JP4113509B2 - 被研磨物保持用キャリア - Google Patents
被研磨物保持用キャリア Download PDFInfo
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- JP4113509B2 JP4113509B2 JP2004066013A JP2004066013A JP4113509B2 JP 4113509 B2 JP4113509 B2 JP 4113509B2 JP 2004066013 A JP2004066013 A JP 2004066013A JP 2004066013 A JP2004066013 A JP 2004066013A JP 4113509 B2 JP4113509 B2 JP 4113509B2
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- Prior art keywords
- carrier
- holding
- polished
- double
- side polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 238000005498 polishing Methods 0.000 claims description 75
- 239000000463 material Substances 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 17
- 238000000576 coating method Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 229910052799 carbon Inorganic materials 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000004744 fabric Substances 0.000 claims description 9
- 229920005989 resin Polymers 0.000 claims description 8
- 239000011347 resin Substances 0.000 claims description 8
- 239000010959 steel Substances 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 4
- 239000004814 polyurethane Substances 0.000 claims description 4
- 229920002635 polyurethane Polymers 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 239000002002 slurry Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000004745 nonwoven fabric Substances 0.000 claims description 2
- 239000002649 leather substitute Substances 0.000 claims 1
- 229910001385 heavy metal Inorganic materials 0.000 description 21
- 238000011109 contamination Methods 0.000 description 20
- 235000012431 wafers Nutrition 0.000 description 20
- 230000000052 comparative effect Effects 0.000 description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 239000002585 base Substances 0.000 description 13
- 229910003460 diamond Inorganic materials 0.000 description 8
- 239000010432 diamond Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000000969 carrier Substances 0.000 description 5
- 239000007769 metal material Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 229920002978 Vinylon Polymers 0.000 description 4
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- 238000012545 processing Methods 0.000 description 4
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- 239000002245 particle Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
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- 238000000227 grinding Methods 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241001391944 Commicarpus scandens Species 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XWROUVVQGRRRMF-UHFFFAOYSA-N F.O[N+]([O-])=O Chemical compound F.O[N+]([O-])=O XWROUVVQGRRRMF-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 208000013201 Stress fracture Diseases 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 239000012050 conventional carrier Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
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- 238000013007 heat curing Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
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- 238000011160 research Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/067—Work supports, e.g. adjustable steadies radially supporting workpieces
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F7/00—Heating or cooling appliances for medical or therapeutic treatment of the human body
- A61F7/007—Heating or cooling appliances for medical or therapeutic treatment of the human body characterised by electric heating
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/44—Detecting, measuring or recording for evaluating the integumentary system, e.g. skin, hair or nails
- A61B5/441—Skin evaluation, e.g. for skin disorder diagnosis
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
- A61H23/00—Percussion or vibration massage, e.g. using supersonic vibration; Suction-vibration massage; Massage with moving diaphragms
