DE60226576D1 - Positionsbestimmungssystem - Google Patents

Positionsbestimmungssystem

Info

Publication number
DE60226576D1
DE60226576D1 DE60226576T DE60226576T DE60226576D1 DE 60226576 D1 DE60226576 D1 DE 60226576D1 DE 60226576 T DE60226576 T DE 60226576T DE 60226576 T DE60226576 T DE 60226576T DE 60226576 D1 DE60226576 D1 DE 60226576D1
Authority
DE
Germany
Prior art keywords
light
apertures
mask
patterns
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60226576T
Other languages
German (de)
English (en)
Inventor
Michael Homer
Alan James Holloway
Iain Robert Gordon-Ingram
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Application granted granted Critical
Publication of DE60226576D1 publication Critical patent/DE60226576D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Vehicle Body Suspensions (AREA)
  • Paper (AREA)
  • Body Structure For Vehicles (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Radar Systems Or Details Thereof (AREA)
  • Train Traffic Observation, Control, And Security (AREA)
DE60226576T 2001-02-14 2002-02-14 Positionsbestimmungssystem Expired - Lifetime DE60226576D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0103582.3A GB0103582D0 (en) 2001-02-14 2001-02-14 Position determination system
PCT/GB2002/000638 WO2002065061A1 (en) 2001-02-14 2002-02-14 Position determination system

Publications (1)

Publication Number Publication Date
DE60226576D1 true DE60226576D1 (de) 2008-06-26

Family

ID=9908684

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60226576T Expired - Lifetime DE60226576D1 (de) 2001-02-14 2002-02-14 Positionsbestimmungssystem

Country Status (7)

Country Link
US (1) US7141780B2 (enExample)
EP (1) EP1360461B1 (enExample)
JP (1) JP4119254B2 (enExample)
AT (1) ATE395578T1 (enExample)
DE (1) DE60226576D1 (enExample)
GB (1) GB0103582D0 (enExample)
WO (1) WO2002065061A1 (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10309679B4 (de) * 2003-02-27 2014-05-22 Dr. Johannes Heidenhain Gmbh Abtasteinheit zum Abtasten einer Maßverkörperung
GB0316921D0 (en) 2003-07-19 2003-08-27 Renishaw Plc Reader for a scale marking
DE102004011911A1 (de) * 2004-03-11 2005-11-10 Sick Ag Sendeelement für Lichtschranken, Lichtgitter und dergleichen
GB0413710D0 (en) * 2004-06-21 2004-07-21 Renishaw Plc Scale reading apparatus
DE102005006247A1 (de) * 2005-02-11 2006-08-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP4869628B2 (ja) * 2005-05-26 2012-02-08 オリンパス株式会社 光学式エンコーダ
GB0522651D0 (en) 2005-11-07 2005-12-14 Renishaw Plc Scale and readhead system
GB0523273D0 (en) 2005-11-16 2005-12-21 Renishaw Plc Scale and readhead apparatus and method
GB0601174D0 (en) 2006-01-20 2006-03-01 Renishaw Plc Multiple readhead apparatus
GB0608812D0 (en) 2006-05-04 2006-06-14 Renishaw Plc Rotary encoder apparatus
EP1862774B1 (fr) * 2006-05-31 2015-07-29 Delphi Technologies, Inc. Optical multiturn rotational encoder
KR101107904B1 (ko) * 2006-08-21 2012-01-25 지에스아이 그룹 코포레이션 회전식 광학적 위치 인코더, 서보 모터 어셈블리, 서보-제어 검류계 및 레이저 시스템
JP2008292352A (ja) 2007-05-25 2008-12-04 Mitsutoyo Corp 反射型エンコーダ
DE112009002101T5 (de) 2008-08-28 2012-01-12 Faro Technologies, Inc. Mit einem Index versehender optischer Encoder, Verfahren zum Indexieren eines optischen Encoders und Verfahren zum dynamischen Einstellen von Verstärkung und Offset in einem optischen Encoder
JP5562076B2 (ja) * 2010-03-10 2014-07-30 キヤノン株式会社 光学式エンコーダおよび変位計測装置
DE102011082570A1 (de) * 2011-09-13 2013-03-14 Dr. Johannes Heidenhain Gmbh Rotatorische Positionsmesseinrichtung
WO2015049173A1 (en) 2013-10-01 2015-04-09 Renishaw Plc Reference mark detector arrangement
JP2016532096A (ja) 2013-10-01 2016-10-13 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 位置測定エンコーダ
GB2554230A (en) 2015-04-22 2018-03-28 Faro Tech Inc Indexed optical encoder
US20170189123A1 (en) * 2016-01-06 2017-07-06 Biosense Webster (Israel) Ltd. Optical Registration of Rotary Sinuplasty Cutter
JP6744066B2 (ja) 2016-03-25 2020-08-19 株式会社ミツトヨ 光電式エンコーダ
EP3623769A1 (en) 2018-09-12 2020-03-18 Renishaw PLC Measurement device
JP7391527B2 (ja) * 2019-04-03 2023-12-05 株式会社ミツトヨ 光電式エンコーダ
JP7475973B2 (ja) 2020-06-08 2024-04-30 キヤノン株式会社 光学式エンコーダ及び制御装置
WO2024134155A1 (en) 2022-12-20 2024-06-27 Renishaw Plc Encoder apparatus
EP4390328A1 (en) 2022-12-21 2024-06-26 Renishaw plc Encoder apparatus

