JP4119254B2 - 位置決定システム - Google Patents

位置決定システム Download PDF

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Publication number
JP4119254B2
JP4119254B2 JP2002564333A JP2002564333A JP4119254B2 JP 4119254 B2 JP4119254 B2 JP 4119254B2 JP 2002564333 A JP2002564333 A JP 2002564333A JP 2002564333 A JP2002564333 A JP 2002564333A JP 4119254 B2 JP4119254 B2 JP 4119254B2
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JP
Japan
Prior art keywords
pattern
light
detector
scale
mask
Prior art date
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Expired - Fee Related
Application number
JP2002564333A
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English (en)
Japanese (ja)
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JP2004520591A (ja
JP2004520591A5 (enExample
Inventor
ホーマー マイケル
ジェイムズ ホロウェイ アラン
ロバート ゴードン−イングラム イアン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
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Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of JP2004520591A publication Critical patent/JP2004520591A/ja
Publication of JP2004520591A5 publication Critical patent/JP2004520591A5/ja
Application granted granted Critical
Publication of JP4119254B2 publication Critical patent/JP4119254B2/ja
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Vehicle Body Suspensions (AREA)
  • Paper (AREA)
  • Body Structure For Vehicles (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Radar Systems Or Details Thereof (AREA)
  • Train Traffic Observation, Control, And Security (AREA)
JP2002564333A 2001-02-14 2002-02-14 位置決定システム Expired - Fee Related JP4119254B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0103582.3A GB0103582D0 (en) 2001-02-14 2001-02-14 Position determination system
PCT/GB2002/000638 WO2002065061A1 (en) 2001-02-14 2002-02-14 Position determination system

Publications (3)

Publication Number Publication Date
JP2004520591A JP2004520591A (ja) 2004-07-08
JP2004520591A5 JP2004520591A5 (enExample) 2005-12-22
JP4119254B2 true JP4119254B2 (ja) 2008-07-16

Family

ID=9908684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002564333A Expired - Fee Related JP4119254B2 (ja) 2001-02-14 2002-02-14 位置決定システム

Country Status (7)

Country Link
US (1) US7141780B2 (enExample)
EP (1) EP1360461B1 (enExample)
JP (1) JP4119254B2 (enExample)
AT (1) ATE395578T1 (enExample)
DE (1) DE60226576D1 (enExample)
GB (1) GB0103582D0 (enExample)
WO (1) WO2002065061A1 (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10309679B4 (de) * 2003-02-27 2014-05-22 Dr. Johannes Heidenhain Gmbh Abtasteinheit zum Abtasten einer Maßverkörperung
GB0316921D0 (en) 2003-07-19 2003-08-27 Renishaw Plc Reader for a scale marking
DE102004011911A1 (de) * 2004-03-11 2005-11-10 Sick Ag Sendeelement für Lichtschranken, Lichtgitter und dergleichen
GB0413710D0 (en) * 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
DE102005006247A1 (de) * 2005-02-11 2006-08-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP4869628B2 (ja) * 2005-05-26 2012-02-08 オリンパス株式会社 光学式エンコーダ
GB0522651D0 (en) 2005-11-07 2005-12-14 Renishaw Plc Scale and readhead system
GB0523273D0 (en) 2005-11-16 2005-12-21 Renishaw Plc Scale and readhead apparatus and method
GB0601174D0 (en) 2006-01-20 2006-03-01 Renishaw Plc Multiple readhead apparatus
GB0608812D0 (en) 2006-05-04 2006-06-14 Renishaw Plc Rotary encoder apparatus
EP1862774B1 (fr) * 2006-05-31 2015-07-29 Delphi Technologies, Inc. Optical multiturn rotational encoder
KR101107904B1 (ko) * 2006-08-21 2012-01-25 지에스아이 그룹 코포레이션 회전식 광학적 위치 인코더, 서보 모터 어셈블리, 서보-제어 검류계 및 레이저 시스템
JP2008292352A (ja) 2007-05-25 2008-12-04 Mitsutoyo Corp 反射型エンコーダ
DE112009002101T5 (de) 2008-08-28 2012-01-12 Faro Technologies, Inc. Mit einem Index versehender optischer Encoder, Verfahren zum Indexieren eines optischen Encoders und Verfahren zum dynamischen Einstellen von Verstärkung und Offset in einem optischen Encoder
JP5562076B2 (ja) * 2010-03-10 2014-07-30 キヤノン株式会社 光学式エンコーダおよび変位計測装置
DE102011082570A1 (de) * 2011-09-13 2013-03-14 Dr. Johannes Heidenhain Gmbh Rotatorische Positionsmesseinrichtung
WO2015049173A1 (en) 2013-10-01 2015-04-09 Renishaw Plc Reference mark detector arrangement
JP2016532096A (ja) 2013-10-01 2016-10-13 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 位置測定エンコーダ
GB2554230A (en) 2015-04-22 2018-03-28 Faro Tech Inc Indexed optical encoder
US20170189123A1 (en) * 2016-01-06 2017-07-06 Biosense Webster (Israel) Ltd. Optical Registration of Rotary Sinuplasty Cutter
JP6744066B2 (ja) 2016-03-25 2020-08-19 株式会社ミツトヨ 光電式エンコーダ
EP3623769A1 (en) 2018-09-12 2020-03-18 Renishaw PLC Measurement device
JP7391527B2 (ja) * 2019-04-03 2023-12-05 株式会社ミツトヨ 光電式エンコーダ
JP7475973B2 (ja) 2020-06-08 2024-04-30 キヤノン株式会社 光学式エンコーダ及び制御装置
WO2024134155A1 (en) 2022-12-20 2024-06-27 Renishaw Plc Encoder apparatus
EP4390328A1 (en) 2022-12-21 2024-06-26 Renishaw plc Encoder apparatus

