JP4085953B2 - 半導体光素子 - Google Patents
半導体光素子 Download PDFInfo
- Publication number
- JP4085953B2 JP4085953B2 JP2003362171A JP2003362171A JP4085953B2 JP 4085953 B2 JP4085953 B2 JP 4085953B2 JP 2003362171 A JP2003362171 A JP 2003362171A JP 2003362171 A JP2003362171 A JP 2003362171A JP 4085953 B2 JP4085953 B2 JP 4085953B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- layer
- znse
- semiconductor layer
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/28—Materials of the light emitting region containing only elements of group II and group VI of the periodic system
Description
基板33:(100)面を有するn型ZnSe半導体基板
バッファ層35:厚さ0.9マイクロメートル、n型ZnSe半導体層
II−VI半導体層17:
厚さ0.5マイクロメートル、n型ZnMgSSe半導体層
第1のガイド層23:厚さ0.03マイクロメートル、i型ZnSe半導体層
量子構造層25:ZnCdSe/ZnSeのMQW
第2のガイド層27:厚さ0.03マイクロメートル、i型ZnSe半導体層
II−VI半導体層21:
厚さ0.5マイクロメートル、p型ZnMgSSe半導体層
II−VI半導体層29:
厚さ0.15マイクロメートル、p型ZnSe半導体層
II−VI半導体層30:
厚さ200ナノメートル、p+型ZnSe半導体層
量子井戸II−VI半導体領域7:
厚さ40ナノメートル、ZnSe/ZnTe量子井戸構造
第1のII−VI半導体のp型層9:厚さ3ナノメートル、ZnSe半導体層
金属電極5:Au層
金属電極37:インジウム層
である。
第1のII−VI半導体の層9:3ナノメートル
ZnTe半導体層39a:0.6ナノメートル 、窒素ドープ
ZnSe半導体層41a:1.8ナノメートル 、窒素ドープ
ZnTe半導体層39b:0.5ナノメートル 、窒素ドープ
ZnSe半導体層41b:1.8ナノメートル 、窒素ドープ
ZnTe半導体層39c:0.37ナノメートル 、窒素ドープ
ZnSe半導体層41c:1.8ナノメートル 、窒素ドープ
ZnTe半導体層39d:0.25ナノメートル 、窒素ドープ
ZnSe半導体層41d: 1.8ナノメートル、窒素ドープ
ZnTe半導体層39e:0.12ナノメートル 、窒素ドープ
が示される。
第1のII−VI半導体の層9:3ナノメートル
ZnTe半導体層43a:2.0ナノメートル 、窒素ドープ
ZnSe半導体層45a:0.113ナノメートル 、窒素ドープ
ZnTe半導体層43b:1.85ナノメートル 、窒素ドープ
ZnSe半導体層45b:0.225ナノメートル 、窒素ドープ
ZnTe半導体層43c:1.72ナノメートル 、窒素ドープ
ZnSe半導体層45c:0.338ナノメートル 、窒素ドープ
ZnTe半導体層43d:0.37ナノメートル 、窒素ドープ
ZnSe半導体層45d:1.575ナノメートル、窒素ドープ
ZnTe半導体層43e:0.25ナノメートル 、窒素ドープ
ZnSe半導体層45e:1.68ナノメートル、窒素ドープ
ZnTe半導体層43f:0.12ナノメートル 、窒素ドープ
が示される。
異常部 正常部
炭素(C) 51.1 57.9
酸素(O) 24.6 19.5
金(Au) 6.4 12.2
亜鉛(Zn) 5.3 3.8
テルル(Te) 12.3 6.6
である。
ついで、II−VI族半導体発光素子を製造する方法を説明する。図8(A)に示されるように、基板を準備する。引き続く説明では、該基板としてZnSe基板を使用する発光ダイオードといった半導体発光素子を製造する方法を説明する。
H2ガス流量:1.0sccm
RFガンのパワー:450ワット
である。
Claims (4)
- 面発光型の半導体光素子であって、
ZnSe/ZnTe量子井戸構造のII−VI半導体領域と、ZnSe半導体からなる第1のII−VI半導体の層とを有する超格子コンタクト半導体領域と、
前記超格子コンタクト半導体領域上に設けられた金属電極と、
ZnSe基板を含む支持基体と、
前記支持基体上に設けられたII−VI半導体の活性層と
を備え、
当該半導体光素子は発光ダイオードであり、
前記第1のII−VI半導体の層の厚さは、2ナノメートル以上20ナノメートル以下であると共に、前記第1のII−VI半導体の層は、ドーパントを供給せずに成長されてアンドープであり、
前記ZnSe/ZnTe量子井戸構造は、ZnSe半導体からなる複数の第2のII−VI半導体の層とZnTe半導体からなる複数の第3のII−VI半導体の層とを有し、
前記第3のII−VI半導体の層のうち前記第1のII−VI半導体の層に最も近い半導体層は、前記第2のII−VI半導体の層のうち前記第1のII−VI半導体の層に最も近い半導体層と前記第1のII−VI半導体の層との間にあり、
前記第1のII−VI半導体の層は、前記II−VI半導体領域と前記金属電極との間に設けられており、
前記金属電極は前記第1のII−VI半導体の層に電気的に接続されており、
前記金属電極は金からなり、
前記金属電極の厚さは、10ナノメートル以上30ナノメートル以下であり、
前記活性層は前記ZnSe基板と前記超格子コンタクト半導体領域との間に設けられている、半導体光素子。 - 前記第1のII−VI半導体の層の厚さは、前記第2のII−VI半導体の層のうち前記第1のII−VI半導体の層に最も近い該半導体層の厚さより大きい、請求項1に記載された半導体光素子。
- 前記第2のII−VI半導体の層の厚さの総和は、前記第3のII−VI半導体の層の厚さの総和よりも大きい、請求項1に記載された半導体光素子。
- 前記金属電極は、前記活性層からの光が放出される出射面を覆って設けられる、請求項1〜請求項3のいずれか一項に記載された半導体光素子。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003362171A JP4085953B2 (ja) | 2003-10-22 | 2003-10-22 | 半導体光素子 |
US10/808,158 US7042016B2 (en) | 2003-10-22 | 2004-03-23 | Semiconductor optical device, method of forming contact in semiconductor optical device |
TW093110000A TWI251946B (en) | 2003-10-22 | 2004-04-09 | Semiconductor optical device and method for forming contact |
EP04009420A EP1526582A3 (en) | 2003-10-22 | 2004-04-21 | Semiconductor optical device, method of forming superlattice contact in semiconductor optical device |
CNB2004100621770A CN100347868C (zh) | 2003-10-22 | 2004-07-02 | 半导体光学装置,在半导体光学装置中形成接触的方法 |
