN-UHFFFAOYSA-N 0.000 description 1
- JNVDVRPRFUSXHQ-UHFFFAOYSA-N CC(C=C1)=CCC1O Chemical compound CC(C=C1)=CCC1O JNVDVRPRFUSXHQ-UHFFFAOYSA-N 0.000 description 1
- JMRBBOAINMYDIR-UHFFFAOYSA-N CC(CC=C1)C=C1O Chemical compound CC(CC=C1)C=C1O JMRBBOAINMYDIR-UHFFFAOYSA-N 0.000 description 1
- YVQMHHUEEQMDIS-UHFFFAOYSA-N CC(CCC1)C2=C1C=CCC2 Chemical compound CC(CCC1)C2=C1C=CCC2 YVQMHHUEEQMDIS-UHFFFAOYSA-N 0.000 description 1
- MYUMKLXYYCTKGB-UHFFFAOYSA-N CC1=CCCC(O)=C1 Chemical compound CC1=CCCC(O)=C1 MYUMKLXYYCTKGB-UHFFFAOYSA-N 0.000 description 1
- KCUTVFGMQZNOGP-UHFFFAOYSA-N CC1c(cccc2)c2C=CC1 Chemical compound CC1c(cccc2)c2C=CC1 KCUTVFGMQZNOGP-UHFFFAOYSA-N 0.000 description 1
- ONOLCCFPXLLQBE-UHFFFAOYSA-N COCCOc(cc1)cc(cc2)c1cc2O Chemical compound COCCOc(cc1)cc(cc2)c1cc2O ONOLCCFPXLLQBE-UHFFFAOYSA-N 0.000 description 1
- LZYYXLBLABHOFC-UHFFFAOYSA-N COCCOc(cc1)cc(cc2)c1cc2OC Chemical compound COCCOc(cc1)cc(cc2)c1cc2OC LZYYXLBLABHOFC-UHFFFAOYSA-N 0.000 description 1
- OYMHEBOQHCBTHS-UHFFFAOYSA-N COCCOc1cc2ccccc2cc1 Chemical compound COCCOc1cc2ccccc2cc1 OYMHEBOQHCBTHS-UHFFFAOYSA-N 0.000 description 1
- JWXYEXKKOMBZBH-UHFFFAOYSA-N Cc(cc1)cc(cc2)c1cc2OC Chemical compound Cc(cc1)cc(cc2)c1cc2OC JWXYEXKKOMBZBH-UHFFFAOYSA-N 0.000 description 1
- IWDCLRJOBJJRNH-UHFFFAOYSA-N Cc(cc1)ccc1O Chemical compound Cc(cc1)ccc1O IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 1
- QPUYECUOLPXSFR-UHFFFAOYSA-N Cc1c(cccc2)c2ccc1 Chemical compound Cc1c(cccc2)c2ccc1 QPUYECUOLPXSFR-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Materials For Photolithography (AREA)
- Graft Or Block Polymers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002262775A JP4139655B2 (ja) | 2002-09-09 | 2002-09-09 | ネガ型レジスト組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002262775A JP4139655B2 (ja) | 2002-09-09 | 2002-09-09 | ネガ型レジスト組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004101811A JP2004101811A (ja) | 2004-04-02 |
| JP2004101811A5 JP2004101811A5 (https=) | 2005-09-22 |
| JP4139655B2 true JP4139655B2 (ja) | 2008-08-27 |
Family
ID=32262731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002262775A Expired - Fee Related JP4139655B2 (ja) | 2002-09-09 | 2002-09-09 | ネガ型レジスト組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4139655B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4614089B2 (ja) * | 2005-11-17 | 2011-01-19 | 信越化学工業株式会社 | ネガ型レジスト材料及びパターン形成方法 |
| JP4546393B2 (ja) * | 2005-12-22 | 2010-09-15 | 富士フイルム株式会社 | パターン形成材料、並びにパターン形成装置及びパターン形成方法 |
| JP4678383B2 (ja) | 2007-03-29 | 2011-04-27 | 信越化学工業株式会社 | 化学増幅ネガ型レジスト組成物及びパターン形成方法 |
| JP5887244B2 (ja) * | 2012-09-28 | 2016-03-16 | 富士フイルム株式会社 | パターン形成用自己組織化組成物、それを用いたブロックコポリマーの自己組織化によるパターン形成方法、及び自己組織化パターン、並びに電子デバイスの製造方法 |
-
2002
- 2002-09-09 JP JP2002262775A patent/JP4139655B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004101811A (ja) | 2004-04-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4007570B2 (ja) | ポジ型レジスト組成物 | |
| JP4070393B2 (ja) | ネガ型レジスト組成物 | |
| JP4194259B2 (ja) | ネガ型レジスト組成物 | |
| JP4187934B2 (ja) | ポジ型レジスト組成物 | |
| JP3989149B2 (ja) | 電子線またはｘ線用化学増幅系ネガ型レジスト組成物 | |
| JP3929653B2 (ja) | ネガ型レジスト組成物 | |
| JP2003337414A (ja) | ネガ型レジスト組成物 | |
| JP4243029B2 (ja) | ポジ型化学増幅レジスト組成物 | |
| JP4007569B2 (ja) | ポジ型電子線又はｘ線レジスト組成物 | |
| JP2002169295A (ja) | ポジ型レジスト組成物 | |
| JP4121309B2 (ja) | ネガ型レジスト組成物 | |
| JP2004062044A (ja) | 電子線、ｘ線又はｅｕｖ用ネガ型レジスト組成物 | |
| JP2004101818A (ja) | ネガ型レジスト組成物 | |
| JP4139655B2 (ja) | ネガ型レジスト組成物 | |
| JP4105414B2 (ja) | 電子線又はｘ線レジスト組成物 | |
| JP2002049155A (ja) | レジスト組成物 | |
| JP2003330191A (ja) | ネガ型レジスト組成物 | |
| JP4079729B2 (ja) | ネガ型レジスト組成物 | |
| JP5075803B2 (ja) | ポジ型レジスト組成物及びこれを用いたパターン形成方法 | |
| US20020058206A1 (en) | Positive resist composition | |
| JP4049237B2 (ja) | ポジ型電子線又はｘ線レジスト組成物 | |
| JP4486768B2 (ja) | ネガ型電子線又はｘ線用化学増幅レジスト組成物 | |
| JP2004020933A (ja) | ネガ型レジスト組成物 | |
| JP2002311585A (ja) | 電子線又はｘ線用ネガ型レジスト組成物 | |
| JP2003057822A (ja) | 電子線又はｘ線用ネガ型レジスト組成物 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050413 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050413 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20060324 |
|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20061124 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070726 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070829 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071026 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20071108 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20071115 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20071122 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080116 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080317 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080521 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20080609 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 4139655 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110613 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110613 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120613 Year of fee payment: 4 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120613 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130613 Year of fee payment: 5 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |