JP4078295B2 - インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法 - Google Patents

インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法 Download PDF

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Publication number
JP4078295B2
JP4078295B2 JP2003413498A JP2003413498A JP4078295B2 JP 4078295 B2 JP4078295 B2 JP 4078295B2 JP 2003413498 A JP2003413498 A JP 2003413498A JP 2003413498 A JP2003413498 A JP 2003413498A JP 4078295 B2 JP4078295 B2 JP 4078295B2
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JP
Japan
Prior art keywords
layer
ink
film
upper protective
protective layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003413498A
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English (en)
Japanese (ja)
Other versions
JP2004216875A (ja
JP2004216875A5 (enExample
Inventor
一郎 斉藤
宇 横山
稔康 坂井
照夫 尾崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003413498A priority Critical patent/JP4078295B2/ja
Priority to PCT/JP2003/016712 priority patent/WO2004060681A1/en
Priority to US10/534,906 priority patent/US7393084B2/en
Priority to AU2003295234A priority patent/AU2003295234A1/en
Priority to TW092137120A priority patent/TW200413176A/zh
Publication of JP2004216875A publication Critical patent/JP2004216875A/ja
Publication of JP2004216875A5 publication Critical patent/JP2004216875A5/ja
Application granted granted Critical
Publication of JP4078295B2 publication Critical patent/JP4078295B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2003413498A 2002-12-27 2003-12-11 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法 Expired - Fee Related JP4078295B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2003413498A JP4078295B2 (ja) 2002-12-27 2003-12-11 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法
PCT/JP2003/016712 WO2004060681A1 (en) 2002-12-27 2003-12-25 Substrate for ink jet head, ink jet head utilizing the same and producing method therefor
US10/534,906 US7393084B2 (en) 2002-12-27 2003-12-25 Substrate for ink jet head with TaCr alloy protective layer, ink jet head utilizing the same and producing method therefor
AU2003295234A AU2003295234A1 (en) 2002-12-27 2003-12-25 Substrate for ink jet head, ink jet head utilizing the same and producing method therefor
TW092137120A TW200413176A (en) 2002-12-27 2003-12-26 Substrate for ink jet head, ink jet head utilizing the same and producing method therefor

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002380822 2002-12-27
JP2002380823 2002-12-27
JP2003413498A JP4078295B2 (ja) 2002-12-27 2003-12-11 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法

Publications (3)

Publication Number Publication Date
JP2004216875A JP2004216875A (ja) 2004-08-05
JP2004216875A5 JP2004216875A5 (enExample) 2007-01-25
JP4078295B2 true JP4078295B2 (ja) 2008-04-23

Family

ID=32718771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003413498A Expired - Fee Related JP4078295B2 (ja) 2002-12-27 2003-12-11 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法

Country Status (5)

Country Link
US (1) US7393084B2 (enExample)
JP (1) JP4078295B2 (enExample)
AU (1) AU2003295234A1 (enExample)
TW (1) TW200413176A (enExample)
WO (1) WO2004060681A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11433674B2 (en) * 2020-01-22 2022-09-06 Canon Kabushiki Kaisha Liquid discharge head and method for producing liquid discharge head

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4208794B2 (ja) * 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4646602B2 (ja) * 2004-11-09 2011-03-09 キヤノン株式会社 インクジェット記録ヘッド用基板の製造方法
JP4241605B2 (ja) * 2004-12-21 2009-03-18 ソニー株式会社 液体吐出ヘッドの製造方法
JP2006327180A (ja) * 2005-04-28 2006-12-07 Canon Inc インクジェット記録ヘッド用基板、インクジェット記録ヘッド、インクジェット記録装置、およびインクジェット記録ヘッド用基板の製造方法
JP4926669B2 (ja) * 2005-12-09 2012-05-09 キヤノン株式会社 インクジェットヘッドのクリーニング方法、インクジェットヘッドおよびインクジェット記録装置
US7824560B2 (en) * 2006-03-07 2010-11-02 Canon Kabushiki Kaisha Manufacturing method for ink jet recording head chip, and manufacturing method for ink jet recording head
JP4854336B2 (ja) * 2006-03-07 2012-01-18 キヤノン株式会社 インクジェットヘッド用基板の製造方法
KR20090062012A (ko) * 2007-12-12 2009-06-17 삼성전자주식회사 잉크젯 헤드 및 그 제조방법
JP5311975B2 (ja) * 2007-12-12 2013-10-09 キヤノン株式会社 液体吐出ヘッド用基体及びこれを用いる液体吐出ヘッド
JP2023170793A (ja) * 2022-05-20 2023-12-01 株式会社リコー ヘッド構成部材、液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置及びヘッド構成部材の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0613219B2 (ja) * 1983-04-30 1994-02-23 キヤノン株式会社 インクジェットヘッド
JP3143307B2 (ja) 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3647365B2 (ja) * 1999-08-24 2005-05-11 キヤノン株式会社 液体吐出ヘッド用基板ユニットおよびその製造方法ならびに液体吐出ヘッド，カートリッジおよび画像形成装置
JP3576888B2 (ja) * 1999-10-04 2004-10-13 キヤノン株式会社 インクジェットヘッド用基体、インクジェットヘッド及びインクジェット装置
JP2001171126A (ja) * 1999-10-05 2001-06-26 Canon Inc 発熱抵抗素子を備えたインクジェットヘッド用基板と、それを用いるインクジェットヘッド、インクジェット装置及び記録方法
JP3720689B2 (ja) 2000-07-31 2005-11-30 キヤノン株式会社 インクジェットヘッド用基体、インクジェットヘッド、インクジェットヘッドの製造方法、インクジェットヘッドの使用方法およびインクジェット記録装置
JP4208793B2 (ja) 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4208794B2 (ja) 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11433674B2 (en) * 2020-01-22 2022-09-06 Canon Kabushiki Kaisha Liquid discharge head and method for producing liquid discharge head

Also Published As

Publication number Publication date
AU2003295234A1 (en) 2004-07-29
TW200413176A (en) 2004-08-01
US7393084B2 (en) 2008-07-01
US20060061626A1 (en) 2006-03-23
WO2004060681A1 (en) 2004-07-22
JP2004216875A (ja) 2004-08-05

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