KR1020040082999A KR100789078B1 (ko) | 2003-10-22 | 2004-10-18 | 반도체 광소자, 및 콘택트를 형성하는 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003362171A JP4085953B2 (ja) | 2003-10-22 | 2003-10-22 | 半導体光素子 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006307044A Division JP2007036300A (ja) | 2006-11-13 | 2006-11-13 | 半導体光素子、およびコンタクトを形成する方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005129650A JP2005129650A (ja) | 2005-05-19 |
JP4085953B2 true JP4085953B2 (ja) | 2008-05-14 |
Family
ID=34386507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003362171A Expired - Fee Related JP4085953B2 (ja) | 2003-10-22 | 2003-10-22 | 半導体光素子 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7042016B2 (ja) |
EP (1) | EP1526582A3 (ja) |
JP (1) | JP4085953B2 (ja) |
KR (1) | KR100789078B1 (ja) |
CN (1) | CN100347868C (ja) |
TW (1) | TWI251946B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100691445B1 (ko) * | 2005-11-21 | 2007-03-09 | 삼성전기주식회사 | 질화물 반도체 발광소자 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04106986A (ja) * | 1990-08-27 | 1992-04-08 | Hitachi Ltd | n型半導体膜、その製造方法及び半導体装置 |
BR9205993A (pt) * | 1991-05-15 | 1994-08-02 | Minnesota Mining & Mfg | Diodo laser semicondutor, processo para produzir um contato ôhmico com um corpo semicondutor e contato ôhmico |
US5396103A (en) * | 1991-05-15 | 1995-03-07 | Minnesota Mining And Manufacturing Company | Graded composition ohmic contact for P-type II-VI semiconductors |
JP3196418B2 (ja) | 1993-04-21 | 2001-08-06 | ソニー株式会社 | 半導体装置 |
JP3221073B2 (ja) | 1992-06-19 | 2001-10-22 | ソニー株式会社 | 発光素子 |
WO1994015369A1 (en) * | 1992-12-22 | 1994-07-07 | Research Corporation Technologies, Inc. | Group ii-vi compound semiconductor light emitting devices and an ohmic contact therefor |
US5665977A (en) * | 1994-02-16 | 1997-09-09 | Sony Corporation | Semiconductor light emitting device with defect decomposing and blocking layers |
JPH07263751A (ja) * | 1994-03-24 | 1995-10-13 | Sharp Corp | Ii−vi族化合物半導体装置及びその製造方法 |
JP3457468B2 (ja) * | 1995-09-12 | 2003-10-20 | 株式会社東芝 | 多層構造半導体装置 |
JP3785660B2 (ja) * | 1995-10-17 | 2006-06-14 | ソニー株式会社 | 半導体発光素子 |
JPH10326941A (ja) * | 1997-03-27 | 1998-12-08 | Sony Corp | 半導体発光素子およびその製造方法ならびに光装置 |
JPH11274564A (ja) * | 1998-03-19 | 1999-10-08 | Sumitomo Electric Ind Ltd | 半導体装置の製造方法 |
JPH11284282A (ja) * | 1998-03-31 | 1999-10-15 | Fuji Photo Film Co Ltd | 短波長発光素子 |
JP2001028459A (ja) * | 1999-05-13 | 2001-01-30 | Sumitomo Electric Ind Ltd | 発光装置およびその製造方法 |
TW497277B (en) * | 2000-03-10 | 2002-08-01 | Toshiba Corp | Semiconductor light emitting device and method for manufacturing the same |
-
2003
- 2003-10-22 JP JP2003362171A patent/JP4085953B2/ja not_active Expired - Fee Related
-
2004
- 2004-03-23 US US10/808,158 patent/US7042016B2/en not_active Expired - Fee Related
- 2004-04-09 TW TW093110000A patent/TWI251946B/zh not_active IP Right Cessation
- 2004-04-21 EP EP04009420A patent/EP1526582A3/en not_active Withdrawn
- 2004-07-02 CN CNB2004100621770A patent/CN100347868C/zh not_active Expired - Fee Related
- 2004-10-18 KR KR1020040082999A patent/KR100789078B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US7042016B2 (en) | 2006-05-09 |
US20050087869A1 (en) | 2005-04-28 |
EP1526582A3 (en) | 2010-01-13 |
KR100789078B1 (ko) | 2007-12-26 |
EP1526582A2 (en) | 2005-04-27 |
CN1610136A (zh) | 2005-04-27 |
JP2005129650A (ja) | 2005-05-19 |
TWI251946B (en) | 2006-03-21 |
CN100347868C (zh) | 2007-11-07 |
TW200515624A (en) | 2005-05-01 |
KR20050039567A (ko) | 2005-04-29 |
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