JP4134566B2 - 光学要素の位置決め方法及び装置、投影光学系、並びに露光装置 - Google Patents

光学要素の位置決め方法及び装置、投影光学系、並びに露光装置 Download PDF

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JP4134566B2
JP4134566B2 JP2002026589A JP2002026589A JP4134566B2 JP 4134566 B2 JP4134566 B2 JP 4134566B2 JP 2002026589 A JP2002026589 A JP 2002026589A JP 2002026589 A JP2002026589 A JP 2002026589A JP 4134566 B2 JP4134566 B2 JP 4134566B2
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optical element
support mechanisms
lens
optical system
displaced
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Japanese (ja)
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JP2003227986A5 (enrdf_load_stackoverflow
JP2003227986A (ja
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祐一 柴崎
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Nikon Corp
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Nikon Corp
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lens Barrels (AREA)
JP2002026589A 2002-02-04 2002-02-04 光学要素の位置決め方法及び装置、投影光学系、並びに露光装置 Expired - Lifetime JP4134566B2 (ja)

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JP2002026589A JP4134566B2 (ja) 2002-02-04 2002-02-04 光学要素の位置決め方法及び装置、投影光学系、並びに露光装置

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JP2002026589A JP4134566B2 (ja) 2002-02-04 2002-02-04 光学要素の位置決め方法及び装置、投影光学系、並びに露光装置

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JP2003227986A JP2003227986A (ja) 2003-08-15
JP2003227986A5 JP2003227986A5 (enrdf_load_stackoverflow) 2005-08-18
JP4134566B2 true JP4134566B2 (ja) 2008-08-20

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105934696A (zh) * 2014-01-25 2016-09-07 柯尼卡美能达株式会社 透镜组件以及摄像装置

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4378938B2 (ja) * 2002-11-25 2009-12-09 株式会社ニコン 露光装置、及びデバイス製造方法
DE10342529B4 (de) * 2003-09-12 2017-02-02 Robert Bosch Gmbh Kameraanordnung
WO2005083487A1 (en) * 2004-02-26 2005-09-09 Carl Zeiss Smt Ag Housing structure
EP1767972B1 (en) * 2004-07-14 2011-11-02 Mitsubishi Denki Kabushiki Kaisha Reflecting mirror apparatus
JP4591136B2 (ja) * 2005-03-14 2010-12-01 株式会社安川電機 ２次元位置決め装置
JP2007147760A (ja) * 2005-11-24 2007-06-14 Fujitsu Ten Ltd レンズ構造および調整治具構造
JP5055384B2 (ja) * 2007-02-27 2012-10-24 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学結像装置
JP2010080754A (ja) * 2008-09-26 2010-04-08 Nikon Corp 照明光学系及び露光装置
JP5535108B2 (ja) 2011-02-18 2014-07-02 ギガフォトン株式会社 極端紫外光源装置
JP2016508626A (ja) * 2013-02-13 2016-03-22 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ 一体化されたフレクシャを有するモノリシック光学構成要素
CN103472560B (zh) * 2013-09-25 2016-11-23 中国科学院长春光学精密机械与物理研究所 透镜X、Y、θZ三自由度微动调整装置
CN106547065B (zh) * 2015-09-17 2019-04-12 上海微电子装备（集团）股份有限公司 一种可动镜片调整机构
CN106547063B (zh) * 2015-09-17 2019-03-26 上海微电子装备（集团）股份有限公司 一种可动镜片调整机构
CN106547064B (zh) * 2015-09-17 2019-04-12 上海微电子装备（集团）股份有限公司 一种可动镜片调整机构
JP7227810B2 (ja) * 2019-03-25 2023-02-22 キヤノン株式会社 光学装置、露光装置および物品製造方法
CN115755530B (zh) * 2022-10-31 2025-05-06 中国科学院光电技术研究所 一种铰链驱动式可动镜片微调装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2891074B2 (ja) * 1993-12-10 1999-05-17 三菱電機株式会社 反射鏡固定装置
JPH10253872A (ja) * 1997-03-13 1998-09-25 Nikon Corp 反射光学部材の保持装置及び露光装置
DE19905779A1 (de) * 1999-02-12 2000-08-17 Zeiss Carl Fa Vorrichtung zum Kippen eines Gegenstandes um wenigstens eine Achse, insbesondere eines optischen Elementes
JP3814460B2 (ja) * 2000-04-13 2006-08-30 三菱電機株式会社 反射鏡調整機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105934696A (zh) * 2014-01-25 2016-09-07 柯尼卡美能达株式会社 透镜组件以及摄像装置

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