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1933254C3 (de) 1969-07-01 1979-08-16 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementales Längen- oder Winkelmeßsystem
GB1302762A (enExample) 1970-02-06 1973-01-10
DE3562948D1 (en) 1984-04-21 1988-06-30 Heidenhain Gmbh Dr Johannes Position-measuring device
GB8432574D0 (en) 1984-12-22 1985-02-06 Renishaw Plc Opto-electronic scale-reading apparatus
DE3526206A1 (de) 1985-07-23 1987-02-05 Heidenhain Gmbh Dr Johannes Wegmesseinrichtung
IN168444B (enExample) * 1986-08-15 1991-04-06 Mitutoyo Mfg Co Ltd
JPS6474414A (en) * 1987-09-16 1989-03-20 Mitutoyo Corp Optical displacement detector
US5073710A (en) * 1989-09-21 1991-12-17 Copal Company Limited Optical displacement detector including a displacement member's surface having a diffractive pattern and a holographic lens pattern
EP0543513B2 (en) 1991-11-06 2007-10-24 Renishaw Transducer Systems Limited Opto-electronic scale-reading apparatus
DE19726935B4 (de) 1997-06-25 2014-06-12 Dr. Johannes Heidenhain Gmbh Optische Positionsmeßeinrichtung
AT410485B (de) * 1997-07-30 2003-05-26 Rsf Elektronik Gmbh Positionsmesseinrichtung
DE19754595B4 (de) * 1997-12-10 2011-06-01 Dr. Johannes Heidenhain Gmbh Lichtelektrische Positionsmeßeinrichtung
JP3506613B2 (ja) * 1998-09-21 2004-03-15 株式会社ミツトヨ 原点検出方式
US6175109B1 (en) 1998-12-16 2001-01-16 Renco Encoders, Inc. Encoder for providing incremental and absolute position data
DE19859669A1 (de) * 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Sensor und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
US7141780B2 (en) 2006-11-28
ATE395578T1 (de) 2008-05-15
EP1360461A1 (en) 2003-11-12
JP2004520591A (ja) 2004-07-08
JP4119254B2 (ja) 2008-07-16
EP1360461B1 (en) 2008-05-14
US20040036016A1 (en) 2004-02-26
WO2002065061A1 (en) 2002-08-22
GB0103582D0 (en) 2001-03-28

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Legal Events

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8364 No opposition during term of opposition