- A61H23/02—Percussion or vibration massage, e.g. using supersonic vibration; Suction-vibration massage; Massage with moving diaphragms with electric or magnetic drive
- A61H23/0218—Percussion or vibration massage, e.g. using supersonic vibration; Suction-vibration massage; Massage with moving diaphragms with electric or magnetic drive with alternating magnetic fields producing a translating or oscillating movement
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F7/00—Heating or cooling appliances for medical or therapeutic treatment of the human body
- A61F7/007—Heating or cooling appliances for medical or therapeutic treatment of the human body characterised by electric heating
- A61F2007/0075—Heating or cooling appliances for medical or therapeutic treatment of the human body characterised by electric heating using a Peltier element, e.g. near the spot to be heated or cooled
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F7/00—Heating or cooling appliances for medical or therapeutic treatment of the human body
- A61F2007/0086—Heating or cooling appliances for medical or therapeutic treatment of the human body with a thermostat
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F7/00—Heating or cooling appliances for medical or therapeutic treatment of the human body
- A61F2007/0095—Heating or cooling appliances for medical or therapeutic treatment of the human body with a temperature indicator
- A61F2007/0096—Heating or cooling appliances for medical or therapeutic treatment of the human body with a temperature indicator with a thermometer
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
- A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
- A61H2201/01—Constructive details
- A61H2201/0157—Constructive details portable
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
- A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
- A61H2201/10—Characteristics of apparatus not provided for in the preceding codes with further special therapeutic means, e.g. electrotherapy, magneto therapy or radiation therapy, chromo therapy, infrared or ultraviolet therapy
- A61H2201/105—Characteristics of apparatus not provided for in the preceding codes with further special therapeutic means, e.g. electrotherapy, magneto therapy or radiation therapy, chromo therapy, infrared or ultraviolet therapy with means for delivering media, e.g. drugs or cosmetics
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
- A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
- A61H2201/16—Physical interface with patient
- A61H2201/1683—Surface of interface
- A61H2201/1685—Surface of interface interchangeable
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
- A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
- A61H2201/50—Control means thereof
- A61H2201/5007—Control means thereof computer controlled
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
- A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
- A61H2201/50—Control means thereof
- A61H2201/5023—Interfaces to the user
- A61H2201/5043—Displays
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61H—PHYSICAL THERAPY APPARATUS, e.g. DEVICES FOR LOCATING OR STIMULATING REFLEX POINTS IN THE BODY; ARTIFICIAL RESPIRATION; MASSAGE; BATHING DEVICES FOR SPECIAL THERAPEUTIC OR HYGIENIC PURPOSES OR SPECIFIC PARTS OF THE BODY
- A61H2201/00—Characteristics of apparatus not provided for in the preceding codes
- A61H2201/50—Control means thereof
- A61H2201/5058—Sensors or detectors
- A61H2201/5082—Temperature sensors
Description
SUS製のキャリア基材をあらかじめラッピングで厚み550μmに整えた上で、DLCを表面に2.5μmの厚みになるよう被覆した。DLCは150℃の製膜温度で1.0μm被覆した後、支持個所を移動し、さらに1.5μm被覆した。
<磨耗試験と耐久性試験>
得られたDLC被覆キャリアに被研磨物を保持させず、表1の条件で研磨を実施した。希釈した研磨剤は循環使用した。磨耗速度は、研磨前後のキャリアの厚みをマイクロメーターで測定し、その差より求めた。耐久性は外観検査で確認した。
キャリアとしてDLC被覆を施していないはSUS製、ガラスエポキシ樹脂(EG)製およびFR-ビニロン製の3種を用いた。