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1933254C3 (de) 1969-07-01 1979-08-16 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementales Längen- oder Winkelmeßsystem
GB1302762A (enExample) 1970-02-06 1973-01-10
DE3562948D1 (en) 1984-04-21 1988-06-30 Heidenhain Gmbh Dr Johannes Position-measuring device
GB8432574D0 (en) 1984-12-22 1985-02-06 Renishaw Plc Opto-electronic scale-reading apparatus
DE3526206A1 (de) 1985-07-23 1987-02-05 Heidenhain Gmbh Dr Johannes Wegmesseinrichtung
IN168444B (enExample) * 1986-08-15 1991-04-06 Mitutoyo Mfg Co Ltd
JPS6474414A (en) * 1987-09-16 1989-03-20 Mitutoyo Corp Optical displacement detector
US5073710A (en) * 1989-09-21 1991-12-17 Copal Company Limited Optical displacement detector including a displacement member's surface having a diffractive pattern and a holographic lens pattern
EP0543513B2 (en) 1991-11-06 2007-10-24 Renishaw Transducer Systems Limited Opto-electronic scale-reading apparatus
DE19726935B4 (de) 1997-06-25 2014-06-12 Dr. Johannes Heidenhain Gmbh Optische Positionsmeßeinrichtung
AT410485B (de) * 1997-07-30 2003-05-26 Rsf Elektronik Gmbh Positionsmesseinrichtung
DE19754595B4 (de) * 1997-12-10 2011-06-01 Dr. Johannes Heidenhain Gmbh Lichtelektrische Positionsmeßeinrichtung
JP3506613B2 (ja) * 1998-09-21 2004-03-15 株式会社ミツトヨ 原点検出方式
US6175109B1 (en) 1998-12-16 2001-01-16 Renco Encoders, Inc. Encoder for providing incremental and absolute position data
DE19859669A1 (de) * 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Sensor und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
US7141780B2 (en) 2006-11-28
ATE395578T1 (de) 2008-05-15
EP1360461A1 (en) 2003-11-12
JP2004520591A (ja) 2004-07-08
EP1360461B1 (en) 2008-05-14
US20040036016A1 (en) 2004-02-26
WO2002065061A1 (en) 2002-08-22
DE60226576D1 (de) 2008-06-26
GB0103582D0 (en) 2001-03-28

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