3種とも厚みはおおよそ550μmであった。実施例1と同様キャリアに被研磨物を保持させず、表1の条件で研磨を実施した。希釈した研磨剤は循環使用した。実施例1および比較例1〜3での研磨試験の結果を表2に示す。
比較例1〜3において用いたSUS製、ガラスエポキシ樹脂(EG)、FR-ビニロン製3種のキャリアを用いた。実施例2と同様に、キャリアに、被研磨物として6インチシリコンウェーハを保持させ表3の条件で研磨を実施した。比較例1〜3においては希釈した研磨剤は掛け捨てとした。実施例2および比較例4〜6での研磨試験の結果を表4に示す。
実施例1と比較例1〜3を比べると、磨耗速度は、実施例1が際立って良好で、ガラス繊維をビニロンで結合したFR−ビニロン(比較例3)が次に良好な結果を得た。試験終了後、各キャリアの破損状態を外観検査にて調べたところ、10時間試験した実施例1には変化がなかった。1時間試験した比較例1、2には変化がなかった。しかし、比較例3はキャリアの歯の付け根部分にクラックが生じた。
実施例2と比較例4〜6で研磨を行ったシリコンウェーハの表面を純水にてリンスを行なった後、硝酸−フッ酸混合液でシリコンウェーハの表面を溶解した。溶解液中の重金属をICP発光分析装置にて定量分析を行いシリコンウェーハ表面の鉄、銅、クロムの汚染量を測定した。表4に示す結果から明らかな通り、実施例のものおよび非金属を基材としたものの重金属汚染は低かった。即ち、本発明の金属基材にDLC被覆を施したキャリアは、重金属汚染においては非金属のものと同等なレベルにあることが明らかである。
実施例1、2に示す本発明のDLC被覆を施したキャリアは、耐磨耗性、耐久性、重金属汚染性、すべての項目できわめて良好な結果を得た。
Claims (8)
- 被覆前にラッピング及び/またはポリッシングにより加工され厚みが均一に調整されたキャリア基材の全表面がダイヤモンドライクカーボンで被覆されていることを特徴とする両面研磨装置用被研磨物保持用キャリア。
- 被覆前のキャリア基材の厚みが、相対標準偏差が0.4%以内になるように調整されたことを特徴とする請求項第1項に記載の両面研磨装置用被研磨物保持用キャリア。
- ダイヤモンドライクカーボン膜の厚みが0.10μmから20μmであることを特徴とする請求項第1項または、請求項第2項に記載の両面研磨装置用被研磨物保持用キャリア。
- 基材が、ステンレス、鋼、アルミニウム、アルミニウム合金、樹脂、繊維強化樹脂のいずれか、あるいはその複合物であることを特徴とする請求項第1項ないし第3項のいずれかに記載の両面研磨装置用被研磨物保持用キャリア。
- 被研磨物保持用の保持孔の周辺に樹脂部分を設けたことを特徴とする請求項第1項ないし第4項のいずれかに記載の両面研磨装置用被研磨物保持用キャリア。
- 減圧可能なチャンバーの中に対向するアノード電極とカソード電極を施し、該アノード電極と該カソード電極の間にキャリア基材を配し、原料ガスを供給しながら該アノード電極と該カソード電極の間に高周波電力を印加して基材表面にダイヤモンドライクカーボン膜を生成させるプラズマCVD法による表面被覆装置を用い、該アノード電極と該カソード電極の間に基材を配し、ダイヤモンドライクカーボン膜生成中もしくは生成の間に基材の支持個所を移動させることを特徴とする請求項第1項ないし第5項のいずれかに記載の両面研磨装置用被研磨物保持用キャリアの製造方法。
- キャリア基材の厚みを均一にした後、基材の表面にダイヤモンドライクカーボンを被覆することを特徴とする請求項第6項に記載の両面研磨装置用被研磨物保持用キャリアの製造方法。
- 研磨布を貼付した該上下定盤の間に請求項第1項ないし第5項のいずれかに記載の両面研磨装置用被研磨物保持用キャリアを装着し、該両面研磨装置用被研磨物保持用キャリア内の保持孔に被研磨物を保持した後、加工面に研磨スラリを供給しつつ該上下定盤および該被研磨物の少なくとも一つを回転させ該被研磨物の両面を鏡面研磨する研磨方法において、研磨布がスエード調合成皮革、ポリウレタンもしくは、不織布をポリウレタンで結合した複合物より選ばれる一つであることを特徴とする該被研磨物の研磨方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004066013A JP4113509B2 (ja) | 2004-03-09 | 2004-03-09 | 被研磨物保持用キャリア |
EP05004803.2A EP1574289B2 (en) | 2004-03-09 | 2005-03-04 | A method for manufacturing a carrier for holding an object to be polished |
KR1020050018955A KR101174143B1 (ko) | 2004-03-09 | 2005-03-08 | 피연마물 유지용 캐리어 |
US11/074,481 US20050202758A1 (en) | 2004-03-09 | 2005-03-08 | Carrier for holding an object to be polished |
US12/386,139 US20090203300A1 (en) | 2004-03-09 | 2009-04-14 | Carrier for holding an object to be polished |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004066013A JP4113509B2 (ja) | 2004-03-09 | 2004-03-09 | 被研磨物保持用キャリア |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005254351A JP2005254351A (ja) | 2005-09-22 |
JP2005254351A5 JP2005254351A5 (ja) | 2007-08-30 |
JP4113509B2 true JP4113509B2 (ja) | 2008-07-09 |
Family
ID=34824559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004066013A Expired - Lifetime JP4113509B2 (ja) | 2004-03-09 | 2004-03-09 | 被研磨物保持用キャリア |
Country Status (4)
Country | Link |
---|---|
US (2) | US20050202758A1 (ja) |
EP (1) | EP1574289B2 (ja) |
JP (1) | JP4113509B2 (ja) |
KR (1) | KR101174143B1 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006001340A1 (ja) * | 2004-06-23 | 2006-01-05 | Komatsu Denshi Kinzoku Kabushiki Kaisha | 両面研磨用キャリアおよびその製造方法 |
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-
2004
- 2004-03-09 JP JP2004066013A patent/JP4113509B2/ja not_active Expired - Lifetime
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2005
- 2005-03-04 EP EP05004803.2A patent/EP1574289B2/en active Active
- 2005-03-08 KR KR1020050018955A patent/KR101174143B1/ko active IP Right Grant
- 2005-03-08 US US11/074,481 patent/US20050202758A1/en not_active Abandoned
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US20050202758A1 (en) | 2005-09-15 |
JP2005254351A (ja) | 2005-09-22 |
US20090203300A1 (en) | 2009-08-13 |
KR20060043488A (ko) | 2006-05-15 |
EP1574289A2 (en) | 2005-09-14 |
EP1574289A3 (en) | 2006-06-07 |
KR101174143B1 (ko) | 2012-08-14 |
EP1574289B1 (en) | 2012-10-17 |
EP1574289B2 (en) | 2019-11-06 |
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